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11. 发明申请

US20040237595A1 Method for producing an optical fiber preform 有权
标题翻译：光纤预制棒的制造方法
公开(公告)号：US20040237595A1
公开(公告)日：2004-12-02
申请号：US10475750
申请日：2004-06-10
发明人： Sabeina Fogliani , Carlo Tregame
IPC分类号： C03B037/018
CPC分类号： C03B37/0142 , C03B37/01446 , C03B37/0148 , C03B37/01486 , C03B2201/31 , C03B2203/22 , C03B2207/32 , C03B2207/66 , C03B2207/80 , C03B2207/85
摘要： A method for producing an optical fiber preform. Glass soot particles are formed by jetting and combusting a gaseous glass-forming material and a fuel gas from a burner in the presence of oxygen. The glass soot particles are deposited on a deposition rod while rotating the deposition rod about its axis and reciprocating the burner in parallel to the deposition rod so as to form the preform and varying at least one of the translation velocity of the burner and the rotation velocity of the rod so as to obtain a predetermined radial soot density distribution in the preform.
摘要翻译：一种光纤预制棒的制造方法。通过在氧的存在下从燃烧器喷射和燃烧气态玻璃形成材料和燃料气体来形成玻璃烟灰颗粒。玻璃烟灰颗粒沉积在沉积杆上，同时围绕其轴线旋转沉积杆并使燃烧器与沉积杆平行地往复运动，以便形成预型件并改变燃烧器的平移速度和旋转速度中的至少一个以便在预成型件中获得预定的径向烟灰密度分布。

12. 发明申请

US20040237594A1 Device and method for manufacturing a preform for optical fibres by chemical vapour deposition 有权
标题翻译：通过化学气相沉积制造光纤预制棒的装置和方法
公开(公告)号：US20040237594A1
公开(公告)日：2004-12-02
申请号：US10481748
申请日：2004-07-07
发明人： Giacomo Stefano Roba , Massimo Nutini , Marco Ruzzier , Franco Veronelli
IPC分类号： C03B037/018
CPC分类号： C03B37/0144 , C03B37/01202 , C03B37/01406 , C03B37/0142 , C03B37/01486 , C03B2207/62 , C03B2207/66 , Y02P40/57
摘要： A method and device for manufacturing a preform for optical fibres through chemical deposition on a substrate for deposition arranged vertically. A chemical deposition chamber includes at least one gripping member rotatably mounted about an axis Z-Z and adapted to hold at least one end of at least one elongated substrate for chemical deposition for the formation of a preform. The chamber includes at least one burner which is mobile along a direction Z substantially parallel to the axis Z-Z and adapted to deposit on the elongated substrate, a chemical substance for the formation of a preform and at least one suction element for collecting exhaust chemical substances. The suction element is arranged on the opposite side of the burner with respect to the axis Z-Z and is mobile along the direction Z and is positioned at a lower height than the burner.
摘要翻译：一种用于通过化学沉积制造用于光纤的预制件的方法和装置，用于垂直布置的用于沉积的基板。化学沉积室包括至少一个夹持构件，该夹持构件围绕轴线Z-Z可旋转地安装，并且适于保持用于化学沉积的至少一个细长衬底的至少一端以形成预成型件。所述腔室包括至少一个燃烧器，所述燃烧器沿着基本上平行于轴线Z-Z的方向Z移动，并且适于沉积在细长衬底上，用于形成预成型件的化学物质和用于收集排气化学物质的至少一个吸入元件。抽吸元件相对于轴线Z-Z布置在燃烧器的相对侧上，并且沿着Z方向移动，并且位于比燃烧器低的高度处。

