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    • 11. 发明授权
    • Target shields for improved magnetic properties of a recording medium
    • 用于提高记录介质的磁性能的目标屏蔽
    • US06482301B1
    • 2002-11-19
    • US09326245
    • 1999-06-04
    • Qixu ChenCharles LeuMark Anthony ShowsPaul Stephen McLeodRajiv Yadav Ranjan
    • Qixu ChenCharles LeuMark Anthony ShowsPaul Stephen McLeodRajiv Yadav Ranjan
    • C23C1432
    • G11B5/851C23C14/34H01J37/34H01J37/3447
    • A collimator system is disclosed for use in an in-line pass-by sputtering system during the fabrication of recording media to improve the data storage density and read/write performance characteristics of the media. The collimator system includes a collimator shield and a collimator honeycomb. The shield includes a rectangular tube having a flange and a frame at inner and outer ends, respectively. The various components of the shield in part serve to prevent possible contamination of substrates due to target atom accumulation on the chamber walls during the sputtering process. The collimator honeycomb is provided for blocking target atoms from contacting the substrate at low incident angles. The collimator honeycomb is comprised of a plurality of collimators which are identical to each other. In a preferred embodiment, the collimators have a hexagonal cross-section taken from a perspective perpendicular to the substrate. The collimators may also have other geometric shapes. It is also contemplated that more than one collimator honeycomb level be used in alternative embodiments.
    • 在制造记录介质期间公开了一种用于在线传递溅射系统的准直器系统,以改善数据存储密度和读/写性能特性。 准直仪系统包括准直器屏蔽和准直器蜂窝。 护罩包括分别在内端和外端具有凸缘和框架的矩形管。 屏蔽件的各种部件部分地用于防止在溅射过程期间由于靶室原子在室壁上的积聚而引起的基板的可能污染。 提供准直器蜂窝用于阻止目标原子以低入射角接触基板。 准直器蜂窝体由多个彼此相同的准直器构成。 在优选实施例中,准直器具有垂直于衬底的透视图的六边形截面。 准直器也可以具有其他几何形状。 还可以想到,在替代实施例中可以使用多于一个准直器蜂窝等级。