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11. 发明授权

US07619718B2 Method and system for active purging of pellicle volumes 失效
标题翻译：主要吹扫防护薄膜的方法和系统
公开(公告)号：US07619718B2
公开(公告)日：2009-11-17
申请号：US10679324
申请日：2003-10-07
申请人： Florence Luo , Herman Vogel , George H Harrold , Nicolaas ten Kate
发明人： Florence Luo , Herman Vogel , George H Harrold , Nicolaas ten Kate
IPC分类号： G03B27/62
CPC分类号： G03F1/64 , G03F7/70933 , G03F7/70983
摘要： The present invention provides methods and systems for fast purging of pellicle volumes. A purge device has a base which is enclosed in a controlled environment filled with purge gas. The base has a cavity formed on a surface therein. The cavity receives a reticle-pellicle assembly including a pellicle surface and an enclosed pellicle volume. A first region within the cavity can be formed to hold purging gas at a high pressure. A gap region is formed below the pellicle within the cavity. A displacement force on the pellicle due to a pressure difference between purging gas in the enclosed volume and purging gas in the gap region is kept within a tolerance range of the pellicle. According to further embodiments, a purge device is provided that includes a flow barrier (e.g., non-contacting and/or contacting barriers). A pressure balancing plate and/or flow resistant plates are provided in a purge device.
摘要翻译：本发明提供用于快速吹扫防护薄膜体积的方法和系统。净化装置具有封闭在充满吹扫气体的受控环境中的基部。底座具有形成在其中的表面上的空腔。空腔容纳包括防护薄膜表面和封闭防护薄膜体积的掩模版防护薄膜组件。可以形成腔内的第一区域以保持高压下的清洗气体。间隙区域形成在空腔内的防护薄膜下方。由于封闭容积中的吹扫气体与间隙区域中的净化气体之间的压力差，防护薄膜上的位移力保持在防护薄膜的容许范围内。根据另外的实施例，提供了包括流动屏障（例如，非接触和/或接触屏障）的清洗装置。在净化装置中设置压力平衡板和/或防流动板。

12. 发明授权

US5590537A Dry gas curtain for cryogenic surface 失效
标题翻译：用于低温表面的干燥气幕
公开(公告)号：US5590537A
公开(公告)日：1997-01-07
申请号：US524555
申请日：1995-09-07
申请人： Herman Vogel
发明人： Herman Vogel
IPC分类号： F24F9/00 , G01K17/00 , F25B19/00
CPC分类号： G01K17/00 , F24F9/00
摘要： An apparatus to provide a laminar curtain of dry gas over a cryogenic working surface includes a housing duct extending longitudinally from the working surface. A honeycomb member fills a section of the duct adjacent to the working surface, each honeycomb cell having a through channel in the longitudinal direction. A porous foam with through porosity fills a section of the duct adjacent to the honeycomb member oppositely from the working surface. A plenum is adjacent to the porous member oppositely from the honeycomb. Dry gas is supplied to the plenum to flow through the foam and honeycomb to effect the laminar curtain.
摘要翻译：在低温工作表面上提供干燥气体的层状帘幕的装置包括从工作表面纵向延伸的壳体管道。蜂窝构件填充与工作表面相邻的管道的一部分，每个蜂窝单元在纵向方向上具有通道。具有通孔孔隙的多孔泡沫填充与蜂窝构件相邻的工作表面相邻的管道的一部分。气室与蜂窝体相对的多孔构件相邻。干燥的气体被供应到集气室以流过泡沫和蜂窝以实现层流帘。

13. 发明授权

US4802823A Stress relief support structures and assemblies 失效
标题翻译：应力消除支撑结构和组件
公开(公告)号：US4802823A
公开(公告)日：1989-02-07
申请号：US191324
申请日：1988-05-09
申请人： Gary W. Decko , Yao Peng , Herman Vogel
发明人： Gary W. Decko , Yao Peng , Herman Vogel
IPC分类号： F01D5/14 , F01D5/18
CPC分类号： F01D5/147 , Y02T50/673
摘要： An improved design for a structure such as a turbine vane or blade subjected to extreme temperature levels and/or gradients resulting in extreme deformation stresses within the structure. The present structures comprise an interior skeletal support having a plurality of spaced, flexible support legs which extend out and are attached to spaced areas of a flexible outer surface skin which is subjected to extreme temperature levels or temperature gradients during use. The extreme stresses normally developed by the expansion of the surface skin are avoided by the ability of the skin to move minutely and flex the spaced support legs to variable extents and in predetermined directions.
摘要翻译：用于诸如涡轮叶片或叶片经过极端温度水平和/或梯度的结构的改进的设计，导致结构内的极端变形应力。本结构包括具有多个间隔开的柔性支撑腿的内部骨架支撑件，其伸出并附接到在使用期间经受极端温度水平或温度梯度的柔性外表皮的间隔区域。通过表皮的膨胀而通常产生的极端压力通过皮肤微小移动并使间隔开的支撑腿弯曲到可变的范围并沿预定方向的能力来避免。

