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    • 11. 发明授权
    • Vacuum channel transistor and diode emitting thermal cathode electrons, and method of manufacturing the vacuum channel transistor
    • 真空通道晶体管和二极管发射热阴极电子,以及制造真空通道晶体管的方法
    • US08115207B2
    • 2012-02-14
    • US12606317
    • 2009-10-27
    • Dae Yong KimHyun Tak Kim
    • Dae Yong KimHyun Tak Kim
    • H01L29/76
    • H01J21/10
    • Provided are a transistor and a method of manufacturing the transistor, and more particularly, a vacuum channel transistor emitting thermal cathode electrons and a method of manufacturing the vacuum channel transistor. The vacuum channel transistor includes: a motherboard; a micro heater member having a thin-film structure formed on the motherboard; a cathode member having a thin-film structure spaced apart from a center part of the micro heater member by a first interval and formed on the micro heater member; a gate member formed on both outer walls of upper parts of the cathode member; and an anode member spaced apart from the cathode member by a second interval through spacers disposed on the gate member, wherein a vacuum electron passing area is interposed between the cathode member and the anode member by the second interval.
    • 提供了晶体管和制造晶体管的方法,更具体地,是发射热阴极电子的真空沟道晶体管和制造真空沟道晶体管的方法。 真空通道晶体管包括:主板; 具有形成在母板上的薄膜结构的微加热器构件; 阴极构件,其具有薄膜结构,所述薄膜结构与所述微加热器构件的中心部分间隔开并形成在所述微加热器构件上; 形成在所述阴极部件的上部的两个外壁上的闸板部件; 以及阳极部件,其间隔设置在所述栅极部件上的间隔隔开所述阴极部件的第二间隔,其中,所述阴极部件与所述阳极部件之间以第二间隔插入真空电子通过区域。
    • 14. 发明申请
    • VACUUM CHANNEL TRANSISTOR AND DIODE EMITTING THERMAL CATHODE ELECTRONS, AND METHOD OF MANUFACTURING THE VACUUM CHANNEL TRANSISTOR
    • 真空通道晶体管和二极管发射热阴极电子,以及制造真空通道晶体管的方法
    • US20100102325A1
    • 2010-04-29
    • US12606317
    • 2009-10-27
    • Dae Yong KIMHyun Tak Kim
    • Dae Yong KIMHyun Tak Kim
    • H01L29/78H01L29/04H01L21/336
    • H01J21/10
    • Provided are a transistor and a method of manufacturing the transistor, and more particularly, a vacuum channel transistor emitting thermal cathode electrons and a method of manufacturing the vacuum channel transistor. The vacuum channel transistor includes: a motherboard; a micro heater member having a thin-film structure formed on the motherboard; a cathode member having a thin-film structure spaced apart from a center part of the micro heater member by a first interval and formed on the micro heater member; a gate member formed on both outer walls of upper parts of the cathode member; and an anode member spaced apart from the cathode member by a second interval through spacers disposed on the gate member, wherein a vacuum electron passing area is interposed between the cathode member and the anode member by the second interval.
    • 提供了晶体管和制造晶体管的方法,更具体地,是发射热阴极电子的真空沟道晶体管和制造真空沟道晶体管的方法。 真空通道晶体管包括:主板; 具有形成在母板上的薄膜结构的微加热器构件; 阴极构件,其具有薄膜结构,所述薄膜结构与所述微加热器构件的中心部分间隔开并形成在所述微加热器构件上; 形成在所述阴极部件的上部的两个外壁上的闸板部件; 以及阳极部件,其间隔设置在所述栅极部件上的间隔隔开所述阴极部件的第二间隔,其中,所述阴极部件与所述阳极部件之间以第二间隔插入真空电子通过区域。
    • 15. 发明授权
    • Vacuum channel transistor and manufacturing method thereof
    • 真空通道晶体管及其制造方法
    • US08159119B2
    • 2012-04-17
    • US12241182
    • 2008-09-30
    • Dae Yong KimHyun Tak Kim
    • Dae Yong KimHyun Tak Kim
    • H01J63/04
    • H01J21/10
    • Disclosed are a vacuum channel transistor including a planar cathode layer formed of a material having a low work function or a planar cathode layer including a heat resistant layer formed of a material having a low work function, and a manufacturing method of the same. In the vacuum channel transistor, electrons can be emitted even when a low voltage is applied to a gate layer, a voltage of an anode layer has a small influence on electron emission of a cathode layer, and instability of emission current is obviated. Accordingly, high efficiency and a long lifespan can be achieved, and thus operational stability is secured.
