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11. 发明授权

US3821554A Magnetic lens assemblies for corpuscular ray superconductive devices which operate under vacuum 失效
标题翻译：用于在真空下操作的超声波超声波装置的磁性镜头组件
公开(公告)号：US3821554A
公开(公告)日：1974-06-28
申请号：US15837371
申请日：1971-06-30
申请人： SIEMENS AG
发明人： ZERBST H , WEYL R , DIETRICH I
IPC分类号： H01F6/00 , H01J37/09 , H01J37/141 , H01J37/10
CPC分类号： H01J37/09 , H01F6/00 , H01J37/1416
摘要： A magnetic lens assembly for a corpuscular ray device such as an electron microscope, ion microscope, electron-diffraction device or other corpuscular ray apparatus comprises a pair of shielding cylinders of superconductive material which are coaxially spaced from each other and which have their common axis coinciding with the lens axis. The shielding cylinders are surrounded by a lens winding which may also be made of superconductive material. The magnetic field produced by the winding is concentrated by the shielding cylinders in the region of the corpuscular ray. The shielding cylinders have directed toward each other a pair of end faces which are spaced from each other and define between each other a lens gap devoid of any shielding components made of superconductive material. The aperture error constant of the lens assembly depends upon the maximum value of the field intensity in the lens gap and upon the field gradient along the lens axis in the lens gap. The magnitude of the lens gap is chosen in such a way that for a fixed value lens-winding excitation, the maximum value of field intensity in the lens gap and the field gradient in the lens gap along the lens axis are optimized to produce a minimum of the aperture error constant.

12. 发明授权

US3587013A Magnetic lens device for corpuscular ray apparatus operating under vacuum 失效
标题翻译：用于真空雷射装置的磁性镜头装置
公开(公告)号：US3587013A
公开(公告)日：1971-06-22
申请号：US3587013D
申请日：1969-05-02
申请人： SIEMENS AG
发明人： DIETRICH ISOLDE , WEYL REINHARD , ZERBST HELMUT
IPC分类号： H01J37/09 , H01J37/141 , H01F7/00
CPC分类号： H01J37/09 , H01J37/1416 , Y10S505/871
摘要： A magnetic lens device for corpuscular ray apparatus to operate under vacuum is equipped with a pair of tubular shielding cylinders of superconductive material coaxially surrounding the lens axis and spaced from each other along said axis. Cryogenic means are thermally connected with the cylinders, and lens windings surround the cylinders for generating a magnetic field. The respective cylinders terminate in end faces directed toward each other and defining between each other a lens gap in which the cylinders concentrate the field near the axis. According to the invention proper, the shielding cylinders comprise respective end portions of superconductive material of higher currentcarrying capacity than the remaining portion of each cylinder, said end faces at said lens gap being formed by said respective end portions.

13. 发明申请

US20170069415A1 SUPERCONDUCTING MAGNETIC FIELD STABILIZER 审中-公开
标题翻译：超导磁场稳定器
公开(公告)号：US20170069415A1
公开(公告)日：2017-03-09
申请号：US15122754
申请日：2014-11-12
申请人： FORSCHUNGSZENTRUM JUELICH GMBH
发明人： Mikhail FALEY , Ulrich POPPE
IPC分类号： H01F7/20 , H01J29/56 , H01J37/141 , H01F6/06 , G01R33/389
CPC分类号： H01F7/20 , G01R33/389 , H01F6/00 , H01F6/06 , H01F7/0278 , H01F7/202 , H01J29/56 , H01J37/141 , H01J37/1416 , H01J2237/26
摘要： A device for applying a constant magnetic field to a volume of interest (VOI) has been developed. At least one magnetic field source and a permeable yoke, which guides the magnetic flux generated by this magnetic field source into the volume of interest (VOI). The yoke is guided through at least one closed conductor loop, which can be switched to the superconducting state so that, in the superconducting state of the conductor loop, a change in the flux through the yoke effects a current counteracting this change along the conductor loop. It has been identified that, in this way, the stabilizer for the magnetic field can be spaced so far apart from the volume of interest (VOI) that the field distribution in this volume is virtually no longer influenced. At the same time, the quality of the stabilization is also improved, since the conductor loop is no longer exposed to the entire magnetic field prevailing in the volume of interest (VOI). The entire critical current that the conductor loop can carry is available as a control range for compensating for fluctuations in the flux. In comparison with the prior art, the invention first accepts the apparent disadvantage that, in general, additional means are required for switching the conductor loop back and forth between the superconducting state and the normal-conducting state. However, this disadvantage is more than compensated for.
摘要翻译：已经开发了用于将恒定磁场施加到感兴趣体积（VOI）的装置。至少一个磁场源和可渗透轭，其将由该磁场源产生的磁通量引导到感兴趣体积（VOI）中。磁轭被引导通过至少一个封闭的导体环路，该环路可以切换到超导状态，使得在导体环路的超导状态下，通过磁轭的磁通量的变化会产生电流抵消沿导体环路的这种变化。已经确定，以这种方式，用于磁场的稳定器可以与感兴趣的体积（VOI）隔开距离，使得该体积中的场分布实际上不再受到影响。同时，由于导体环不再暴露于感兴趣体积（VOI）中的整个磁场，稳定性的质量也得到改善。导体回路可承载的整个临界电流可用作补偿通量波动的控制范围。与现有技术相比，本发明首先接受一个明显的缺点，一般来说，在超导状态和正常导通状态之间来回切换导体环路需要附加装置。然而，这个缺点是被补偿的。

