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1. 发明申请

US20020145077A1 Method and system for directing an object 有权
标题翻译：用于指导物体的方法和系统
公开(公告)号：US20020145077A1
公开(公告)日：2002-10-10
申请号：US09828639
申请日：2001-04-05
申请人： Northrop Grumman Corporation.
发明人： Douglas E. Shultz
IPC分类号： B64C017/06 , B64C015/00 , B64C029/00
CPC分类号： B64C17/06 , B64C19/00 , B64G1/286
摘要： A system for directing an object is disclosed. The system includes a first gyroscope with a first rotating rotor and a second gyroscope with a second rotating rotor. Each gyroscope has a motor that rotates a first gimbal coupled to the rotor and a brake that decreases the rotation of a second gimbal coupled to the first gimbal. The first gyroscope and the second gyroscope generate a torque.
摘要翻译：公开了一种用于引导物体的系统。该系统包括具有第一旋转转子的第一陀螺仪和具有第二旋转转子的第二陀螺仪。每个陀螺仪具有使联接到转子的第一万向架旋转的马达和减小耦合到第一万向架的第二万向架的旋转的制动器。第一陀螺仪和第二陀螺仪产生扭矩。

2. 发明申请

US20010045810A1 High performance stage assembly 审中-公开
标题翻译：高性能舞台装配
公开(公告)号：US20010045810A1
公开(公告)日：2001-11-29
申请号：US09814633
申请日：2001-03-22
发明人： Alex Ka Tim Poon , Douglas Watson
IPC分类号： B64C017/06
CPC分类号： G03F7/70716 , Y10T74/20012
摘要： A stage assembly (10) for moving and positioning one or more objects (24) for an exposure apparatus (28) is provided herein. The stage assembly (10) includes a fine stage (14) and a coarse stage (18). The fine stage (14) includes a holder (15) that retains the object (24). The stage assembly (10) also includes a fine Y mover (32) and a fine X mover (34) that precisely move the fine stage (14) relative to the coarse stage (18). Uniquely, the fine movers (32), (34) are positioned on only one side of the holder (15). With this design, the resulting stage assembly (10) has a relatively low mass and a relatively high servo bandwidth. Further, with this design, the stage assembly (10) is readily accessible for service and a measurement system (16) can be easily positioned near the fine stage (14). The stage assembly (10) can also include an anti-gravity mechanism (40) that minimizes distortion of a stage base (12) that supports the fine stage (14) as the fine stage (14) moves above the stage base (12). Additionally, the stage assembly (10) can include a reaction assembly (20) that reduces the amount of reaction forces transferred from the coarse stage (18).
摘要翻译：本文提供了用于移动和定位用于曝光设备（28）的一个或多个物体（24）的台架组件（10）。台架组件（10）包括细级（14）和粗级（18）。精细台（14）包括保持物体（24）的保持器（15）。舞台组件（10）还包括精细Y移动器（32）和精细X移动器（34），精细移动器（34）相对于粗略级（18）精确地移动细级（14）。唯一地，精细推动器（32），（34）仅位于保持器（15）的一侧。通过这种设计，所得到的载物台组件（10）具有相对低的质量和较高的伺服带宽。此外，通过该设计，台架组件（10）易于接近以进行维修，并且测量系统（16）可以容易地定位在细台（14）附近。舞台组件（10）还可以包括一个抗重力机构（40），当细台（14）移动到舞台底座（12）上方时，能够最小化支撑精细舞台（14）的舞台底座（12）的变形，。另外，台架组件（10）可以包括反作用组件（20），其减少从粗级（18）传递的反作用力的量。

