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11. 发明授权

US06501107B1 Addressable fuse array for circuits and mechanical devices 失效
标题翻译：用于电路和机械设备的可寻址保险丝阵列
公开(公告)号：US06501107B1
公开(公告)日：2002-12-31
申请号：US09452886
申请日：1999-12-01
申请人： Michael J. Sinclair , Jeremy A. Levitan
发明人： Michael J. Sinclair , Jeremy A. Levitan
IPC分类号： H01L2710
CPC分类号： B81B3/0086 , B81B7/0012 , H01L23/5256 , H01L2924/0002 , H01L2924/00
摘要： A fuse array having a plurality of fusible links that can be addressed by two electrodes is disclosed. The fuse array includes two conductive strips having the plurality of fusible links located therebetween and electrically coupled to the conductive strips. The fusible links have different electrical resistance and each fusible link includes a fuse portion. A voltage potential applied across the conductive strips induces current flow through the fusible links in accordance with Ohm's law and ohmic heating occurs at the fuse portion in proportion to the square of the current. The voltage is increased to cause sufficient ohmic heating to occur in the most conductive fusible link (the fusible link having the lowest electrical resistance) so that the fuse portion in that fusible link fuses. Because the fusible links are connected in parallel to the conductive strips, an equivalent resistance of the plurality of fusible links increases and the current flow diminishes so that no further fuse portions are fused at the selected voltage level. Thereafter, the voltage level may be increased to fuse the most conductive fusible link remaining that is not fused. The fuse array may be incorporated into a circuit as a resistor that can be tuned to circuit requirements or as a physical structure in MEMS devices wherein the fuse array may be tuned to change physical properties of the MEMS device.
摘要翻译：公开了一种具有可由两个电极寻址的多个易熔链的熔丝阵列。保险丝阵列包括两个导电条，其中多个易熔连接件位于它们之间并电耦合到导电条上。熔断链路具有不同的电阻，并且每个可熔连接件包括保险丝部分。导电片上施加的电压电压根据欧姆定律引起电流流经可熔连接点，欧姆加热与电流平方成比例地在熔丝部分发生。增加电压以在最导电的可熔连接件（具有最低电阻的熔断管）中发生足够的欧姆加热，使得该可熔接头中的保险丝部分熔断。因为可熔连接件与导电条平行连接，所以多个可熔连接件的等效电阻增加，并且电流流动减小，使得在所选择的电压电平下不再熔合熔丝部分。此后，可以增加电压电平以熔断剩余的未融合的最导电的可熔断链。保险丝阵列可以作为电阻器被并入到电路中，该电阻器可以被调谐到电路要求或作为MEMS器件中的物理结构，其中熔丝阵列可被调谐以改变MEMS器件的物理特性。

12. 发明授权

US09122047B2 Preventing glass particle injection during the oil fill process 有权
标题翻译：在填油过程中防止玻璃颗粒注入
公开(公告)号：US09122047B2
公开(公告)日：2015-09-01
申请号：US13731511
申请日：2012-12-31
申请人： Pixtronix, Inc.
发明人： Eugene E. Fike, III , Timothy J. Brosnihan
IPC分类号： G02B26/00 , G02F1/01 , G09G3/00 , B81B3/00 , B81B7/00 , B81C1/00 , G02B26/02 , G02B27/00
CPC分类号： G02B26/00 , B81B3/0005 , B81B7/0012 , B81B7/0029 , B81B2201/045 , B81C1/0096 , G02B26/02 , G02B27/0006 , G02F1/0102 , G09G3/00
摘要： This disclosure provides systems, methods and apparatus for preventing particles from entering electromechanical systems (EMS) display devices. In one aspect, an apparatus includes a plate, a substrate supporting at least one EMS device, a seal joining the plate and the substrate to define a cavity therebetween and at least one port for receiving a fluid, and a filter disposed between the port and the EMS device. The filter includes elements formed on at least one of a surface of the substrate and a surface of the plate, defining a gap sized to allow the received fluid to pass and to inhibit non-fluidic particles carried in the fluid from the EMS device.
摘要翻译：本公开提供了用于防止颗粒进入机电系统（EMS）显示装置的系统，方法和装置。在一个方面，一种装置包括板，支撑至少一个EMS装置的基板，连接板和基板的密封件，以在其间限定一个空腔，以及用于接收流体的至少一个端口，以及设置在端口和 EMS设备。过滤器包括形成在基板的表面和板的表面中的至少一个上的元件，其限定了尺寸允许接收的流体通过并且抑制从EMS装置流入的流体中的非流体颗粒的间隙。