13. 发明授权

US06783898B2 Projection lithography photomask blanks, preforms and method of making 失效
标题翻译：投影光刻光掩模坯料，预成型件和制造方法
公开(公告)号：US06783898B2
公开(公告)日：2004-08-31
申请号：US09876194
申请日：2001-06-06
申请人： George Edward Berkey , Lisa Anne Moore , Charles Chunzhe Yu
发明人： George Edward Berkey , Lisa Anne Moore , Charles Chunzhe Yu
IPC分类号： G03F900
CPC分类号： C03B23/07 , C03B19/1415 , C03B19/1423 , C03B19/1453 , C03B19/1469 , C03B19/1492 , C03B23/043 , C03B23/045 , C03B23/051 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2207/02 , C03B2207/06 , C03B2207/20 , C03B2207/32 , C03B2207/52 , C03B2207/54 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/12 , C03C2201/21 , C03C2203/50 , G03F1/60
摘要： The invention includes methods of making lithography photomask blanks. The invention also includes lithography photomask blanks and preforms for producing lithography photomask. The method of making a lithography photomask blank includes providing a soot deposition surface, producing SiO2 soot particles and projecting the SiO2 soot particles toward the soot deposition surface. The method includes successively depositing layers of the SiO2 soot particle on the deposition surface to form a coherent SiO2 porous glass preform body comprised of successive layers of the SiO2 soot particles and dehydrating the coherent SiO2 glass preform body to remove OH from the preform body. The SiO2 is exposed to and reacted with a fluorine containing compound and consolidated into a nonporous silicon oxyfluoride glass body with parallel layers of striae. The method further includes forming the consolidated silicon oxyfluoride glass body into a photomask blank having a planar surface with the orientation of the striae layer parallel to the photomask blank planar surface.
摘要翻译：本发明包括制造光刻光掩模坯料的方法。本发明还包括光刻光掩模坯料和用于生产光刻光掩模的预成型件。制造光刻光掩模坯料的方法包括提供烟灰沉积表面，产生SiO 2烟灰颗粒并将SiO 2烟灰颗粒投射到烟灰沉积表面。该方法包括在沉积表面上依次沉积SiO 2烟灰颗粒的层，以形成由SiO 2烟灰颗粒的连续层组成的粘结SiO 2多孔玻璃预制体，并使相干的SiO 2玻璃预制体脱水以从预成型体中去除OH。将SiO 2暴露于含氟化合物并与其反应，并固化成具有平行的条纹层的无孔氟氧化硅玻璃体。该方法还包括将固化的氟氧化硅玻璃体形成为具有平坦表面的光掩模坯料，其中条纹层的取向平行于光掩模坯料平面。

14. 发明授权

US06735984B1 Making an optical fiber preform including reducing the length of a deposition layer 失效
标题翻译：制造包括减小沉积层的长度的光纤预制件
公开(公告)号：US06735984B1
公开(公告)日：2004-05-18
申请号：US09532968
申请日：2000-03-22
申请人： Jacques Jolly , Rémi Fauche , Jean-Florent Campion
发明人： Jacques Jolly , Rémi Fauche , Jean-Florent Campion
IPC分类号： C03B37018
CPC分类号： C03B37/01291 , C03B37/01426 , C03B37/01446 , C03B37/01466 , C03B2207/66 , C03B2207/70
摘要： The method is designed to be implemented in an installation provided with means enabling a preform held between two points by supporting end-pieces to be rotated and to be moved in translation. Heater means for heating the preform by means of a plasma torch are associated with material supply means, so as to enable the preform to be manufactured in layers. Preform/torch relative displacements, with or without material being supplied, lead either to a new layer of material being deposited on the preform, or to the most recent layer deposited being glazed. Said method interposes a one-ended reduction in layer length, starting from one of the intermediate layers, while a succession of concentric layers are being deposited on the preform in a manner such that the lengths of the layers are progressively reduced so that the preform tapers towards it ends. The one-ended reduction leads to a limitation of the thickness of a determined segment at the level of the layer deposited immediately prior to the reduction.
摘要翻译：该方法被设计成在具有能够通过支撑端件被旋转并且以平移方式移动的情况下使得能够保持在两个点之间的预成型件的装置的实施中实现。通过等离子体焰炬加热预成型件的加热器装置与材料供应装置相关联，以便使预成型件能够分层制造。预制件/割炬相对位移（有或没有材料供应）导致沉积在预成型件上的新层材料，或沉积在玻璃上的最近层。所述方法从一个中间层开始以层间长度的单端还原，同时一连串的同心层以这样的方式沉积在预成型件上，使得层的长度逐渐减小，使得预成型件逐渐变细朝它结束单端还原导致在紧接着还原之前沉积的层的水平上的确定段的厚度受到限制。

