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11. 发明授权

US06929726B2 Sputtering target, Al interconnection film, and electronic component 有权
标题翻译：溅射靶，铝互连膜和电子元件
公开(公告)号：US06929726B2
公开(公告)日：2005-08-16
申请号：US10752517
申请日：2004-01-08
申请人： Koichi Watanabe , Takashi Ishigami
发明人： Koichi Watanabe , Takashi Ishigami
IPC分类号： B22C1/00 , C22C21/00 , C22C21/02 , C22C21/04 , C22C21/12 , C22C21/14 , C22C27/00 , C22F1/00 , C22F1/04 , C23C14/32 , C23C14/34 , H01L21/285 , H01L21/3205 , H01L21/768 , H01L23/12 , H01L23/532
CPC分类号： C22C21/00 , C22F1/04 , C23C14/3414 , H01L21/2855 , H01L21/32051 , H01L21/76838 , H01L23/53219 , H01L2924/0002 , Y10T428/10 , H01L2924/00
摘要： A sputtering target consists essentially of 0.1 to 50% by weight of at least one kind of element that forms an intermetallic compound with Al, and the balance of Al. The element that forms an intermetallic compound with Al is uniformly dispersed in the target texture, and in a mapping of EPMA analysis, a portion of which count number of detection sensitivity of the element is 22 or more is less than 60% by area ratio in a measurement area of 20×20 μm. According to such a sputtering target, even when a sputtering method such as long throw sputtering or reflow sputtering is applied, giant dusts or large concavities can be suppressed in occurrence.
摘要翻译：溅射靶基本上由0.1〜50重量％的与Al形成金属间化合物的至少一种元素，余量为Al。与Al形成金属间化合物的元素被均匀地分散在目标结构中，在EPMA分析的映射中，元素的检测灵敏度的数量为22以上的部分的面积比例小于60％测量面积为20x20 mum。根据这样的溅射靶，即使在采用溅射溅射或回流溅射等溅射法的情况下，也可以抑制巨大的尘埃或大的凹坑。

12. 再颁专利

USRE41975E1 Interconnector line of thin film, sputter target for forming the wiring film and electronic component using the same 失效
标题翻译：薄膜互连线，用于形成布线膜的溅射靶和使用其的电子部件
公开(公告)号：USRE41975E1
公开(公告)日：2010-11-30
申请号：US10732888
申请日：1996-10-14
申请人： Takashi Ishigami , Koichi Watanabe , Akihisa Nitta , Toshihiro Maki , Noriaki Yagi
发明人： Takashi Ishigami , Koichi Watanabe , Akihisa Nitta , Toshihiro Maki , Noriaki Yagi
IPC分类号： H01L21/20
CPC分类号： H01L21/32051 , C22C21/00 , C23C14/14 , C23C14/165 , C23C14/3414 , G02F2001/136295 , H01L21/2855 , H01L23/53214 , H01L23/53219 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2924/16152 , H01L2924/181 , H03H9/14538 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： An interconnector line of thin film comprising 0.001 to 30 at % of at least one kind of a first element capable of constituting an intermetallic compound of aluminum and/or having a higher standard electrode potential than aluminum, for example, at least one kind of the first element selected from Y, Sc, La, Ce, Nd, Sm, Gd, Tb, Dy, Er, Th, Sr, Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Tc, Re, Fe, Co, Ni, Pd, Ir, Pt, Cu, Ag, Au, Cd, Si, Pb and B; and one kind of a second element selected from C, O, N and H in a proportion of 0.01 at ppm to 50 at % of the first element, with the balance comprising substantially Al. In addition to having low resistance, such an Al interconnector line of thin film can prevent the occurrence of hillocks and the electrochemical reaction with an ITO electrode. The interconnector line of thin film can be obtained by sputtering in a dust-free manner by using a sputter target having a similar composition.
摘要翻译：包含0.001〜30原子％的至少一种能够构成铝的金属间化合物和/或具有比铝更高的标准电极电位的第一元素的互连线，例如至少一种选自Y，Sc，La，Ce，Nd，Sm，Gd，Tb，Dy，Er，Th，Sr，Ti，Zr，V，Nb，Ta，Cr，Mo，W，Mn，Tc，Re， Fe，Co，Ni，Pd，Ir，Pt，Cu，Ag，Au，Cd，Si，Pb和B; 和一种选自C，O，N和H的第二元素，其比例为0.01〜100原子％的比例，余量基本上为Al。除了具有低电阻之外，这种薄膜的Al互连线可以防止发生小丘和与ITO电极的电化学反应。可以通过使用具有相似组成的溅射靶以无尘的方式溅射来获得薄膜的互连线。