13. 发明授权

US08866239B2 IC manufacturing method, IC and apparatus 有权
标题翻译： IC制造方法，IC和装置
公开(公告)号：US08866239B2
公开(公告)日：2014-10-21
申请号：US13289063
申请日：2011-11-04
申请人： Marcus Van Dal , Aurelie Humbert , Matthias Merz , Youri Victorovitch Ponomarev
发明人： Marcus Van Dal , Aurelie Humbert , Matthias Merz , Youri Victorovitch Ponomarev
IPC分类号： H01L27/14 , H01L29/66 , H01L23/34
CPC分类号： B81B7/0012 , B81B2201/0214 , B81B2207/015 , B81C2201/016
摘要： A method of manufacturing an integrated circuit having a substrate comprising a plurality of components and a metallization stack over the components, the metallization stack comprising a first sensing element and a second sensing element adjacent to the first sensing element.
摘要翻译：一种制造集成电路的方法，所述集成电路具有包括多个部件的基板和在所述部件上的金属化叠层，所述金属化堆叠包括第一感测元件和与所述第一感测元件相邻的第二感测元件。

14. 发明申请

US20140185127A1 PREVENTING GLASS PARTICLE INJECTION DURING THE OIL FILL PROCESS 有权
标题翻译：在油灌装过程中预防玻璃颗粒注射
公开(公告)号：US20140185127A1
公开(公告)日：2014-07-03
申请号：US13731511
申请日：2012-12-31
申请人： PIXTRONIX, INC.
发明人： Eugene E. Fike, III , Timothy J. Brosnihan
IPC分类号： G02B26/00 , G09G3/00 , G02F1/01
CPC分类号： G02B26/00 , B81B3/0005 , B81B7/0012 , B81B7/0029 , B81B2201/045 , B81C1/0096 , G02B26/02 , G02B27/0006 , G02F1/0102 , G09G3/00
摘要： This disclosure provides systems, methods and apparatus for preventing particles from entering electromechanical systems (EMS) display devices. In one aspect, an apparatus includes a plate, a substrate supporting at least one EMS device, a seal joining the plate and the substrate to define a cavity therebetween and at least one port for receiving a fluid, and a filter disposed between the port and the EMS device. The filter includes elements formed on at least one of a surface of the substrate and a surface of the plate, defining a gap sized to allow the received fluid to pass and to inhibit non-fluidic particles carried in the fluid from the EMS device.
摘要翻译：本公开提供了用于防止颗粒进入机电系统（EMS）显示装置的系统，方法和装置。在一个方面，一种装置包括板，支撑至少一个EMS装置的基板，连接板和基板的密封件，以在其间限定一个空腔，以及用于接收流体的至少一个端口，以及设置在端口和 EMS设备。过滤器包括形成在基板的表面和板的表面中的至少一个上的元件，其限定了尺寸允许接收的流体通过并且抑制从EMS装置流入的流体中的非流体颗粒的间隙。

15. 发明授权

US08536964B2 Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing 有权
公开(公告)号：US08536964B2
公开(公告)日：2013-09-17
申请号：US13741609
申请日：2013-01-15
申请人： Raymond Goggin , Padraig Fitzgerald
发明人： Raymond Goggin , Padraig Fitzgerald
IPC分类号： H01H51/22
CPC分类号： H01H57/00 , B81B7/0012 , B81B2201/014 , H01H59/0009
摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

