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11. 发明授权

US07321180B2 Piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件
公开(公告)号：US07321180B2
公开(公告)日：2008-01-22
申请号：US10959420
申请日：2004-10-06
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Ikeda , Koji Kimura , Kazuyoshi Shibata
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Ikeda , Koji Kimura , Kazuyoshi Shibata
IPC分类号： H02N2/00
CPC分类号： H01L41/094 , H01L41/0831 , H01L41/0946 , H01L41/1132 , H01L41/273
摘要： A piezoelectric/electrostrictive device is provided, including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the thin plate sections. The piezoelectric/electrostrictive device also includes movable sections defined by at least first end portions of the thin plate sections and a material which is different from that of the thin plate section.
摘要翻译：提供一种压电/电致伸缩器件，包括一对相互相对的薄板部分和用于支撑薄板部分的固定部分。压电/电致伸缩元件布置在每个薄板部分上。压电/电致伸缩装置还包括由薄板部分的至少第一端部限定的可移动部分和与薄板部分不同的材料。

12. 发明授权

US07274134B2 Piezoelectric/electrostrictive structure and method for manufacturing the same 失效
标题翻译：压电/电致伸缩结构及其制造方法
公开(公告)号：US07274134B2
公开(公告)日：2007-09-25
申请号：US11138250
申请日：2005-05-26
申请人： Makoto Ohmori , Koji Kimura
发明人： Makoto Ohmori , Koji Kimura
IPC分类号： H01L41/083
CPC分类号： H01L41/23 , B41J2/14209 , B41J2/1609 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1646 , H01L41/0533 , H01L41/0831 , H01L41/273
摘要： A piezoelectric/electrostrictive structure is provided, including a plurality of stacked sheet-shaped piezoelectric/electrostrictive bodies and at least one sheet of a thin film. The interfaces between the piezoelectric/electrostrictive bodies are exposed at side faces of the piezoelectric/electrostrictive structure, the side faces have notches, and the thin film is placed on the notched portions of side faces. A method for manufacturing the piezoelectric/electrostrictive structure includes the steps of stacking a plurality of ceramic green sheets made of a piezoelectric/electrostrictive material, firing the stacked ceramic green sheets to prepare fired piezoelectric/electrostrictive bodies and forming at least one sheet of a thin film on side faces of the fired piezoelectric/electrostrictive bodies by a chemical vapor deposition process.
摘要翻译：提供一种压电/电致伸缩结构，包括多个堆叠的片状压电/电致伸缩体和至少一片薄膜。压电/电致伸缩体之间的界面在压电/电致伸缩结构的侧面露出，侧面具有凹口，并且薄膜被放置在侧面的切口部分上。一种制造压电/电致伸缩结构的方法包括以下步骤：堆叠由压电/电致伸缩材料制成的多个陶瓷生片，烧制层叠的陶瓷生片以制备烧制的压电/电致伸缩体并形成至少一片薄的通过化学气相沉积工艺在烧结的压电/电致伸缩体的侧面上形成薄膜。

13. 发明授权

US07192799B2 Matrix type piezoelectric/electrostrictive device and manufacturing method thereof 失效
标题翻译：矩阵型压电/电致伸缩器件及其制造方法
公开(公告)号：US07192799B2
公开(公告)日：2007-03-20
申请号：US10834297
申请日：2004-04-28
申请人： Yukihisa Takeuchi , Masashi Watanabe , Koji Kimura , Tatsuo Kawaguchi
发明人： Yukihisa Takeuchi , Masashi Watanabe , Koji Kimura , Tatsuo Kawaguchi
IPC分类号： H01L41/00 , H01L21/44 , H01L41/047 , H01L41/083
CPC分类号： G02B6/12004 , G02B26/0858 , H01J5/54 , H01L27/20 , H01L41/0986 , H01L41/338 , H01L41/43 , Y10T29/42
摘要： A method of making a matrix type piezoelectric/electrostrictive device having a plurality of pillar shaped piezoelectric/electrostrictive elements, each having a piezoelectric/electrostrictive substance and at least a pair of electrodes being formed on the sides of the substance, are vertically provided on a thick ceramic substrate, such that the device is driven by displacement of the piezoelectric/electrostrictive substance. In this device, the piezoelectric/electrostrictive elements are integrally bonded to the ceramic substrate and independently arranged in two dimensions. The percentage of transgranularly fractured crystal grains on at least the sides of the piezoelectric/electrostrictive substance on which the electrodes are formed is 10% or less. The unit forms a curved surface near a joined section between the substance and the substrate.
摘要翻译：制造具有多个柱状压电/电致伸缩元件的矩阵型压电/电致伸缩元件的方法，每个具有压电/电致伸缩物质和至少一对电极形成在物质的侧面上，垂直地设置在使得该器件由压电/电致伸缩物质的位移驱动。在该装置中，压电/电致伸缩元件一体地结合到陶瓷基板上，并且二维地独立地布置。在形成电极的压电/电致伸缩物质的至少两侧的晶粒间断裂的晶粒的百分比为10％以下。该单元在物质和基底之间的接合部分附近形成弯曲表面。

