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    • 12. 发明授权
    • Aligning method utilizing reliability weighting coefficients
    • 利用可靠性加权系数对齐方法
    • US5543921A
    • 1996-08-06
    • US465098
    • 1995-06-05
    • Shigeyuki UzawaAkiya NakaiMasaaki ImaizumiHiroshi TanakaNoburu TakakuraYoshio Kaneko
    • Shigeyuki UzawaAkiya NakaiMasaaki ImaizumiHiroshi TanakaNoburu TakakuraYoshio Kaneko
    • G03F9/00G01B11/00
    • G03F9/7088G03F9/7003G03F9/7092
    • An aligning method suitably usable in a semiconductor device manufacturing exposure apparatus of step-and-repeat type, for sequentially positioning regions on a wafer to an exposure position. In one preferred form, the marks provided on selected regions of the wafer are detected to obtain corresponding mark signals and then respective positional data related to the positions or positional errors of the selected regions are measured, on the basis of the mark signals. Then, the reliability of each measured positional data of a corresponding selected region is detected, on the basis of the state of a corresponding mark signal or the state of that measured positional data and by using fuzzy reasoning, for example. Corrected positional data related to the disposition of all the regions on the wafer is then prepared by using the measured positional data of the selected regions, wherein, for preparation of the corrected positional data, each measured positional data is weighted in accordance with the detected reliability thereof such that measured positional data having higher reliability is more influential to determine the corrected positional data.
    • 适用于步进重复类型的半导体器件制造曝光设备中的对准方法,用于将晶片上的区域顺序地定位到曝光位置。 在一个优选形式中,检测提供在晶片的选定区域上的标记以获得对应的标记信号,然后基于标记信号测量与所选区域的位置或位置误差相关的各个位置数据。 然后,基于对应的标记信号的状态或测量的位置数据的状态,并通过使用模糊推理来检测对应的选择区域的每个测量位置数据的可靠性。 然后通过使用测量的所选择的区域的位置数据来准备与晶片上的所有区域的配置相关的位置数据,其中,为了准备校正的位置数据,根据检测到的可靠性对每个测量的位置数据进行加权 使得具有较高可靠性的测量位置数据对确定校正的位置数据更有影响力。
    • 15. 发明授权
    • Circuit providing gamma, color and temperature compensation for thermal
printer
    • 电路为热敏打印机提供伽马,色温和温度补偿
    • US4584601A
    • 1986-04-22
    • US532843
    • 1983-09-16
    • Masakuni SuzukiSadao MaeyamaKiyoshi AraiYoshio KanekoShohgo Fujito
    • Masakuni SuzukiSadao MaeyamaKiyoshi AraiYoshio KanekoShohgo Fujito
    • B41J2/325B41J17/10B41J35/16G06T1/00G06T1/20H04N1/46H04N1/60G03F3/08
    • H04N1/60
    • The color signals to be printed by a thermal color transfer printer are processed in order to provide gamma and temperature compensation for nonlinearities in the responses of the colored dyes used in the thermal printing ribbon and also to provide color compensation to correct for any overlap in the spectral response of these colored dyes. Color data signals are sampled and multiplexed to place the main or print color signal, which is determined by the color of the dye in position in front of the thermal head at that instant, in the center of a multiplexed, time-sharing arrangement with the non-print color signals arranged on either side. The multiplexed signal is digitized and used to address a read only memory containing compensation curves to provide both gamma compensation and color compensation, and the compensated signals are adjusted in gray scale magnitude before being pulse width modulated for driving the thermal head to produce the desired color, hard-copy print.
    • 处理要由热色转印打印机打印的彩色信号,以便为在热敏打印色带中使用的着色染料的响应中的非线性提供伽马和温度补偿,并且还提供颜色补偿以校正在 这些有色染料的光谱响应。 对彩色数据信号进行采样和多路复用以将主色或信号颜色信号放在多路复用的分时布置中心,将由该时刻的热敏头前面的染料的颜色确定在位置的位置。 非打印颜色信号布置在任一侧。 多路复用信号被数字化并用于寻址包含补偿曲线的只读存储器,以提供伽马补偿和色彩补偿,并且补偿信号在被调制为脉宽调制之前以灰度级调整,以驱动热头以产生所需颜色 ,硬拷贝打印。
    • 20. 发明授权
    • Magnetic sensor
    • 磁传感器
    • US07084624B2
    • 2006-08-01
    • US10495127
    • 2003-02-14
    • Yoshinori TokuraMasashi KawasakiHiroyuki YamadaYoshihiro OgawaYoshio Kaneko
    • Yoshinori TokuraMasashi KawasakiHiroyuki YamadaYoshihiro OgawaYoshio Kaneko
    • G01R33/02
    • G11C13/06G01R33/0325G01R33/095G11B5/1278G11B11/10547
    • The present invention provides a magnetic sensor capable of reproducing a magnetic record even if the size of a recorded magnetization is a minute one, directly reading a magnetization recorded on a magneto-optical disk without applying incident light itself to the magneto-optical disk, and obtaining signals of a second harmonic having a high S/N ratio. This magnetic sensor includes a magnetic sensor element (102) having electric polarization disposed with respect to a perpendicular recording medium (101), and laser generating means acting on the magnetic sensor element (102). The magnetic sensor reads information in the perpendicular recording medium (101) based on the variation of the rotation angle φ of the polarization plane of a second harmonic (105) of a frequency 2ω exiting the magnetic sensor element (102) by the application of laser light (104) with a frequency ω from the laser generation means to the magnetic sensor element (102).
    • 本发明提供一种能够再现磁记录的磁传感器,即使记录的磁化的大小是微小的,直接读取记录在磁光盘上的磁化而不将入射光本身插入磁光盘,以及 获得具有高S / N比的二次谐波的信号。 该磁传感器包括相对于垂直记录介质(101)设置的具有电极化的磁传感器元件(102)和作用在磁传感器元件(102)上的激光产生装置。 磁传感器基于通过施加激光器离开磁传感器元件(102)的频率为2omega的二次谐波(105)的偏振面的旋转角度phi的变化,读取垂直记录介质(101)中的信息 具有从激光产生装置到磁传感器元件(102)的频率ω的光(104)。