13. 发明申请

US20050252584A1 Sputtering target, Al wiring film and electronic component 审中-公开
标题翻译：溅射靶，Al布线膜和电子元件
公开(公告)号：US20050252584A1
公开(公告)日：2005-11-17
申请号：US11171372
申请日：2005-07-01
申请人： Koichi Watanabe , Takashi Ishigami
发明人： Koichi Watanabe , Takashi Ishigami
IPC分类号： B22C1/00 , C22C21/00 , C22C21/02 , C22C21/04 , C22C21/12 , C22C21/14 , C22C27/00 , C22F1/00 , C22F1/04 , C23C14/32 , C23C14/34 , H01L21/285 , H01L21/3205 , H01L21/768 , H01L23/12 , H01L23/532
CPC分类号： C22C21/00 , C22F1/04 , C23C14/3414 , H01L21/2855 , H01L21/32051 , H01L21/76838 , H01L23/53219 , H01L2924/0002 , Y10T428/10 , H01L2924/00
摘要： A sputtering target consists essentially of 0.1 to 50% by weight of at least one kind of element that forms an intermetallic compound with Al, and the balance of Al. The element that forms an intermetallic compound with Al is uniformly dispersed in the target texture, and in a mapping of EPMA analysis, a portion of which count number of detection sensitivity of the element is 22 or more is less than 60% by area ratio in a measurement area of 20×20 μm. According to such a sputtering target, even when a sputtering method such as long throw sputtering or reflow sputtering is applied, giant dusts or large concavities can be suppressed in occurrence.
摘要翻译：溅射靶基本上由0.1〜50重量％的与Al形成金属间化合物的至少一种元素，余量为Al。与Al形成金属间化合物的元素被均匀地分散在目标结构中，在EPMA分析的映射中，元素的检测灵敏度的数量为22以上的部分的面积比例小于60％测量面积为20x20 mum。根据这样的溅射靶，即使在采用溅射溅射或回流溅射等溅射法的情况下，也可以抑制巨大的尘埃或大的凹坑。

14. 发明授权

US06329275B1 Interconnector line of thin film, sputter target for forming the wiring film and electronic component using the same 失效
标题翻译：薄膜互连线，用于形成布线膜的溅射靶和使用其的电子部件
公开(公告)号：US06329275B1
公开(公告)日：2001-12-11
申请号：US09051567
申请日：1998-04-10
申请人： Takashi Ishigami , Koichi Watanabe , Akihisa Nitta , Toshihiro Maki , Noriaki Yagi
发明人： Takashi Ishigami , Koichi Watanabe , Akihisa Nitta , Toshihiro Maki , Noriaki Yagi
IPC分类号： H01L2120
CPC分类号： H01L21/32051 , C22C21/00 , C23C14/14 , C23C14/165 , C23C14/3414 , G02F2001/136295 , H01L21/2855 , H01L23/53214 , H01L23/53219 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2924/16152 , H01L2924/181 , H03H9/14538 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： An interconnector line of thin film comprising 0.001 to 30 at % of at least one kind of a first element capable of constituting an intermetallic compound of aluminum and/or having a higher standard electrode potential than aluminum, for example, at least one kind of the first element selected from Y, Sc, La, Ce, Nd, Sm, Gd, Tb, Dy, Er, Th, Sr, Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Tc, Re, Fe, Co, Ni, Pd, Ir, Pt, Cu, Ag, Au, Cd, Si, Pb and B; and one kind of a second element selected from C, O, N and H in a proportion of 0.01 at ppm to 50 at % of the first element, with the balance comprising substantially Al. In addition to having low resistance, such an Al interconnector line of thin film can prevent the occurrence of hillocks and the electrochemical reaction with an ITO electrode. The interconnector line of thin film can be obtained by sputtering in a dust-free manner by using a sputter target having a similar composition.
摘要翻译：包含0.001〜30原子％的至少一种能够构成铝的金属间化合物和/或具有比铝更高的标准电极电位的第一元素的互连线，例如至少一种选自Y，Sc，La，Ce，Nd，Sm，Gd，Tb，Dy，Er，Th，Sr，Ti，Zr，V，Nb，Ta，Cr，Mo，W，Mn，Tc，Re， Fe，Co，Ni，Pd，Ir，Pt，Cu，Ag，Au，Cd，Si，Pb和B; 和一种选自C，O，N和H的第二元素，其比例为0.01〜100原子％的比例，余量基本上为Al。除了具有低电阻之外，这种薄膜的Al互连线可以防止发生小丘和与ITO电极的电化学反应。可以通过使用具有相似组成的溅射靶以无尘的方式溅射来获得薄膜的互连线。

