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11. 发明授权

US06673512B1 Negative-working resist composition 有权
标题翻译：负性抗蚀剂组成
公开(公告)号：US06673512B1
公开(公告)日：2004-01-06
申请号：US09760806
申请日：2001-01-17
申请人： Kazuya Uenishi , Yutaka Adegawa , Koji Shirakawa
发明人： Kazuya Uenishi , Yutaka Adegawa , Koji Shirakawa
IPC分类号： G03F7003
CPC分类号： G03F7/0045 , G03F7/038 , Y10S430/168
摘要： A chemical amplification system negative-working resist composition for an electron beam and/or an X-ray, which is excellent in sensitivity and resolution and has a rectangular profile, comprising an alkali-soluble resin having structural units represented by the following general formula (a), a compound generating an acid by irradiation of the electron beam or the X-ray, and a crosslinking agent which initiates crosslinking by the acid:
摘要翻译：一种用于电子束和/或X射线的化学放大系统负性抗蚀剂组合物，其灵敏度和分辨率优异并且具有矩形轮廓，包括具有由以下通式表示的结构单元的碱溶性树脂（ a），通过照射电子束或X射线产生酸的化合物和引发酸的交联的交联剂：

12. 发明申请

US20120094235A1 ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING PATTERN USING THE COMPOSITION 审中-公开
标题翻译：丙酰胺或辐射敏感性树脂组合物和使用组合物形成图案的方法
公开(公告)号：US20120094235A1
公开(公告)日：2012-04-19
申请号：US13320116
申请日：2010-05-20
申请人： Toru Tsuchihashi , Hideaki Tsubaki , Koji Shirakawa , Hidenori Takahashi , Tomotaka Tsuchimura
发明人： Toru Tsuchihashi , Hideaki Tsubaki , Koji Shirakawa , Hidenori Takahashi , Tomotaka Tsuchimura
IPC分类号： G03F7/20 , G03F7/027
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0397
摘要： According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a resin (A) whose solubility in an alkali developer is increased by the action of an acid, the resin containing any of the units of general formula (AI) below and any of the units of general formula (AII) below, and a compound (B) that when exposed to actinic rays or radiation, generates an acid with any of the structures of general formula (BI) below.
摘要翻译：根据一个实施方案，光化射线或辐射敏感性树脂组合物包括其在碱性显影剂中的溶解度通过酸的作用而增加的树脂（A），所述树脂包含任何通式（AI）的单元，和下述通式（AII）的任何单元和当暴露于光化射线或辐射时产生具有以下通式（BI）的任何结构的酸的化合物（B）。

13. 发明授权

US08900791B2 Actinic ray-sensitive or radiation-sensitive resin composition and method of forming pattern with the composition 有权
标题翻译：光化射线敏感或辐射敏感性树脂组合物和组合物形成图案的方法
公开(公告)号：US08900791B2
公开(公告)日：2014-12-02
申请号：US13071153
申请日：2011-03-24
申请人： Tomotaka Tsuchimura , Koji Shirakawa , Toru Tsuchihashi , Hideaki Tsubaki
发明人： Tomotaka Tsuchimura , Koji Shirakawa , Toru Tsuchihashi , Hideaki Tsubaki
IPC分类号： G03F7/004 , G03F7/028 , C07C309/25 , C07C309/28 , C07C309/42 , C07C309/29 , C07C309/35 , C07C309/38 , C07C309/39 , C07C309/44 , C07C309/59 , C07C323/66 , C07C381/12 , C07D209/82 , C07D339/08 , G03F7/038 , G03F7/039
CPC分类号： C07C309/42 , C07C309/25 , C07C309/29 , C07C309/35 , C07C309/38 , C07C309/39 , C07C309/44 , C07C309/59 , C07C323/66 , C07C381/12 , C07C2601/02 , C07C2601/04 , C07C2601/08 , C07C2601/14 , C07C2601/18 , C07C2602/28 , C07C2602/42 , C07C2602/44 , C07C2603/24 , C07C2603/28 , C07C2603/74 , C07D209/82 , C07D339/08 , G03F7/0045 , G03F7/0382 , G03F7/0392 , G03F7/0397 , Y10S430/122
摘要： An actinic ray-sensitive or radiation-sensitive resin composition includes any of the compounds of general formula (I) below; wherein: Ar represents an aromatic ring that may have a substituent other than the -(A-B) groups; n is an integer of 1 or greater; A represents any one, or a combination of two or more members selected from a single bond, an alkylene group, —O—, —S—, —C(═O)—, —S(═O)—, —S(═O)2— and —OS(═O)2—, provided that —C(═O)O— is excluded; B represents a group containing a hydrocarbon group having 4 or more carbon atoms wherein either a tertiary or a quaternary carbon atom is contained, when n is 2 or greater, the two or more -(A-B) groups may be identical to or different from each other; and M+ represents an organic onium ion.
摘要翻译：光化射线敏感或辐射敏感性树脂组合物包含下列通式（I）的任何化合物; 其中：Ar表示可以具有除 - （A-B）基团以外的取代基的芳香环; n是1或更大的整数; A表示选自单键，亚烷基，-O - ， - S - ， - C（= O） - ， - S（= O） - ， - S（ ≡O）2-和-OS（ΟO）2-，条件是不包括-C（= O）O-; B表示含有具有4个以上碳原子的烃基，其中含有叔或季碳原子的基团，当n为2以上时，两个以上（AB）基可以相同或不同，其他; M +表示有机鎓离子。