16. 发明授权

US08063458B2 Micromechanical component, method for fabrication and use 有权
标题翻译：微机械部件，制造和使用方法
公开(公告)号：US08063458B2
公开(公告)日：2011-11-22
申请号：US11918189
申请日：2006-03-28
申请人： Bernhard Loeffler , Franz Schrank
发明人： Bernhard Loeffler , Franz Schrank
IPC分类号： H01L29/84
CPC分类号： B81B3/0072 , B81B7/0012 , B81B2201/018 , B81B2201/0235 , B81B2201/0264 , B81B2203/0109
摘要： A micromechanical component that can be produced in an integrated thin-film method is disclosed, which component can be produced and patterned on the surface of a substrate as multilayer construction. At least two metal layers that are separated from the substrate and with respect to one another by interlayers are provided for the multilayer construction. Electrically conductive connecting structures provide for an electrical contact of the metal layers among one another and with a circuit arrangement arranged in the substrate. The freely vibrating membrane that can be used for an inertia sensor, a microphone or an electrostatic switch can be provided with matching and passivation layers on all surfaces in order to improve its mechanical properties, said layers being concomitantly deposited and patterned during the layer producing process or during the construction of the multilayer construction. Titanium nitride layers are advantageously used for this.
摘要翻译：公开了可以以集成薄膜方法制造的微机械部件，该组件可以在基板的表面上制造和图案化为多层结构。为了多层结构，提供了至少两个从衬底分离并通过夹层彼此分开的金属层。导电连接结构提供了彼此之间的金属层的电接触以及布置在基板中的电路装置。可以用于惯性传感器，麦克风或静电开关的自由振动膜可以在所有表面上设置匹配和钝化层，以改善其机械性能，所述层在层生产过程中伴随沉积和图案化或在多层结构的施工期间。氮化钛层有利地用于此。

17. 发明授权

US08004736B2 Optical interference display panel and manufacturing method thereof 有权
标题翻译：光干涉显示面板及其制造方法
公开(公告)号：US08004736B2
公开(公告)日：2011-08-23
申请号：US12463312
申请日：2009-05-08
申请人： Wen-Jian Lin , Brian Arbuckle , Brian Gally , Philip Floyd , Lauren Palmateer
发明人： Wen-Jian Lin , Brian Arbuckle , Brian Gally , Philip Floyd , Lauren Palmateer
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B7/0012 , B81B2201/045
摘要： A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.
摘要翻译：第一电极和牺牲层依次形成在基板上，然后在第一电极和牺牲层中形成用于形成支撑件的第一开口。支撑件形成在第一开口中，然后在牺牲层和支撑件上形成第二电极，从而形成微机电系统结构。之后，使用粘合剂将保护结构粘附并固定到基底上以形成腔室以包围微机电系统结构，并且至少一个第二开口保留在腔室的侧壁上。随后采用释放蚀刻工艺以通过第二开口去除牺牲层，以便在光学干涉反射结构中形成空腔。最后，关闭第二个开口以密封衬底和保护结构之间的光学干涉反射结构。

18. 发明申请

US20100005877A1 Semiconductor sensor having heater on insulation film and manufacturing method of the same 有权
标题翻译：具有隔热膜加热器的半导体传感器及其制造方法
公开(公告)号：US20100005877A1
公开(公告)日：2010-01-14
申请号：US12458272
申请日：2009-07-07
申请人： Ryuichirou Abe , Tsuyoshi Fukada , Keisuke Suzui
发明人： Ryuichirou Abe , Tsuyoshi Fukada , Keisuke Suzui
IPC分类号： G01F1/68 , H01L21/30
CPC分类号： B81B7/0012 , B81B2201/0214 , G01F1/6845 , G01F1/692
摘要： A sensor includes: a silicon substrate having a hollow portion, which is arranged on a backside of the substrate; an insulation film disposed on a front side of the substrate and covering the hollow portion; a heater disposed on the insulation film, made of a semiconductor layer, and configured to generate heat; and an anti-stripping film for protecting the insulation film from being removed from the silicon substrate. The silicon substrate, the insulation film and the. semiconductor layer provide a SOI substrate. The hollow portion has a sidewall and a bottom. The anti-stripping film covers at least a boundary between the sidewall and the bottom of the hollow portion.
摘要翻译：传感器包括：具有中空部分的硅衬底，其设置在衬底的背面; 绝缘膜，设置在所述基板的前侧并覆盖所述中空部; 设置在绝缘膜上的加热器，由半导体层制成，并且被配置为产生热量; 以及用于保护绝缘膜不被从硅衬底移除的防剥离膜。硅衬底，绝缘膜和。半导体层提供SOI衬底。中空部分具有侧壁和底部。防剥离膜至少覆盖中空部分的侧壁和底部之间的边界。

