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11. 发明授权

US4850709A Fabri-perot spectroscopy method and apparatus utilizing the same 失效
标题翻译： Fabri-perot光谱法和利用该法的装置
公开(公告)号：US4850709A
公开(公告)日：1989-07-25
申请号：US19665
申请日：1987-02-27
申请人： Mikichi Ban , Osamu Kakuchi , Hironori Yamamoto , Masaru Ohtsuka , Osamu Shiba , Kazuhiko Hara
发明人： Mikichi Ban , Osamu Kakuchi , Hironori Yamamoto , Masaru Ohtsuka , Osamu Shiba , Kazuhiko Hara
IPC分类号： G01J3/26
CPC分类号： G01J3/26
摘要： Fabri-Perot spectroscopy method comprises a step of directing a light beam at a first refraction angle to a first Fabri-Perot interference plate and a step of directing a light beam transmitted through the first Fabri-Perot interference plate to a second Fabri-Perot interference plate at a second refraction angle, and Fabri-Perot spectroscopy apparatus comprises Fabri-Perot interference plates, a control device for changing a spacing between the Fabri-Perot interference plates, a first optical device for directing a light beam to the first Fabri-Perot interference plate at a first refraction angle, a second optical device for directing the light beam transmitted through the Fabri-Perot interference plate at a second refraction angle different from the first refraction angle to the second Fabri-Perot interference plate, and a seal for externally sealing the Fabri-Perot interference plates. Gas for protecting the Fabri-Perot interference plates is filled in the sealed space.
摘要翻译： Fabri-Pérot光谱法包括将第一折射角的光束引导到第一Fabri-Pérot干涉板的步骤和将透射通过第一Fabri-Pérot干涉板的光束引导到第二Fabri-Pérot干涉平板以第二折射角，Fabri-Pérot光谱装置包括Fabri-Pérot干涉板，用于改变Fabri-Pérot干涉板之间的间距的控制装置，用于将光束引导到第一Fabri-Pérot的第一光学装置在第一折射角处的干涉板，用于将透射通过Fabri-Pérot干涉板的光束以不同于第一折射角的第二折射角引导到第二Fabri-Pérot干涉板的第二光学装置，以及用于外部的密封件密封Fabri-Pérot干涉板。用于保护Fabri-Pérot干涉板的气体填充在密封空间中。

12. 发明授权

US6004187A Method and apparatus for measuring film thickness and film thickness distribution during polishing 失效
标题翻译：研磨过程中测量薄膜厚度和薄膜厚度分布的方法和装置
公开(公告)号：US6004187A
公开(公告)日：1999-12-21
申请号：US917853
申请日：1997-08-27
申请人： Masaru Nyui , Mikichi Ban
发明人： Masaru Nyui , Mikichi Ban
IPC分类号： G01B11/06 , B24B49/12 , H01L21/66 , B24B49/00 , B24B5/00
CPC分类号： B24B37/013 , H01L22/26
摘要： Disclosed is a method of polishing the surface of a film provided on a substrate, by use of a polishing device, while relatively moving the film surface and the polishing device. The method includes a position detecting step for detecting a predetermined position on the surface of the film, a first measurement step for measuring an absolute value of the film thickness at the predetermined position, and a second measurement step for measuring film thickness information of the film about the predetermined position, on the basis of a measured value obtained through the first measurement step. The method also includes a film thickness distribution measurement step for detecting a film thickness distribution of the film, on the basis of a data obtained through the first and second measurement steps, and a control step for controlling continuation/discontinuation of polishing, on the basis of a data obtained through the film thickness distribution measurement step.
摘要翻译：公开了通过使用研磨装置，在使膜面和研磨装置相对移动的同时研磨设置在基板上的膜的表面的方法。该方法包括用于检测胶片表面上的预定位置的位置检测步骤，用于测量预定位置处的膜厚绝对值的第一测量步骤，以及用于测量胶片厚度信息的第二测量步骤基于通过第一测量步骤获得的测量值来关于预定位置。该方法还包括基于通过第一和第二测量步骤获得的数据以及用于控制抛光的持续/停止的控制步骤，用于检测膜的膜厚度分布的膜厚度分布测量步骤通过膜厚分布测量步骤获得的数据。