15. 发明授权

US06673396B2 Method for producing an SiO2 blank by adjusting shape of deposition burner flame 失效
标题翻译：通过调节沉积燃烧器火焰的形状来生产SiO2坯料的方法
公开(公告)号：US06673396B2
公开(公告)日：2004-01-06
申请号：US10045339
申请日：2001-11-07
申请人： Heinz Fabian
发明人： Heinz Fabian
IPC分类号： B05D106
CPC分类号： C03B37/0142 , C03B19/1423 , C03B2207/46 , C03B2207/52 , C03B2207/66 , C03B2207/70
摘要： In a known method for producing an SiO2 blank, SiO2 particles are formed in a burner flame of a deposition burner and are deposited under the effect of an electrical field on a substrate. Starting therefrom, in order to indicate a simple and inexpensive method by means of which blanks can be produced with a predetermined, in particular axially homogeneous, mass and density distribution, it is suggested according to the invention that the geometrical shape of the burner flame (8) is adjusted by the effect of the electrical field (9) in dependence upon the geometrical parameter of a deposition surface (12; 21) of the substrate (1) that is assigned to the burner flame (8). An apparatus suited for performing the method comprises a substrate, at least one deposition burner for producing SiO2 particles in a burner flame assigned to the deposition burner, a measuring device for sensing a geometrical parameter in the area of a deposition surface of the SiO2 blank, and a pair of electrodes connected to a source of voltage for producing an electrical field (9) which is operative in the area of the burner flame and is adjustable in dependence upon the geometrical parameter of that deposition surface (21; 21) of the substrate that is assigned to the burner flame (8).
摘要翻译：在已知的用于制备SiO 2坯料的方法中，SiO 2颗粒在沉积燃烧器的燃烧器火焰中形成，并且在电场作用下沉积在衬底上。从其开始，为了表示简单且便宜的方法，通过该方法可以以预定的，特别是轴向均匀的质量和密度分布来生产坯料，根据本发明，建议燃烧器火焰的几何形状（ 8）由电场（9）的影响根据分配给燃烧器火焰（8）的衬底（1）的沉积表面（12; 21）的几何参数来调节。适用于执行该方法的装置包括：衬底，用于在分配给沉积燃烧器的燃烧器火焰中产生SiO 2颗粒的至少一个沉积燃烧器;用于感测SiO 2坯料的沉积表面区域中的几何参数的测量装置，以及连接到电压源的一对电极，用于产生电场（9），所述电场在所述燃烧器火焰的区域中操作，并且可根据所述衬底的所述沉积表面（21; 21）的几何参数来调节分配给燃烧器火焰（8）。

16. 发明申请

US20030232200A1 Multilayered optical structures 失效
标题翻译：多层光学结构
公开(公告)号：US20030232200A1
公开(公告)日：2003-12-18
申请号：US10420343
申请日：2003-04-22
发明人： Michael A. Bryan , Xiangxin Bi
IPC分类号： B32B009/04
CPC分类号： G02B6/12002 , B32B9/04 , C03B19/1415 , C03B19/1423 , C03B19/1484 , C03B37/01413 , C03B37/0142 , C03B37/01486 , C03B37/027 , C03B2203/34 , C03B2205/40 , C03B2207/02 , C03B2207/34 , C03B2207/66 , C03B2207/85 , C04B35/14 , C04B2235/3201 , C04B2235/3203 , C04B2235/3215 , C04B2235/3217 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3232 , C04B2235/3234 , C04B2235/3244 , C04B2235/3251 , C04B2235/3258 , C04B2235/3287 , C04B2235/3293 , C04B2235/3294 , C04B2235/3296 , C04B2235/3298 , C04B2235/3409 , C04B2235/3418 , C04B2235/3463 , C23C16/483 , C23C26/00 , G02B6/02042 , G02B6/13 , G02B6/132 , G02B2006/12147 , G02B2006/1215 , G02B2006/12176 , Y02P40/57
摘要： Monolithic optical structures include a plurality of layer with each layer having an isolated optical pathway confined within a portion of the layer. The monolithic optical structure can be used as an optical fiber preform. Alternatively or additionally, the monolithic optical structure can include integrated optical circuits within one or more layers of the structure. Monolithic optical structures can be formed by performing multiple passes of a substrate through a flowing particle stream. The deposited particles form an optical material following consolidation. Flexible optical fibers include a plurality of independent light channels extending along the length of the optical fiber. The fibers can be pulled from an appropriate preform.
摘要翻译：单片光学结构包括多个层，每个层具有限定在层的一部分内的隔离的光学路径。单片光学结构可以用作光纤预制件。或者或另外，单片光学结构可以包括在该结构的一个或多个层内的集成光学电路。单片光学结构可以通过通过流动的颗粒流进行多次通过基板来形成。沉积的颗粒在固结后形成光学材料。柔性光纤包括沿着光纤的长度延伸的多个独立的光通道。纤维可以从适当的预成型件拉出。