14. 发明申请

US20060032034A1 Method of manufacturing a piezoelectric/electrostrictive device 失效
标题翻译：制造压电/电致伸缩器件的方法
公开(公告)号：US20060032034A1
公开(公告)日：2006-02-16
申请号：US11252122
申请日：2005-10-17
申请人： Mutsumi Kitagawa , Koji Kimura
发明人： Mutsumi Kitagawa , Koji Kimura
IPC分类号： H04R17/00
CPC分类号： B41J2/1637 , B41J2/14233 , B41J2/161 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/081 , H01L41/0973 , H01L41/098 , H01L41/314 , Y10T29/42 , Y10T29/49002
摘要： There is disclosed a piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film which includes: a substrate section; and an operation section disposed on the substrate section and constituted of a piezoelectric/electrostrictive film and an electrode film and which operates by displacement of the operation section. The operation section comprises the piezoelectric/electrostrictive films and electrode films alternately laminated so that uppermost and lowermost layers form the electrode films, the operation and substrate sections are integrally fired, and the substrate section is constituted of a ceramic which contains a titanium element. For the piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film, a residual stress after firing hardly exists, therefore larger displacement is obtained with the same driving voltage, response speed is higher, and generation force is larger.
摘要翻译：公开了一种由压电/电致伸缩膜制成的压电/电致伸缩器件，其包括：衬底部分; 以及设置在所述基板部上并由压电/电致伸缩膜和电极膜构成的操作部，所述操作部通过所述操作部的位移进行操作。操作部分包括压电/电致伸缩膜和交替层压的电极膜，使得最上层和最下层形成电极膜，操作和基板部分被整体烧制，并且基板部分由含有钛元素的陶瓷构成。对于由压电/电致伸缩膜制成的压电/电致伸缩器件，几乎不存在烧制后的残余应力，因此在相同的驱动电压，响应速度更高，发电力更大的情况下获得较大的位移。

15. 发明授权

US06988301B2 Method for manufacturing a matrix type actuator 失效
标题翻译：矩阵式致动器的制造方法
公开(公告)号：US06988301B2
公开(公告)日：2006-01-24
申请号：US11007485
申请日：2004-12-08
申请人： Yukihisa Takeuchi , Hiroyuki Tsuji , Kazumasa Kitamura , Nobuo Takahashi , Koji Kimura
发明人： Yukihisa Takeuchi , Hiroyuki Tsuji , Kazumasa Kitamura , Nobuo Takahashi , Koji Kimura
IPC分类号： H04R17/00 , H01L41/04 , H01L41/08 , H01L41/18 , H02N2/00
CPC分类号： H01L27/20 , B41J2/14209 , H01L41/338 , H01L41/339 , H02N2/021 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49078 , Y10T29/49126 , Y10T29/4913 , Y10T29/49833
摘要： A matrix type piezoelectric/electrostrictive (P/E) actuator includes a plurality of piezoelectric/electrostrictive elements, each including a piezoelectric/electrostrictive body and at least one pair of electrodes formed on a ceramic substrate. The matrix type P/E actuator is activated by the displacement of the piezoelectric/electrostrictive bodies. The piezoelectric/electrostrictive elements are joined to the ceramic substrate as respective unified bodies, and are two-dimensionally arranged independently from each other. The piezoelectric/electrostrictive actuator provides a greater displacement with a lower voltage, a high responsive speed, and a greater generating force, as well as enhancing the mounting ability and the integration. A method for manufacturing such a matrix type P/E actuator is also disclosed.
摘要翻译：矩阵型压电/电致伸缩（P / E）致动器包括多个压电/电致伸缩元件，每个压电/电致伸缩元件包括压电/电致伸缩体和在陶瓷衬底上形成的至少一对电极。矩阵型P / E致动器由压电/电致伸缩体的位移激活。压电/电致伸缩元件作为各自的统一体接合到陶瓷基板，并且彼此独立地二维地排列。压电/电致伸缩致动器提供具有较低电压，高响应速度和更大发电力的更大位移，以及增强安装能力和集成度。还公开了一种用于制造这种矩阵型P / E致动器的方法。