14. 发明申请

US20110188049A1 Assembly Comprising a Conditioning System and at Least One Object, a Conditioning System, a Lithographic Apparatus and Methods 失效
标题翻译：包括调节系统和至少一个对象的组装，调节系统，平版印刷设备和方法
公开(公告)号：US20110188049A1
公开(公告)日：2011-08-04
申请号：US13084372
申请日：2011-04-11
申请人： Ronald VAN DER HAM , Tjarko Adriaan Rudolf Van Empel , Herman Vogel , Niek Jacobus Johannes Roset
发明人： Ronald VAN DER HAM , Tjarko Adriaan Rudolf Van Empel , Herman Vogel , Niek Jacobus Johannes Roset
IPC分类号： G01B11/02
CPC分类号： G03F7/70933 , G03F7/70775 , G03F7/70858 , G03F7/70866 , Y10T137/8593
摘要： An assembly including a conditioning system and an object moveable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from the fluid outlet passages depending on a position of the object.
摘要翻译：公开了一种组件，其包括调节系统和可移动到待调节区域中和/或之外的物体。调节系统具有流体出口通道，以将调节流体供应到待调节的区域，并且构造成根据物体的位置调节调节流体与流体出口通道的流出。

15. 发明授权

US07924399B2 Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods 有权
标题翻译：组件包括调节系统和至少一个物体，调节系统，光刻设备和方法
公开(公告)号：US07924399B2
公开(公告)日：2011-04-12
申请号：US11389493
申请日：2006-03-27
申请人： Ronald Van Der Ham , Tjarko Adriaan Rudolf Van Empel , Herman Vogel , Niek Jacobus Johannes Roset
发明人： Ronald Van Der Ham , Tjarko Adriaan Rudolf Van Empel , Herman Vogel , Niek Jacobus Johannes Roset
IPC分类号： A61N5/00 , G03B27/32 , G03B27/42 , G03B27/52 , G03B27/58 , G03B27/62
CPC分类号： G03F7/70933 , G03F7/70775 , G03F7/70858 , G03F7/70866 , Y10T137/8593
摘要： An assembly including a conditioning system and an object movable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from the fluid outlet passages depending on a position of the object.
摘要翻译：公开了一种组件，其包括调节系统和可移动到待调节区域中和/或之外的物体。调节系统具有流体出口通道，以将调节流体供应到待调节的区域，并且构造成根据物体的位置调节调节流体与流体出口通道的流出。

16. 发明授权

US07578168B2 Increasing gas gauge pressure sensitivity using nozzle-face surface roughness 有权
标题翻译：使用喷嘴面表面粗糙度增加气表压力灵敏度
公开(公告)号：US07578168B2
公开(公告)日：2009-08-25
申请号：US11769421
申请日：2007-06-27
申请人： Herman Vogel
发明人： Herman Vogel
IPC分类号： G01B13/08
CPC分类号： G01B13/12
摘要： A gas gauge for sensing distance to an object includes a gas supply system and a nozzle that supplies the gas from the gas supply system to a space between the nozzle and the object. For example, the gas supply system supplies the gas with a flow rate that corresponds to a flow in a transitional region between laminar flow and turbulent flow. A surface of the nozzle may be roughened so as to increase a friction factor across the surface, which increases gas pressure drop and also a gain of the nozzle. Noise generated by the increased flow rate may be attenuated using one or more strategically placed Helmholtz attenuators and/or snubbers.
摘要翻译：用于感测到物体的距离的气量计包括气体供应系统和将气体从气体供应系统供应到喷嘴和物体之间的空间的喷嘴。例如，气体供应系统为气体提供与层流和湍流之间的过渡区域中的流动相对应的流量。喷嘴的表面可以被粗糙化，以便增加穿过表面的摩擦系数，这增加了气体压降以及喷嘴的增益。由增加的流量产生的噪声可以使用一个或多个策略性放置的亥姆霍兹衰减器和/或缓冲器来衰减。

17. 发明授权

US07411650B2 Immersion photolithography system and method using microchannel nozzles 有权
标题翻译：浸入式光刻系统和使用微通道喷嘴的方法
公开(公告)号：US07411650B2
公开(公告)日：2008-08-12
申请号：US11053328
申请日：2005-02-09
申请人： Herman Vogel , Klaus Simon , Antonius Theodorus Anna Maria Derksen
发明人： Herman Vogel , Klaus Simon , Antonius Theodorus Anna Maria Derksen
IPC分类号： G03B27/52 , G03B27/54
CPC分类号： G03F7/70341 , G03F7/20 , G03F7/70358 , G03F7/709 , H01L21/027
摘要： A liquid immersion photolithography system includes an exposure system that exposes a substrate with electromagnetic radiation and includes a projection optical system that focuses the electromagnetic radiation on the substrate. A liquid supply system provides liquid flow between the projection optical system and the substrate. An optional plurality of micronozzles are arranged around the periphery of one side of the projection optical system so as to provide a substantially uniform velocity distribution of the liquid flow in an area where the substrate is being exposed.
摘要翻译：液浸式光刻系统包括：用电磁辐射曝光基板的曝光系统，包括将电磁辐射聚焦在基板上的投影光学系统。液体供应系统在投影光学系统和基板之间提供液体流动。可选的多个微喷嘴布置在投影光学系统的一侧的周边周围，以便在衬底被暴露的区域中提供基本均匀的液流速度分布。