19. 发明授权

US07590252B2 Heat-resistant electret condenser microphone 失效
标题翻译：耐热驻极体电容话筒
公开(公告)号：US07590252B2
公开(公告)日：2009-09-15
申请号：US10589281
申请日：2005-08-04
申请人： Katsuhiro Makihata , Hiroshi Ogura , Yoshinobu Yasuno
发明人： Katsuhiro Makihata , Hiroshi Ogura , Yoshinobu Yasuno
IPC分类号： H04R25/00
CPC分类号： B81B7/0012 , B81B2201/0257 , H04R19/016
摘要： The outer face of a case which accommodates a whole microphone is coated by a material having a heat conductivity which is lower than that of a metal, and a material transforming temperature which is higher than the charge dissipating temperature of a dielectric layer for forming an internal electret, and which is higher than 260° C., so that the internal temperature rise can be mitigated by the thermal resistance and the thermal capacity of the whole interior. When a microphone is attached to an application equipment, particularly, the microphone may be passed through a reflow solder bath for a short time period. A heat-resistant structure which can prevent the function from being impaired by a high temperature in the period is provided.
摘要翻译：容纳整个麦克风的壳体的外表面涂覆有导热率低于金属的材料，并且材料转化温度高于用于形成内部的介电层的电荷消散温度驻极体，并且高于260℃，使得内部温度升高可以通过整个内部的耐热性和热容量来缓解。当麦克风连接到应用设备时，特别地，麦克风可以在短时间内通过回流焊锡浴。提供了能够防止该功能在该时间段内被高温损坏的耐热结构。

20. 发明申请

US20090126183A1 METHOD OF FABRICATING A POLYMER-BASED CAPACITIVE ULTRASONIC TRANSDUCER 审中-公开
标题翻译：制造基于聚合物的电容式超声波传感器的方法
公开(公告)号：US20090126183A1
公开(公告)日：2009-05-21
申请号：US12348452
申请日：2009-01-05
申请人： Ming-Wei Chang , Da-Chen Pang , Chao-Sheng Tseng
发明人： Ming-Wei Chang , Da-Chen Pang , Chao-Sheng Tseng
IPC分类号： H04R31/00
CPC分类号： B81B7/0012 , B06B1/0292 , B81C2201/0108 , Y10T29/435 , Y10T29/49005 , Y10T29/4908 , Y10T29/49172 , Y10T29/49194
摘要： A method of fabricating a polymer-based capacitive ultrasonic transducer, which comprises the steps of: (a) providing a substrate; (b) forming a first conductor on the substrate; (c) coating a sacrificial layer on the substrate while covering the first conductor by the same; (d) etching the sacrificial layer for forming an island while maintaining the island to contact with the first conductor; (e) coating a first polymer-based material on the substrate while covering the island by the same; (f) forming a second conductor on the first polymer-based material; (g) forming a via hole on the first polymer-based material while enabling the via hole to be channeled to the island; and (h) utilizing the via hole to etch and remove the island for forming a cavity.
摘要翻译：一种制造基于聚合物的电容式超声换能器的方法，包括以下步骤：（a）提供基底; （b）在所述基板上形成第一导体; （c）在衬底上涂覆牺牲层，同时覆盖第一导体; （d）蚀刻用于形成岛的牺牲层，同时保持岛与第一导体接触; （e）在衬底上涂覆第一聚合物基材料同时覆盖该岛; （f）在第一聚合物基材料上形成第二导体; （g）在第一聚合物基材料上形成通孔，同时使通孔能够引导到岛上; 和（h）利用通孔蚀刻并去除用于形成空腔的岛。

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