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    • 11. 发明申请
    • FUEL CELL FORMED IN A SINGLE LAYER OF MONOCRYSTALLINE SILICON AND FABRICATION PROCESS
    • 在单层硅和制造工艺单层中形成的燃料电池
    • US20100216046A1
    • 2010-08-26
    • US12773190
    • 2010-05-04
    • Giuseppe D'ArrigoSalvatore Coffa
    • Giuseppe D'ArrigoSalvatore Coffa
    • H01M8/24
    • H01M8/1004H01M8/1097H01M2008/1095
    • Fuel cells are formed in a single layer of conductive monocrystalline silicon including a succession of electrically isolated conductive silicon bodies separated by narrow parallel trenches etched through the whole thickness of the silicon layer. Semicells in a back-to-back configuration are formed over etch surfaces of the separation trenches. Each semicell formed on the etch surface of one of the silicon bodies forming an elementary cell in cooperation with an opposite semicell formed on the etch surface of the next silicon body of the succession, is separated by an ion exchange membrane resin filling the separation trench between the opposite semicells forming a solid electrolyte of the elementary cell. Each semicell includes a porous conductive silicon region permeable to fluids, extending for a certain depth from the etch surface of the silicon body, at least partially coated by a non passivable metallic material. Each of the porous and fluid permeable regions communicates with a feed duct of a fuel fluid or of oxygen gas that extends parallel to the etch surface inside the conductive silicon body.
    • 燃料电池形成在单层导电单晶硅中,包括一系列电绝缘的导电硅体,这些导电硅体由通过硅层的整个厚度蚀刻的窄平行沟槽分开。 背对背配置的半规格形成在分离沟槽的蚀刻表面上。 与形成在下一次硅体的蚀刻表面上形成的相反的半导体协作的形成元件单元的硅体之一上形成的每个半单元被填充分离槽之间的离子交换膜树脂隔开, 相反的半细胞形成基本细胞的固体电解质。 每个半腔包括可渗透流体的多孔导电硅区域,其延伸至硅体的蚀刻表面一定深度,至少部分地由不可通行的金属材料涂覆。 多孔和流体渗透区域中的每一个与在导电硅体内部平行于蚀刻表面延伸的燃料流体或氧气的进料管道连通。
    • 16. 发明授权
    • Fuel cell formed in a single layer of monocrystalline silicon and fabrication process
    • 燃料电池形成在单层单晶硅和制造工艺中
    • US07763372B2
    • 2010-07-27
    • US11383088
    • 2006-05-12
    • Giuseppe D'ArrigoSalvatore Coffa
    • Giuseppe D'ArrigoSalvatore Coffa
    • H01M4/00H01L23/48
    • H01M8/1004H01M8/1097H01M2008/1095
    • Fuel cells are formed in a single layer of conductive monocrystalline silicon including a succession of electrically isolated conductive silicon bodies separated by narrow parallel trenches etched through the whole thickness of the silicon layer. Semicells in a back-to-back configuration are formed over etch surfaces of the separation trenches. Each semicell formed on the etch surface of one of the silicon bodies forming an elementary cell in cooperation with an opposite semicell formed on the etch surface of the next silicon body of the succession, is separated by an ion exchange membrane resin filling the separation trench between the opposite semicells forming a solid electrolyte of the elementary cell. Each semicell includes a porous conductive silicon region permeable to fluids, extending for a certain depth from the etch surface of the silicon body, at least partially coated by a non passivable metallic material. Each of the porous and fluid permeable regions communicates with a feed duct of a fuel fluid or of oxygen gas that extends parallel to the etch surface inside the conductive silicon body.
    • 燃料电池形成在单层导电单晶硅中,包括一系列电绝缘的导电硅体,这些导电硅体由通过硅层的整个厚度蚀刻的窄平行沟槽分开。 背对背配置的半规格形成在分离沟槽的蚀刻表面上。 与形成在下一次硅体的蚀刻表面上形成的相反的半导体协作的形成元件单元的硅体之一上形成的每个半单元被填充分离槽之间的离子交换膜树脂隔开, 相反的半细胞形成基本细胞的固体电解质。 每个半腔包括可渗透流体的多孔导电硅区域,其延伸至硅体的蚀刻表面一定深度,至少部分地由不可通行的金属材料涂覆。 多孔和流体渗透区域中的每一个与在导电硅体内部平行于蚀刻表面延伸的燃料流体或氧气的进料管道连通。
    • 18. 发明授权
    • Method of fabricating pressure sensor monolithically integrated
    • 制造压力传感器单片集成方法
    • US06743654B2
    • 2004-06-01
    • US10014880
    • 2001-12-11
    • Salvatore CoffaLuigi Occhipinti
    • Salvatore CoffaLuigi Occhipinti
    • H01L2100
    • B81C1/00182B81B2201/0257B81B2201/0264B81B2203/0127B81C2201/0109B81C2201/0115G01L9/0042
    • A method of making a monolithically integrated pressure sensor includes making a cavity in the semiconductor substrate. This may be formed by plasma etching the front side or the back side of the silicon wafer to cut a plurality of trenches or holes deep enough to extend for at least part of its thickness into a doped buried layer of opposite type of conductivity of the substrate and of the epitaxial layer grown over it. The method may also include electrochemically etching through such trenches, and the silicon of the buried layer with an electrolytic solution suitable for selectively etching the doped silicon of the opposite type of conductivity, thereby making the silicon of the buried layer porous. The method may also include oxidizing and leaching away the silicon so made porous.
    • 制造单片集成压力传感器的方法包括在半导体衬底中形成空腔。 这可以通过等离子体蚀刻硅晶片的前侧或背面来形成,以切割多个深度足以将其厚度的至少一部分延伸到衬底的相反导电性的掺杂掩埋层中的沟槽或孔 以及在其上生长的外延层。 该方法还可以包括通过这样的沟槽进行电化学蚀刻,以及使用适合于选择性地蚀刻具有相反导电性的掺杂硅的电解液的掩埋层的硅,从而使掩埋层的硅多孔化。 该方法还可以包括氧化和浸出如此制成的多孔的硅。