会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 18. 发明申请
    • POLARISCOPE STRESS MEASUREMENT TOOL AND METHOD OF USE
    • 极化应力测量工具及其使用方法
    • US20120314202A1
    • 2012-12-13
    • US13571481
    • 2012-08-10
    • Steven DanylukFang Li
    • Steven DanylukFang Li
    • G01B11/16G01J4/00
    • G01B11/168G01L1/241G01L5/0047
    • The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.
    • 本发明提供了一种使用红外透射技术提取薄多晶硅晶片中的平面内残余应力的全应力分量的工具和方法,包括原位测量大型晶圆的残余应力。 剪切差法用于通过从边界积分剪切应力图来获得全应力分量。 通过引入新的分析功能,完全解决了边界的系统模糊。 提供了新的各向异性应力光学定律,并且针对不同的晶粒取向和应力取向校准了应力光学系数。
    • 19. 发明申请
    • DEVICES AND METHODS FOR POLARIZATION-SENSITIVE OPTICAL COHERENCE TOMOGRAPHY AND ADAPTIVE OPTICS
    • 极化敏感光学相干和自适应光学的装置和方法
    • US20120038885A1
    • 2012-02-16
    • US13144988
    • 2010-01-22
    • Abraham J. CenseDonald T. Miller
    • Abraham J. CenseDonald T. Miller
    • A61B3/14G01B9/02G01B11/16
    • A61B3/102A61B3/1225G01B11/168
    • The present disclosure includes disclosure of devices, and methods to resolve microscopic structures. In at least one exemplary embodiment, a visualization apparatus comprises a source arm having a light source operable to emit a light beam, wherein the light beam defines a beam pathway, a reference arm comprising a reflecting surface positioned within the beam pathway, a sample arm comprising a wavefront sensor, an adaptive optics wavefront corrector, and a target, each of which are positioned within the beam pathway, wherein the adaptive optics wavefront sensor is operable to compensate for at least one aberration in the light beam, a detector arm comprising a beam detector positioned within the beam pathway, wherein the beam detector is operable to detect the reflected light beam from the reference arm and the target, and wherein the visualization apparatus is operable to minimize at least one aberration of the target.
    • 本公开包括设备的公开以及解决微观结构的方法。 在至少一个示例性实施例中,可视化装置包括具有可操作以发射光束的光源的源臂,其中光束限定光束通路,包括位于光束通路内的反射表面的参考臂, 其包括波前传感器,自适应光学波前校正器和目标,每个都位于所述光束通路内,其中所述自适应光学波前传感器可操作以补偿所述光束中的至少一个像差;检测器臂,包括 光束检测器定位在光束通路内,其中光束检测器可操作以检测来自参考臂和靶的反射光束,并且其中可视化设备可操作以使目标的至少一个像差最小化。