17. 发明申请

US20030121290A1 Glass base material manufacturing apparatus and glass base material manufacturing method 失效
标题翻译：玻璃基材制造装置和玻璃基材制造方法
公开(公告)号：US20030121290A1
公开(公告)日：2003-07-03
申请号：US10370494
申请日：2003-02-24
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Yuuji Tobisaka , Tadakatsu Shimada , Hiroshi Machida , Masataka Watanabe , Hiroshi Tsumura , Hideo Hirasawa
IPC分类号： C03B037/018
CPC分类号： C03B37/0142 , C03B37/01406 , C03B37/0144 , C03B37/01486 , C03B2207/52 , C03B2207/60 , C03B2207/66 , C03B2207/70 , Y02P40/57
摘要： An apparatus for manufacturing a glass base material, which is a base material of an optical fiber, comprising: a base rod, around and along which said glass base material is formed; a burner that hydrolyzes and accumulates a gas material, which is a base material of said glass base material, around and along said base rod; a first burner-moving-unit that moves said burner in a direction parallel with a longitudinal direction of said base rod; and a second burner-moving-unit that moves said first burner-moving-unit in a same moving direction of said first burner-moving-unit.
摘要翻译：一种用于制造作为光纤的基材的玻璃基材的设备，包括：基棒，在其周围形成所述玻璃基材; 在所述基棒周围并沿着所述基棒水解积聚作为所述玻璃基材的基材的气体材料的燃烧器; 第一燃烧器移动单元，其沿与所述基棒的纵向方向平行的方向移动所述燃烧器; 以及第二燃烧器移动单元，其在所述第一燃烧器移动单元的相同移动方向上移动所述第一燃烧器移动单元。

18. 发明授权

US06374639B2 Silica glass and its manufacturing method 有权
标题翻译：二氧化硅玻璃及其制造方法
公开(公告)号：US06374639B2
公开(公告)日：2002-04-23
申请号：US09933749
申请日：2001-08-22
申请人： Norio Komine , Seishi Fujiwara , Hiroki Jinbo
发明人： Norio Komine , Seishi Fujiwara , Hiroki Jinbo
IPC分类号： C03B1914
CPC分类号： C03B19/14 , C03B19/1423 , C03B19/1484 , C03B37/014 , C03B37/0142 , C03B2201/07 , C03B2201/12 , C03B2201/23 , C03B2207/06 , C03B2207/12 , C03B2207/20 , C03B2207/30 , C03B2207/36 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/12 , C03C2201/21 , C03C2201/23 , C03C2203/42 , C03C2203/46 , G03F7/2004 , Y10S65/90
摘要： A method is provided for manufacturing a silica glass that is substantially free of chlorine. The method includes the step of separately expelling a silicon tetrafluoride gas, a combustion gas, and a combustible gas from a burner made of silica glass, the flow velocity of the silicon tetrafluoride gas being within the range of about 9 slm/cm2 to about 20 slm/cm2. The method further includes the steps of producing minute silica glass particles by reacting the silicon tetrafluoride gas with water produced by a reaction of the combustion gas with the combustible gas, depositing the minute silica glass particles on a target, and producing the silica glass by fusing and vitrifying the minute silica glass particles deposited on the target.
摘要翻译：提供了一种制造基本上不含氯的石英玻璃的方法。该方法包括从由石英玻璃制成的燃烧器分别排出四氟化硅气体，燃烧气体和可燃气体的步骤，四氟化硅气体的流速在约9slm / cm 2至约20的范围内 slm / cm2。该方法还包括以下步骤：通过使四氟化硅气体与通过燃烧气体与可燃气体的反应产生的水反应生成微小的二氧化硅玻璃颗粒，将微小二氧化硅玻璃颗粒沉积在靶材上，并通过熔融制备石英玻璃并使沉积在靶上的微小二氧化硅玻璃颗粒玻璃化。