13. 发明授权

US4294538A Image forming optical system 失效
标题翻译：成像光学系统
公开(公告)号：US4294538A
公开(公告)日：1981-10-13
申请号：US116752
申请日：1980-01-30
申请人： Mikichi Ban
发明人： Mikichi Ban
IPC分类号： G02B17/06 , G02B27/00 , G03F7/20 , G03B27/48 , G02B21/18 , G03B27/50 , G03B27/70
CPC分类号： G02B17/0636 , G03F7/70066 , G03F7/702 , G03F7/70233 , G03F7/70358
摘要： An optical system for forming a spot object or an arcuate object into an arcuate image or a spot image. This optical system has a band-like spherical mirror obtained by sectioning a concave spherical mirror. By the band-like spherical mirror, the spot object disposed on the rotational symmetry axis other than the center of curvature may be imaged into an arcuate form on a certain surface perpendicular to the rotational symmetry axis. Conversely, an arcuate object on said certain surface may form a spot image at the position whereat the spot object is disposed.
摘要翻译：一种用于将斑点物体或弓形物体形成为弓形图像或斑点图像的光学系统。该光学系统具有通过对凹球面镜进行切片而获得的带状球面镜。通过带状球面镜，设置在除了曲率中心之外的旋转对称轴上的斑点物体可以在垂直于旋转对称轴线的某个表面上成像为弓形。相反，所述特定表面上的弓形物体可以在放置点对象的位置处形成斑点图像。

14. 发明授权

US6142855A Polishing apparatus and polishing method 失效
公开(公告)号：US6142855A
公开(公告)日：2000-11-07
申请号：US182457
申请日：1998-10-30
申请人： Masaru Nyui , Mikichi Ban , Takehiko Suzuki , Yasushi Sugiyama
发明人： Masaru Nyui , Mikichi Ban , Takehiko Suzuki , Yasushi Sugiyama
IPC分类号： B24B37/013 , B24B49/12 , B24B7/00
CPC分类号： B24B37/013 , B24B49/12
摘要： In order to measure a thickness of a surface to be polished of a material to be polished for a short time, two-dimensional images are obtained from a light reflected from the surface to be polished of the material to be polished, a location at which a thickness is to be observed is specified by the obtained two-dimensional images, and thickness measurement is carried out.

15. 发明授权

US5087121A Depth/height measuring device 失效
标题翻译：深度/高度测量装置
公开(公告)号：US5087121A
公开(公告)日：1992-02-11
申请号：US593253
申请日：1990-10-01
申请人： Osamu Kakuchi , Mikichi Ban
发明人： Osamu Kakuchi , Mikichi Ban
IPC分类号： G01B11/06 , G01B11/22
CPC分类号： G01B11/22 , G01B11/0608
摘要： A device for measuring depth of a groove formed on an article includes a light source for illuminating the article, a first detector for receiving light from a portion of the article having a groove and being illuminated by the light source, and for detecting a spectral reflectance in relation to the received light, a second detector for receiving light from the article illuminated by the light source and for detecting a spectral reflectance in relation to the received light, the second detector being effective to detect the spectral reflectance in a way not affected or substantially not affected by the groove of the article as compared with the detection by the first detector, and a depth detector for detecting the depth of the groove on the basis of the results of detection by the first and second detectors.
摘要翻译：用于测量形成在物品上的凹槽的深度的装置包括用于照亮物品的光源，用于接收来自具有凹槽并由光源照射的物品的一部分的光的第一检测器，并用于检测光谱反射率相对于所接收的光，第二检测器用于接收由光源照射的物品的光并且用于检测相对于接收的光的光谱反射率，第二检测器有效地以不受影响的方式检测光谱反射率，与第一检测器的检测相比基本上不受制品的凹槽的影响;以及深度检测器，用于基于第一和第二检测器的检测结果来检测凹槽的深度。

