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    • 13. 发明授权
    • Apparatus for and method of processing substrate
    • 基板处理装置及其处理方法
    • US07341634B2
    • 2008-03-11
    • US10647457
    • 2003-08-26
    • Toshio YokoyamaMasahiko SekimotoAkira OgataHiroaki InoueSeiji Katsuoka
    • Toshio YokoyamaMasahiko SekimotoAkira OgataHiroaki InoueSeiji Katsuoka
    • B05C11/00
    • H01L21/76849C23C18/1619C23C18/1678C25D17/001C25D21/12H01L21/288
    • A workpiece is processed uniformly, e.g., a uniform plated film is formed on a workpiece, by a processing liquid, e.g., a plating solution, which is maintained in an optimum state while minimizing the amount of the processing liquid to be used. An apparatus for processing the workpiece has a plurality of solution supply tanks 50a, 50b for individually holding a plurality of solutions, respectively, to be mixed into a processing liquid 54 while managing the temperatures of the solutions, a plurality of mixing tanks 52a, 52b for mixing the solutions individually supplied from the solution supply tanks 50a, 50b into the processing liquid 54 while managing the temperatures of the solutions, and a processing bath 56 for introducing the processing liquid 54 therein and processing the workpiece, e.g., a substrate W, by bringing the workpiece into contact with the processing liquid 54 while managing the temperature of the processing liquid 54.
    • 工件被均匀地加工,例如,通过处理液体(例如电镀液)在工件上形成均匀的镀膜,其保持在最佳状态,同时最小化待使用的处理液体的量。 用于处理工件的装置具有多个溶液供应罐50a,50b,用于分别保持多个溶液以混合到处理液体54中同时管理溶液的温度;多个混合罐52 a,52b,用于将从溶液供应罐50a,50b分别供应的溶液混合到处理液体54中同时管理溶液的温度;以及处理槽56,用于将处理液体54引入其中并处理工件, 例如,通过在处理液体54的温度控制的同时使工件与处理液体54接触而进行基板W的接合。
    • 20. 发明授权
    • Apparatus for controlling hydraulic pumps for construction machine
    • 控制建筑机械液压泵的装置
    • US5176504A
    • 1993-01-05
    • US820868
    • 1992-01-17
    • Yukio MoriyaShigeru KinoshitaTakumi OnodaToshio Yokoyama
    • Yukio MoriyaShigeru KinoshitaTakumi OnodaToshio Yokoyama
    • E02F9/22F04B49/06
    • E02F9/2235E02F9/2292E02F9/2296F04B49/065F04B2203/0209F04B2205/05F04B2207/041
    • An apparatus for controlling hydraulic pumps for a construction machine wherein the construction machine includes first and second hydraulic pumps adapted to be driven by an engine and hydraulic actuators hydraulically connected to the first and second hydraulic pumps via first and second actuating valves is disclosed. A controlling section calculates extra horse powers .DELTA.HP.sub.1 and .DELTA.HP.sub.2 based on reference allowable absorptive horse powers set relative to the first and second hydraulic pumps and actual absorptive horse powers (HP.sub.01) and (HP.sub.02) derived from the first and second hydraulic pumps. In addition, the controlling section calculates allowable discharge capacities (V.sub.1P) and (V.sub.2P) based on the number (N) of revolutions of the engines, pressures (P.sub.1) and (P.sub.2) of hydraulic oils discharged from the first and second hydraulic pumps, the extra horse powers .DELTA.HP.sub.1 and .DELTA.HP.sub.2 and allowable discharge capacities (V.sub.1P) and (V.sub.2P). Then, the controlling section selects a smaller one of a target discharge capacity and the allowable discharge capacity (V.sub.1P) and a smaller one of another target discharge capacity and the allowable discharge capacity (V.sub.2P) as minimum target discharge capacities (V.sub.1) and (V.sub.2). Thereafter, the controlling section controls swash plate angles of the first and second hydraulic pumps such that the minimum target discharge capacities (V.sub.1) and (V.sub.2) are correctly set corresponding to the first and second hydraulic pumps. Consequently, absorptive horse powers to be derived from the first and second hydraulic pumps can properly be controlled while a sum of the reference allowable absorptive horse powers is kept constant.
    • PCT No.PCT / JP90 / 00964 Sec。 371日期:1992年1月17日 102(e)日期1992年1月17日PCT提交1990年7月27日PCT公布。 公开号WO91 / 02162 日本1991年2月21日。一种用于控制建筑机械的液压泵的设备,其中建筑机械包括适于由发动机驱动的第一和第二液压泵和通过第一和第二液压连接到第一和第二液压泵的液压致动器 公开了致动阀。 控制部分基于相对于从第一和第二液压泵获得的第一和第二液压泵和实际吸收马力(HP01)和(HP02)设定的参考允许吸收马力来计算额外的马力DELTA HP1和DELTA HP2。 此外,控制部基于从第一和第二液压泵排出的液压油的发动机数量(N),压力(P1)和(P2),计算容许排放容量(V1P)和(V2P) 额外的马力DELTA HP1和DELTA HP2和容许放电容量(V1P)和(V2P)。 然后,控制部选择目标放电容量和容许放电容量(V1P)中较小的一个,另一个目标放电容量和容许放电容量(V2P)中的较小一个作为最小目标放电容量(V1)和(V2 )。 此后,控制部分控制第一和第二液压泵的斜盘角度,使得对应于第一和第二液压泵正确地设定最小目标排出容量(V1)和(V2)。 因此,可以适当地控制从第一和第二液压泵得到的吸收马力,同时参考允许吸收马力的总和保持恒定。