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    • 13. 发明授权
    • Controlled curvature of stressed micro-structures
    • 应力微结构的受控曲率
    • US06712480B1
    • 2004-03-30
    • US10256558
    • 2002-09-27
    • Omar LeungDavid T. Amm
    • Omar LeungDavid T. Amm
    • G02B7182
    • G02B26/0816
    • The current invention is directed to optical MEM devices and methods for making the same. MEM devices, in accordance with the current invention, have one or more movable micro-structures which are preferably ribbon structures or cantilever structures configured for modulating light. The movable micro-structures are patterned from a device layer comprising a silicon nitride under-layer, a reflective metal top-layer and a ceramic compensating layer. The ceramic compensating layer is provided. to reduce stress in the micro-structures which can lead to curvature. In accordance with the embodiments of the invention, the device layer is formed on a silicon substrate that is preferably etched with trenches before forming the device layer. The device layer is then patterned using lithographic masking and etching techniques to release the patterned device layer and form the movable micro-structures. Portions of the device layer which are formed over the trenches provide support for the released patterned device layer.
    • 本发明涉及光学MEM器件及其制造方法。 根据本发明的MEM器件具有一个或多个可移动的微结构,其优选地被配置用于调制光的带状结构或悬臂结构。 可移动微结构从包括氮化硅底层,反射金属顶层和陶瓷补偿层的器件层图案化。 提供陶瓷补偿层。 以减少可能导致曲率的微结构中的应力。 根据本发明的实施例,器件层形成在硅衬底上,优选在形成器件层之前用沟槽蚀刻。 然后使用光刻掩模和蚀刻技术对器件层进行构图,以释放图案化器件层并形成可移动微结构。 在沟槽上形成的器件层的部分为释放的图案化器件层提供支撑。
    • 14. 发明授权
    • Configurable input device
    • 可配置的输入设备
    • US08799803B2
    • 2014-08-05
    • US13039510
    • 2011-03-03
    • David T. Amm
    • David T. Amm
    • G06F3/048G06F3/01
    • G06F3/0216G06F1/169G06F3/01G06F3/0425G06F3/048G06F3/04886
    • There are provided methods and systems related to having an input device configured according to a position of a user's hand relative to the input device. In particular, in some embodiments, a method of operating a computing system is provided that includes determining an operational context of the computing system utilizing a processor of the system and configuring an input device for the system based on the operational context. The input device includes a plurality of discrete input members. The method also includes displaying a virtual image representative of the input device on a display of the system. A position of a user's digits relative to the input device is sensed and the input device is reconfigured based on the sensed position of the user's digits. An image of the user's digits overlaying the virtual image representative of the input device is provided on a display of the computing system.
    • 提供了与根据用户的手相对于输入装置的位置配置的输入装置相关的方法和系统。 特别地,在一些实施例中,提供了一种操作计算系统的方法,其包括利用所述系统的处理器确定所述计算系统的操作上下文,并且基于所述操作上下文来配置所述系统的输入设备。 输入装置包括多个离散输入构件。 该方法还包括在系统的显示器上显示代表输入设备的虚拟图像。 感测到用户数字相对于输入设备的位置,并且基于感测到的用户数字的位置重新配置输入设备。 在计算系统的显示器上提供覆盖代表输入设备的虚拟图像的用户数字的图像。
    • 15. 发明申请
    • CONFIGURABLE INPUT DEVICE
    • 可配置输入设备
    • US20120227006A1
    • 2012-09-06
    • US13039510
    • 2011-03-03
    • David T. Amm
    • David T. Amm
    • G06F3/048
    • G06F3/0216G06F1/169G06F3/01G06F3/0425G06F3/048G06F3/04886
    • There are provided methods and systems related to having an input device configured according to a position of a user's hand relative to the input device. In particular, in some embodiments, a method of operating a computing system is provided that includes determining an operational context of the computing system utilizing a processor of the system and configuring an input device for the system based on the operational context. The input device includes a plurality of discrete input members. The method also includes displaying a virtual image representative of the input device on a display of the system. A position of a user's digits relative to the input device is sensed and the input device is reconfigured based on the sensed position of the user's digits. An image of the user's digits overlaying the virtual image representative of the input device is provided on a display of the computing system.
