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11. 发明申请

US20090091215A1 PIEZOELECTRIC ACTUATOR AND LIQUID DISCHARGE HEAD USING THE SAME 有权
标题翻译：压电致动器和使用其的液体排出头
公开(公告)号：US20090091215A1
公开(公告)日：2009-04-09
申请号：US12237933
申请日：2008-09-25
申请人： Katsumi Aoki , Kenichi Takeda , Toshihiro Ifuku , Takanori Matsuda , Tetsuro Fukui
发明人： Katsumi Aoki , Kenichi Takeda , Toshihiro Ifuku , Takanori Matsuda , Tetsuro Fukui
IPC分类号： H01L41/00
CPC分类号： B41J2/14233 , B41J2202/03 , H01L41/0478 , H01L41/0973 , H01L41/1875 , H01L41/316 , H01L41/319
摘要： The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by PδMAX; and a point located on a circumference of a reference-circle having PδMAX as a center and having a minimum difference in displacement from PδMAX is expressed by PδA, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining PδMAX and PδA, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.
摘要翻译：压电致动器包括在两个电极层和隔膜之间的压电膜。假设：所有材料的每个弹性系数是各向同性的，并且通过电场的压电膜的失真量在所有面内方向都是各向同性的; 位于膜片表面上并且当施加预定电场以使压电膜失真时具有最大位移的点由PdeltaMAX表示; 并且位于具有PdeltaMAX作为中心并且具有与PdeltaMAX的位移的最小差异的参考圆的圆周上的点由PdeltaA表示，所述隔膜具有能够确定在连接PdeltaMAX的直线中设置的轴A1的形状和PdeltaA，隔膜包括其中与A1正交并垂直于膜片表面上的轴线A2的平面为{110}面的单晶材料，并且压电膜为{100} - 单晶材料，定向电影。

12. 发明授权

US07984977B2 Piezoelectric element, manufacturing method for piezoelectric body, and liquid jet head 有权
标题翻译：压电元件，压电体制造方法和液体喷头
公开(公告)号：US07984977B2
公开(公告)日：2011-07-26
申请号：US11769091
申请日：2007-06-27
申请人： Kenichi Takeda , Katsumi Aoki , Toshihiro Ifuku , Takanori Matsuda , Tetsuro Fukui
发明人： Kenichi Takeda , Katsumi Aoki , Toshihiro Ifuku , Takanori Matsuda , Tetsuro Fukui
IPC分类号： B41J2/045
CPC分类号： H01L41/1876 , H01L41/319 , Y10T29/42
摘要： A piezoelectric element comprises a piezoelectric body including a film made of an ABO3 perovskite oxide crystal epitaxially grown above a substrate, and a pair of electrode layers provided to the piezoelectric body, wherein the piezoelectric body has a porous region on a side opposite to a side of the substrate.
摘要翻译：压电元件包括压电体，该压电体包括在基板上外延生长的由ABO3钙钛矿氧化物晶体构成的膜和设置在压电体上的一对电极层，其中，压电体在与侧面相反的一侧具有多孔区域的基底。

13. 发明申请

US20060012648A1 Piezoelectric element 有权
公开(公告)号：US20060012648A1
公开(公告)日：2006-01-19
申请号：US10532020
申请日：2004-01-30
申请人： Toshihiro Ifuku , Kenichi Takeda , Tetsuro Fukui , Katsumi Aoki , Takanori Matsuda , Masaru Shimizu
发明人： Toshihiro Ifuku , Kenichi Takeda , Tetsuro Fukui , Katsumi Aoki , Takanori Matsuda , Masaru Shimizu
IPC分类号： B41J2/045
CPC分类号： H01L41/41 , B41J2/14233 , B41J2202/03 , H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/1876 , H01L41/316
摘要： A piezoelectric element including an upper electrode, a piezoelectric and/or electrostrictive material and a lower electrode, characterized in that the piezoelectric and/or electrostrictive material is a composite oxide constituted by ABO3 as general formula and the piezoelectric and/or electrostrictive material has a twin crystal.