19. 发明授权

US06291377B1 Silica glass and its manufacturing method 有权
标题翻译：二氧化硅玻璃及其制造方法
公开(公告)号：US06291377B1
公开(公告)日：2001-09-18
申请号：US09150613
申请日：1998-09-10
申请人： Norio Komine , Seishi Fujiwara , Hiroki Jinbo
发明人： Norio Komine , Seishi Fujiwara , Hiroki Jinbo
IPC分类号： C03C306
CPC分类号： C03B19/14 , C03B19/1423 , C03B19/1484 , C03B37/014 , C03B37/0142 , C03B2201/07 , C03B2201/12 , C03B2201/23 , C03B2207/06 , C03B2207/12 , C03B2207/20 , C03B2207/30 , C03B2207/36 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/12 , C03C2201/21 , C03C2201/23 , C03C2203/42 , C03C2203/46 , G03F7/2004 , Y10S65/90
摘要： A method is provided for manufacturing a silica glass that is substantially free of chlorine. The method includes the step of separately expelling a silicon tetrafluoride gas, a combustion gas, and a combustible gas from a burner made of silica glass, the flow velocity of the silicon tetrafluoride gas being within the range of about 9 slm/cm2 to about 20 slm/cm2. The method further includes the steps of producing minute silica glass particles by reacting the silicon tetrafluoride gas with water produced by a reaction of the combustion gas with the combustible gas, depositing the minute silica glass particles on a target, and producing the silica glass by fusing and vitrifying the minute silica glass particles deposited on the target.
摘要翻译：提供了一种制造基本上不含氯的石英玻璃的方法。该方法包括从由石英玻璃制成的燃烧器分别排出四氟化硅气体，燃烧气体和可燃气体的步骤，四氟化硅气体的流速在约9slm / cm 2至约20的范围内 slm / cm2。该方法还包括以下步骤：通过使四氟化硅气体与通过燃烧气体与可燃气体的反应产生的水反应生成微小的二氧化硅玻璃颗粒，将微小二氧化硅玻璃颗粒沉积在靶材上，并通过熔融制备石英玻璃并使沉积在靶上的微小二氧化硅玻璃颗粒玻璃化。

20. 发明授权

US6145344A Method for the preparation of a porous silica glass preform for optical fibers 失效
标题翻译：制备光纤多孔石英玻璃预制件的方法
公开(公告)号：US6145344A
公开(公告)日：2000-11-14
申请号：US284902
申请日：1994-08-02
申请人： Hiroshi Oyamada , Hiroyuki Koide , Goh Ogino , Hideo Hirasawa
发明人： Hiroshi Oyamada , Hiroyuki Koide , Goh Ogino , Hideo Hirasawa
IPC分类号： C03B37/018 , C03B37/014 , G02B6/00 , G02B6/036
CPC分类号： G02B6/03633 , C03B37/0142 , G02B6/02042 , C03B2203/22 , C03B2203/34 , C03B2207/06 , C03B2207/50 , C03B2207/60 , C03B2207/64 , C03B2207/66 , G02B6/0281 , G02B6/0286
摘要： Proposed is an improvement in the VAD process for the preparation of a porous silica glass preform for double-core optical fibers by using three oxyhydrogen flame burners installed one above the other in a flame hydrolysis chamber in which a porous silica glass body consisting of the center core portion formed by the lowermost burner, side core portion formed by the middle burner and the cladding layer formed by the uppermost burner is gradually pulled up as it grows under rotation. Different from conventional procedures in which the extension of the nozzle axis of each of the burners intersects with the rotation axis of the growing body, the extension of the nozzle axis of the middle burner for the side core is displaced in a horizontal direction by a limited distance not to intersect nor to be in parallel with the rotation axis in the invention. By this means, an improvement is obtained in the uniformity of distribution of the refractive index in the side core which otherwise is remarkably disordered.
摘要翻译：提出了通过在火焰水解室中使用三个氢氧焰燃烧器一起制备用于双芯光纤的多孔石英玻璃预制件的VAD方法的改进，其中由中心组成的多孔石英玻璃体由最下面的燃烧器形成的芯部，由中间燃烧器形成的侧芯部和由最上面的燃烧器形成的包覆层随着其旋转而逐渐上升。与常规方法不同，其中每个燃烧器的喷嘴轴线的延伸与生长体的旋转轴线相交，用于侧芯的中间燃烧器的喷嘴轴线的延伸在水平方向上被限制在本发明中不相交或不与旋转轴平行的距离。通过这种方式，在侧核中折射率分布的均匀性得到改善，否则其显着无序。

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