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    • 12. 发明授权
    • Handheld heat detection device
    • 手持式热量检测装置
    • US06674080B2
    • 2004-01-06
    • US10027702
    • 2001-12-19
    • Dohn J. TrempalaCharles Greuzard
    • Dohn J. TrempalaCharles Greuzard
    • G08B1712
    • G01J5/04G01J5/02G01J5/025G01J5/026G01J5/0265G01J5/028G01J5/08G01J5/0815G01J5/0834G08B17/12
    • An elongated heat detection device identifies heat sources based upon infrared radiation. The device includes a purged and sealed instrumentation chamber and a rugged and shock absorbing case. The case surrounds and protects the chamber and includes anti-roll features. The instrumentation is provided in a forward end of the device and is capable of being plugged into the balance of the device for rapid repair and replacement. The power supply is contained in a rear end of the device and the case forms a portion of the power supply circuit. The device employs a startup test of the sensor and the power supply. Also, the power supply is continuously monitored. The device also employs a lost device locator such that the device can be readily located after being misplaced. Moreover, the device has a signal expanding feature that allows a heat source that is rapidly passed over to be relocated on subsequent sweeps of the device.
    • 细长的热检测装置基于红外辐射来识别热源。 该设备包括一个清洗和密封的仪器室和一个坚固耐用的减震箱。 外壳围绕并保护室,并包括防侧倾功能。 仪器设置在设备的前端,并且能够插入设备的平衡中,以便快速修复和更换。 电源被容纳在设备的后端,并且壳体形成电源电路的一部分。 该设备采用传感器和电源的启动测试。 另外,连续监控电源。 该设备还采用丢失的设备定位器,使得该设备可以容易地位于错放位置之后。 此外,该装置具有信号扩展特征,其允许快速通过的热源在装置的后续扫描中重新定位。
    • 15. 发明申请
    • Sensor for measuring a substrate temperature
    • 用于测量衬底温度的传感器
    • US20010006530A1
    • 2001-07-05
    • US09756945
    • 2001-01-08
    • Applied Materials, Inc.
    • Bruce AdamsAaron HunterAlex RubinchikMark YamPaul A. O'Brien
    • G01J005/08G01N025/00G01K001/14G01K013/00A21B001/00
    • G01J5/04G01J5/0003G01J5/0007G01J5/046G01J5/08G01J5/0806G01J5/0809G01J5/0815G01J5/0818G01J5/0821G01J5/0846G01J5/0862G01J2005/0048
    • A temperature sensor for measuring a temperature of a substrate in a thermal processing chamber is described. The chamber includes a reflector forming a reflecting cavity with a substrate when the substrate is positioned in the chamber. The temperature sensor includes a probe having an input end positioned to receive radiation from the reflecting cavity, and a detector optically coupled to an output end of the probe. The radiation entering the probe includes reflected radiation and non-reflected radiation. The detector measures an intensity of a first portion of the radiation entering the probe to generate a first intensity signal and measures an intensity of a second portion of the radiation entering the probe to generate a second intensity signal. The detector is configured so that a ratio of the reflected radiation to the non-reflected radiation is higher in the first portion than the second portion. The two intensity signals are used to calculate the temperature and emissivity of the substrate.
    • 描述了用于测量热处理室中的基板的温度的温度传感器。 该腔室包括一反射镜,当该基片定位在腔室中时,该反射器形成具有基底的反射腔。 温度传感器包括探针,其具有定位成接收来自反射腔的辐射的输入端,以及光学耦合到探针的输出端的检测器。 进入探头的辐射包括反射辐射和未反射的辐射。 检测器测量进入探头的辐射的第一部分的强度,以产生第一强度信号并测量进入探头的辐射的第二部分的强度以产生第二强度信号。 检测器被配置为使得反射辐射与非反射辐射的比率在第一部分中比第二部分高。 两个强度信号用于计算衬底的温度和发射率。
    • 16. 发明授权
    • Infrared sensor and method for compensating temperature thereof
    • 红外传感器及其温度补偿方法
    • US6043493A
    • 2000-03-28
    • US10513
    • 1998-01-21
    • In Sik KimTae Yoon KimYoung Cho ShimJun Bae Lee
    • In Sik KimTae Yoon KimYoung Cho ShimJun Bae Lee
    • G01J5/00G01J5/06G01J5/08G01J5/10G01J5/16
    • G01J5/16G01J5/06G01J5/08G01J5/0815G01J5/0846G01J5/0862G01J5/0893G01J2005/068G01J5/026
    • Infrared sensor that can make a temperature compensation by itself, and method for compensating a temperature thereof, are disclosed. The infrared sensor preferably includes a substrate, a diaphragm formed on the substrate, and a first thermopile sensor formed on a region of the diaphragm for sensing an infrared radiation emitted from a measured object and infrared radiations emitted from regions other than the measured object. A second thermopile sensor is formed on a region of the diaphragm and connected to the first thermopile sensor for sensing the infrared radiations emitted from the regions other than the measured object. A housing protects a front face of the substrate including the first, and second thermopile sensors includes an infrared filter in the housing over the first and second thermopile sensors for transmission of infrared radiations, and a reflector reflects the infrared radiation emitted from the measured object toward the first thermopile sensor. The method for temperature compensation can include the steps of letting an infrared radiation from a measured object be directed to the first thermopile sensor and letting infrared radiations from regions other than the measured object be directed to the first and second thermopile sensors, respectively, sensing the infrared radiations in the first and second thermopile sensors directed thereto, and making a temperature compensation for the infrared radiations from regions other than the measured object using the first and second thermopile sensors to provide a temperature component of the measured object only.
    • 公开了能够自行进行温度补偿的红外线传感器及其温度补偿方法。 红外线传感器优选地包括基板,形成在基板上的光阑和形成在光阑的区域上的第一热电堆传感器,用于感测从测量对象发射的红外辐射和从测量对象以外的区域发射的红外辐射。 第二热电堆传感器形成在隔膜的一个区域上并连接到第一热电堆传感器,用于感测从测量对象以外的区域发射的红外辐射。 壳体保护基板的前表面,包括第一和第二热电堆传感器在壳体中包括在第一和第二热电堆传感器上的红外滤光器,用于传输红外辐射,并且反射器将从测量对象发射的红外辐射反射到 第一个热电堆传感器。 用于温度补偿的方法可以包括以下步骤:将来自测量对象的红外辐射引导到第一热电堆传感器并且使来自被测物体以外的区域的红外辐射分别被引导到第一和第二热电堆传感器,感测 第一和第二热电堆传感器中的红外辐射被引导到其上,并且使用第一和第二热电堆传感器对来自除被测物体之外的区域的红外辐射进行温度补偿,以仅提供被测物体的温度分量。