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    • 14. 发明授权
    • Surface-modified member, surface-treating process and apparatus therefor
    • 表面改性构件,表面处理工艺及其设备
    • US08216663B2
    • 2012-07-10
    • US11922921
    • 2006-06-15
    • Koichiro Takayanagi
    • Koichiro Takayanagi
    • B32B3/10B44C1/22C23C16/02F22B1/08
    • C23C8/16C03C15/00C03C17/001C03C23/0075C03C2217/75C03C2218/15C03C2218/31C04B41/009C04B41/502C04B41/85C23C8/18Y10T428/24479C04B41/0072C04B41/4529C04B35/01C04B35/10
    • A member having high non-electrostatic properties and high hydrophilicity and preventing an adhesion of contaminants, a surface-treating process and an apparatus for the surface-treating process are provided.A surface-treatment apparatus comprises a water vapor-generating unit 1, a superheating unit 5 for superheating a water vapor to generate a superheated water vapor, and a processing unit 11 for spraying the superheated water vapor to a member 14 to be treated (a ceramic, a metal) or for exposing the member to the superheated water vapor. Treating the untreated member with a superheated water vapor having a temperature 300 to 1000° C., hydrophilicity and antistatic properties are imparted to the member. The untreated member may be a member (a window member) contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.
    • 提供具有高非静电性能和高亲水性并防止污染物附着的部件,表面处理工艺和用于表面处理工艺的装置。 表面处理装置包括水蒸汽发生单元1,用于使水蒸气过热以产生过热水蒸汽的过热单元5,以及用于将过热水蒸气喷射到待处理的构件14的处理单元11(a 陶瓷,金属)或用于将构件暴露于过热水蒸汽。 用温度为300〜1000℃的过热水蒸汽处理未处理的部件,赋予该部件亲水性和抗静电性。 未处理的构件可以是通过诸如PVD,CVD等气相法的用于衬底表面处理的气相表面处理装置(例如,室)中与处理空间接触的构件(窗构件) 或干蚀刻。
    • 15. 发明申请
    • Method of Manufacturing Bellows
    • 制造波纹管的方法
    • US20090139397A1
    • 2009-06-04
    • US12327261
    • 2008-12-03
    • Tsutomu YoshidaTadahiro OhmiYasuyuki ShiraiMasafumi Kitano
    • Tsutomu YoshidaTadahiro OhmiYasuyuki ShiraiMasafumi Kitano
    • F01B19/00C23C8/18
    • C23C8/18
    • Method for producing at low cost bellows which show high durability even when used in a quite reactive atmosphere. A method for manufacturing bellows includes the steps of: I: forming an untreated bellows from a flat base plate, the base plate including 15 to 30 wt % of Cr, 5 to 40 wt % of Ni, 0.9 to 6 wt % of Al, less than 1 wt % of Mo, less than 0.1 wt % of Mn, less than 0.1 wt % of C, less than 0.1 wt % of S, less than 0.1 wt % of P and a balance of Fe and an unavoidable impurity (relative to 100 wt % of the base plate); and II: heating the untreated bellows at a temperature of 750 to 895° C. in an atmosphere which contains water and hydrogen and in which the volume ratio of hydrogen to water (H2/H2O) is in the range of 2×103 to 1×1012, thereby forming an Al2O3 passivation film on a surface of the untreated bellows.
    • 低成本波纹管的生产方法,即使在相当活跃的气氛中使用也显示出高耐用性。 制造波纹管的方法包括以下步骤:I:从平的基板形成未经处理的波纹管,基板包括15至30重量%的Cr,5至40重量%的Ni,0.9至6重量%的Al, 小于1重量%的Mo,小于0.1重量%的Mn,小于0.1重量%的C,小于0.1重量%的S,小于0.1重量%的P和余量的Fe和不可避免的杂质(相对 至100重量%); 和II:在含有水和氢的气氛中在750至895℃的温度下加热未处理的波纹管,其中氢与水的体积比(H 2 / H 2 O)在2×10 3至1×10 12的范围内,从而 在未处理的波纹管的表面上形成Al 2 O 3钝化膜。