16. 发明授权

US4787749A Method and apparatus for measuring the thickness of a thin film using the spectral reflection factor of the film 失效
标题翻译：使用该膜的光谱反射因子测量薄膜厚度的方法和装置
公开(公告)号：US4787749A
公开(公告)日：1988-11-29
申请号：US935381
申请日：1986-11-26
申请人： Mikichi Ban , Yuki Toriumi , Kazuhiko Hara
发明人： Mikichi Ban , Yuki Toriumi , Kazuhiko Hara
IPC分类号： G01B11/06
CPC分类号： G01B11/0625
摘要： A device, usable with an object having a layer, for measuring the thickness of the layer, includes a system for irradiating the object with light while changing its wavelength, the irradiating system having a light-emitting portion disposed opposed to the surface of the object, a photodetecting unit for detecting the light from the object irradiated by the irradiating system, the photodetecting unit having a light-receiving portion disposed opposed to the object, a system for detecting the thickness of the layer of the object on the basis of the detection by the photo-detecting unit, and a setting mechanism for positioning the object, relative to the light-emitting portion and the light-receiving portion, at a distance that substantially corresponds to an extremum of the quantity of light which is to be received by the light-receiving portion and which is variable with the positional relation of the object with the light-emitting portion and the light-receiving portion.
摘要翻译：可用于具有层的物体的用于测量层的厚度的装置包括用于在改变其波长的同时照射物体的系统，该照射系统具有与物体的表面相对设置的发光部分用于检测由照射系统照射的物体的光的光电检测单元，具有与物体相对设置的受光部的光电检测单元，基于检测来检测物体的层的厚度的系统通过光检测单元和用于相对于发光部分和光接收部分定位物体的设置机构，其距离基本上对应于将被接收的光量的极值的极值光接收部分，其可以随着物体与发光部分和光接收部分的位置关系而变化。

17. 发明授权

US4322130A Phase shifting mirror 失效
标题翻译：相移镜
公开(公告)号：US4322130A
公开(公告)日：1982-03-30
申请号：US79086
申请日：1979-09-26
申请人： Susumu Ito , Mikichi Ban
发明人： Susumu Ito , Mikichi Ban
IPC分类号： C03C17/36 , G02B5/08 , G02B5/26 , G02B5/28 , G02B5/30 , G02B27/28
CPC分类号： G02B5/0858 , C03C17/36 , C03C17/3605 , C03C17/3615 , C03C17/3621 , C03C17/3628 , C03C17/3642 , C03C17/3649 , C03C17/3663 , G02B27/288 , G02B5/3083
摘要： A phase shifting mirror comprising a thin film layer of metal provided on a substrate, and a thin film layer of dielectric material provided on said thin film layer of metal, wherein by utilization of a phase difference between a P-polarization reflected component and an S-polarization reflected component resulting from the reflection on the boundary surface between the layer of metal and the layer of dielectric material and variations in refractive index and film thickness of the dielectric material, a desired phase difference is obtained between the P-polarization reflected component and the S-polarization reflected component.
摘要翻译：一种相移镜，包括设置在基板上的金属薄膜层和设置在所述金属薄膜层上的介电材料薄膜层，其中通过利用P偏振反射分量和S极之间的相位差由金属层和电介质材料层之间的边界面上的反射以及介电材料的折射率和膜厚度的变化导致的偏振反射分量，在P偏振反射分量和 S偏振反射分量。

