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    • 12. 发明申请
    • Microactuator,head gimbal assembly, and magnetic disk drive
    • 微型制动器,磁头万向架组件和磁盘驱动器
    • US20090080116A1
    • 2009-03-26
    • US12284252
    • 2008-09-19
    • Haruhide TakahashiToshiki Hirano
    • Haruhide TakahashiToshiki Hirano
    • G11B21/24
    • G11B5/4826G11B5/4873G11B5/5552
    • Embodiments of the present invention help to suppress reduction of the operation quantity of a microactuator. According to one embodiment, a microactuator comprises a silicon substrate and a piezoelectric element. The silicon substrate has some rigidity and provides elastic counter force to the piezoelectric element. In the piezoelectric element a secondary piezoelectric layer is laminated on a primary piezoelectric layer opposite from the silicon substrate. The contraction force of the secondary piezoelectric layer acts on the primary piezoelectric layer so that it bends toward the secondary piezoelectric layer opposite from the silicon substrate. When the primary piezoelectric layer expands, the contraction force of the secondary piezoelectric layer acts on the primary piezoelectric layer so that it warps against the primary piezoelectric layer.
    • 本发明的实施例有助于抑制微致动器的操作量的减少。 根据一个实施例,微致动器包括硅衬底和压电元件。 硅衬底具有一定的刚性并且向压电元件提供弹性反作用力。 在压电元件中,次级压电层层压在与硅衬底相反的初级压电层上。 次级压电层的收缩力作用在初级压电层上,使其向与第二压电层相对的硅衬底弯曲。 当主压电层膨胀时,次级压电层的收缩力作用在初级压电层上,使其与主压电层翘曲。