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    • 18. 发明授权
    • Chemically amplified radiation-sensitive composition
    • 化学放大的辐射敏感组合物
    • US5550004A
    • 1996-08-27
    • US292899
    • 1994-08-19
    • Kenji Honda
    • Kenji Honda
    • C08F12/22C08F12/00C08F12/24C08G8/28C08G8/30C08G8/38C08L25/00C08L25/18C08L61/00C08L61/04C09K13/06G03F7/004G03F7/023G03F7/039H01L21/027
    • C08G8/38G03F7/0045G03F7/0233G03F7/0392Y10S430/106
    • A chemically amplified-type radiation-sensitive composition comprising:(a) an alkali-soluble binder resin made by a condensation reaction of:(i) hydroxystyrene moiety having formula [1] or [2]: ##STR1## wherein x is an integer from 2 to 300; with (ii) a monomethylolated phenolic compound having a formula [8]: ##STR2## wherein R.sub.1 and R.sub.2 are individually selected from the group consisting of lower alkyl group having 1-4 carbon atoms, lower alkoxy group having 1-4 carbon atoms, amino group, and carboxylic acid group; wherein R.sub.3 and R.sub.4 are individually selected from the group consisting of hydrogen, lower alkyl group having 1-4 carbon atoms, lower alkoxy groups having 1-4 carbon atoms, an amino group, and a carboxylic group; and wherein a mole ratio of the hydroxystyrene moiety to the monomethylolated phenolic compound is from about 1:10 to about 10:1;(b) at least one alkaline dissolution inhibitor containing acid-cleavable groups; and(c) at least one compound that results in generation of an acidic moiety under irradiation.
    • 一种化学放大型辐射敏感性组合物,其包含:(a)通过以下缩合反应制备的碱溶性粘合剂树脂:(i)具有式[1]或[2]的羟基苯乙烯部分: > [2]其中x是2至300的整数; 与(ii)具有式[8]的单羟基化酚类化合物:其中R 1和R 2分别选自具有1-4个碳原子的低级烷基,具有1-4个碳原子的低级烷氧基 碳原子,氨基和羧酸基团; 其中R3和R4分别选自氢,具有1-4个碳原子的低级烷基,具有1-4个碳原子的低级烷氧基,氨基和羧基; 并且其中羟基苯乙烯部分与单羟甲基化酚类化合物的摩尔比为约1:10至约10:1; (b)至少一种含有酸可裂解基团的碱性溶解抑制剂; 和(c)至少一种导致在照射下产生酸性部分的化合物。