16. 发明授权

US06895829B2 Mass sensor and mass sensing method 失效
标题翻译：质量传感器和质量感测方法
公开(公告)号：US06895829B2
公开(公告)日：2005-05-24
申请号：US10925514
申请日：2004-08-25
申请人： Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
发明人： Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
IPC分类号： B06B1/06 , G01G3/16 , G01H11/08 , G01N35/00 , G01P15/09 , G02B26/02 , H01L41/09 , H01L41/113 , H01L41/187 , G01P15/10
CPC分类号： G01P15/0922 , B06B1/06 , B06B1/0648 , G01G3/16 , G01H11/08 , G01N2035/00217 , G01N2035/00237 , G01N2291/02827 , G01P15/09 , G01P2015/0814 , H01L41/0973 , H01L41/1132
摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective side; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.
摘要翻译：质量传感器，其中连接板和隔膜在它们各自的一侧接合在一起; 感测板在垂直于隔膜接合方向的连接板的相应侧面处连接到连接板; 由压电膜和电极构成的压电元件安装在感测板的板表面的至少任一个上; 并且由隔膜，感测板，连接板和压电元件组成的谐振部分接合到传感器基板。通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。

17. 发明授权

US06840123B2 Mass sensor and mass sensing method 失效
标题翻译：质量传感器和质量感测方法
公开(公告)号：US06840123B2
公开(公告)日：2005-01-11
申请号：US10465470
申请日：2003-06-19
申请人： Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
发明人： Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
IPC分类号： B06B1/06 , G01G3/16 , G01H11/08 , G01N35/00 , G01P15/09 , G02B26/02 , H01L41/09 , H01L41/113 , H01L41/187 , G01P15/10
CPC分类号： G01P15/0922 , B06B1/06 , B06B1/0648 , G01G3/16 , G01H11/08 , G01N2035/00217 , G01N2035/00237 , G01N2291/02827 , G01P15/09 , G01P2015/0814 , H01L41/0973 , H01L41/1132
摘要： A mass sensor is provided, including a sensor substrate, at least one connection plate having a first end attached to a first portion of the sensor substrate and an opposed second end, and at least one diaphragm attached to the second end of the connection plate. Means for changing the mass of the diaphragm is provided on the diaphragm, and at least one sensing plate having a first end attached to a second portion of the sensor substrate and an opposed second end is attached to one of the diaphragm and the connection plate. At least one piezoelectric element is arranged on at least a portion of a surface of the sensing plate. The sensing plate and sensor substrate are arranged in one of a substantially parallel planar or coplanar relationship with respect to one another, and the connection plate, diaphragm, sensing plate and piezoelectric element define a resonance portion.
摘要翻译：提供了一种质量传感器，包括传感器基板，至少一个连接板，其具有附接到传感器基板的第一部分的第一端和相对的第二端，以及附接到连接板的第二端的至少一个隔膜。用于改变隔膜的质量的装置设置在隔膜上，并且至少一个传感板，其具有附接到传感器基板的第二部分的第一端和相对的第二端，附接到隔膜和连接板中的一个。至少一个压电元件布置在感测板的表面的至少一部分上。感测板和传感器基板相对于彼此基本上平行的平面或共面关系中的一个布置，并且连接板，隔膜，感测板和压电元件限定共振部分。

