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    • 19. 发明授权
    • Vibration isolation apparatus for stage
    • 舞台隔振装置
    • US06327024B1
    • 2001-12-04
    • US09546181
    • 2000-04-10
    • Yutaka HayashiHideaki Sakamoto
    • Yutaka HayashiHideaki Sakamoto
    • G03B2742
    • G03F7/70358F16F15/02F16F15/03G03F7/70716G03F7/70825G03F7/70841G03F7/709
    • A vibration isolation apparatus for preventing shaking and vibration of a stage of an exposure apparatus or the like uses a vibration isolation mount formed of a spring buffer system employing a spring member and a fluid buffer system employing a viscous fluid as a vibration isolation base which is disposed between a base member on which an exposure unit is mounted and an installation surface on which the base member is installed so as to support the base member. The coefficient of viscous drag of the viscous fluid is varied to vary a damping coefficient which depends on the coefficient of viscous drag thereby to vary rigidity of the vibration isolation mount, whereby vibration transmitted from an external source and vibration associated with a stage movement are damped.
    • 用于防止曝光装置等的震动和振动的防振装置使用由使用弹性构件的弹簧缓冲系统和使用粘性流体作为隔振基座的流体缓冲系统形成的防振装置, 设置在安装有曝光单元的基座构件和安装有基座构件的安装面之间,以支撑基座构件。 改变粘性流体的粘滞阻力系数以改变取决于粘性阻力系数的阻尼系数,从而改变防振装置的刚度,由此从外部源发出的振动和与舞台运动相关联的振动被阻尼 。