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    • 12. 发明申请
    • Method For Preparing Recycled Abrasive Slurry
    • 制备循环磨料浆料的方法
    • US20160376468A1
    • 2016-12-29
    • US15189833
    • 2016-06-22
    • KONICA MINOLTA, INC.
    • Chie INUIAkihiro MAEZAWAYuuki NAGAINatsumi HIRAYAMA
    • C09G1/02
    • C09G1/02B24B57/02Y02P70/605
    • A method for preparing a recycled abrasive slurry includes: polishing a material to be polished, which includes silicon as a main component, with an abrasive slurry including a plurality of kinds of additives added for different purposes; and preparing a recycled abrasive slurry from a collected abrasive slurry collected after the polishing, wherein the recycled abrasive slurry is prepared through: step 1 of removing, from the collected abrasive slurry, at least an additive B capable of decreasing a polishing rate among the plurality of additives, and step 2 of replenishing at least an additive A capable of increasing a polishing rate among the plurality of additives, to the abrasive slurry from which an additive has been removed, which has been prepared in step 1.
    • 一种制备再循环磨料浆料的方法包括:用包含硅作为主要成分的抛光材料,研磨含有多种添加剂的磨料浆料,用于不同目的; 以及从抛光后收集的收集的磨料浆料制备回收的磨料浆料,其中通过以下步骤制备回收的磨料浆料:步骤1,从收集的磨料浆料中除去至少一种能够降低多个磨料浆料中的抛光速率的添加剂B 的添加剂,以及步骤2,其至少补充了能够将多种添加剂中的抛光速率提高到在步骤1中制备的已除去添加剂的研磨浆料的添加剂A.