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    • 11. 发明申请
    • METHOD OF FORMING AN ISOLATION LAYER OF A SEMICONDUCTOR DEVICE
    • 形成半导体器件隔离层的方法
    • US20090068818A1
    • 2009-03-12
    • US12163917
    • 2008-06-27
    • Wan Soo Kim
    • Wan Soo Kim
    • H01L21/76
    • H01L21/76224
    • In a method of forming an isolation layer of a semiconductor device, a gate insulating layer, a first conductive layer, and a hard mask are formed in an active region of a semiconductor substrate and a trench is formed in an isolation region. The trench is partially gap-filled by forming a first insulating layer in the trench. The trench is fully gap-filled by forming a second insulating layer on the first insulating layer. A polishing process is performed on the first insulating layer and the second insulating layer formed over the hard mask. An etchback process is performed to lower a height of the second insulating layer in the trench. The trench is gap-filled by forming a third insulating layer over the first insulating layer and the second insulating layer, thereby forming an isolation layer in the trench. Accordingly, the occurrence of a void within the isolation layer is prevented.
    • 在形成半导体器件的隔离层的方法中,在半导体衬底的有源区中形成栅绝缘层,第一导电层和硬掩模,并且在隔离区域中形成沟槽。 沟槽通过在沟槽中形成第一绝缘层而被部分间隙填充。 通过在第一绝缘层上形成第二绝缘层,使沟槽完全间隙填充。 对形成在硬掩模上的第一绝缘层和第二绝缘层进行抛光处理。 执行回蚀处理以降低沟槽中的第二绝缘层的高度。 通过在第一绝缘层和第二绝缘层之上形成第三绝缘层,从而在沟槽中形成隔离层,使沟槽间隙填充。 因此,防止隔离层内的空隙的发生。
    • 12. 发明申请
    • Power transmission device for hybrid vehicle
    • 混合动力车动力传动装置
    • US20090054190A1
    • 2009-02-26
    • US11999749
    • 2007-12-07
    • Wan Soo KimKyung Ha KimYeon Ho Kim
    • Wan Soo KimKyung Ha KimYeon Ho Kim
    • F16H3/72
    • B60K6/387B60K6/405B60K6/48B60K6/547Y02T10/6221
    • The present invention provides a power transmission device for a hybrid vehicle which provides an effect of reducing engine vibration, facilitates engine clutch control, and has a package type layout enabling mass production.For this, the preset invention provides a power transmission device for a hybrid vehicle, in which an automatic transmission having an input shaft, a motor, a torsion damper, and an engine having an output shaft connected to a crank shaft of the engine are arranged in a row, the power transmission device including: a motor support shaft, the outer end of which is supported by a motor rotor and the inner end of which extends toward the boundary between the output shaft of the engine and the input shaft of the automatic transmission; a motor housing disposed to surround the outer circumference and the left side surface of the motor rotor; an engine clutch, disposed between the left side end of the motor housing and the left side surface of the inner end of the motor support shaft, for power transmission between the output shaft of the engine and the input shaft of the automatic transmission; a motor cover housing arranged to so as cover the right side surface of the motor rotor and the right side surface of the inner end of the motor support shaft and including a concave portion on the right side surface thereof; and a torsion damper positioned in the concave portion of the motor cover housing to be blocked from the motor rotor.
    • 本发明提供一种用于混合动力车辆的动力传递装置,其提供减少发动机振动,促进发动机离合器控制的效果,并且具有能够批量生产的包装类型布局。 为此,本发明提供了一种用于混合动力车辆的动力传递装置,其中具有输入轴,电动机,扭转阻尼器和具有连接到发动机的曲轴的输出轴的发动机的自动变速器被布置 一方面,动力传递装置包括:电动机支撑轴,其外端由电动机转子支撑,其内端朝向发动机的输出轴与自动的发动机的输入轴之间的边界延伸 传输; 电动机壳体,设置成围绕电动机转子的外周和左侧面; 发动机离合器,设置在电动机壳体的左侧端部与电动机支撑轴的内端的左侧面之间,用于在发动机的输出轴与自动变速器的输入轴之间进行动力传递; 马达盖壳体,其布置成覆盖马达转子的右侧表面和电动机支撑轴的内端的右侧表面,并且在其右侧表面上包括凹部; 以及位于所述电动机盖壳体的凹部中以阻止所述电动机转子的扭转阻尼器。
    • 17. 发明授权
    • Ball screw with inner ball circulation and linear actuator equipped with the ball screw
    • 带内球循环的滚珠丝杠和配有滚珠丝杠的线性执行器
    • US06393930B1
    • 2002-05-28
    • US09560683
    • 2000-04-27
    • Se Kyong SongWan Soo KimDong Soo KwonHyung Suck Cho
    • Se Kyong SongWan Soo KimDong Soo KwonHyung Suck Cho
    • F16H2522
    • F16H25/2228Y10T74/18688
    • A ball screw with inner ball circulation whose transfer displacement to size ratio is large, resulting in a device which has an optimized size with a positioning accuracy measured in microns, and a linear actuator equipped with the ball screw, are disclosed. The ball screw includes a plurality of balls arranged in a space between a hemispherical groove formed on a cylindrical inner surface of a housing and a hemispherical groove of a rotating male screw. The ball screw also includes a ball circulation tube with its cylindrical outer surface formed with the hemispherical groove of the male screw and with the groove corresponding to the hemispherical groove of the housing. The ball circulation tube is formed with ball openings penetrating from both ends of the male screw toward the inner part. The ball screw also includes a ball circulation section, which fits inside the ball circulation tube, and has a hemispherical inner return path formed on its outer cylindrical surface. By coupling the ball circulation section to the ball circulation tube, the inner return path has a start point and end point which are matched with the ball openings of the ball circulation tube and the ball circulation tube and the ball circulation section can rotate together as a fixed unit with the balls circulating along the inner return path of the ball circulation section.