18. 发明申请

US20060123889A1 Immersion lithography proximity sensor having a nozzle shroud with flow curtain 失效
公开(公告)号：US20060123889A1
公开(公告)日：2006-06-15
申请号：US11353007
申请日：2006-02-14
申请人： Herman Vogel
发明人： Herman Vogel
IPC分类号： G01B13/12
CPC分类号： G03F7/70933 , G03F7/70341 , G03F9/7023
摘要： The present invention is directed to an immersion lithography proximity sensor having a nozzle shroud with a flow curtain. The immersion lithography proximity sensor includes a shroud that affixes to the nozzle. A plenum is located inside the shroud that holds a shroud liquid, which is fed into the plenum through one or more intake holes. The shroud liquid is emitted out through a series of openings, such as holes or slots, along a bottom surface of the shroud in a direction away from the nozzle. The shroud liquid that is emitted forms a curtain around the nozzle to prevent cross currents from impacting the flow of liquid out of the nozzle.

19. 发明授权

US07017390B1 Proximity sensor nozzle shroud with flow curtain 失效
标题翻译：接近传感器喷嘴罩带流幕
公开(公告)号：US07017390B1
公开(公告)日：2006-03-28
申请号：US11005246
申请日：2004-12-07
申请人： Herman Vogel
发明人： Herman Vogel
IPC分类号： G01B13/08
CPC分类号： G03F7/70933 , G03F7/70341 , G03F9/7023
摘要： The present invention is directed to an apparatus for reducing the impact of cross winds on gas flow emitted from a nozzle. The apparatus includes a shroud that affixes to the nozzle. A plenum is located inside the shroud that holds a shroud gas, which is fed into the plenum through one or more intake holes. The shroud gas is emitted out through a series of openings, such as holes or slots, along a bottom surface of the shroud in a direction away from the nozzle. The shroud gas that is emitted forms an air curtain around the nozzle to prevent cross winds from impacting the flow of gas out of the nozzle. In one application, the apparatus is used with a lithography gas gauge proximity sensor. The apparatus can also be used with nozzles that emit liquids, such as, for example, an immersion lithography proximity sensor.
摘要翻译：本发明涉及一种用于减少横风对从喷嘴排出的气流的影响的装置。该装置包括固定在喷嘴上的护罩。一个充气室位于护罩内，保持护罩气体，护罩气体通过一个或多个进气孔进入气室。护罩气体沿着远离喷嘴的方向沿罩体的底表面通过一系列开口（例如孔或狭槽）排出。排出的护罩气体在喷嘴周围形成一个空气幕，以防止交叉风影响气流从喷嘴流出。在一个应用中，该设备与光刻气量计接近传感器一起使用。该设备还可以与喷射液体的喷嘴一起使用，例如浸没式光刻接近传感器。

20. 发明授权

US5762381A Connecting apparatus for conveyance of cryogenic fluid 失效
标题翻译：用于输送低温液体的连接装置
公开(公告)号：US5762381A
公开(公告)日：1998-06-09
申请号：US569535
申请日：1995-12-08
申请人： Herman Vogel , Richard T. Ferranti
发明人： Herman Vogel , Richard T. Ferranti
IPC分类号： F16L23/032 , F16L59/18 , F16L59/16
CPC分类号： F16L23/04 , F16L23/12 , F16L59/184 , Y10S285/904
摘要： A connecting apparatus for conveyance of cryogenic fluid has a pair of connecting members formed of thermal insulating material. Each has a flange with an axial tubular protrusion and a rim extending over the protrusion so as to form an annular cavity therebetween. Each flange and its protrusion has a central bore. When the two members are fitted together, the combined bore conveys of cryogenic fluid therethrough. The protrusions have overlapping lips with a snug fit to substantially retain the cryogenic fluid in the combined bore. A detachable retainer holds the members in union with an o-ring seal between the rims. The respective cavities form an enclosed cavity that provides thermal insulation between the ring seal and the tubular protrusions for the cryogenic fluid in the common bore.
摘要翻译：用于输送低温流体的连接装置具有由绝热材料形成的一对连接构件。每一个都具有凸缘，该凸缘具有轴向的管状突出部和在突出部上延伸的边缘，以在它们之间形成环形空腔。每个凸缘及其突起都有一个中心孔。当两个构件装配在一起时，组合的孔传送低温液体通过其中。突起具有重叠的唇部，具有紧密配合，以将低温流体基本上保持在组合的孔中。可拆卸的保持器保持构件与边缘之间的O形环密封件结合。相应的空腔形成封闭的腔体，其在环形密封件和用于公共孔中的低温流体的管状突起之间提供热绝缘。

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