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11. 发明授权

US07814376B2 Method and apparatus for frame delineation 失效
标题翻译：框架划分方法和装置
公开(公告)号：US07814376B2
公开(公告)日：2010-10-12
申请号：US10790981
申请日：2004-03-01
申请人： Sanjay Bhardwaj
发明人： Sanjay Bhardwaj
IPC分类号： G06F11/00
CPC分类号： H04J3/0608
摘要： A frame delineation mechanism which alternately considers even and odd sync pattern position possibilities. With the addition of toggle logic, each of 66 possible states of even and odd alignment are exhausted in turn, odd, followed by even, followed by odd and so on, providing synchronization more quickly than known mechanisms. Additionally, faster convergence is reached due to the use of an exhaust register which keeps track of those alignment states that were tested but did not provide synchronization. Until synchronization is acquired, the states indicated in the exhaust register are ignored in further attempts to acquire synchronization.
摘要翻译：交替地考虑偶和奇同步图案位置可能性的帧描绘机构。通过添加切换逻辑，偶数和奇数对齐的66个可能状态中的每一个依次被耗尽，奇数，紧随其后是奇数等等，提供比已知机制更快的同步。另外，由于使用了排除寄存器来跟踪已经测试但没有提供同步的对准状态，所以达到更快的收敛。在获取同步之前，在进一步尝试获取同步时忽略排气寄存器中指示的状态。

12. 发明授权

US5271274A Thin film process monitoring techniques using acoustic waves 失效
标题翻译：使用声波的薄膜过程监测技术
公开(公告)号：US5271274A
公开(公告)日：1993-12-21
申请号：US745005
申请日：1991-08-14
申请人： B. T. Khuri-Yakub , Sanjay Bhardwaj , Krishna Saraswat
发明人： B. T. Khuri-Yakub , Sanjay Bhardwaj , Krishna Saraswat
IPC分类号： G01B17/02 , G01N29/07 , G01N29/12 , G01N29/10 , G01N29/24
CPC分类号： G01N29/12 , G01B17/025 , G01N29/07 , G01N2291/0231 , G01N2291/0237 , G01N2291/02854 , G01N2291/044 , G01N2291/101
摘要： A system and method is disclosed for measuring thickness of at least one film on a substrate by propagating an acoustic wave through the film on a substrate such that echo waves are generated and received by a transducer. An output signal is generated and processed to give a thickness value. The thickness valve is obtained from the time lapse between the propagated wave and receipt of the echo wave; by the frequency domain of the echo wave; or the phase of the echo wave.
摘要翻译：公开了一种系统和方法，用于通过在基板上传播声波通过膜，从而通过传感器产生和接收回波来测量衬底上的至少一个膜的厚度。产生并处理输出信号以给出厚度值。厚度阀是从传播波与回波之间的时间间隔获得的; 通过回波的频域; 或回波的相位。

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