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11. 发明申请

US20090120584A1 COUNTER-BALANCED SUBSTRATE SUPPORT 审中-公开
标题翻译：计数平衡基板支持
公开(公告)号：US20090120584A1
公开(公告)日：2009-05-14
申请号：US12059820
申请日：2008-03-31
申请人： Dmitry Lubomirsky , Toan Q. Tran , Lun Tsuei , Manuel A. Hernandez , Kirby H. Floyd , Ellie Y. Yieh
发明人： Dmitry Lubomirsky , Toan Q. Tran , Lun Tsuei , Manuel A. Hernandez , Kirby H. Floyd , Ellie Y. Yieh
IPC分类号： C23F1/08 , B05C13/00 , B05C15/00 , H01L21/677 , B05C21/00
CPC分类号： H01L21/6719 , H01L21/67017 , H01L21/68742 , H01L21/68792
摘要： A semiconductor processing system is described. The system includes a processing chamber having an interior capable of holding an internal chamber pressure below ambient atmospheric pressure. The system also includes a pumping system coupled to the chamber and adapted to remove material from the processing chamber. The system further includes a substrate support pedestal, where the substrate support pedestal is rigidly coupled to a substrate support shaft extending through a wall of the processing chamber. A bracket located outside the processing chamber is provided which is rigidly and sometimes rotatably coupled to the substrate support shaft. A motor coupled to the bracket can be actuated to vertically translate the substrate support pedestal, shaft and bracket from a first position to a second position closer to a processing plate. A piston mounted on an end of the bracket provides a counter-balancing force to a tilting force, where the tilting force is generated by a change in the internal chamber pressure and causes a deflection in the position of the bracket and the substrate support. The counter-balancing force reduces the deflection of the bracket and the substrate support.
摘要翻译：描述半导体处理系统。该系统包括具有能够将内部室压力保持在环境大气压力以下的内部的处理室。该系统还包括耦合到腔室并适于从处理室移除材料的泵送系统。该系统还包括基板支撑基座，其中基板支撑基座刚性地联接到延伸穿过处理室的壁的基板支撑轴。提供位于处理室外部的支架，其刚性且有时可旋转地联接到基板支撑轴。耦合到支架的马达可以被致动以将基板支撑基座，轴和托架从第一位置垂直平移到靠近处理板的第二位置。安装在支架的端部上的活塞提供与倾斜力的反平衡力，其中倾斜力由内部室压力的变化产生，并且引起支架和基板支撑件的位置的偏转。反平衡力减小了支架和基板支架的挠曲。

12. 发明授权

US07506552B2 Micro torque and micro stiffness measurement device 有权
标题翻译：微扭矩和微刚度测量装置
公开(公告)号：US07506552B2
公开(公告)日：2009-03-24
申请号：US11704017
申请日：2007-02-07
申请人： Manuel A. Hernandez , Yen Fu , Ellis T. Cha
发明人： Manuel A. Hernandez , Yen Fu , Ellis T. Cha
IPC分类号： G01L3/02 , G01L3/00
CPC分类号： G11B5/455
摘要： In a method and apparatus for testing a head-gimbal assembly (HGA), a HGA is placed in contact with force transducers mounted on a rotational stage. The force transducers are adjusted to position the transducers around a rotational center of the rotational stage. The rotational stage is rotated, and the torque and variations in torque exerted by the HGA on the force transducers during rotation are measured.
摘要翻译：在用于测试头部万向节组件（HGA）的方法和装置中，HGA被放置成与安装在旋转台上的力换能器接触。调节力传感器以使换能器绕旋转台的旋转中心定位。旋转台被旋转，并且测量在旋转期间由HGA施加在力传感器上的扭矩和扭矩的变化。

13. 发明授权

US06916227B2 Method and apparatus for processing sliders for use in disk drives and the like 失效
标题翻译：用于处理用于磁盘驱动器等的滑块的方法和装置
公开(公告)号：US06916227B2
公开(公告)日：2005-07-12
申请号：US10287910
申请日：2002-11-04
申请人： Niraj Mahadev , Manuel A. Hernandez
发明人： Niraj Mahadev , Manuel A. Hernandez
IPC分类号： B24B9/06 , B24B21/00 , B24B37/04 , G11B5/10 , B24B1/00
CPC分类号： G11B5/102 , B24B9/065 , B24B21/004 , B24B37/048 , Y10T29/49034
摘要： A system and method are described for processing a slider (e.g., one to be used in a disk drive apparatus). Corners of the sliders are abraded while still a part of a row of sliders in a part-off operation. By abrading the corners of the sliders, head slap events between the slider and the recording media result in less damage to the recording media and less particulate matter from the slider being left on the recording media, improving data integrity for the recording media.
摘要翻译：描述了用于处理滑块（例如，用于磁盘驱动装置中的滑块）的系统和方法。滑块的角部磨损，同时仍然是一排滑块的一部分，分开操作。通过研磨滑块的角部，滑块和记录介质之间的头部拍打事件导致对记录介质的损害较小，并且较少的颗粒物质从滑块留在记录介质上，从而提高了记录介质的数据完整性。

