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11. 发明申请

US20020180395A1 System and method to control planar motors 失效
标题翻译：控制平面电机的系统和方法
公开(公告)号：US20020180395A1
公开(公告)日：2002-12-05
申请号：US09870753
申请日：2001-06-01
发明人： Michael B. Binnard
IPC分类号： B64C017/06
CPC分类号： H02P6/006 , H02K41/03 , H02K2201/18 , Y10T74/20201
摘要： A method for controlling and positioning a two-dimensional electric motor is disclosed. The electric motor has a coil array and a magnet array. The method controls the motor in two directions in the plane of the magnet array and about a third direction generally orthogonal to the plane. The method includes: determining currents for generating the desired forces, determining a resultant torque that would be generated from applying the determined currents, determining current adjustments to compensate for the resultant torque, and applying a current equal to the sum of the determined currents and the current adjustments to the coils to interact with the magnetic fields of the magnet array. The currents are applied to the portion of the coil array within the magnetic field of the magnet array, including those coils which are only partially within the magnetic field of the magnet array. Alternatively, the currents could be applied to all of the coils. Applying the current to all of the coils requires more electrical power, but uses for amplifiers so the electronics are simpler and less expensive. The method of the present invention may be used in applications such as positioning wafers in semiconductor fabrication.
摘要翻译：公开了一种用于控制和定位二维电动机的方法。电动机具有线圈阵列和磁体阵列。该方法在磁体阵列的平面中的两个方向上控制电动机，并且大体上与平面垂直的第三方向。该方法包括：确定用于产生所需力的电流，确定将由施加确定的电流产生的合成转矩，确定当前调整以补偿合成转矩，以及施加等于所确定的电流和电流调节线圈与磁体阵列的磁场相互作用。电流被施加到磁体阵列的磁场内的线圈阵列的部分，包括仅部分地在磁体阵列的磁场内的那些线圈。或者，可以将电流施加到所有线圈。将电流施加到所有线圈需要更多的电力，但是用于放大器，因此电子装置更简单且更便宜。本发明的方法可以用于诸如在半导体制造中定位晶片的应用中。

12. 发明申请

US20040251867A1 Rotary indexing table 有权
标题翻译：旋转分度台
公开(公告)号：US20040251867A1
公开(公告)日：2004-12-16
申请号：US10769552
申请日：2004-01-30
申请人： WEISS GmbH Sondermaschinentechnik
发明人： Dieter Weiss
IPC分类号： B64C017/06
CPC分类号： B23Q16/102 , B23Q1/52 , B23Q5/28 , B23Q5/36 , B23Q7/02 , Y10T29/5129 , Y10T74/14 , Y10T74/1488
摘要： The invention relates to a rotary indexing table comprising a stationary base unit and a plate rotatably supported thereon and drivable relative to the base unit by means of a drive, in which the drive is formed by a plurality of individual drive elements arranged in the circumferential region of the plate.
摘要翻译：本发明涉及一种旋转分度台，其包括固定基座单元和可旋转地支撑在其上并通过驱动器相对于基座单元驱动的板，其中驱动器由布置在周向区域中的多个单独的驱动元件形成的盘子。

13. 发明申请

US20040189234A1 Uniaxial drive unit 失效
标题翻译：单轴驱动单元
公开(公告)号：US20040189234A1
公开(公告)日：2004-09-30
申请号：US10807134
申请日：2004-03-24
申请人： Tokyo Seimitsu Co., Ltd.
发明人： Takashi Fukasawa
IPC分类号： B64C017/06
CPC分类号： G05B19/409 , G05B2219/35457 , G05B2219/41105 , G05B2219/41337
摘要： A uniaxial drive unit is provided with a tiltable pulse generating device having a joystick, which generates a continuous pulse of a frequency corresponding to the tilt angle of the joystick, and a rotary encoder having a knob, which generates a pulse of a frequency corresponding to the turning speed of the knob and generates pulses of the number corresponding to the turning angle of the knob to drive a linear motor. High-speed and medium-speed operations are carried out by using the tiltable pulse generating device, and low-speed fine feed is carried out by using the rotary encoder.
摘要翻译：单轴驱动单元设置有具有操纵杆的可倾斜脉冲产生装置，其产生与操纵杆的倾斜角相对应的频率的连续脉冲，以及具有旋钮的旋转编码器，其产生对应于旋钮的转动速度并产生与旋钮的转动角度对应的数字的脉冲，以驱动线性电动机。通过使用可倾斜脉冲发生装置进行高速和中速操作，并且通过使用旋转编码器执行低速精细进给。

