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11. 发明申请

US20150065020A1 CUSTOMIZED POLISHING PADS FOR CMP AND METHODS OF FABRICATION AND USE THEREOF 有权
标题翻译：用于CMP的定制抛光垫及其制造方法及其使用方法
公开(公告)号：US20150065020A1
公开(公告)日：2015-03-05
申请号：US14489177
申请日：2014-09-17
申请人： Pradip K. Roy , Manish Deopura , Sudhanshu Misra
发明人： Pradip K. Roy , Manish Deopura , Sudhanshu Misra
IPC分类号： B24B37/26 , B24D11/04
CPC分类号： B24B37/26 , B24D7/14 , B24D11/04
摘要： The present application relates to polishing pads for chemical mechanical planarization (CMP) of substrates, and methods of fabrication and use thereof. The pads described in this invention are customized to polishing specifications where specifications include (but not limited to) to the material being polished, chip design and architecture, chip density and pattern density, equipment platform and type of slurry used. These pads can be designed with a specialized polymeric nano-structure with a long or short range order which allows for molecular level tuning achieving superior themo-mechanical characteristics. More particularly, the pads can be designed and fabricated so that there is both uniform and nonuniform spatial distribution of chemical and physical properties within the pads. In addition, these pads can be designed to tune the coefficient of friction by surface engineering, through the addition of solid lubricants, and creating low shear integral pads having multiple layers of polymeric material which form an interface parallel to the polishing surface. The pads can also have controlled porosity, embedded abrasive, novel grooves on the polishing surface, for slurry transport, which are produced in situ, and a transparent region for endpoint detection.
摘要翻译：本申请涉及用于基板的化学机械平面化（CMP）的抛光垫及其制造和使用方法。本发明中描述的焊盘定制为抛光规格，其中规格包括（但不限于）被抛光材料，芯片设计和结构，芯片密度和图案密度，设备平台和使用的浆料类型。这些焊盘可以设计成具有长或短范围顺序的专门的聚合物纳米结构，其允许分子水平调谐实现优异的机械特性。更具体地，可以设计和制造焊盘，使得焊盘内的化学和物理性质均匀和不均匀的空间分布。此外，这些垫可以被设计成通过表面工程，通过添加固体润滑剂来调节摩擦系数，并且产生具有形成与抛光表面平行的界面的多层聚合材料的低剪切整体垫。焊盘还可以具有受控的孔隙率，嵌入式研磨剂，抛光表面上的新型凹槽，用于原位生产的浆料输送，以及用于端点检测的透明区域。

12. 发明申请

US20140113534A1 Multi Grit Anti Chatter Sand Paper 审中-公开
标题翻译：多砂砾砂纸
公开(公告)号：US20140113534A1
公开(公告)日：2014-04-24
申请号：US13694055
申请日：2012-10-24
申请人： Clyde Alan Pritchett
发明人： Clyde Alan Pritchett
IPC分类号： B24D11/04
CPC分类号： B24D11/04 , B24B7/188 , B24D11/02
摘要： A sanding paper for use with a floor sander having one direction sanding comprising a paper sleeve or belt having a length and a width and a first surface and a second surface joined together and running parallel along the length of the sand paper wherein the first surface is disposed on the sander to apply to the floor first and the second to follow immediately thereafter and wherein the first surface has a grit which is more coarse than the second surface. The sanding paper first grit is a grit between 24-60 and the second grit is between 80 and 120 grit. In place of a middle grit, The intermediate surface between the first surface and second surface and wherein the first surface is between 24 and 40 grit, the intermediate surface between 41 and 80 grit and the third surface between 80 and 120 grit.
摘要翻译：一种用于具有单向磨砂的地板砂光机的砂纸，包括具有长度和宽度的纸套或带，第一表面和第二表面连接在一起并沿着砂纸的长度平行延伸，其中第一表面是设置在砂光机上以首先施加到地板上，第二表面紧随其后，其中第一表面具有比第二表面更粗糙的砂粒。砂纸第一粒砂砾是24-60之间的砂砾，第二颗砂粒在80和120粒度之间。代替中间砂粒，第一表面和第二表面之间的中间表面，其中第一表面在24和40砂粒之间，中间表面在41和80砂粒之间，第三表面在80和120砂粒之间。