14. 发明授权

US5604649A Disk drive system having a novel head gimbal assembly with a single offset mounting plate on each actuator arm 失效
标题翻译：磁盘驱动系统具有在每个致动器臂上具有单个偏移安装板的新型头部万向架组件
公开(公告)号：US5604649A
公开(公告)日：1997-02-18
申请号：US670039
申请日：1996-06-25
申请人： Manuel A. Hernandez
发明人： Manuel A. Hernandez
IPC分类号： G11B5/49 , G11B5/48 , G11B21/02 , G11B21/16
CPC分类号： G11B5/4833
摘要： The improved disk drive system has an improved head gimbal assembly having a mounting plate with an attachment portion for attachment to an actuator arm and a distal end for mounting the read/write heads, or load beam assemblies, thereto. The mounting portion and distal end of the mounting plate are vertically offset such that when the attachment portion is attached to the actuator arm, the distal end of the mounting plate is centered between opposing sides of adjacent disks, thereby permitting a smaller spacing between adjacent disks. The new swage type connection between the mounting plate and the actuator arm has a hole in the actuator arm and has a spud located on the attachment portion of the mounting plate. The spud has a cylinder having an outer diameter such that the cylinder can fit inside the actuator arm hole. A distal end of the cylinder has a lip protruding inwardly from an inside diameter of the cylinder. The cylinder has a length such that when the cylinder is inserted into the actuator arm hole, the lip and the distal end of the cylinder extend beyond the thickness of the actuator arm around the actuator arm hole so that when the spud is swaged while in the actuator arm hole, the lip and the distal end of the cylinder expand into an area outside the actuator arm hole.
摘要翻译：改进的磁盘驱动器系统具有改进的磁头万向架组件，其具有安装板，该安装板具有用于附接到致动器臂的附接部分和用于将读/写头或负载梁组件安装到其上的远端。安装板的安装部分和远端垂直偏移，使得当附接部分附接到致动器臂时，安装板的远端在相邻盘的相对侧之间居中，从而允许相邻盘之间的间隔更小。安装板和致动器臂之间的新的型锻型连接件在致动器臂中具有一个孔，并且具有位于安装板的附接部分上的定位销。喷嘴具有具有外径的圆筒，使得圆筒可以装配在致动器臂孔内。气缸的远端具有从气缸的内径向内突出的唇部。气缸具有这样的长度，使得当气缸插入致动器臂孔中时，气缸和气缸的远端延伸超过致动器臂的致动器臂孔周围的厚度，使得当在第执行器臂孔，唇缘和气缸的远端扩展到致动器臂孔外部的区域。

15. 发明申请

US20100006032A1 CHAMBER COMPONENTS FOR CVD APPLICATIONS 审中-公开
标题翻译：用于CVD应用的CHAMBER组件
公开(公告)号：US20100006032A1
公开(公告)日：2010-01-14
申请号：US12501195
申请日：2009-07-10
申请人： Kimberly Hinckley , Yizhen Zhang , Manuel A. Hernandez , Won B. Bang , Dmitry Lubomirsky
发明人： Kimberly Hinckley , Yizhen Zhang , Manuel A. Hernandez , Won B. Bang , Dmitry Lubomirsky
IPC分类号： C23C16/00
CPC分类号： C23C16/452 , C23C16/4481 , C23C16/45512 , C23C16/45591
摘要： Apparatus for use with a processing chamber are provided. In one aspect a blocker plate is provided including an annular plate having an inner portion of a first thickness and the annular plate having an aperture pattern including a center portion, a first patterned portion concentrically disposed around the center portion and comprising a first plurality of apertures having a first number of apertures, an second patterned portion concentrically disposed around the first patterned portion and comprising a second plurality of apertures having a second number of apertures greater than the first number of apertures, a perimeter portion concentrically disposed around the second patterned portion, and an outer portion comprising a raised concentric portion disposed on a perimeter of the annular plate. In another aspect, a second, third, and fourth blocker plates are provided. Additionally, a mixing apparatus and a liquid evaporating apparatus for use in a processing chamber are provided.
摘要翻译：提供了一种用于处理室的设备。在一个方面，提供了阻挡板，其包括具有第一厚度的内部部分的环形板，并且环形板具有包括中心部分的孔图案，第一图案化部分同心地设置在中心部分周围，并且包括第一多个孔具有第一数量的孔，第二图案部分同心地设置在第一图案化部分周围，并且包括第二多个孔，其具有大于第一数量孔的第二数量的孔，围绕第二图案化部分同心设置的周边部分，以及包括设置在所述环形板的周边上的升高的同心部分的外部部分。另一方面，提供第二，第三和第四阻滞板。此外，提供了一种用于处理室的混合装置和液体蒸发装置。