14. 发明申请

US20040119436A1 Method and apparatus for reducing countermass stroke with initial velocity 审中-公开
标题翻译：用初始速度降低反搏行程的方法和装置
公开(公告)号：US20040119436A1
公开(公告)日：2004-06-24
申请号：US10325916
申请日：2002-12-23
发明人： Michael Binnard , Kenji Nishi
IPC分类号： B64C017/06
CPC分类号： G03F7/705 , G03F7/70725 , G03F7/70766
摘要： A countermass stroke reduction assembly is provided. The assembly generally includes a base supporting one or more stages and first and second countermasses. Alternatively, first and second countermasses could be mounted separately from the base. The first and second stages move in one or more degrees of freedom. The countermasses move in at least one degree of freedom. In order to minimize the stroke of the countermasses, a drift velocity and y-intercept are determined off-line from an average position line for the countermass. An initial velocity equal in magnitude but opposite in sense to the drift velocity is then imparted to the countermass at the start of operation. Alternatively or additionally, an initial position offset equal and opposite to the y-intercept may be provided at the start of operation.
摘要翻译：提供了一种反冲击行程减少组件。组件通常包括支撑一个或多个阶段的基座和第一和第二反作用力。或者，第一和第二反通道可以与基座分离安装。第一和第二阶段以一个或多个自由度移动。反恐怖主义至少有一个自由度。为了最小化反走样的行程，从平衡位置线离线确定漂移速度和y截距。然后在操作开始时将等于大小但与漂移速度相关的初始速度赋予反质量。或者或另外，可以在操作开始时提供与y截距相等且相反的初始位置偏移。

15. 发明申请

US20020050804A1 XYZ-axes table 失效
标题翻译： XYZ轴表
公开(公告)号：US20020050804A1
公开(公告)日：2002-05-02
申请号：US09791678
申请日：2001-02-26
发明人： Kim Houng Joong , Ryouichi Naganuma , Hiromitsu Seino
IPC分类号： B64C017/06
CPC分类号： H02K41/031 , B23Q1/626 , B23Q5/28 , H02K2201/18
摘要： The invention provides an XYZ-axes table with a linear motor. The XYZ-axes table has a base, a plurality of linear guiding apparatuses, a stage, an X-axis drive linear motor, a Y-axis drive linear motor, and a Z-axis drive linear motor. The linear motor is constituted by an armature and a movable element being capable of relatively moving with respect to the armature. The linear motor further has one magnetic pole teeth rows which are magnetically connected to one magnetic pole of the armature and are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to a moving direction of the movable element, and another magnetic pole teeth rows which are magnetically connected to another magnetic pole of the movable element and are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to the moving direction of the movable element, the first stage of magnetic pole teeth in the one magnetic pole teeth rows and the first stage of magnetic pole teeth in the another magnetic pole teeth row are alternately arranged with respect to the moving direction of the movable element, the second stage of magnetic pole teeth in the one magnetic pole teeth rows and the second stage of magnetic pole teeth in the another magnetic pole teeth row are alternately arranged with respect to the moving direction of the movable element, and the movable element is arranged between the one and another first stage of magnetic pole teeth rows and the one and another second stage of magnetic pole teeth rows.
摘要翻译：本发明提供了一种带有线性电动机的XYZ轴表。 XYZ轴台具有底座，多个线性导引装置，平台，X轴驱动线性马达，Y轴驱动线性马达，Z轴驱动线性马达。线性电动机由电枢和能够相对于电枢相对移动的可动元件构成。线性电动机还具有一个磁极齿排，其磁性地连接到电枢的一个磁极，并且被布置成在与可移动元件的移动方向大致垂直的方向上分离成第一级和第二级以及与可动元件的另一个磁极磁性连接的另一个磁极齿排，并且被配置成在与可移动元件的移动方向大致垂直的方向上分离成第一级和第二级，在另一个磁极齿排中的一个磁极齿排和磁极齿的第一级的磁极齿的第一级相对于可移动元件的运动方向交替地布置，第二级的磁极齿另一个磁极齿排中的一个磁极齿排和第二级的磁极齿交替布置 h相对于可动元件的移动方向，并且可动元件布置在磁极齿列的一个和另一个第一级之间以及一个和另一个第二级磁极齿排。

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