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    • 14. 发明申请
    • Method and apparatus for inspection of optical component
    • 光学部件检查方法和装置
    • US20060192977A1
    • 2006-08-31
    • US11319172
    • 2005-12-28
    • Kazumasa TakataHidetoshi UtsuroTomotaka FurutaTakashi Urashima
    • Kazumasa TakataHidetoshi UtsuroTomotaka FurutaTakashi Urashima
    • G01B11/02G01B9/02
    • G01M11/0271
    • An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beam 24 and a second light beam 26 both having different phases are generated from light which has passed through an optical component 18, and are interfered with each other to form an interference region 30. A linear line 66, a linear line 70 and linear lines 72 are set within the interference region 30 so as to determine a distribution of light intensities on each of the linear lines 72. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line 72. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.
    • 提供了一种用于高精度地评估光学部件的性能的检查方法。 根据检查方法,由已经通过光学部件18的光产生具有不同相位的第一光束24和第二光束26,并且彼此干涉以形成干涉区域30。 线性线66,线性线70和线性线72设置在干涉区域30内,以便确定每个线性线72上的光强度的分布。 然后,确定与最大光强度对应的频率。 此外,根据为每个线性线72确定的多个频率来确定近似线性线或近似曲线。 然后,基于近似线性或曲线的系数来评价光学部件的像差。
    • 16. 发明授权
    • Optical method of detecting defect and apparatus used therein
    • 检测缺陷的光学方法及其中使用的装置
    • US5894345A
    • 1999-04-13
    • US859423
    • 1997-05-20
    • Kenji TakamotoKanji NishiiMasami ItoAtsushi FukuiKazumasa Takata
    • Kenji TakamotoKanji NishiiMasami ItoAtsushi FukuiKazumasa Takata
    • G01B11/30G01N21/88G01N21/89G01N21/956G01N21/00
    • G01N21/8903
    • An array light source 1 with semiconductor laser sources disposed one-dimensionally and a projective lens 2 are used to illuminate an inspected object so that light beams projected from the array light source form a dotted line on the object. A line sensor is used to receive through an objective lens 3 light emitted from an imaging area 11 away from an illuminated area 12. An image signal, fed to an image processing unit 8 through a pre-processing unit 7 producing an image from signals from the line sensor 4 and a stage 5 is processed, while the stage 5 bearing the object 6 is being gradually moved, to inspect the object 6 for crack defects 9 and 10 by detecting an optically nonhomogeneous portion of the object. The method allows a crack defect of an object, such as a ceramic substrate or a sintered metal product, to be detected fast with high accuracy.
    • 使用具有一维设置的半导体激光源的阵列光源1和投射透镜2来照射被检查物体,使得从阵列光源投射的光束在物体上形成虚线。 线传感器用于通过物镜3接收从成像区域11发出的远离照明区域12的光。图像信号,通过预处理单元7馈送到图像处理单元8,从预处理单元7产生来自 在承载物体6的台架5正在逐渐移动的同时,对线传感器4和台5进行处理,通过检测物体的光学非均匀部分来检查物体6的裂纹缺陷9和10。 该方法允许以高精度快速检测诸如陶瓷基板或烧结金属产品的物体的裂纹缺陷。