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    • 12. 发明授权
    • Data flow management in generating different signal formats used in optical metrology
    • 生成用于光学计量学的不同信号格式的数据流管理
    • US07765234B2
    • 2010-07-27
    • US11580716
    • 2006-10-12
    • Hong QiuJunwei BaoWei LiuJeffrey Alexander ChardMiao LiuGang HeHemalatha ErvaVi Vuong
    • Hong QiuJunwei BaoWei LiuJeffrey Alexander ChardMiao LiuGang HeHemalatha ErvaVi Vuong
    • G06Q50/00
    • G01N21/4788G01B11/24Y10S707/953
    • To manage data flow in generating different signal formats for use in optical metrology, a project data object is created. A first option data object is created. The first option data object has a set of signal parameters. Different settings of the set of signal parameters correspond to different signal formats for diffraction signals. A version number is associated with the first option data object. The first option data object is linked with the project data object. At least a second option data object is created. The second option data object has a set of signal parameters. Different settings of the set of signal parameters correspond to different signal formats for diffraction signals. The set of signal parameters of the first option data object and the set of signal parameters of the second option data object are set differently. Another version number is associated with the second option data object. The second option data object is linked with the project data object. The project data object, the first option data object, and the second option data object are stored. The version numbers associated with the first option data object and the second option data object are stored. The link between the first option data object and the project data object is stored. The link between the second option data object and the project data object is stored.
    • 为了管理生成用于光学测量的不同信号格式的数据流,创建了一个项目数据对象。 创建第一个选项数据对象。 第一个选项数据对象具有一组信号参数。 信号参数组的不同设置对应于衍射信号的不同信号格式。 版本号与第一选项数据对象相关联。 第一个选项数据对象与项目数据对象链接。 至少创建第二个选项数据对象。 第二个选项数据对象具有一组信号参数。 信号参数组的不同设置对应于衍射信号的不同信号格式。 第一选项数据对象的信号参数集合和第二选项数据对象的信号参数集合设置不同。 另一个版本号与第二个选项数据对象相关联。 第二个选项数据对象与项目数据对象链接。 存储项目数据对象,第一选项数据对象和第二选项数据对象。 存储与第一选项数据对象和第二选项数据对象相关联的版本号。 存储第一个选项数据对象和项目数据对象之间的链接。 存储第二选项数据对象与项目数据对象之间的链接。
    • 14. 发明授权
    • Library accuracy enhancment and evaluation
    • 图书馆精确度增强和评估
    • US07617075B2
    • 2009-11-10
    • US11946821
    • 2007-11-28
    • Shifang LiJunwei BaoWei Liu
    • Shifang LiJunwei BaoWei Liu
    • G06F15/00
    • G01B11/24G03F7/70625
    • The accuracy of a library of simulated-diffraction signals for use in optical metrology of a structure formed on a wafer is evaluated by utilizing an identity relationship inherent to simulated diffraction signals. Each simulated diffraction signal contains at least one set of four reflectivity parameters for a wavelength and/or angle of incidence. One of the four reflectivity parameters is selected. A value for the selected reflectivity parameter is determined using the identity relationship and values of the remaining three reflectivity parameters. The determined value for the selected reflectivity parameter is compared to the value in the obtained set of four reflectivity parameters to evaluate and improve the accuracy of the library. The identity relationship can also be used to reduce the data storage in a library.
    • 通过利用模拟衍射信号固有的身份关系来评估用于在晶片上形成的结构的光学计量学中的模拟衍射信号库的精度。 每个模拟衍射信号包含用于波长和/或入射角的至少一组四个反射率参数。 选择四个反射率参数之一。 使用身份关系和剩余的三个反射率参数的值确定所选反射率参数的值。 将所选反射率参数的确定值与获得的四个反射率参数组中的值进行比较,以评估和提高库的准确性。 身份关系也可用于减少库中的数据存储。