14. 发明申请

US20110287234A1 NEGATIVE RESIST PATTERN FORMING METHOD, DEVELOPER AND NEGATIVE CHEMICAL-AMPLIFICATION RESIST COMPOSITION USED THEREFOR, AND RESIST PATTERN 有权
标题翻译：负极电阻图案形成方法，开发商和负极化学放大电阻组合物及其电阻图案
公开(公告)号：US20110287234A1
公开(公告)日：2011-11-24
申请号：US13146976
申请日：2010-01-29
申请人： Toru Tsuchihashi , Tadateru Yatsuo , Koji Shirakawa , Hideaki Tsubaki , Akira Asano
发明人： Toru Tsuchihashi , Tadateru Yatsuo , Koji Shirakawa , Hideaki Tsubaki , Akira Asano
IPC分类号： G03F7/038 , G03F7/20 , B32B3/14 , G03F7/30
CPC分类号： G03F7/0382 , G03F7/0045 , G03F7/325
摘要： A resist pattern forming method including in the following order, (1) a step of forming a film by using a negative chemical-amplification resist composition capable of undergoing negative conversion by a crosslinking reaction, (2) a step of exposing the film, and (4) a step of developing the exposed film by using a developer containing an organic solvent; a developer and a negative chemical-amplification resist composition used therefor; and a resist pattern formed by the pattern forming method.
摘要翻译：一种抗蚀剂图案形成方法，包括以下顺序：（1）通过使用能够通过交联反应进行负转化的负性化学增幅抗蚀剂组合物形成膜的步骤，（2）曝光所述膜的步骤，以及（4）通过使用含有有机溶剂的显影剂使曝光的膜显影的步骤; 用于此的显影剂和负化学放大抗蚀剂组合物; 以及通过图案形成方法形成的抗蚀剂图案。

15. 发明申请

US20050277060A1 Positive resist composition and pattern forming method using the same 审中-公开
标题翻译：正型抗蚀剂组合物和使用其的图案形成方法
公开(公告)号：US20050277060A1
公开(公告)日：2005-12-15
申请号：US11151549
申请日：2005-06-14
申请人： Koji Shirakawa , Tomoya Sasaki
发明人： Koji Shirakawa , Tomoya Sasaki
IPC分类号： G03F7/039 , C08F12/24 , G03C1/492 , G03F7/004 , G03F7/033 , H01L21/027
CPC分类号： G03F7/0392
摘要： A positive resist composition satisfying high sensitivity, high resolution, good pattern profile and good in-vacuum PED property at the same time, and a pattern forming method using the composition, are provided, which is a positive resist composition comprising: (A) a resin which is insoluble or sparingly soluble in an alkali developer and becomes soluble in an alkali developer under the action of an acid; (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; and (C) an organic basic compound, wherein (A1) a resin containing a repeating unit having a specific structure and (A2) a resin other than the resin (A1) are contained as the resin of the component (A); and a pattern forming method using the composition.
摘要翻译：提供了一种能够同时满足高灵敏度，高分辨率，良好的图案形状和良好的真空PED特性的正性抗蚀剂组合物和使用该组合物的图案形成方法，其是正性抗蚀剂组合物，其包含：（A）树脂，其不溶或微溶于碱显影剂，并在酸的作用下变得可溶于碱显影剂; （B）能够在用光化射线或辐射照射时能产生酸的化合物; 和（C）有机碱性化合物，其中（A1）包含具有特定结构的重复单元的树脂和（A2）除树脂（A1）之外的树脂的树脂包含作为组分（A）的树脂; 以及使用该组合物的图案形成方法。