13. 发明申请

US20090068938A1 Grinding Lamella and Grinding Wheel Holding Same 有权
标题翻译：磨砂板和砂轮保持相同
公开(公告)号：US20090068938A1
公开(公告)日：2009-03-12
申请号：US12224703
申请日：2007-02-28
申请人： Georg Klug
发明人： Georg Klug
IPC分类号： B24D13/16 , B24D11/00 , B24D11/04
CPC分类号： B24D13/08 , B24D11/008 , B24D13/16 , B24D18/0045
摘要： A grinding lamella (1) for being arranged on a rotatingly drivable grinding wheel (8), has at least two annular portions (4, 5, 6, 7, 24, 25, 26, 27, 34, 35, 36, 37, 44, 45, 46, 47) arranged at an angle (α) relative to one another. At least partially, the grinding lamellae (1) have a shape that deviates from the shape of a circular wheel with a central aperture. The grinding wheel (8) containing the grinding lamellae has at least one carrier element (2) and a least two such grinding lamellae (1) that partially overlap and, together, form an annular shape. If use is made of a pattern (14, 32) for a piece of material or a strip of material for producing the grinding lamellae (1), the grinding lamellae (1) are arranged side by side in the same direction so as to adjoin one another and offset relative to one another by 180°.
摘要翻译：用于布置在可旋转驱动的砂轮（8）上的研磨板（1）具有至少两个环形部分（4,5,6,7,24,25,26,27,34,35,36,37,38,36,37,38,38,38,38,38,38,38,40,46） 44,45,46,47），以相对于彼此成角度（α）排列。至少部分地，研磨片（1）具有偏离具有中心孔的圆形轮的形状的形状。包含研磨薄片的砂轮（8）具有至少一个载体元件（2）和至少两个这样的磨削薄片（1），其部分地重叠并且一起形成环形。如果使用用于生产研磨薄片（1）的一块材料或材料条的图案（14,32），则研磨薄片（1）沿相同方向并排布置，以便邻接彼此相对偏移180°。

14. 发明授权

US07182672B2 Method of probe tip shaping and cleaning 有权
标题翻译：探针尖端成型和清洁方法
公开(公告)号：US07182672B2
公开(公告)日：2007-02-27
申请号：US11139460
申请日：2005-05-27
申请人： Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
发明人： Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
IPC分类号： B25B1/00 , B24D11/04 , H01L21/66
CPC分类号： B24B19/16 , B24B29/08 , B24D3/28 , B24D13/142 , B24D18/0045 , B24D18/0072
摘要： Methods are provided for shaping, maintaining the shape of, and cleaning a probe tip using a pad such as a multi-layer adhesive and abrasive pad. The multi-layer adhesive and abrasive pad may be formed from layers of adhesive material having abrasive particles in-between each layer. Using the pad, probe tips may be shaped as desired from an unfinished probe stock, substantially limiting the use of relatively expensive conventional machining operations. Further, the pad may also be used to maintain probe tips in a desired operating shape. Still further, the pad may be used to clean accumulated debris from the probe tip. Preferably, the maintenance and cleaning operations are performed on-line, with the probes operatively installed in connection with testing machinery.
摘要翻译：提供了使用诸如多层粘合剂和研磨垫的垫来成形，保持探针尖端的形状和清洁探针尖端的方法。多层粘合剂和研磨垫可以由在各层之间具有磨料颗粒的粘合剂材料层形成。使用垫，探针尖端可以根据需要从未完成的探针坯料成型，从而基本上限制了相对昂贵的常规加工操作的使用。此外，垫也可以用于将探针尖端保持在期望的操作形状。此外，垫可以用于清洁来自探针尖端的积聚的碎屑。优选地，维护和清洁操作在线执行，探头可操作地安装在与测试机器相连接上。