14. 发明授权

US06410923B1 Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes 失效
标题翻译：用于高分辨率扫描电子显微镜和光刻工艺的磁性透镜装置
公开(公告)号：US06410923B1
公开(公告)日：2002-06-25
申请号：US09550945
申请日：2000-04-17
申请人： Albert V. Crewe
发明人： Albert V. Crewe
IPC分类号： H01J37143
CPC分类号： H01J37/1416 , H01J2237/1035 , H01J2237/28
摘要： Disclosed are lens apparatus in which a beam of charged particles is brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscope as the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and/or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.
摘要翻译：公开了透镜装置，其中通过磁场使带电粒子束聚焦，透镜位于目标位置之后。在示例性实施例中，在扫描电子显微镜中采用透镜装置作为用于电子束的高分辨率聚焦的唯一透镜，特别是具有约10至约30,000V的加速电压的电子束。在一个透镜设备包括围绕光束的轴线布置的导电线圈和至少在由线圈包围的空间内沿着光束的轴线延伸的磁极片。在其他实施例中，透镜装置包括由各种材料制成的磁偶极子或虚拟磁单极子，包括永磁体，超导线圈和可磁化球体以及包含在能量传导线圈内的针。还公开了多阵列透镜装置，用于在单个或多个标本上同时和/或连续成像多个图像。本发明还提供了用于聚焦用于光刻工艺的带电粒子束的装置，方法和装置。

15. 发明授权

US6051839A Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes 失效
标题翻译：用于高分辨率扫描电子显微镜和光刻工艺的磁性透镜装置
公开(公告)号：US6051839A
公开(公告)日：2000-04-18
申请号：US973706
申请日：1998-03-09
申请人： Albert V. Crewe
发明人： Albert V. Crewe
IPC分类号： G01Q10/00 , G01Q30/02 , H01J37/141
CPC分类号： H01J37/1416 , H01J2237/1035 , H01J2237/28
摘要： Disclosed are lens apparatus in which a beam of charged particlesis brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscopeas the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and/or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.
摘要翻译： PCT No.PCT / US96 / 09906 Sec。 371日期1998年3月9日 102（e）1998年3月9日PCT PCT 1996年7月6日PCT公布。公开号WO96 / 41362 日期1996年12月19日公开的是透镜装置，其中带电粒子束通过磁场被聚焦，透镜位于目标位置之后。在说明性实施例中，在扫描电子显微镜中使用透镜装置用于电子束的高分辨率聚焦的唯一透镜，特别是具有约10至约30,000V的加速电压的电子束。在一个实施例中透镜装置包括围绕光束的轴线布置的导电线圈和至少在由线圈包围的空间内沿着光束的轴线延伸的磁极片。在其他实施例中，透镜装置包括由各种材料制成的磁偶极子或虚拟磁单极子，包括永磁体，超导线圈和可磁化球体以及包含在能量传导线圈内的针。还公开了多阵列透镜装置，用于在单个或多个标本上同时和/或连续成像多个图像。本发明还提供了用于聚焦用于光刻工艺的带电粒子束的装置，方法和装置。

16. 发明授权

US5393983A Magnetic electron lens and elctron microscope using the same 失效
标题翻译：磁性电子透镜和电子显微镜使用相同
公开(公告)号：US5393983A
公开(公告)日：1995-02-28
申请号：US50044
申请日：1993-04-28
申请人： Shigeyuki Hosoki
发明人： Shigeyuki Hosoki
IPC分类号： G01Q30/10 , G01Q30/18 , H01J37/141
CPC分类号： H01J37/1416 , H01J2237/26
摘要： A magnetic electron lens for use in charged particle beam-applied apparatuses such as electron microscopes, the lens having concave lens characteristics in a geometric-optical sense. The magnetic concave lens of the invention comprises a first and a second magnetic field generating coil arranged in the propagating direction of the charged particle beam, and a first and a second magnetic shielding plate made of a superconductor each and furnished so as to enclose the first and the second magnetic field generating coils. The first magnetic shielding plate shields the magnetic field generated above the first magnetic field generating coil, and the second magnetic shielding plate shields the magnetic field generated under the second magnetic field generating coil. This setup constitutes a magnetic electron lens that is concave in terms of geometric-optical lens characteristics.
摘要翻译： PCT No.PCT / JP92 / 01076 Sec。 371日期：1993年4月28日 102（e）日期1993年4月28日PCT提交1992年8月26日PCT公布。出版物WO93 / 05529 日期：1993年3月18日。一种用于带电粒子束施加装置如电子显微镜的磁性电子透镜，具有几何光学意义上的凹透镜特性的透镜。本发明的磁凹透镜包括沿着带电粒子束的传播方向布置的第一和第二磁场产生线圈，以及由超导体制成的第一和第二磁屏蔽板，并且被设置为包围第一和第二磁场产生线圈。第一磁屏蔽板屏蔽在第一磁场产生线圈之上产生的磁场，并且第二磁屏蔽板屏蔽在第二磁场产生线圈下产生的磁场。该装置构成了几何光学透镜特性为凹面的磁性电子透镜。