3. 发明申请

US20040124803A1 SYSTEM AND METHOD FOR MOVING OBJECTS WITHIN THREE-DIMENSIONAL SPACE 有权
标题翻译：用于在三维空间内移动物体的系统和方法
公开(公告)号：US20040124803A1
公开(公告)日：2004-07-01
申请号：US10604525
申请日：2003-07-29
发明人： Jim Rodnunsky
IPC分类号： B64C017/06
CPC分类号： B66C13/085 , B66C13/08 , F16M11/18 , F16M11/425
摘要： Embodiments of the invention move objects throughout three-dimensional by using two supporting ropes each of which connects to both opposing sides of the payload. If one rope breaks, the payload gently travels to the middle of the coverage area in a safe manner, maintaining the given displacement in the other unbroken axis. One rope controls the X-axis motion of the platform and is designated the X movement rope. The other rope controls the Y-axis motion of the platform and is designated the Y movement rope. Displacing equal lengths of the X and Y movement ropes allows the Z-axis of the platform to be traversed. There is no need for a complex computer control system since the Z-axis displacement is substantially independent of X and Y axis movement over a coverage area serviced by the platform. In addition, since the ropes are commanded from one point, distantly located motors and electrical cables are not required. Many types of useful devices may then be attached to the platform including devices that require external power or devices that possess their own power and are operated via wireless signals. Triangle and quadrilateral embodiments may be readily constructed without requiring equal distances between any two support structures.
摘要翻译：本发明的实施例通过使用两个支撑绳索将物体移动到三维状态，每个支撑绳索连接到有效载荷的两个相对侧。如果一根绳索断裂，有效载荷会以安全的方式轻轻地行进到覆盖区域的中部，从而保持另一个不间断轴线的给定位移。一根绳子控制平台的X轴运动，并被指定为X运动绳索。另一根绳索控制平台的Y轴运动，并被指定为Y运动绳。移动相等长度的X和Y移动绳可以平移平台的Z轴。由于Z轴位移基本上与由平台所服务的覆盖区域上的X轴和Y轴运动无关，所以不需要复杂的计算机控制系统。另外，由于从一点来指示绳索，所以不需要远距离定位的马达和电缆。然后可以将许多类型的有用设备连接到平台，包括需要外部电源的设备或具有其自身功率并经由无线信号操作的设备。可以容易地构造三角形和四边形实施例，而不需要任何两个支撑结构之间的等距离。

4. 发明申请

US20030155882A1 Anti-gravity mount with air and magnets 审中-公开
标题翻译：防重力安装有空气和磁铁
公开(公告)号：US20030155882A1
公开(公告)日：2003-08-21
申请号：US10079291
申请日：2002-02-19
申请人： Nikon Corporation
发明人： Kazuya Ono , Jean-Marc Gery
IPC分类号： B64C017/06
CPC分类号： G03F7/709 , F16F6/00 , F16F2228/063 , G03F7/70833
摘要： An apparatus for providing support between a first structure and a second structure is described. The apparatus includes a supporting member, and first and second sections. The supporting member is mounted to the first structure and second structure, and has positive stiffness with respect to a lateral direction. The first section has at least one magnetic member, and is coupled to the first structure. The second section has at least one magnetic member, and is coupled to the second structure. The first and second sections present negative stiffness caused by magnetic attractive force at a neutral position, thereby canceling at least a part of the positive stiffness of the supporting member.
摘要翻译：描述了一种用于在第一结构和第二结构之间提供支撑的装置。该装置包括支撑构件，以及第一和第二部分。支撑构件安装到第一结构和第二结构，并且相对于横向方向具有正刚度。第一部分具有至少一个磁性部件，并且耦合到第一结构。第二部分具有至少一个磁性部件，并且联接到第二结构。第一和第二部分呈现由中性位置处的磁性吸引力引起的负刚度，从而抵消支撑构件的正刚度的至少一部分。

5. 发明申请

US20020195984A1 XYZ-axes table 失效
标题翻译： XYZ轴表
公开(公告)号：US20020195984A1
公开(公告)日：2002-12-26
申请号：US10216775
申请日：2002-08-13
发明人： Kim Houng Joong , Ryouichi Naganuma , Hiromitsu Seino
IPC分类号： B64C017/06
CPC分类号： H02K41/031 , B23Q1/626 , B23Q5/28 , H02K2201/18
摘要： An XY-axes table having a base, a plurality of linear guiding apparatuses, a stage, an X-axis drive linear motor and a Y-axis drive linear motor. The linear motor include an armature and a movable element relatively movable with respect to the armature. The linear motor further includes first magnetic pole teeth rows which are magnetically connected to a first magnetic pole of the armature and are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to a moving direction of the movable element. Second magnetic pole teeth rows which are magnetically connected to a second magnetic pole of the movable element are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to the moving direction of the movable element.
摘要翻译：具有基座，多个线性引导装置，台架，X轴驱动线性马达和Y轴驱动线性马达的XY轴台。线性电动机包括电枢和可相对于电枢相对移动的可移动元件。线性电动机还包括磁性连接到电枢的第一磁极的第一磁极齿排，并且被布置成在与可移动的移动方向相对的大致垂直方向上分离成第一级和第二级元件。与可动元件的第二磁极磁性连接的第二磁极齿排被布置成在与可移动元件的移动方向大致垂直的方向上分离成第一级和第二级。