14. 发明申请

US20070090730A1 Method for forming perovskite type oxide thin film, piezoelectric element, liquid discharge head, and liquid discharge apparatus 失效
标题翻译：用于形成钙钛矿型氧化物薄膜，压电元件，液体排出头和液体排出装置的方法
公开(公告)号：US20070090730A1
公开(公告)日：2007-04-26
申请号：US11582403
申请日：2006-10-18
申请人： Tetsuro Fukui , Kenichi Takeda , Takanori Matsuda , Hiroshi Funakubo , Shintaro Yokoyama
发明人： Tetsuro Fukui , Kenichi Takeda , Takanori Matsuda , Hiroshi Funakubo , Shintaro Yokoyama
IPC分类号： H01L41/187
CPC分类号： H01L41/316 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , H01L41/0973 , H01L41/1875 , H01L41/318
摘要： To provide a film forming method capable of obtaining a high-quality perovskite type oxide thin film, piezoelectric element having a piezoelectric substance constituted of the thin film formed by the film forming method, liquid discharge head having the piezoelectric element and liquid discharge apparatus having the liquid discharge head. A method for forming a perovskite type oxide thin film having a composition expressed by (A1x, A2y A3z) (B1j, B2k, B3l, B4m B5n)Op is included, which is a film forming method having a plurality of steps for supplying a material containing the elements onto the substrate, dividing the elements A1 to A3 and B1 to B5 into a plurality of groups and supplying each material containing the elements included in the groups onto the substrate in separate steps.
摘要翻译：为了提供能够获得高质量钙钛矿型氧化物薄膜的成膜方法，具有由通过成膜方法形成的薄膜构成的压电体的压电元件，具有压电元件的液体排出头和具有液体排放头。一种形成具有由（A1 ，A2＆gt; A3＆lt; z＆gt;）表示的组成的钙钛矿型氧化物薄膜的方法（B1＆ B 1，B 2，B 1，B 2，B 3，N 2，B 3，N 3，是一种成膜方法，其具有多个步骤，用于将含有元素的材料提供到基底上，将元件A1至A3和B1至B5分成多个组，并将含有包含在基团中的元素在单独的步骤中。

15. 发明授权

US07567022B2 Method for forming perovskite type oxide thin film, piezoelectric element, liquid discharge head, and liquid discharge apparatus 失效
标题翻译：用于形成钙钛矿型氧化物薄膜，压电元件，液体排出头和液体排出装置的方法
公开(公告)号：US07567022B2
公开(公告)日：2009-07-28
申请号：US11582403
申请日：2006-10-18
申请人： Tetsuro Fukui , Kenichi Takeda , Takanori Matsuda , Hiroshi Funakubo , Shintaro Yokoyama
发明人： Tetsuro Fukui , Kenichi Takeda , Takanori Matsuda , Hiroshi Funakubo , Shintaro Yokoyama
IPC分类号： H01L41/00 , H01L41/187
CPC分类号： H01L41/316 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1646 , H01L41/0973 , H01L41/1875 , H01L41/318
摘要： To provide a film forming method capable of obtaining a high-quality perovskite type oxide thin film, piezoelectric element having a piezoelectric substance constituted of the thin film formed by the film forming method, liquid discharge head having the piezoelectric element and liquid discharge apparatus having the liquid discharge head. A method for forming a perovskite type oxide thin film having a composition expressed by (A1x, A2y A3z) (B1j, B2k, B3l, B4m B5n)Op is included, which is a film forming method having a plurality of steps for supplying a material containing the elements onto the substrate, dividing the elements A1 to A3 and B1 to B5 into a plurality of groups and supplying each material containing the elements included in the groups onto the substrate in separate steps.
摘要翻译：为了提供能够获得高质量钙钛矿型氧化物薄膜的成膜方法，具有由通过成膜方法形成的薄膜构成的压电体的压电元件，具有压电元件的液体排出头和具有液体排放头。包括具有由（A1x，A2y A3z）（B1j，B2k，B3l，B4m B5n）Op表示的组成的钙钛矿型氧化物薄膜的方法，该方法是具有用于供给材料的多个步骤的成膜方法将元件包含在基板上，将元件A1至A3和B1至B5分成多个组，并将包含在组中的元素的每种材料分离到基板上。