16. 发明申请

US20090109568A1 Thermal elements for controlling and manipulating thermal pitch static attitude (PSA) 审中-公开
标题翻译：用于控制和操纵热沥青静止姿态（PSA）的热元件
公开(公告)号：US20090109568A1
公开(公告)日：2009-04-30
申请号：US11981126
申请日：2007-10-31
申请人： Manuel A. Hernandez , Niraj Mahadev , Yugraj S. Aujla , Yen Fu , Nelson Troung , Tai Dang
发明人： Manuel A. Hernandez , Niraj Mahadev , Yugraj S. Aujla , Yen Fu , Nelson Troung , Tai Dang
IPC分类号： G11B33/14
CPC分类号： G11B5/3106 , G11B5/3136 , G11B5/40 , G11B5/6064 , G11B5/6082
摘要： The sensitivity of the fly height of a HDD (hard disk drive) recording head to temperature variations can be greatly reduced, eliminated or controlled in a manner to enhance HDD performance under various temperature conditions by affixing a thermal element to the HGA (head gimbals assembly) flexure. The thermal element in this invention is a deposited, patterned layer of DLC (diamond-like carbon) that has a coefficient of thermal expansion that is less than that of the stainless steel flexure. As a result of the placement of this thermal element on the flexure, the temperature-induced angular variations of PSA (pitch static attitude) can be made to compensate for temperature-induced changes in the slider crown curvature, thereby reducing or eliminating fly height variations due to temperature.
摘要翻译： HDD（硬盘驱动器）记录头的飞行高度对温度变化的敏感度可以通过将热元件附接到HGA（头部万向节组件）而以各种温度条件提高HDD性能来大大减少，消除或控制）弯曲。本发明中的热元件是DLC（金刚石状碳）的沉积的图案化层，其具有小于不锈钢挠曲件的热膨胀系数。作为将该热元件放置在挠曲件上的结果，可以进行PSA的温度诱导的角度变化（俯仰静止姿态）以补偿滑块冠曲率的温度引起的变化，从而减少或消除飞行高度变化由于温度。

17. 发明授权

US07161767B2 Wireless suspension design with ground plane structure 有权
标题翻译：无线悬挂设计，具有接地平面结构
公开(公告)号：US07161767B2
公开(公告)日：2007-01-09
申请号：US10195471
申请日：2002-07-16
申请人： Manuel A. Hernandez , Yen Fu
发明人： Manuel A. Hernandez , Yen Fu
IPC分类号： G11B5/48 , G11B21/21
CPC分类号： G11B5/486
摘要： Methods and devices are described that provide improved electromagnetic interference (EMI) protection for suspension assemblies. In one embodiment, a ground line is provided among the traces that are used in the suspension. Alternatively, a top ground plane is provided on top of the conductive traces with an interposed insulative layer. The ground line and/or the top ground plane provide EMI protection for read and write signals traveling through the traces (e.g., read and write traces) of the suspension assembly. The ground line and/or the top ground plane reduce the interaction between the read and the write traces, thus minimizing cross talk.
摘要翻译：描述了为悬架组件提供改进的电磁干扰（EMI）保护的方法和装置。在一个实施例中，在悬架中使用的迹线之间提供接地线。或者，顶部接地平面设置在导电迹线的顶部，并具有插入的绝缘层。接地线和/或顶部接地平面为通过悬挂组件的迹线（例如，读取和写入迹线）传输的读取和写入信号提供EMI保护。接地线和/或顶部接地平面减小读取和写入轨迹之间的相互作用，从而最小化串扰。

18. 发明授权

US07092214B2 Wireless suspension design to accommodate multiple drive designs 有权
公开(公告)号：US07092214B2
公开(公告)日：2006-08-15
申请号：US10229591
申请日：2002-08-27
申请人： Manuel A. Hernandez
发明人： Manuel A. Hernandez
IPC分类号： G11B5/48
CPC分类号： H05K1/028 , G11B5/486 , H05K1/0266 , H05K2201/09145 , H05K2201/09936
摘要： A wireless suspension design is described that can be used in varying types of drive designs. In one embodiment, a flex circuit is provided with at least two indicia to indicate where the flex circuit is to be bent when attaching it to a head stack assembly.

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