15. 发明授权

US09369018B2 Method of manufacturing rotating electrical machine 有权
标题翻译：旋转电机制造方法
公开(公告)号：US09369018B2
公开(公告)日：2016-06-14
申请号：US13702260
申请日：2011-06-06
申请人： Yuichiro Tanaka , Takashi Ishigami
发明人： Yuichiro Tanaka , Takashi Ishigami
IPC分类号： H02K15/00 , H02K3/04 , H02K15/095 , H02K15/04 , H02K3/28 , H02K3/18
CPC分类号： H02K3/04 , H02K3/18 , H02K3/28 , H02K15/045 , H02K15/095 , Y10T29/49009 , Y10T29/49073
摘要： A manufacturing method for manufacturing a rotating electrical machine equipped with a stator that includes a continuously wound coil unit achieved by continuously winding concentrated winding-type coils via cross wires, with coil wire having a rectangular section. The manufacturing method includes: mounting core segments, at which the coil wire is yet to be wound, at a core segment forward/backward moving mechanism; winding the coil wire with a winding track secured by driving the core segments forward/backward via the core segment forward/backward moving mechanism; setting faces of the coil wire in alignment by holding orientations of winding start wire and winding end wire at the concentrated winding-type coils at approximately 90° via open/close type chucks each equipped with a chuck forward/backward moving mechanism, with the open/close type chucks mounted at the core segment forward/backward moving mechanism; and forming the continuously wound coil unit by driving the core segments forward/backward via the core segment forward/backward moving mechanism, driving the open/close type chucks forward/backward and opening/closing the open/close type chucks.
摘要翻译：一种制造具有定子的旋转电机的制造方法，该定子包括通过交叉线连续卷绕集中绕组线圈而实现的连续卷绕的线圈单元，其具有矩形截面的线圈线。制造方法包括：在芯部前进/后退移动机构上安装线圈线未被缠绕的芯部段; 通过经由芯段前进/后退移动机构将线芯段向前/向后驱动而固定的缠绕轨道卷绕线圈线; 通过使夹紧前后移动机构的开闭型卡盘将保持卷绕起始线和卷绕端部线的卷绕起始线和卷绕端部线的方向保持在集中绕线型线圈大约90°处， /关闭型卡盘安装在芯段前进/后退移动机构; 并且通过芯部前进/后退移动机构向前/向后驱动芯部段，形成连续卷绕的线圈单元，驱动打开/关闭型卡盘向前/向后并打开/关闭打开/关闭型卡盘。

