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    • 19. 发明申请
    • Lithographic Type Microelectronic Spring Structures with Improved Contours
    • 具有改进轮廓的平版印刷型微电子弹簧结构
    • US20070045874A1
    • 2007-03-01
    • US11551621
    • 2006-10-20
    • Benjamin EldridgeStuart Wenzel
    • Benjamin EldridgeStuart Wenzel
    • H01L23/52
    • H05K7/1069G01R1/06727G01R1/06733G01R1/07342G01R3/00H01L23/4822H01L24/72H01L2924/01006H01L2924/01012H01L2924/01013H01L2924/01019H01L2924/01023H01L2924/01027H01L2924/01029H01L2924/01033H01L2924/01042H01L2924/01046H01L2924/01047H01L2924/01049H01L2924/01074H01L2924/01078H01L2924/01079H01L2924/01082H01L2924/14H01L2924/19041H01L2924/30107H05K3/4092Y10T29/49151Y10T29/4922
    • Improved lithographic type microelectronic spring structures and methods are disclosed, for providing improved tip height over a substrate, an improved elastic range, increased strength and reliability, and increased spring rates. The improved structures are suitable for being formed from a single integrated layer (or series of layers) deposited over a molded sacrificial substrate, thus avoiding multiple stepped lithographic layers and reducing manufacturing costs. In particular, lithographic structures that are contoured in the z-direction are disclosed, for achieving the foregoing improvements. For example, structures having a U-shaped cross-section, a V-shaped cross-section, and/or one or more ribs running along a length of the spring are disclosed. The present invention additionally provides a lithographic type spring contact that is corrugated to increase its effective length and elastic range and to reduce its footprint over a substrate, and springs which are contoured in plan view. The present invention further provides combination (both series and parallel) electrical contacts tips for lithographic type microelectronic spring structures. The microelectronic spring structures according to the present invention are particularly useful for making very fine pitch arrays of electrical connectors for use with integrated circuits and other substrate-mounted electronic devices, because their performance characteristics are enhanced, while at the same time, they may be manufactured at greatly reduced costs compared to other lithographic type microelectronic spring structures.
    • 公开了改进的光刻型微电子弹簧结构和方法,用于提供改善的基板上的尖端高度,改进的弹性范围,增加的强度和可靠性以及增加的弹簧刚度。 改进的结构适于由沉积在模制的牺牲衬底上的单个集成层(或一系列层)形成,从而避免多个阶梯式光刻层并降低制造成本。 特别地,为了实现上述改进,公开了在z方向上成形的平版印刷结构。 例如,公开了具有沿着弹簧的长度延伸的U形横截面,V形横截面和/或一个或多个肋的结构。 本发明另外提供了一种平版印刷型弹性接触件,其被波纹化以增加其有效长度和弹性范围并减小其在基底上的覆盖面,以及在俯视图中成形的弹簧。 本发明还提供了用于光刻型微电子弹簧结构的组合(串联和并联)电接触尖端。 根据本发明的微电子弹簧结构特别适用于制造用于集成电路和其它基板安装的电子设备的电连接器的非常精细的间距阵列,因为它们的性能特性被增强,同时它们可以是 与其他光刻型微电子弹簧结构相比大大降低了成本。