16. 发明授权

US07622852B2 Piezoelectric member, piezoelectric element, and liquid discharge head and liquid discharge apparatus utilizing piezoelectric element 有权
标题翻译：压电元件，压电元件，以及利用压电元件的液体排出头和液体排出装置
公开(公告)号：US07622852B2
公开(公告)日：2009-11-24
申请号：US12031176
申请日：2008-02-14
申请人： Toshihiro Ifuku , Tetsuro Fukui , Kenichi Takeda , Hiroshi Funakubo , Hiroshi Nakaki , Rikyu Ikariyama , Osami Sakata
发明人： Toshihiro Ifuku , Tetsuro Fukui , Kenichi Takeda , Hiroshi Funakubo , Hiroshi Nakaki , Rikyu Ikariyama , Osami Sakata
IPC分类号： H01L41/04 , H01L41/187
CPC分类号： B41J2/14233 , B41J2202/03 , H01L41/0805 , H01L41/1875 , H01L41/1876 , H01L41/316
摘要： The invention provides a piezoelectric film having a large piezoelectric property, and a piezoelectric element, a liquid discharge head and a liquid discharge apparatus utilizing the same. The piezoelectric film is formed by an epitaxial oxide of orientation having at least a tetragonal crystal structure, in which the oxide is a perovskite type composite oxide represented by a general formula ABO3 and contains at least domains C, D and E of [100] orientation having mutual deviation in crystal direction, where the angular deviation between [100] directions in domains C and D, in domains D and E, in domains C and E and in domains D and E are respectively 5° or less, 5° or less, 0.3° or less, and 0.3° or more, and the angular deviation between [001] directions in domains C and E and in domains D and E are respectively 1.0° or more, and 1.0° or more.
摘要翻译：本发明提供一种压电性能大的压电膜，以及压电元件，液体排出头和利用该压电元件的液体排出装置。压电膜由具有至少四方晶系结构的<100>取向的外延氧化物形成，其中氧化物是由通式ABO 3表示的钙钛矿型复合氧化物，并且至少含有C，D和E的畴， 100]取向在晶体方向上具有相互偏离，其中区域C和D中的结构域C和D中的结构域D和E中的区域C和E以及区域D和E中的角度偏差分别为5°或更小，5 °或更小，0.3°以下，0.3°以上，域C，E以及区域D，E的[001]方向的角度偏差分别为1.0°以上1.0°以上。

17. 发明申请

US20050213020A1 Dielectric member, piezoelectric member, ink jet head, ink jet recording apparatus and producing method for ink jet recording apparatus 有权
标题翻译：电介质构件，压电构件，喷墨头，喷墨记录装置和喷墨记录装置的制造方法
公开(公告)号：US20050213020A1
公开(公告)日：2005-09-29
申请号：US11085091
申请日：2005-03-22
申请人： Kenichi Takeda , Toshihiro Ifuku , Tetsuro Fukui , Hiroshi Funakubo , Shoji Okamoto
发明人： Kenichi Takeda , Toshihiro Ifuku , Tetsuro Fukui , Hiroshi Funakubo , Shoji Okamoto
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , H01L21/02 , H01L41/047 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/316 , H01L41/319 , C09K19/02
CPC分类号： H01L41/0478 , H01L41/0973 , H01L41/1876 , H01L41/29 , H01L41/316
摘要： A dielectric member including, on a substrate, a lower electrode, an oriented dielectric layer, and an upper electrode, in which at least either of the electrodes has an at least two-layered structure constituted of perovskite type oxide conductive layers, and has an orientation.
摘要翻译：一种电介质构件，在基板上包括下电极，取向介质层和上电极，其中至少任一个电极具有由钙钛矿型氧化物导电层构成的至少两层结构，并且具有方向。

18. 发明申请

US20090273257A1 PIEZOELECTRIC SUBSTANCE, PIEZOELECTRIC ELEMENT, AND LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE APPARATUS USING PIEZOELECTRIC ELEMENT 有权
标题翻译：压电元件，压电元件和液体放电头和液体放电器件使用压电元件
公开(公告)号：US20090273257A1
公开(公告)日：2009-11-05
申请号：US12301567
申请日：2007-07-13
申请人： Toshihiro Ifuku , Kenichi Takeda , Tetsuro Fukui , Hiroshi Funakubo
发明人： Toshihiro Ifuku , Kenichi Takeda , Tetsuro Fukui , Hiroshi Funakubo
IPC分类号： H01L41/04 , H01L41/18 , B32B15/00
CPC分类号： B41J2/161 , B41J2/1646 , B41J2202/03 , H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/316
摘要： A piezoelectric substance which is made of oxide with perovskite type structure which is made of ABO3, where a principal component of A is Pb, and principal components of B contain at least two kinds of elements among Nb, Mg, Zn, Sc, Cd, Ni, Mn, Co, Yb, In, and Fe, and Ti, characterized by being a uniaxial orientation crystal or a single crystal which has an a-domain and a c-domain of tetragonal.
摘要翻译：由ABO3制成的具有钙钛矿型结构的氧化物的压电体，其中A的主成分为Pb，B的主要成分含有Nb，Mg，Zn，Sc，Cd中的至少两种元素， Ni，Mn，Co，Yb，In和Fe以及Ti，其特征在于单轴取向晶体或单晶，其具有四方晶的a畴和c畴。