    • 公开了一种真空沟道晶体管及其制造方法,该真空沟道晶体管包括由具有低功函数的材料形成的平面阴极层或包括由具有低功函数的材料形成的耐热层的平面阴极层。 在真空通道晶体管中,即使当向栅极层施加低电压时,也可以发射电子,阳极层的电压对阴极层的电子发射影响较小,并且消除了发射电流的不稳定性。 因此,可以实现高效率和长寿命,从而确保操作稳定性。
    • 16. 发明授权
    • Photoresist stripper composition for semiconductor manufacturing
    • 用于半导体制造的光刻胶剥离剂组合物
    • US07951765B2
    • 2011-05-31
    • US12063745
    • 2006-08-05
    • Hyun Tak KimSeong Hwan ParkJung Hun LimSung Bae KimChan Jin JeongKui Jong Baek
    • Hyun Tak KimSeong Hwan ParkJung Hun LimSung Bae KimChan Jin JeongKui Jong Baek
    • C11D7/50
    • G03F7/425G03F7/426
    • The present invention relates to a photoresist stripper composition for removing the photoresist in the manufacturing process of the semiconductor device. More particularly, the photoresist stripper composition comprises 3-20 wt % of hydrazine hydrate or amine compound; 20˜40 wt % of polar solvent; 0.01-3 wt % of corrosion inhibitor selected from the group consisting of imidazoline derivative, sulfide derivative, sulfoxide derivative, aromatic compound or aromatic compound with hydroxyl group; 0.01-5 wt % of monoalcohol compound of C2-C10; and 40-70 wt % of deionized water. The photoresist stripper composition for manufacturing the semiconductor can remove the photoresist film thermoset by hard bake, dry etching, ashing or ion implantation and denatured by the metallic by-product etched from the bottom metallic film in said process at low temperature easily and quickly, and minimize the corrosion of the bottom metallic wiring in the removing process of the photoresist.
    • 本发明涉及在半导体器件的制造过程中去除光致抗蚀剂的光致抗蚀剂剥离剂组合物。 更具体地,光致抗蚀剂剥离剂组合物包含3-20重量%的水合肼或胺化合物; 20〜40重量%的极性溶剂; 0.01-3重量%的选自咪唑啉衍生物,硫化物衍生物,亚砜衍生物,芳族化合物或具有羟基的芳族化合物组成的组中的腐蚀抑制剂; 0.01-5重量%的C2-C10的一元醇化合物; 和40-70重量%的去离子水。 用于制造半导体的光致抗蚀剂剥离剂组合物可以通过硬烘烤,干蚀刻,灰化或离子注入去除光致抗蚀剂膜热固性,并且在低温下容易且快速地在所述工艺中从底部金属膜蚀刻的金属副产物变性, 在光致抗蚀剂的去除过程中最小化底部金属布线的腐蚀。
    • 17. 发明申请
    • METHOD AND CIRCUIT FOR CONTROLLING RADIANT HEAT OF TRANSISTOR USING METAL-INSULATOR TRANSITION DEVICE
    • 使用金属绝缘体过渡器件控制晶体管辐射热的方法和电路
    • US20110018607A1
    • 2011-01-27
    • US12742430
    • 2008-11-11
    • Hyun Tak KimYong-Wook LeeBong-Jun KimSun-jin Yun
    • Hyun Tak KimYong-Wook LeeBong-Jun KimSun-jin Yun
    • H03K17/60
    • H01L25/16H01L23/62H01L2924/0002H02H3/085H02H5/047H01L2924/00
    • Provided are a method and circuit for controlling heat generation of a power transistor, in which the power transistor can be protected by preventing heat generation of the power transistor by using a metal-insulator transition (MIT) device that can function as a fuse and can be semi-permanently used. The circuit for controlling heat generation of a transistor includes a metal-insulator transition (MIT) device in which abrupt MIT occurs at a predetermined critical temperature; and a power transistor connected to a driving device and controlling power-supply to the driving device, wherein the MIT device is attached to a surface or heating portion of the transistor and is connected to a base terminal or gate terminal of the transistor or a surrounding circuit from a circuit point of view, and wherein when a temperature of the transistor increases to a temperature equal to or greater than the predetermined critical temperature, the MIT device reduces or shuts off a current of the transistor so as to prevent heat generation of the transistor.