18. 发明授权

US06551172B1 Polishing apparatus and polishing method 失效
标题翻译：抛光设备和抛光方法
公开(公告)号：US06551172B1
公开(公告)日：2003-04-22
申请号：US09654036
申请日：2000-09-01
申请人： Masaru Nyui , Mikichi Ban , Takehiko Suzuki , Yasushi Sugiyama
发明人： Masaru Nyui , Mikichi Ban , Takehiko Suzuki , Yasushi Sugiyama
IPC分类号： B24B4900
CPC分类号： B24B37/013 , B24B49/12
摘要： In order to measure a thickness of a surface to be polished of a material to be polished for a short time, two-dimensional images are obtained from a light reflected from the surface to be polished of the material to be polished, a location at which a thickness is to be observed is specified by the obtained two-dimensional images, and thickness measurement is carried out.
摘要翻译：为了在短时间内测量待抛光材料的被研磨表面的厚度，从被抛光材料的待抛光表面反射的光获得二维图像，在该位置处通过所获得的二维图像指定要观察的厚度，并且进行厚度测量。

19. 发明授权

US6137575A Film thickness measuring method and apparatus 失效
标题翻译：薄膜厚度测量方法和装置
公开(公告)号：US6137575A
公开(公告)日：2000-10-24
申请号：US177486
申请日：1998-10-23
申请人： Yasushi Sugiyama , Mikichi Ban , Takehiko Suzuki , Masaru Nyui
发明人： Yasushi Sugiyama , Mikichi Ban , Takehiko Suzuki , Masaru Nyui
IPC分类号： G01B11/06 , G01B9/02
CPC分类号： G01B11/0625
摘要： A method and apparatus for measuring the thickness of a film layer provided on a predetermined surface includes a step and device for detecting light reception signals of interference light of different wavelengths generated when light illuminates the film layer on the predetermined surface, a step or device for performing a first process for obtaining an approximate value for the film thickness by selecting a combination of solutions with the closest values from among solutions for the film thickness obtainable from at least three of the light reception signals corresponding to the respective wavelengths, and a step or device for performing a second process for obtaining an exact value for the film thickness by selecting a combination of solutions with the closest values from among solutions for the film thickness obtainable from all the light reception signals corresponding to the respective wavelengths. The second process is performed on the basis of the approximate value and with a restricted range for selection of the combination.
摘要翻译：用于测量设置在预定表面上的膜层的厚度的方法和装置包括用于检测当光照射预定表面上的膜层时产生的不同波长的干涉光的光接收信号的步骤和装置，用于通过从对应于各个波长的光接收信号中的至少三个获得的薄膜厚度的解决方案中选择具有最接近值的解的组合来获得膜厚的近似值的第一处理，以及步骤或用于通过从对应于各个波长的所有光接收信号可获得的膜厚度的解决方案中选择具有最接近的值的解的组合来执行用于获得膜厚度的精确值的第二处理的装置。基于近似值进行第二处理，并且具有用于选择组合的限制范围。

20. 发明授权

US6038068A Aberration correction system and astronomical telescope having the same 失效
标题翻译：畸变校正系统和天文望远镜具有相同的功能
公开(公告)号：US6038068A
公开(公告)日：2000-03-14
申请号：US802213
申请日：1997-02-19
申请人： Kunio Takeshi , Mikichi Ban , Yoshiya Matsui , Kyoji Nariai
发明人： Kunio Takeshi , Mikichi Ban , Yoshiya Matsui , Kyoji Nariai
IPC分类号： G02B13/02 , G02B13/18 , G02B17/08 , G02B23/00 , G02B27/00 , G02B17/00 , G02B25/00 , G02B27/64
CPC分类号： G02B17/08 , G02B17/0852 , G02B27/0025
摘要： An aberration correction system having a first lens disposed at an object side; and a second lens disposed at an image side, wherein the first and second lenses have different dispersions (Abbe numbers) with respect to each other, the surface of the object side of the first lens and the surface of the image side of the second lens which is adjacent to the image have substantially common center of curvature and the first and second lenses rotate around the center of curvature.
摘要翻译：一种像差校正系统，具有设置在物体侧的第一透镜; 以及设置在图像侧的第二透镜，其中所述第一透镜和所述第二透镜相对于彼此具有不同的色散（阿贝数），所述第一透镜的物体侧的表面和所述第二透镜的像侧的表面与图像相邻的基本上共同的曲率中心，第一和第二透镜围绕曲率中心旋转。

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