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11. 发明授权

US06888620B2 System and method for holding a device with minimal deformation 失效
标题翻译：用于保持最小变形的装置的系统和方法
公开(公告)号：US06888620B2
公开(公告)日：2005-05-03
申请号：US09997553
申请日：2001-11-29
申请人： Martin E. Lee , Mike Binnard , Douglas C. Watson
发明人： Martin E. Lee , Mike Binnard , Douglas C. Watson
IPC分类号： G03F7/20 , G03B27/60 , G03B27/58 , G03B27/62 , G03B27/42
CPC分类号： G03F7/707 , G03F7/70708 , G03F7/70716
摘要： A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20). Additionally, the stage assembly (10) can include a fluid connector (94) that connects the device holder (24) in fluid communication with the device table (20).
摘要翻译：用于移动和定位装置（26）的平台组件（10）包括装置台（20），保持装置（26）的装置保持器（24）和平台移动器组件（14）。台架组件（10）包括可以隔离设备保持器24和设备（26）不变形的一个或多个特征。在一些实施例中，台架组件（10）允许装置（26）在第一位置（42）和第二位置（44）之间精确地旋转，而不影响装置（26）的平坦度，并且不会使装置偏转和变形（26）。例如，台架组件（10）可以包括托架（60）和托架连接器组件（62）。载体（60）被支撑在装置台（20）上方并相对于装置台（20）旋转。支架连接器组件（62）将装置支架（24）连接到支架（60）上。此外，台架组件（10）可以包括相对于设备台（20）旋转设备保持器（24）的保持器移动器（120）。另外，台架组件（10）可以包括流体连接器（94），其连接与装置台（20）流体连通的装置保持器（24）。

12. 发明授权

US06603531B1 Stage assembly including a reaction assembly that is connected by actuators 失效
公开(公告)号：US06603531B1
公开(公告)日：2003-08-05
申请号：US09713910
申请日：2000-11-16
申请人： Mike Binnard
发明人： Mike Binnard
IPC分类号： G03B2742
CPC分类号： G03F7/70766 , G03B27/42
摘要： A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) reduces the reaction forces created by the stage mover assembly (16) in three degrees of freedom that are transferred to the stage base (12). As provided herein, the reaction assembly (18) includes a first reaction mass (88) and a second reaction mass (90) that move independently along the X axis, along the Y axis and about a Z axis. With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).

13. 发明申请

US20070268475A1 System and method for controlling a stage assembly 审中-公开
标题翻译：用于控制舞台组件的系统和方法
公开(公告)号：US20070268475A1
公开(公告)日：2007-11-22
申请号：US11801585
申请日：2007-05-10
申请人： Mike Binnard
发明人： Mike Binnard
IPC分类号： G03B27/58
CPC分类号： G03B27/58 , G03F7/70725
摘要： A stage assembly (220) that moves a work piece (200) a movement step (257) includes a first stage (238), a first mover assembly (242), a second stage (240) that retains the work piece (200), and a second mover assembly (244). The first mover assembly (242) moves the first stage (238) with a first velocity profile (770) during the movement step (257) and the second mover assembly (244) moves the second stage (240) with a second velocity profile (772) during the movement step (257) that is different than the first velocity profile (770). For example, the first mover assembly (242) moves the first stage (238) during the movement step (257) with a higher peak velocity than the second mover assembly (244) moves the second stage (240) during the movement step (257). This can reduce the amount of relative stroke required by the second mover assembly (244). Further, the second mover assembly (244) moves the second stage (240) during the movement step (257) with a higher average acceleration than the first mover assembly (242) moves the first stage (238) during the movement step (257).
摘要翻译：移动工件（257）的工作台组件（220）包括第一阶段（238），第一推动组件（242），保持工件（200）的第二阶段（240），和第二移动器组件（244）。第一移动器组件（242）在移动步骤（257）期间以第一速度分布（770）移动第一阶段（238），并且第二移动器组件（244）以第二速度分布（ 772）在与第一速度轮廓（770）不同的运动步骤（257）期间。例如，在移动步骤（257）期间，第一移动器组件（242）在移动步骤（257）期间以比第二移动器组件（244）在移动步骤（257）移动第二阶段（240）更高的峰值速度移动第一阶段）。这可以减少第二移动器组件（244）所需的相对行程的量。此外，第二移动器组件（244）在移动步骤（257）期间以比在移动步骤（257）期间移动第一阶段（238）的第一移动器组件（242）更高的平均加速度移动第二阶段（240）。