6. 发明申请

US20030184254A1 Electromagnetic alignment and scanning apparatus 失效
公开(公告)号：US20030184254A1
公开(公告)日：2003-10-02
申请号：US10397367
申请日：2003-03-27
申请人： Nikon Corporation
发明人： Akimitsu Ebihara , Thomas Novak
IPC分类号： B64C017/06
CPC分类号： G03F7/70766 , G03F7/20 , G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70775 , G03F7/709 , G03F7/70991 , G03F9/00 , Y10S414/135 , Y10S414/136
摘要： An apparatus capable of high accuracy position and motion control utilizes one or more linear commutated motors to move a guideless stage in one long linear direction and small yaw rotation in a plane. A carrier/follower holding a single voice coil motor (VCM) is controlled to approximately follow the stage in the direction of the long linear motion. The VCM provides an electromagnetic force to move the stage for small displacements in the plane in a linear direction perpendicular to the direction of the long linear motion to ensure proper alignment. One element of the linear commutated motors is mounted on a freely suspended drive assembly frame which is moved by a reaction force to maintain the center of gravity of the apparatus. Where one linear motor is utilized, yaw correction can be achieved utilizing two VCMs.

7. 发明申请

US20030030402A1 Stage assembly and exposure apparatus including the same 失效
标题翻译：舞台组合和包括其的曝光装置
公开(公告)号：US20030030402A1
公开(公告)日：2003-02-13
申请号：US09925531
申请日：2001-08-10
申请人： Nikon Corporation.
发明人： Michael Binnard
IPC分类号： B64C017/06
CPC分类号： G03F7/707 , G03F7/70708 , G03F7/70716 , G03F7/70758 , G03F7/70766
摘要： A stage assembly for an exposure apparatus is disclosed. The stage assembly comprises a guide assembly. The guide assembly includes a guide bar, a stage, a first actuator component, and a second actuator component. The guide bar is movable in a first direction and has a center of gravity and a guiding portion. The stage is movable along the guiding portion of the guide bar in a second direction substantially perpendicular to the first direction and exerts a reaction force on the guide bar. The stage has a center of gravity spaced apart from the center of gravity of the guide bar in the first direction. The first actuator component is positioned on the guide bar. The first actuator component is aligned with the center of gravity of the stage in the second direction to apply a compensating force on the guide bar to cancel the reaction force exerted by the stage. The second actuator component is positioned on the guide bar. The second actuator component is aligned with the center of gravity of the guide bar in the second direction to apply a force on the guide bar to control a position of the guide bar in the second direction.
摘要翻译：公开了一种用于曝光设备的舞台组件。台架组件包括导向组件。引导组件包括导杆，平台，第一致动器部件和第二致动器部件。引导杆可沿第一方向移动并具有重心和引导部分。台架沿导向杆的引导部分沿基本上垂直于第一方向的第二方向移动，并在导杆上施加反作用力。舞台具有在第一方向上与导杆重心间隔开的重心。第一致动器部件定位在导杆上。第一致动器部件在第二方向上与工作台的重心对准，以在引导杆上施加补偿力，以消除由工作台施加的反作用力。第二致动器部件定位在导杆上。第二致动器部件沿着第二方向与引导杆的重心对准，以在引导杆上施加力以控制导杆在第二方向上的位置。