15. 发明授权

US6120352A Lapping apparatus and lapping method using abrasive sheets 失效
标题翻译：研磨设备和研磨方法
公开(公告)号：US6120352A
公开(公告)日：2000-09-19
申请号：US812792
申请日：1997-03-06
申请人： Wayne O. Duescher
发明人： Wayne O. Duescher
IPC分类号： B24B37/04 , B24D9/10 , B24D11/04 , B24B1/00
CPC分类号： B24B37/26 , B24B37/042 , B24D11/04 , B24D9/10
摘要： Lapping or polishing at high speeds with fine abrasive particles offer significant advantages in the speed of lapping, savings of time in lapping, and smoothness in the finished articles. An improved process for lapping a surface according to the present invention comprises:a) providing a work piece to be lapped, having at least one surface to be lapped,b) providing a rotating platen having i) a back surface and ii) a flat surface which can be adjusted to a position parallel to said at least one surface of said work piece, said flat surface of said platen having openings therein through which air may flow,c) providing a sheet of abrasive material on said flat surface of said platen with an abrasive face of said sheet facing said at least one surface to be lapped,d) reducing the pressure at said back surface of said platen to secure said sheet of abrasive material to said flat surface of said platen, ande) rotating said platen at a rotational velocity sufficient to generate a surface speed of at least 4,000 surface feet per minute (or even more than 20,000 surface feet per minute), which, depending upon the diameter of the rotating abrasive may be at an angular speed of at least 500 revolutions per minute (which with a 15.2 cm or 6 inch diameter platen and abrasive sheet, equates to over 700 surface feet per minute at the periphery of the abrasive surface), or even more than 3,000 revolutions per minute (which with a 15.2 cm diameter abrasive sheet equates to over 4200 surface feet per minute and with a 30.4 cm or 12 inch abrasive sheet equates to over 8400 surface feet per minute) and contacting said abrasive material with said work piece. The boundary layer of any liquid (e.g., coolant or lubricant) applied to the working surface of the abrasive sheet can be controlled to improve the uniformity of the lapped surface.
摘要翻译：用高精度研磨颗粒高速研磨或抛光提供研磨速度，研磨时间节省以及成品中平滑度方面的显着优点。根据本发明的用于研磨表面的改进方法包括：a）提供待研磨的工件，具有至少一个要研磨的表面，b）提供旋转的压板，该压板具有i）背面和ii）表面可以被调节到与所述工件的所述至少一个表面平行的位置，所述压板的所述平坦表面具有开口，空气可以通过该开口流动，c）在所述压板的所述平坦表面上提供一块研磨材料其中所述片材的研磨面面向所述至少一个要被研磨的表面，d）降低所述压板的所述后表面处的压力，以将所述研磨材料片固定到所述压板的所述平坦表面，以及e）旋转所述压板以足以产生至少4,000英尺/分钟（或甚至大于20,000表面英尺每分钟）的表面速度的旋转速度，其取决于旋转磨料的直径可以是角度螺栓 d至少500转/分钟（其具有15.2cm或6英寸直径的压板和研磨片，在磨料表面的周边相当于每分钟超过700个表面英尺），或甚至每分钟3000转具有15.2cm直径的研磨片等于每分钟超过4200个表面脚，并且具有30.4cm或12英寸的研磨片等于每分钟超过8400个表面脚），并将所述研磨材料与所述工件接触。可以控制施加到研磨片的工作表面的任何液体（例如冷却剂或润滑剂）的边界层，以改善研磨表面的均匀性。

16. 发明授权

US6080215A Abrasive article and method of making such article 失效
标题翻译：磨料制品及其制作方法
公开(公告)号：US6080215A
公开(公告)日：2000-06-27
申请号：US11361
申请日：1998-02-04
申请人： Roy Stubbs , Scott R. Culler , Mara E. Liepa , Donna W. Bange , John D. Haas
发明人： Roy Stubbs , Scott R. Culler , Mara E. Liepa , Donna W. Bange , John D. Haas
IPC分类号： B24D3/28 , B24D11/04 , B24D3/00 , B24D17/00
CPC分类号： B24D3/28 , B24D11/04
摘要： A method for making an abrasive article having at least two abrasive coatings having different abrasive natures. The abrasive natures can differ, for example, by abrasive particle size, abrasive particle type, abrasive particle shape, filler, surfactant, or coupling agent. In another embodiment, the abrasive article can be a structured abrasive article comprising abrasive composites. In another aspect of the invention, the article can have a coating having a single abrasive nature, where the composites comprising the coating are free of abrasive particles.
摘要翻译： PCT No.PCT / US96 / 13100 Sec。 371日期：1998年2月4日 102（e）1998年2月4日PCT 1996年8月12日PCT PCT。出版物WO97 / 0692800 日期1997年2月27日一种用于制造具有至少两种具有不同磨蚀性质的磨料涂层的磨料制品的方法。研磨性质可以不同，例如，通过研磨颗粒尺寸，磨料颗粒类型，磨料颗粒形状，填料，表面活性剂或偶联剂。在另一个实施方案中，磨料制品可以是包含磨料复合材料的结构化磨料制品。在本发明的另一方面，制品可以具有单一研磨性质的涂层，其中包含涂层的复合材料不含磨料颗粒。