16. 发明申请

US20080241745A1 NEGATIVE RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME 审中-公开
标题翻译：负极性组合物和使用其的图案形成方法
公开(公告)号：US20080241745A1
公开(公告)日：2008-10-02
申请号：US12058329
申请日：2008-03-28
申请人： Koji Shirakawa , Tadateru Yatsuo
发明人： Koji Shirakawa , Tadateru Yatsuo
IPC分类号： G03F7/004 , G03F7/26
CPC分类号： G03F7/11 , C09D125/18 , G03F7/0382 , H01L21/0274 , H01L21/31144 , H01L21/32 , Y10S430/143
摘要： A negative resist composition, includes: (A) an alkali-soluble polymer containing a specific repeating unit as defined in the specification; (B) a crosslinking agent capable of crosslinking with the alkali soluble polymer (A) under an action of an acid; (C) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (D) a specific quaternary ammonium salt as defined in the specification; and (E) an organic carboxylic acid, and a pattern forming method uses the composition.
摘要翻译：负光刻胶组合物包括：（A）含有本说明书中定义的特定重复单元的碱溶性聚合物; （B）能够在酸的作用下与碱溶性聚合物（A）交联的交联剂; （C）能够在光化射线或辐射照射时能够产生酸的化合物; （D）说明书中定义的特定季铵盐; 和（E）有机羧酸，并且图案形成方法使用该组合物。

17. 发明授权

US5714303A Image forming method using strippable layer and light-sensitive polymerizable layer containing silver halide 失效
标题翻译：使用可剥离层和含有卤化银的光敏聚合层的成像方法
公开(公告)号：US5714303A
公开(公告)日：1998-02-03
申请号：US755915
申请日：1996-11-25
申请人： Hiroaki Yokoya , Koji Shirakawa
发明人： Hiroaki Yokoya , Koji Shirakawa
IPC分类号： C08F2/48 , G03F3/10 , G03F7/028 , G03F7/28 , G03C11/12
CPC分类号： G03F7/28 , G03F3/106 , G03F7/0285
摘要： The present invention provides new image forming methods. The image forming methods use a combination of a light-sensitive material and an image receiving material. The light-sensitive material comprises a support, a strippable layer and a light-sensitive polymerizable layer in order. The light-sensitive polymerizable layer contains silver halide, a reducing agent and an ethylenically unsaturated polymerizable compound or a cross-linkable polymer. The light-sensitive polymerizable layer may further contain a colorant. An image forming method using the light-sensitive polymerizable layer containing no colorant comprises an exposing step, a developing step, a toning step and a transferring step. Another image forming method using the colorant-containing light-sensitive polymerizable layer comprises an exposing step, a developing step, a removing step and a transferring step. The present invention is characterized in that an image formed on the strippable layer is entirely transferred to the image receiving material. The strippable layer has a thickness of not less than 1.0 .mu.m. A new light-sensitive material having the strippable layer is also disclosed.
摘要翻译：本发明提供了新的成像方法。图像形成方法使用感光材料和图像接收材料的组合。感光材料依次包括支持体，可剥离层和光敏聚合层。光敏聚合层含有卤化银，还原剂和烯键式不饱和可聚合化合物或可交联聚合物。光敏聚合层还可以含有着色剂。使用不含着色剂的光敏聚合层的成像方法包括曝光步骤，显影步骤，调色步骤和转印步骤。使用含着色剂的光敏聚合层的另一成像方法包括曝光步骤，显影步骤，去除步骤和转印步骤。本发明的特征在于，形成在可剥离层上的图像被完全转印到图像接收材料。可剥离层的厚度不小于1.0μm。还公开了具有可剥离层的新的感光材料。

