会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 12. 发明授权
    • High frequency MEMS switch having a bent switching element and method for its production
    • 具有弯曲开关元件的高频MEMS开关及其制造方法
    • US07786829B2
    • 2010-08-31
    • US10590699
    • 2005-02-25
    • Ulrich PrechtelVolker Ziegler
    • Ulrich PrechtelVolker Ziegler
    • H01H51/22
    • H01H59/0009H01H2059/0081Y10T29/49105
    • A high-frequency MEMS switch comprises a signal conductor which is arranged on a substrate and an oblong switching element which has a bent elastic bending area and is fastened on the substrate in a cantilevered manner. An electrode arrangement generates an electrostatic force which bends the switching element toward the signal conductor. The switching element is arranged longitudinally parallel to the signal conductor, and has a contact area which extends transversely to the switch element over the signal conductor. Under the effect of the electrostatic force, the elastic bending area of the switching element progressively approaches the electrode arrangement in a direction parallel to the signal line. The switching element has, for example, two mutually parallel extending switching arms, which are mutually connected by a bridge as the contact area and are arranged on both sides of the signal line and parallel thereto.
    • 高频MEMS开关包括布置在基板上的信号导体和具有弯曲弹性弯曲区域并以悬臂方式紧固在基板上的长方形开关元件。 电极布置产生使开关元件朝向信号导体弯曲的静电力。 开关元件纵向平行于信号导体布置,并且具有在信号导体上横向于开关元件延伸的接触区域。 在静电力的作用下,开关元件的弹性弯曲区域沿平行于信号线的方向逐渐接近电极布置。 开关元件具有例如两个相互平行的延伸的开关臂,它们通过作为接触区域的桥相互连接并且布置在信号线的两侧并与之平行。