16. 发明授权

US08471428B2 Rotating electrical machine 有权
标题翻译：旋转电机
公开(公告)号：US08471428B2
公开(公告)日：2013-06-25
申请号：US12846432
申请日：2010-07-29
申请人： Takashi Naganawa , Kenji Miyata , Takashi Ishigami , Yoshihisa Ishikawa
发明人： Takashi Naganawa , Kenji Miyata , Takashi Ishigami , Yoshihisa Ishikawa
IPC分类号： H02K3/28
CPC分类号： H02K3/28 , H02K19/34
摘要： A rotating electrical machine includes a rotor, in which a plurality of magnetic poles are provided in circumferential direction, and a stator, within which the rotor is disposed. In the stator, two stator magnetic poles are formed by winding coils of one phase and by a stator core of the stator within 360° of electrical angle defined by the magnetic poles of the rotor. The coils that form respective stator magnetic poles have angular widths in circumferential direction of less than 180° of electrical angle, the coils that form the respective two stator magnetic poles are provided so as not to mutually overlap and are wound so that adjacent ones of the stator magnetic poles have mutually opposite polarities, and, in the stator, each winding of each coil consists of an external bridge wire, a turn portion, an internal bridge wire, and a turn portion, in that order.
摘要翻译：旋转电机包括在圆周方向上设置有多个磁极的转子和设置转子的定子。在定子中，两个定子磁极通过将一个相的线圈和定子的定子铁芯缠绕在由转子的磁极限定的电角度的360°内而形成。形成各个定子磁极的线圈的圆周方向的角度宽度小于电角度的180°，形成相应的两个定子磁极的线圈被设置为不相互重叠并缠绕，使得相邻的定子磁极具有相互相反的极性，并且在定子中，每个线圈的每个绕组按顺序由外部桥接线，匝部分，内部桥接线和匝部组成。

17. 发明授权

US08330318B2 Rotating electrical machine and method for manufacturing the same 失效
标题翻译：旋转电机及其制造方法
公开(公告)号：US08330318B2
公开(公告)日：2012-12-11
申请号：US12197085
申请日：2008-08-22
申请人： Yasuyuki Saito , Takashi Ishigami , Kenichi Nakayama , Akira Toba , Toru Mita
发明人： Yasuyuki Saito , Takashi Ishigami , Kenichi Nakayama , Akira Toba , Toru Mita
IPC分类号： H02K3/48
CPC分类号： H02K3/487 , H02K3/12 , H02K3/28 , H02K3/345 , H02K2203/09 , Y10T29/49009
摘要： A rotating electrical machine includes: a stator that has a stator core and a stator coil; and a rotor disposed rotatably on an inner circumferential side of the stator core. The stator core includes a plurality of slots opening on the inner circumferential side and the slots are each formed as an open slot with a width of an inner circumferential-side opening thereof ranging along a circumferential direction set substantially equal to or greater than a width of a bottom side measured along the circumferential direction. The stator further includes a slot insulator disposed between inner wall of each of the slots at the stator core and the stator coil and a holding member constituted with a nonmagnetic material and inserted in each of the slots at the stator core so as to hold the slot insulator between two side surfaces present along the circumferential direction at the slot. The stator is formed by winding the stator coil through the plurality of slots.
摘要翻译：旋转电机包括：具有定子芯和定子线圈的定子; 以及可转动地设置在定子铁芯的内周侧的转子。定子铁芯包括在内周侧开口的多个槽，并且槽各自形成为开口槽，其内周侧开口的宽度沿着圆周方向设置，该圆周方向设定为基本上等于或大于沿圆周方向测量的底侧。定子还包括设置在定子铁芯和定子线圈之间的每个槽的内壁之间的槽绝缘体，以及由非磁性材料构成并插入定子铁心中的每个槽中的保持构件，以便将该槽两个侧表面之间的绝缘体沿着圆周方向在槽处存在。定子通过将定子线圈卷绕在多个槽中而形成。

18. 发明授权

US07651941B2 Method of manufacturing a semiconductor device that includes forming a via hole through a reaction layer formed between a conductive barrier and a wiring 失效
标题翻译：一种制造半导体器件的方法，包括通过形成在导电屏障和布线之间的反应层形成通孔
公开(公告)号：US07651941B2
公开(公告)日：2010-01-26
申请号：US11892925
申请日：2007-08-28
申请人： Takashi Ishigami
发明人： Takashi Ishigami
IPC分类号： H01L21/4763
CPC分类号： H01L21/76844 , H01L21/76805 , H01L21/76814 , H01L21/76849 , H01L21/76886
摘要： Provided are: a method of manufacturing semiconductor device which has multilayer interconnection in a damascene structure and a conductive barrier film such as CoWP film, and which has more excellent electric characteristics than a conventional one. To this end, when a via hole reaching a lower wiring is formed, a reaction layer formed between a conductive barrier film and the lower wiring and remaining on the surface of the lower wiring is removed. Thus, at an interface where a lower surface of the via and the lower wiring are joined, the reaction layer, formed between the conductive barrier film and the lower wiring, does not exist, so that the via resistance can be sufficiently reduced.
摘要翻译：提供：一种制造在镶嵌结构中具有多层互连并且具有诸如CoWP膜的导电阻挡膜的半导体器件的方法，并且具有比常规的更优异的电特性。为此，当形成到达下布线的通孔时，除去形成在导电阻挡膜和下布线之间并保留在下布线表面上的反应层。因此，在通孔的下表面和下布线接合的界面处，形成在导电阻挡膜和下布线之间的反应层不存在，从而可以充分降低通孔电阻。