18. 发明授权

US09090722B2 Chemical amplification resist composition, and mold preparation method and resist film using the same 有权
标题翻译：化学放大抗蚀剂组合物，以及模具制备方法和使用其的抗蚀剂膜
公开(公告)号：US09090722B2
公开(公告)日：2015-07-28
申请号：US13256397
申请日：2010-06-23
申请人： Toru Fujimori , Koji Shirakawa , Toshihiro Usa , Kenji Sugiyama , Takayuki Ito , Hideaki Tsubaki , Katsuhiro Nishimaki , Shuji Hirano , Hidenori Takahashi
发明人： Toru Fujimori , Koji Shirakawa , Toshihiro Usa , Kenji Sugiyama , Takayuki Ito , Hideaki Tsubaki , Katsuhiro Nishimaki , Shuji Hirano , Hidenori Takahashi
IPC分类号： C08F20/50 , G03F7/00 , G03F7/039 , B82Y10/00 , B82Y40/00 , B29C59/02 , B29C33/38 , B29C33/42 , G03F7/004
CPC分类号： C08F20/50 , B29C33/38 , B29C2033/426 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F7/0046 , G03F7/0392 , G03F7/0397
摘要： A chemical amplification resist composition that is used for preparation of a mold, and a mold preparation method and a resist film each using the composition are provided.
摘要翻译：提供了用于制备模具的化学增幅抗蚀剂组合物，以及使用该组合物的模具制备方法和抗蚀剂膜。

19. 发明授权

US08637222B2 Negative resist pattern forming method, developer and negative chemical-amplification resist composition used therefor, and resist pattern 有权
标题翻译：用于其的负抗蚀剂图案形成方法，显影剂和负极化学放大抗蚀剂组合物以及抗蚀剂图案
公开(公告)号：US08637222B2
公开(公告)日：2014-01-28
申请号：US13146976
申请日：2010-01-29
申请人： Toru Tsuchihashi , Tadateru Yatsuo , Koji Shirakawa , Hideaki Tsubaki , Akira Asano
发明人： Toru Tsuchihashi , Tadateru Yatsuo , Koji Shirakawa , Hideaki Tsubaki , Akira Asano
IPC分类号： G03C5/00
CPC分类号： G03F7/0382 , G03F7/0045 , G03F7/325
摘要： A resist pattern forming method including in the following order, (1) a step of forming a film by using a negative chemical-amplification resist composition capable of undergoing negative conversion by a crosslinking reaction, (2) a step of exposing the film, and (4) a step of developing the exposed film by using a developer containing an organic solvent; a developer and a negative chemical-amplification resist composition used therefor; and a resist pattern formed by the pattern forming method.
摘要翻译：一种抗蚀剂图案形成方法，包括以下顺序：（1）通过使用能够通过交联反应进行负转化的负性化学增幅抗蚀剂组合物形成膜的步骤，（2）曝光所述膜的步骤，以及（4）通过使用含有有机溶剂的显影剂使曝光的膜显影的步骤; 用于此的显影剂和负化学放大抗蚀剂组合物; 以及通过图案形成方法形成的抗蚀剂图案。

20. 发明申请

US20100224207A1 Eyelash Curler 审中-公开
标题翻译：睫毛夹
公开(公告)号：US20100224207A1
公开(公告)日：2010-09-09
申请号：US12086388
申请日：2008-03-14
申请人： Koji Otsuka , Koji Shirakawa
发明人： Koji Otsuka , Koji Shirakawa
IPC分类号： A45D2/48
CPC分类号： A45D2/48
摘要： [Subject] To provide an eyelash curler capable of curling the entire eyelashes easily and beautifully in an ideally radial state by using the eyelash curler once.[Solving Means] An eyelash curler according to the present invention is provided with a pair of supporting columns 10, a movable member 14 in a curved shape capable of moving in the up and down direction along supporting column upper parts 10a in a linear shape of a pair of the supporting columns, an elastic body 16 attached to the movable member, a fixing member 12 in a curved shape fixed to the upper parts 10a of a pair of the supporting column and handles 18 and 22 for moving the movable member 14 in the up and down direction, a curvature radius R3 of a lower edge 12a of the fixing member 12 (excluding the vicinities of both ends) in a front view is set to 16.5 to 22.5 mm, and a curvature radius R1 of the lower edge 12a of the fixing member 12 (excluding the vicinities of the both ends) in a plan view is set to 18.5 to 24.5 mm.
摘要翻译： [主题]提供一种能够通过使用睫毛夹卷发器，在理想的径向状态下容易且美观地卷曲整个睫毛的睫毛夹。具体实施方式根据本发明的睫毛夹具设置有一对支柱10，能够沿着支撑柱上部10a沿上下方向沿着上下方向移动的可动构件14，其形状为直线状一对支撑柱，附接到可动构件的弹性体16，固定在一对支柱的上部10a上的弯曲形状的固定构件12和用于使可动构件14移动的手柄18和22 前后方向上的固定构件12的下边缘12a的曲率半径R3（不包括两端附近）设定为16.5〜22.5mm，下边缘12a的曲率半径R1 （不包括两端附近）在平面图中设定为18.5〜24.5mm。

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