14. 发明授权

US06842248B1 System and method for calibrating mirrors of a stage assembly 失效
标题翻译：用于校准舞台组件的镜子的系统和方法
公开(公告)号：US06842248B1
公开(公告)日：2005-01-11
申请号：US09724146
申请日：2000-11-28
申请人： Mike Binnard , Masahiko Okumura
发明人： Mike Binnard , Masahiko Okumura
IPC分类号： G01B11/00 , G01B11/02 , G03B27/38 , G03B27/42 , G03F7/20 , G12B5/00 , H01L21/027 , H01L21/66 , H01L21/68
CPC分类号： G03F7/70775
摘要： A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a device table (48), a stage mover assembly (16), a measurement system (20), and a control system (22). The stage mover assembly (16) moves the device table (48) along an X axis, along a Y axis, and about a Z axis relative to the stage base (12). The measurement system (20) includes a first X mirror (25A) for monitoring the position of the device table (48) in an alignment position (31A) and a second X mirror (25B) for monitoring the position of the device table (48) in an operational position (31B). In one embodiment, the stage assembly (10) includes a first fiducial mark (76) and a second fiducial mark (78) that are secured to the device table (48) to determine the relative position of the X mirrors (25A)(25B). Alternately, in another embodiment, the stage assembly additionally includes a third fiducial mark (80) secured to the device table (48) for determining the relative positions of the X mirrors (25A)(25B). In both embodiments, the control system (22) utilizes the measured position of the fiducial marks relative to the first X mirror (25A) and the second X mirror (25B) to determine the position of the first X mirror (25A) relative to the second X mirror (25B). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).
摘要翻译：本文提供了用于移动和定位装置（26）的平台组件（10）。舞台组件（10）包括舞台基座（12），装置台（48），舞台动子组件（16），测量系统（20）和控制系统（22）。平台移动器组件（16）沿着Y轴沿X轴移动设备台（48），并且相对于台架（12）绕Z轴移动。测量系统（20）包括用于监视设备台（48）处于对准位置（31A）的位置的第一X镜（25A）和用于监视设备台（48）的位置的第二X镜（25B））处于操作位置（31B）。在一个实施例中，台架组件（10）包括固定到设备台（48）上以确定X反射镜（25A）（25B）的相对位置的第一基准标记（76）和第二基准标记（78））。或者，在另一实施例中，台组件还包括固定到设备台（48）的第三基准标记（80），用于确定X反射镜（25A）（25B）的相对位置。在两个实施例中，控制系统（22）利用相对于第一X镜（25A）和第二X镜（25B）的基准标记的测量位置来确定第一X镜（25A）相对于第二台X镜（25B）。这些特征允许通过平台组件（10）更准确地定位设备（26）并且使台架组件（10）具有更好的性能。

15. 发明授权

US06304320B1 Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same 失效
标题翻译：平台装置及其制造方法，位置控制方法，曝光装置及其制造方法，以及其制造方法
公开(公告)号：US06304320B1
公开(公告)日：2001-10-16
申请号：US09512766
申请日：2000-02-25
申请人： Keiichi Tanaka , Andrew Hazelton , Mike Binnard
发明人： Keiichi Tanaka , Andrew Hazelton , Mike Binnard
IPC分类号： G03B2760
CPC分类号： G03F7/70716 , G03F7/70758 , H01J2237/202
摘要： In a stage device, prior to two-dimensional movement of a stage, a first driving device disposed on a side of the stage where an object is loaded drives the stage in a first-axis direction, and a second driving device disposed on a side of the stage opposite to the side where the object is loaded drives the stage in a second-axis direction that is different from the first-axis direction. Thus, the stage is moved in two-dimensional directions. Therefore, in order to perform two-dimensional movement of the stage, a structure is possible in which each driving device is defined as a one-dimensional driving device, and in which one driving device is not driven by another driving device. Therefore, it is possible to move the object at high speed and to accurately control the position of the object with a simple structure. By using the stage device in order to move the wafer or the like, an exposure device of high throughput and high accuracy can be realized.
摘要翻译：在舞台装置中，在舞台的二维移动之前，设置在被加载物的舞台的一侧的第一驱动装置沿第一轴方向驱动舞台，并且设置在一侧的第二驱动装置在与第一轴方向不同的第二轴方向上与载物侧相对的台阶驱动台。因此，阶段在二维方向上移动。因此，为了进行平台的二维运动，可以将各驱动装置定义为一维驱动装置，其中一个驱动装置不被其他驱动装置驱动的结构。因此，可以高速地移动物体并且以简单的结构精确地控制物体的位置。通过使用平台装置来移动晶片等，可以实现高吞吐量和高精度的曝光装置。

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