8. 发明申请

US20020017890A1 Electromagnetic alignment and scanning apparatus 失效
标题翻译：电磁对准和扫描装置
公开(公告)号：US20020017890A1
公开(公告)日：2002-02-14
申请号：US09977292
申请日：2001-10-16
申请人： Nikon Corporation
发明人： Akimitsu Ebihara , Thomas Novak
IPC分类号： B64C017/06
CPC分类号： G03F7/70766 , G03F7/20 , G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70775 , G03F7/709 , G03F7/70991 , G03F9/00 , Y10S414/135 , Y10S414/136
摘要： An apparatus capable of high accuracy position and motion control utilizes one or more linear commutated motors to move a guideless stage in one long linear direction and small yaw rotation in a plane. A carrier/follower holding a single voice coil motor (VCM) is controlled to approximately follow the stage in the direction of the long linear motion. The VCM provides an electromagnetic force to move the stage for small displacements in the plane in a linear direction perpendicular to the direction of the long linear motion to ensure proper alignment. One element of the linear commutated motors is mounted on a freely suspended drive assembly frame which is moved by a reaction force to maintain the center of gravity of the apparatus. Where one linear motor is utilized, yaw correction can be achieved utilizing two VCMs.
摘要翻译：能够进行高精度位置和运动控制的装置利用一个或多个线性换向马达来在一个长的直线方向上移动导引台，并在平面中移动小的偏转旋转。控制单个音圈电机（VCM）的载体/跟随器被控制成大致沿着长线性运动的方向跟随舞台。 VCM提供电磁力，以在垂直于长线性运动方向的直线方向上在平面中移动平台的小位移以确保正确的对准。线性整流马达的一个元件安装在自由悬挂的驱动组合框架上，该框架通过反作用力移动以保持设备的重心。在使用一个线性电动机的情况下，可以利用两个VCM实现偏航校正。

9. 发明申请

US20030184253A1 Electromagnetic alignment and scanning apparatus 失效
公开(公告)号：US20030184253A1
公开(公告)日：2003-10-02
申请号：US10397366
申请日：2003-03-27
申请人： Nikon Corporation
发明人： Akimitsu Ebihara , Thomas Novak
IPC分类号： B64C017/06
CPC分类号： G03F7/70766 , G03F7/20 , G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70775 , G03F7/709 , G03F7/70991 , G03F9/00 , Y10S414/135 , Y10S414/136
摘要： An apparatus capable of high accuracy position and motion control utilizes one or more linear commutated motors to move a guideless stage in one long linear direction and small yaw rotation in a plane. A carrier/follower holding a single voice coil motor (VCM) is controlled to approximately follow the stage in the direction of the long linear motion. The VCM provides an electromagnetic force to move the stage for small displacements in the plane in a linear direction perpendicular to the direction of the long linear motion to ensure proper alignment. One element of the linear commutated motors is mounted on a freely suspended drive assembly frame which is moved by a reaction force to maintain the center of gravity of the apparatus. Where one linear motor is utilized, yaw correction can be achieved utilizing two VCMs.

10. 发明申请

US20030098664A1 Holder mover for a stage assembly 失效
标题翻译：用于舞台组装的持有者
公开(公告)号：US20030098664A1
公开(公告)日：2003-05-29
申请号：US09997144
申请日：2001-11-29
发明人： Douglas C. Watson , Mike Binnard , Andrew J. Hazelton , Martin E. Lee
IPC分类号： B64C017/06
CPC分类号： B23Q1/623
摘要： A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20). Additionally, the stage assembly (10) can include a fluid connector (94) that connects the device holder (24) in fluid communication with the device table (20).
摘要翻译：用于移动和定位装置（26）的平台组件（10）包括装置台（20），保持装置（26）的装置保持器（24）和平台移动器组件（14）。台架组件（10）包括可以隔离设备保持器24和设备（26）不变形的一个或多个特征。在一些实施例中，台架组件（10）允许装置（26）在第一位置（42）和第二位置（44）之间精确地旋转，而不影响装置（26）的平坦度，并且不会使装置偏转和变形（26）。例如，台架组件（10）可以包括托架（60）和托架连接器组件（62）。载体（60）被支撑在装置台（20）上方并相对于装置台（20）旋转。支架连接器组件（62）将装置支架（24）连接到支架（60）上。此外，台架组件（10）可以包括相对于设备台（20）旋转设备保持器（24）的保持器移动器（120）。另外，台架组件（10）可以包括流体连接器（94），其连接与装置台（20）流体连通的装置保持器（24）。

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