18. 发明授权

US06819825B2 Optical switch 失效
标题翻译：光开关
公开(公告)号：US06819825B2
公开(公告)日：2004-11-16
申请号：US10027773
申请日：2001-12-20
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： G02B626
CPC分类号： G02B6/3522 , G02B6/3512 , G02B6/3556 , G02B6/3578 , G02B6/43
摘要： An optical switch includes: at least a light transmission portion, an optical path-changing portion and an actuator portion. The light transmission portion has a light reflecting plane and light transmission channels having optical wave guiding bodies provided in at least three directions. The optical path-changing portion is proximate the light transmission portion in a movable condition and is made to contact or separate from the light transmission portion. An optical path where light input to the light transmission channels is totally reflected in the light transmission portion and is transmitted to a specific light transmission channel on an output side, is switched to another optical path where light input to the light transmission channel is taken to the light introduction member, and is totally reflected at the light reflection member and is transmitted to a specific light transmission channel on the output side.
摘要翻译：光学开关包括：至少光传输部分，光路改变部分和致动器部分。光传输部分具有光反射面和具有设置在至少三个方向上的光波导体的光传输通道。光路改变部分在可移动状态下靠近光传输部分，并使其与光传输部分接触或分离。输入到光传输通道的光在光传输部分被全反射并被传输到输出侧的特定光传输通道的光路被切换到另一光路，其中光传输通道被输入到光光引入构件，并且在光反射构件处被全反射并被传输到输出侧的特定光传输通道。

19. 发明授权

US06719211B2 Droplet ejecting apparatus 失效
标题翻译：液滴喷射装置
公开(公告)号：US06719211B2
公开(公告)日：2004-04-13
申请号：US10057749
申请日：2001-10-25
申请人： Yukihisa Takeuchi , Koji Kimura , Kazuhiro Yamamoto
发明人： Yukihisa Takeuchi , Koji Kimura , Kazuhiro Yamamoto
IPC分类号： B05B304
CPC分类号： B01L3/0268 , B05B12/085 , B05B17/0607
摘要： A droplet ejecting apparatus includes: a droplet quantity evaluation apparatus, wherein the mass of a droplet ejected onto an article is measured, and a measurement signal is generated based on the measurement result; a feedback control apparatus, wherein the measurement signal is compared with a respective reference value and then a control signal is generated based on the result of the comparison; and droplet ejecting apparatus for adjusting the amount of ejection for the droplet on the basis of the control signal. In the droplet apparatus, the amount of droplets ejected from the droplet ejecting apparatus can be accurately determined in real time, and the variation in the amount of ejected droplets, the presence thereof and the deviation of the arrival position thereof can also be determined.
摘要翻译：液滴喷射装置包括：液滴量评价装置，其中测量喷射到物品上的液滴的质量，并且基于测量结果产生测量信号; 反馈控制装置，其中将测量信号与相应的参考值进行比较，然后基于比较的结果生成控制信号; 以及用于根据控制信号调整液滴的喷射量的液滴喷射装置。在液滴装置中，可以实时精确地确定从液滴喷射装置喷出的液滴的量，并且还可以确定喷射液滴量的变化，其存在和其到达位置的偏差。

20. 发明授权

US06703257B2 Piezoelectric/electrostrictive film type elements and process for producing the same 失效
标题翻译：压电/电致伸缩膜型元件及其制造方法
公开(公告)号：US06703257B2
公开(公告)日：2004-03-09
申请号：US10236754
申请日：2002-09-06
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Masao Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Masao Takahashi
IPC分类号： H01L2100
CPC分类号： B81B3/0021 , H01L41/081 , H01L41/0933 , H01L41/094 , H01L41/0973 , H01L41/314 , H01L41/43 , Y10T29/40 , Y10T29/42 , Y10T29/49155
摘要： A process for providing an integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要翻译：提供具有优异的耐久性的集成压电/电致伸缩膜型元件的方法包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过膜整合到陶瓷基板上的压电/电致伸缩操作部压电/电致伸缩操作部分包括下电极，含铅元素组合物的压电/电致伸缩层和上电极，其中在压电/电致伸缩层的表面处的异相发生率被控制至0.1〜30％的范围。

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