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    • 18. 发明申请
    • SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
    • 基板处理装置和基板处理方法
    • US20070144563A1
    • 2007-06-28
    • US11614382
    • 2006-12-21
    • Hiroyuki Araki
    • Hiroyuki Araki
    • B08B3/00
    • H01L21/6708H01L21/67253
    • A substrate treatment apparatus includes a substrate holding mechanism, a substrate attitude changing mechanism which changes the attitude of a substrate held by the substrate holding mechanism between a generally horizontal attitude and a tilted attitude in which the substrate is tilted with respect to a horizontal plane, a treatment liquid supplying mechanism which is capable of supplying a plurality of treatment liquids to the substrate, a plurality of treatment liquid receiving portions which each receive a corresponding one of the treatment liquids flowing down from a surface of the substrate when the substrate is brought into the tilted attitude, and a receiving portion selecting unit which selects one of the treatment liquid receiving portions according to the type of a treatment liquid present on the substrate for receiving the treatment liquid flowing down from the substrate.
    • 基板处理装置包括:基板保持机构,基板姿态改变机构,其使基板保持机构保持的基板的姿态大致水平姿态与基板相对于水平面倾斜的倾斜姿势, 能够向基板供给多种处理液的处理液供给机构,多个处理液接收部,其中,当所述基板进入所述基板时,所述处理液接收部各接收从所述基板的表面向下流动的对应的处理液 倾斜姿势,以及接收部选择单元,其根据存在于用于接收从基板流下的处理液的基板上的处理液的种类,选择处理液接收部中的一个。
    • 20. 发明申请
    • Electrically-driven tape cutter
    • 电动卷带切割机
    • US20060048622A1
    • 2006-03-09
    • US10517777
    • 2004-03-30
    • Hiroyuki Araki
    • Hiroyuki Araki
    • B26D1/00
    • B65H35/0026B65H35/0066B65H35/0086B65H2403/40B65H2403/42B65H2553/22Y10T83/9447
    • The invention provides an improved electric tape cutter in which a pinion gear with an attached magnet that is connected to a drive source is embedded with a member having a weight equal to that of the magnet at a location that is symmetrical to the location at which the magnet is mounted, with respect to a center axis of rotation, imparting balanced rotation that enables eccentric rotation of the pinion gear to be prevented, preventing noise and apparatus malfunction. The electric tape cutter, which feeds a leading edge of adhesive tape wound on a reel from a delivery outlet and cuts it to an appropriate length with an electrically driven blade provided at the delivery outlet, has a configuration wherein, in order to prevent eccentric rotation of a pinion gear that has a magnet affixed thereto and is connected to a drive source, a fitted member of equal weight to the magnet is embedded in the pinion gear at a location that is symmetrical to the position at which the magnet is provided, with the axis of rotation of the pinion gear therebetween.
    • 本发明提供了一种改进的电动带切割机,其中具有连接到驱动源的附接磁体的小齿轮嵌入具有与磁体重量相等的重量的构件,该构件在与 相对于中心旋转轴线安装磁体,赋予能够防止小齿轮偏心旋转的平衡旋转,防止噪音和设备故障。 电动带切割机具有如下配置:其中,为了防止偏心旋转,电动带切割器将从卷绕在出纸口上的胶带的前缘进给并将其切割成合适的长度, 具有固定到其上并连接到驱动源的磁体的小齿轮,与磁体相等重量的配合构件被嵌入在与设置磁体的位置对称的位置处的小齿轮中,与 其间的小齿轮的旋转轴线。