19. 发明申请

US20090200888A1 Rotating Electric Apparatus and Method for Connecting Stator Coils Thereof 有权
标题翻译：旋转电气设备及其定子线圈连接方法
公开(公告)号：US20090200888A1
公开(公告)日：2009-08-13
申请号：US12370307
申请日：2009-02-12
申请人： Yuichiro Tanaka , Takashi Ishigami , Kenichi Nakayama , Yasuyuki Saito
发明人： Yuichiro Tanaka , Takashi Ishigami , Kenichi Nakayama , Yasuyuki Saito
IPC分类号： H02K3/28
CPC分类号： H02K3/28 , H02K3/12 , H02K15/0081
摘要： Each pair of coils mutually connected in a stator winding is arranged in a fashion that a first coil of each pair of coils has an inner-circumferential-side coil terminal (212) led out from an inner-circumferential-side slot position in the direction of a coil end (220) of the stator winding, and that a second coil of each pair of coils has an outer-circumferential-side coil terminal (211) led out from an outer-circumferential-side slot position in the direction of the coil end (220) of the stator winding for connection to the inner-circumferential-side coil terminal (212), wherein there is provided a coil terminal connection structure in which the inner-circumferential-side coil terminal (212) is connected to the outer-circumferential-side coil terminal (211) across the coil end (220), and joint parts (211a, 212a) thereof are bent close to the coil end (220).
摘要翻译：互相连接在定子绕组中的每对线圈以每一对线圈的第一线圈的内周侧线圈端子（212）的方式配置，内周侧线圈端子（212）从内周侧槽位置朝向定子绕组的线圈端部（220），并且每对线圈的第二线圈具有从外周侧槽位置沿着该方向从外周侧槽位置引出的外周侧线圈端子（211）用于与内周侧线圈端子（212）连接的定子绕组的线圈端部（220），其中，设置有内周侧线圈端子（212）连接到所述内周侧线圈端子跨越线圈端（220）的外周侧线圈端子（211）及其接合部（211a，212a）在线圈端（220）附近弯曲。

20. 发明申请

US20090140595A1 Stator for Rotating Machine and Rotating Machine Using the Same 有权
标题翻译：旋转机定子及其使用的旋转机
公开(公告)号：US20090140595A1
公开(公告)日：2009-06-04
申请号：US12275839
申请日：2008-11-21
申请人： Takashi NAGANAWA , Takashi Ishigami , Koji Obata , Toshiaki Ueda , Katsuhiro Hoshino
发明人： Takashi NAGANAWA , Takashi Ishigami , Koji Obata , Toshiaki Ueda , Katsuhiro Hoshino
IPC分类号： H02K3/52
CPC分类号： H02K3/522
摘要： The stator includes a plurality of concentrated winding coils disposed coupled into an annular form through yokes, and a plurality of conductors that couple the coil ends of the concentrated winding coils to each other in a multi-phase connection fashion. Conductors for a U-phase, a V-phase, a W-phase, and neutral points P are each formed of a plurality of holes for inserting therethrough coil ends and are substantially circular with different diameters, and are disposed on the same plane. A connection plate provided with a wall is inserted between the conductors and the concentrated winding coils. A rotating machine includes the above-mentioned stator and a rotor that is rotatable within the stator.
摘要翻译：定子包括多个通过轭架耦合成环形形式的集中绕组线圈，以及以多相连接方式将集中绕组线圈的线圈端彼此耦合的多个导体。 U相，V相，W相和中性点P的导体各自由用于插入线圈端部的多个孔形成，并且基本上具有不同直径的圆形，并且设置在同一平面上。设置有壁的连接板插入在导体和集中绕组线圈之间。旋转机器包括上述定子和可在定子内旋转的转子。

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