    • 提供了与根据用户的手相对于输入装置的位置配置的输入装置相关的方法和系统。 特别地,在一些实施例中,提供了一种操作计算系统的方法,其包括利用所述系统的处理器确定所述计算系统的操作上下文,并且基于所述操作上下文来配置所述系统的输入设备。 输入装置包括多个离散输入构件。 该方法还包括在系统的显示器上显示代表输入设备的虚拟图像。 感测到用户数字相对于输入设备的位置,并且基于感测到的用户数字的位置重新配置输入设备。 在计算系统的显示器上提供覆盖代表输入设备的虚拟图像的用户数字的图像。
    • 18. 发明授权
    • Hybrid analog/digital spatial light modulator
    • 混合模拟/数字空间光调制器
    • US07573631B1
    • 2009-08-11
    • US11352763
    • 2006-02-13
    • David T. Amm
    • David T. Amm
    • G02F1/03G02B26/00
    • G02B26/0808G02B5/1828G02B26/0841G02F2203/12G09G3/344G09G2310/0275
    • One embodiment relates to a hybrid micro electromechanical systems (MEMS) based spatial light modulator (SLM) capable of operating in both analog and digital modes. The hybrid SLM includes a substrate having an upper surface, a number of movable ribbons disposed a predetermined distance above the upper surface of the substrate, the ribbons having light reflective surfaces formed on their upper side facing away from the upper surface of the substrate, and a number of standoffs having a predetermined height positioned between a lower surface of the movable ribbons and the upper surface of the substrate. The standoffs are configured to limit the ribbon deflection of movable ribbons toward the upper surface of the substrate when the SLM is operated in digital mode with snap-down voltages applied between the ribbon and drive electronics in the substrate. Other embodiments are also disclosed.
    • 一个实施例涉及能够在模拟和数字模式下操作的基于混合微机电系统(MEMS)的空间光调制器(SLM)。 混合SLM包括具有上表面的衬底,多个可移动的带,其设置在衬底的上表面上方预定距离,所述带在其上侧形成为背离衬底的上表面的光反射表面,以及 具有预定高度的多个间隔位于可移动带的下表面和基底的上表面之间。 当SLM在数字模式下操作时,支架被配置为将可移动带的带偏转限制到衬底的上表面,其中施加在衬底中的色带和驱动电子器件之间的卡扣电压。 还公开了其他实施例。
    • 20. 发明授权
    • Micro-support structures
    • 微支撑结构
    • US07123399B2
    • 2006-10-17
    • US11054056
    • 2005-02-09
    • Christopher GudemanJames HunterRichard YehDavid T. Amm
    • Christopher GudemanJames HunterRichard YehDavid T. Amm
    • G02B26/00
    • B81C1/00111B81B2203/0136B81B2203/0307B81C2201/0109G02B26/0808
    • A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one or more support regions comprising a plurality of anchor support features and a plurality of post support features. The MEM device is preferably an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions each comprising a plurality of anchor support features and a plurality of post support features. In accordance with the method of the embodiments, the positions of the anchor and post support features, the number of anchor and support features and the spacings between the support features can selected during fabrication of the device to determine an operating condition of the MEM device.
    • 根据本发明的MEM装置包括优选带状结构或悬臂结构的一个或多个可移动微结构。 带状结构或悬臂结构优选地通过包括多个锚固支撑特征和多个支撑支撑特征的一个或多个支撑区域耦合到基底结构。 MEM装置优选地是具有多个可移动带结构的光学MEM装置,每个可移动带结构各自由相对的端部支撑,每个支撑区域包括多个锚固支撑特征和多个支撑支撑特征。 根据实施例的方法,可以在制造装置期间选择锚和支柱特征的位置,锚固和支撑特征的数量以及支撑特征之间的间隔,以确定MEM装置的操作状态。