17. 发明授权

US4939493A Magnetic field generator 失效
标题翻译：磁场发生器
公开(公告)号：US4939493A
公开(公告)日：1990-07-03
申请号：US249666
申请日：1988-09-27
申请人： Frank Krienin
发明人： Frank Krienin
IPC分类号： H01F7/20 , H01J37/141
CPC分类号： H01F7/202 , H01J37/1416
摘要： A magnetic field generating device provides a useful magnetic field within a specific retgion, while keeping nearby surrounding regions virtually field free. By placing an appropriate current density along a flux line of the source, the stray field effects of the generator may be contained. One current carrying structure may support a truncated cosine distribution, and it may be surrounded by a current structure which follows a flux line that would occur in a full coaxial double cosine distribution. Strong magnetic fields may be generated and contained using superconducting cables to approximate required current surfaces.
摘要翻译：磁场产生装置在特定的反射区内提供有用的磁场，同时保持附近的周围区域实际上无场。通过沿着源极的通量线放置合适的电流密度，可以包含发生器的杂散场效应。一个载流结构可以支持截断的余弦分布，并且其可以被跟随在全同轴双余弦分布中发生的磁通线的电流结构所包围。可以使用超导电缆产生和包含强磁场以近似所需的电流表面。

18. 发明授权

US4893103A Superconducting PYX structures 失效
标题翻译：超导PYX结构
公开(公告)号：US4893103A
公开(公告)日：1990-01-09
申请号：US316710
申请日：1989-02-24
申请人： Herbert A. Leupold
发明人： Herbert A. Leupold
IPC分类号： H01F6/00 , H01F7/02 , H01J37/141
CPC分类号： H01J37/1416 , H01F6/00 , H01F7/0278
摘要： A permanent magnet structure comprising one or more truncated hollow cyliical flux source (HCFS) segments with the end faces of each segment covered by superconducting sheets. In the case of a plurality of axially aligned segments, the array may be arranged to provide a periodic magnet structure suitable for use in a wiggler.
摘要翻译：一种永磁体结构，包括一个或多个截顶的中空圆柱形磁通源（HCFS）段，每段的端面由超导薄片覆盖。在多个轴向对准的段的情况下，阵列可以被布置成提供适于在摆动器中使用的周期性磁体结构。

19. 发明授权

US4209701A Magnetic lens arrangement for corpuscular radiation equipment working under a vacuum 失效
标题翻译：用于在真空下工作的红外辐射设备的磁性透镜装置
公开(公告)号：US4209701A
公开(公告)日：1980-06-24
申请号：US891894
申请日：1978-03-30
申请人： Isolde Dietrich , Fred Fox , Erwin Knapek , Karl Nachtrieb , Reinhard Weyl , Helmut Zerbst , Guy LeFranc
发明人： Isolde Dietrich , Fred Fox , Erwin Knapek , Karl Nachtrieb , Reinhard Weyl , Helmut Zerbst , Guy LeFranc
IPC分类号： H01J37/141 , H01J37/26 , H01J37/00
CPC分类号： H01J37/1416 , Y10S505/871
摘要： A magnetic lens arrangement for corpuscular radiation equipment working under a vacuum, in particular an objective lens for high voltage electron microscopes, which permits having objects to be examined disposed in a vacuum chamber at room temperature, is achieved by an arrangement which includes a vacuum chamber having a lens coil winding, a superconductive shielding device which is of cup-shaped design and encloses the winding, two superconductive shielding cylinders disposed one behind the other with mutual spacing enclosed by the winding, with a vacuum chamber for the object to be examined disposed in front of the open side of the shielding device and the first shielding cylinder.
摘要翻译：一种用于在真空下工作的微粒辐射设备的磁性透镜装置，特别是用于高压电子显微镜的物镜，其允许在室温下设置在真空室中的物体被检查，其包括真空室具有透镜线圈绕组，具有杯形设计并且围绕绕组的超导屏蔽装置，两个超导屏蔽圆筒彼此隔开布置，相互间隔由绕组包围，并设置用于待检测物体的真空室在屏蔽装置的开口侧和第一屏蔽筒之前。

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