    • 提供了一种用于控制功率晶体管的发热的方法和电路,其中功率晶体管可以通过使用能够用作保险丝的金属 - 绝缘体转变(MIT)装置来阻止功率晶体管的发热来保护,并且可以 半永久使用。 用于控制晶体管发热的电路包括金属 - 绝缘体转变(MIT)器件,其中在预定的临界温度下出现突发的MIT; 以及连接到驱动装置并控制对驱动装置的电源的功率晶体管,其中所述MIT装置附接到所述晶体管的表面或加热部分,并且连接到所述晶体管的基极或栅极端子或周围 电路,并且其中当晶体管的温度升高到等于或大于预定临界温度的温度时,MIT器件降低或切断晶体管的电流,以防止晶体管的发热 晶体管。
    • 18. 发明申请
    • Photoresist Stripper Composition for Semiconductor Manufacturing
    • 半导体制造用光阻剥离剂组合物
    • US20090312216A1
    • 2009-12-17
    • US12063745
    • 2006-08-05
    • Hyun Tak KimSeong Hwan ParkJung Hun LimSung Bae KimChan Jin JeongKui Jong BaekWoong HahnSang Won LeeGun-Woong Lee
    • Hyun Tak KimSeong Hwan ParkJung Hun LimSung Bae KimChan Jin JeongKui Jong BaekWoong HahnSang Won LeeGun-Woong Lee
    • G03F7/42
    • G03F7/425G03F7/426
    • The present invention relates to a photoresist stripper composition for removing the photoresist in the manufacturing process of the semiconductor device. More particularly, the photoresist stripper composition comprises 3-20 wt % of hydrazine hydrate or amine compound; 20˜40 wt % of polar solvent; 0.01-3 wt % of corrosion inhibitor selected from the group consisting of imidazoline derivative, sulfide derivative, sulfoxide derivative, aromatic compound or aromatic compound with hydroxyl group; 0.01-5 wt % of monoalcohol compound of C2-C10; and 40-70 wt % of deionized water. The photoresist stripper composition for manufacturing the semiconductor can remove the photoresist film thermoset by hard bake, dry etching, ashing or ion implantation and denatured by the metallic by-product etched from the bottom metallic film in said process at low temperature easily and quickly, and minimize the corrosion of the bottom metallic wiring in the removing process of the photoresist.
    • 本发明涉及在半导体器件的制造过程中去除光致抗蚀剂的光致抗蚀剂剥离剂组合物。 更具体地,光刻胶剥离剂组合物包含3-20重量%的水合肼或胺化合物; 20〜40wt%极性溶剂; 0.01-3重量%的选自咪唑啉衍生物,硫化物衍生物,亚砜衍生物,芳族化合物或具有羟基的芳族化合物组成的组中的腐蚀抑制剂; 0.01-5重量%的C2-C10的一元醇化合物; 和40-70重量%的去离子水。 用于制造半导体的光致抗蚀剂剥离剂组合物可以通过硬烘烤,干蚀刻,灰化或离子注入去除光致抗蚀剂膜热固性,并且在低温下容易且快速地在所述工艺中从底部金属膜蚀刻的金属副产物变性, 在光致抗蚀剂的去除过程中最小化底部金属布线的腐蚀。