17. 发明授权

US5863306A Production of patterned abrasive surfaces 失效
标题翻译：生产图案磨料表面
公开(公告)号：US5863306A
公开(公告)日：1999-01-26
申请号：US892494
申请日：1997-07-14
申请人： Paul Wei , Gwo Shin Swei , Wenliang Patrick Yang , Kevin Bruce Allen
发明人： Paul Wei , Gwo Shin Swei , Wenliang Patrick Yang , Kevin Bruce Allen
IPC分类号： B24D99/00 , B24D3/02 , B24D3/20 , B24D3/28 , B24D3/34 , B24D11/00 , B24D11/04 , B24D18/00
CPC分类号： B24D11/001 , B24D11/04 , B24D3/28
摘要： Coated abrasives suitable for very fine abrading applications can be obtained by depositing a layer of a formulation comprising abrasive grits, fillers, grinding aid, additives and a binder resin on a substrate, treating the formulation to increase the viscosity and render it plastic but non-flowing, embossing a suitable pattern on the surface of the layer, and then curing the binder component of the formulation.
摘要翻译：适用于非常细的研磨应用的涂布研磨剂可以通过在基材上沉积包含磨料砂粒，填料，研磨助剂，添加剂和粘合剂树脂的组合物层来处理，以增加粘度并使其成为塑料，流动，在层的表面上压花合适的图案，然后固化制剂的粘合剂组分。

18. 发明授权

US5833724A Structured abrasives with adhered functional powders 失效
标题翻译：具有附着功能粉末的结构磨料
公开(公告)号：US5833724A
公开(公告)日：1998-11-10
申请号：US927611
申请日：1997-09-11
申请人： Paul Wei , Gwo Shin Swei , Wenliang Patrick Yang , Kevin Bruce Allen
发明人： Paul Wei , Gwo Shin Swei , Wenliang Patrick Yang , Kevin Bruce Allen
IPC分类号： B24D3/00 , B24D3/28 , B24D11/00 , B24D11/04 , B24D3/34
CPC分类号： B24D3/28 , B24D11/001 , B24D11/04
摘要： Coated abrasives suitable for very fine abrading applications can be obtained by depositing a layer of a formulation comprising abrasive grits, fillers, grinding aid, additives and a binder resin on a substrate in the form of a structured abrasive and then adhering to the surface of the structured abrasive a functional powder.
摘要翻译：适用于非常细的研磨应用的涂布研磨剂可以通过在基体上以结构化磨料的形式沉积包含磨料砂粒，填料，研磨助剂，添加剂和粘合剂树脂的制剂层，然后粘附到结构磨料是功能粉末。

19. 发明授权

US4734104A Coated abrasive product incorporating selective mineral substitution 失效
标题翻译：包含选择性矿物替代的涂层磨料产品
公开(公告)号：US4734104A
公开(公告)日：1988-03-29
申请号：US852096
申请日：1986-04-14
申请人： David E. Broberg
发明人： David E. Broberg
IPC分类号： C09K3/14 , B24D3/00 , B24D3/04 , B24D11/00 , B24D11/04 , C01G25/00 , C08J20060101 , C08J5/14 , C09C1/68
CPC分类号： B24D3/00 , B24D11/04
摘要： Replacement of all or most of the coarse mineral in a coated abrasive product by a superior (and typically more expensive) mineral improves abrading performance significantly more than would be predicted. In some cases the performance is superior to that of products made with either mineral alone. Typically 5% to 30% of the total mineral weight is made up of the superior mineral.
摘要翻译：通过优越（通常更昂贵）的矿物替代涂覆的研磨产品中的所有或大部分粗矿物质，显着地提高了研磨性能。在某些情况下，性能优于单独使用矿物制成的产品。通常矿物重量的5％至30％由优质矿物组成。

20. 发明授权

US4644703A Plural layered coated abrasive 失效
标题翻译：多层涂层磨料
公开(公告)号：US4644703A
公开(公告)日：1987-02-24
申请号：US839243
申请日：1986-03-12
申请人： Wesley R. Kaczmarek , Eugene Zador , Sitaramaiah Ravipati
发明人： Wesley R. Kaczmarek , Eugene Zador , Sitaramaiah Ravipati
IPC分类号： B24D11/00 , B24D11/04
CPC分类号： B24D11/00 , B24D11/005
摘要： A coated abrasive which is advantageous for certain applications has at least two distinct layers of abrasive grits: a coarse outer layer and a finer inner layer. The median particle size of the grits in the outer layer is at least 150% of that of the inner layer grits. The grits may be adhered to the backing with adhesives compounded primarily of acrylates and cured by exposure to UV light. A product made in this way is effective for one step fining of plastic ophthalmic lenses.
摘要翻译：对某些应用有利的涂层磨料具有至少两个不同的研磨砂粒层：粗糙的外层和更细的内层。外层中砂粒的中值粒径至少为内层砂粒的150％。可以使用主要由丙烯酸酯复合的粘合剂并且通过暴露于UV光固化来将砂砾粘附到背衬上。以这种方式制造的产品对于塑料眼镜片的一步澄清是有效的。

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