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    • 15. 发明授权
    • Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam
    • 光束剂量计算方法和写入方法和记录载体体和书写装置,用于确定带电粒子束的最佳剂量
    • US07740991B2
    • 2010-06-22
    • US11460848
    • 2006-07-28
    • Keiko EmiJunichi SuzukiTakayuki AbeTomohiro IijimaJun Yashima
    • Keiko EmiJunichi SuzukiTakayuki AbeTomohiro IijimaJun Yashima
    • G06F1/00G06F19/00G06F17/50G06K9/00
    • H01J37/3174B82Y10/00B82Y40/00H01J2237/31764H01J2237/31769
    • A beam dose computing method includes specifying a matrix of rows and columns of regions as divided from a surface area of a target object to include first, second and third regions of different sizes, the third regions being less in size than the first and second regions, determining first corrected doses of a charged particle beam for correcting fogging effects in the first regions, determining corrected size values for correcting pattern line width deviations occurring due to loading effects in the second regions, using said corrected size values in said second regions to create a map of base doses of the beam in respective ones of said second regions, using said corrected size values to prepare a map of proximity effect correction coefficients in respective ones of said second regions, using the maps to determine second corrected doses of said beam for correction of proximity effects in said third regions, and using the first and second corrected doses to determine an actual beam dose at each position on the surface of said object.
    • 光束剂量计算方法包括:从目标对象的表面区域划分出区域的行和列的矩阵,以包括不同大小的第一,第二和第三区域,第三区域的尺寸小于第一和第二区域 确定用于校正所述第一区域中的雾化效应的带电粒子束的第一校正剂量,确定用于校正由于所述第二区域中的负载效应而导致的图案线宽度偏差的校正大小值,使用所述第二区域中的所述校正大小值来创建 使用所述校正的大小值,在所述第二区域的各个区域中的所述光束的基本剂量的映射,以使用所述映射来确定所述第二区域中的相应的所述第二区域中的邻近效应校正系数的映射,以确定所述光束的第二校正剂量 校正所述第三区域中的邻近效应,并且使用第一和第二校正剂量来确定实际波束d 在所述对象的表面上的每个位置上。
    • 18. 发明申请
    • WIRELESS FIRE ALARM SYSTEM
    • 无线消防系统
    • US20100079278A1
    • 2010-04-01
    • US12523530
    • 2008-01-16
    • Junichi SuzukiTakashi SaekiKoji SakamotoMasanori Kurita
    • Junichi SuzukiTakashi SaekiKoji SakamotoMasanori Kurita
    • G08B1/08
    • G08B25/10G08B25/007
    • A power saving wireless fire alarm system has a master station and a plurality of battery-powered fire detecting cc terminals linked for wireless communication with each other. Upon detection of a fire occurrence at one of the fire detecting terminals, the fire detecting terminal transmit a fire detection message to a master station which in turn transmit a wake-up message to the other fire detecting terminals and thereafter a fire information message which starts a multiple synchronous communication between the master station and the fire detecting terminals. Each fire detecting terminal has a power controller which selects an intermittent reception mode of activating its own receiver only intermittently until receiving the wake-up message or information indicative of the fire occurrence, and select a constant operation mode thereafter to make the fire detecting terminals be ready for the multiple synchronous communication commenced by the fire information message from the master station.
    • 省电无线火灾报警系统具有相互无线通信连接的主站和多个电池供电的火灾检测CC终端。 在火灾检测终端中的一个检测到火灾发生时,火情检测终端向主站发送火灾检测消息,主站又向其他火情检测终端发送唤醒消息,之后发送起火信息消息 主站和火灾检测终端之间的多重同步通信。 每个火灾检测终端具有功率控制器,其选择间歇地激活其自己的接收机的间歇接收模式,直到接收到唤醒消息或指示火灾发生的信息,并且此后选择恒定操作模式以使火情检测终端为 准备好从主站的火灾信息消息开始的多个同步通信。