19. 发明授权

US07948154B2 Piezoelectric substance, piezoelectric element, and liquid discharge head and liquid discharge apparatus using piezoelectric element 有权
标题翻译：压电体，压电元件，液体排出头以及使用压电元件的液体排出装置
公开(公告)号：US07948154B2
公开(公告)日：2011-05-24
申请号：US12301567
申请日：2007-07-13
申请人： Toshihiro Ifuku , Kenichi Takeda , Tetsuro Fukui , Hiroshi Funakubo
发明人： Toshihiro Ifuku , Kenichi Takeda , Tetsuro Fukui , Hiroshi Funakubo
IPC分类号： H01L41/187
CPC分类号： B41J2/161 , B41J2/1646 , B41J2202/03 , H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/316
摘要： A piezoelectric substance which is made of oxide with perovskite type structure which is made of ABO3, where a principal component of A is Pb, and principal components of B contain at least two kinds of elements among Nb, Mg, Zn, Sc, Cd, Ni, Mn, Co, Yb, In, and Fe, and Ti, characterized by being a uniaxial orientation crystal or a single crystal which has an a-domain and a c-domain of tetragonal.
摘要翻译：由ABO3制成的具有钙钛矿型结构的氧化物的压电体，其中A的主成分为Pb，B的主要成分含有Nb，Mg，Zn，Sc，Cd中的至少两种元素， Ni，Mn，Co，Yb，In和Fe以及Ti，其特征在于单轴取向晶体或单晶，其具有四方晶的a畴和c畴。

20. 发明申请

US20090026408A1 PIEZOELECTRIC MATERIAL 有权
标题翻译：压电材料
公开(公告)号：US20090026408A1
公开(公告)日：2009-01-29
申请号：US12135980
申请日：2008-06-09
申请人： Kaoru Miura , Toshihiro Ifuku , Kenichi Takeda , Tetsuro Fukui , Hiroshi Funakubo
发明人： Kaoru Miura , Toshihiro Ifuku , Kenichi Takeda , Tetsuro Fukui , Hiroshi Funakubo
IPC分类号： H01L41/187
CPC分类号： H01L41/1871 , H01L41/43
摘要： The present invention provides a piezoelectric material which can be applied even to the MEMS technique, exhibits satisfactory piezoelectricity even at high ambient temperatures and is environmentally clean, namely, a piezoelectric material including an oxide obtained by forming a solid solution composed of two perovskite oxides A(1)B(1)O3 and A(2)B(2)O3 different from each other in crystalline phase, the oxide being represented by the following general formula (1): X{A(1)B(1)O3}−(1−X){A(2)B(2)O3} (1) wherein “A(1)” and “A(2)” are each an element including an alkali earth metal and may be the same or different from each other; “B(1)” and “B(2)” each include two or more metal elements, and either one of “B(1)” and “B(2)” contains Cu in a content of 3 atm % or more; and “X” satisfies the relation 0
摘要翻译：本发明提供一种甚至可以应用于MEMS技术的压电材料，即使在高环境温度下也表现出令人满意的压电性，并且是环境清洁的，即包括通过形成由两种钙钛矿氧化物A形成的固溶体获得的氧化物的压电材料（1）在结晶相中彼此不同的B（1）O 3和A（2）B（2）O 3，所述氧化物由以下通式（1）表示：<？in-line-formula description =“In （1）B（1）O3} - （1-X）{A（2）B（2）O3}（1）<？在线公式 description =“In-line Formulas”end =“tail”？>其中“A（1）”和“A（2）”分别是包含碱土金属的元素，可以相同或不同; “B（1）”和“B（2）”各自包含两个或更多个金属元素，“B（1）”和“B（2）”中的任一个含有3atm％以上的Cu; 和“X”满足0

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