    • 具有内球循环的滚珠丝杠,其传递位移与尺寸比大,导致具有优化尺寸的装置,具有以微米计量的定位精度,以及配备有滚珠丝杠的线性致动器。 滚珠丝杠包括布置在形成在壳体的圆柱形内表面上的半球槽与旋转的外螺纹的半球形凹槽之间的空间中的多个球。 滚珠丝杠还包括球形循环管,其圆柱形外表面形成有阳螺纹的半球形凹槽,并且凹槽对应于壳体的半球形凹槽。 球循环管形成有从外螺纹两端向内部贯穿的球形开口。 滚珠丝杠还包括球循环部,其配合在球循环管内部,并且具有形成在其外圆柱形表面上的半球形内部返回路径。 通过将球循环部连接到球循环管,内返回路径具有与球循环管和球循环管的球开口相匹配的起点和终点,球循环段可一起旋转 固定单元,其具有沿着球循环部分的内部返回路径循环的滚珠。
    • 18. 发明授权
    • Axial flow fan for air conditioner
    • 空调轴流风机
    • US06325597B1
    • 2001-12-04
    • US09475236
    • 1999-12-30
    • Wan Soo KimSim Won ChinSeung Chul ParkDong Soo Moon
    • Wan Soo KimSim Won ChinSeung Chul ParkDong Soo Moon
    • F04D2938
    • F04D29/384F24F7/007Y10S416/02Y10S416/05
    • An axial flow fan for an air conditioner is disclosed. This axial flow fan is capable of changing the shape of blades by varying a design factor such as a chord length, a sweep angle, etc., generating an enough flowing amount of a fan for implementing an efficient heat radiation of a heat exchanger, and decreasing a noise which occurs during an air flowing operation of the fan, so that it is possible to implement a high efficiency and low noise fan system. The above-described axial flow fan according to the present invention includes a hub engaged to a rotary shaft of a motor, and a plurality of blades engaged to the hub, wherein assuming a coordinate which is obtained by computing a distance R in a radial direction of the blade into a distance from a radius Rh to a radius Rt at a blade tip BT based on a non-dimensional method as “r” (r=(R−Rh)/(Rt−Rh), a maximum camber ratio Hc(r) which is a ratio between a maximum camber Cmax and a chord length 1 has 0.02±0.01 at a hub BH of r=0, 0.04±0.015 at a blade tip BT of r=1, and a maximum camber ratio at a portion of r=0.6˜0.75 has a maximum value of 0.05±0.02.
    • 公开了一种用于空调的轴流风扇。 该轴流风扇能够通过改变诸如弦长,扫掠角等的设计因素来改变叶片的形状,从而产生足够流量的用于实现热交换器的有效热辐射的风扇,以及 降低在风扇的空气流动操作期间发生的噪声,从而可以实现高效率和低噪音的风扇系统。 根据本发明的上述轴流风扇包括接合到电动机的旋转轴的毂和接合到轮毂的多个叶片,其中假定通过计算径向方向上的距离R而获得的坐标 (r =(R-Rh)/(Rt-Rh))的最大外倾比Hc(r =(R-Rh)/(Rt-Rh)),将叶片从半径Rh延伸到叶片端部BT的半径Rt 在最大弧度Cmax和弦长1之间的比值在r = 0的轮毂BH上为0.02±0.01,在r = 1的叶尖BT处为0.04±0.015,在 r = 0.6〜0.75的最大值为0.05±0.02。