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    • 18. 发明授权
    • Compositions comprising silane modified metal oxides
    • 包含硅烷改性金属氧化物的组合物
    • US09382450B2
    • 2016-07-05
    • US12657334
    • 2010-01-19
    • James A. Belmont
    • James A. Belmont
    • C09K13/00C01B33/12C09G1/02B82Y30/00C09C1/30C09K3/14
    • C09G1/02B82Y30/00C01P2004/62C01P2004/64C09C1/3081C09K3/1436C09K3/1463
    • The present invention relates to a composition comprising a silane modified metal oxide, wherein the silane modified metal oxide comprises a metal oxide having attached at least one silyl group, and wherein the silyl group comprises at least one —SO3−M+, —OSO3−M+, —SSO3−M+, —NHSO3−M+, —NR′SO3−M+, —NR′3+A−, or -Q+A− group. R′, which can be the same or different, is a branched or unbranched, substituted or unsubstituted alkyl, alkenyl or alkynyl group or a substituted or unsubstituted aryl, heteroaryl, alkylaryl; or arylalkyl group, M+ is a cationic counterion, and A− is a anionic counterion. The present invention further relates to the silane modified metal oxide used in the disclosed chemical mechanical polishing composition.
    • 本发明涉及包含硅烷改性金属氧化物的组合物,其中硅烷改性金属氧化物包括具有至少一个甲硅烷基的金属氧化物,其中甲硅烷基包括至少一个-SO 3 -M +,-OSO 3 -M + ,-SSO 3 -M +,-NHSO 3 -M +, - NR'SO 3 -M +, - NR'3 + A-或-Q + A-基团。 R'可以相同或不同,是支链或非支链的,取代或未取代的烷基,烯基或炔基或取代或未取代的芳基,杂芳基,烷基芳基; 或芳基烷基,M +是阳离子抗衡离子,A-是阴离子抗衡离子。 本发明还涉及用于所公开的化学机械抛光组合物中的硅烷改性金属氧化物。