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    • 19. 发明申请
    • MICROELECTRONIC SENSOR DEVICE WITH A MODULATED LIGHT SOURCE
    • 具有调制光源的微电子传感器装置
    • US20100165345A1
    • 2010-07-01
    • US12670148
    • 2008-07-17
    • Dominique Maria BrulsJohannes Joseph Hubertina Barbara Schleipen
    • Dominique Maria BrulsJohannes Joseph Hubertina Barbara Schleipen
    • G01N21/59
    • G01N21/552G01N21/648G01N27/745G01N2201/064G01N2201/0691G01N2201/0696
    • The invention relates to a microelectronic sensor device and a method for making optical examinations at a carrier (11), e.g. for the detection of magnetic particles (1) at a contact surface (12) of the carrier (11) by frustrated total internal reflection (FTIR). A light source (21), particularly a laser light source, with a laser modulator (22) are used for emitting an input light beam (L1) into the carrier (11) which is modulated such that optical interferences with reflections (L1′) of the input light beam (L1) from the entrance window (14) or other components of the carrier (11) are reduced/minimized. This can for example be achieved by a pulsed on/off modulation in which the first relaxation minimum of a currently emitted pulse (PN) coincides in the light source (21) with the first relaxation maximum of a reflected pulse (PN-1′). By reducing the effect of interferences, the setup is less prone to disturbances from dimensional variations that are e.g. induced by thermal extension.
    • 本发明涉及一种微电子传感器装置和一种用于在载体(11)上进行光学检查的方法。 用于通过沮丧的全内反射(FTIR)检测载体(11)的接触表面(12)处的磁性颗粒(1)。 使用具有激光调制器(22)的光源(21),特别是具有激光光源的光源(21)将输入光束(L1)发射到被调制的载波(11)中,使得与反射(L1')的光学干涉 (14)的输入光束(L1)或载体(11)的其他部件的距离减小/最小化。 这可以例如通过脉冲开/关调制实现,其中当前发射的脉冲(PN)的第一弛豫最小值与光源(21)中的第一弛豫最小值与反射脉冲(PN-1')的第一弛豫最大值一致, 。 通过减少干扰的影响,该装置不容易受到尺寸变化的干扰。 由热延伸引起。