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11. 发明授权

US07112264B2 Plating apparatus and method 失效
标题翻译：电镀装置及方法
公开(公告)号：US07112264B2
公开(公告)日：2006-09-26
申请号：US10606956
申请日：2003-06-27
申请人： Hidetoshi Tsuzuki , Noboru Toyama , Yasuyoshi Takai , Ryo Hayashi , Yuichi Sonoda , Masumitsu Iwata , Yusuke Miyamoto
发明人： Hidetoshi Tsuzuki , Noboru Toyama , Yasuyoshi Takai , Ryo Hayashi , Yuichi Sonoda , Masumitsu Iwata , Yusuke Miyamoto
IPC分类号： C25D5/02 , C25D7/06 , C25D17/00
CPC分类号： C25D7/0671 , C25D5/028
摘要： A plating apparatus includes a plating vessel for holding a plating bath containing at least metal ions, a conveying device for conveying a long conductive substrate and immersing the long conductive substrate in the plating bath, a facing electrode disposed in the plating bath so as to face one surface of the conductive substrate, a voltage application device for performing plating on the one surface of the conductive substrate by applying a voltage between the conductive substrate and the facing electrode, and a film-deposition suppression device fixedly disposed in the plating vessel so that at least a portion of the film-deposition suppression means is close to shorter-direction edges of the conductive substrate. At least a portion of the film-deposition suppression device close to the shorter-direction edges of the conductive substrate is conductive. By holding the conductive portion of the film-deposition suppression device and the conductive substrate at substantially the same potential, film deposition on the other surface of the conductive substrate is suppressed.
摘要翻译：电镀装置包括用于保持至少含有金属离子的电镀槽的电镀容器，用于输送长导电性基板并将长导电性基材浸渍在电镀槽中的输送装置，设置在镀浴中的面对电极，导电基板的一个表面，通过在导电基板和对置电极之间施加电压在导电基板的一个表面上进行电镀的电压施加装置和固定地设置在电镀槽中的成膜抑制装置，使得至少一部分成膜抑制装置接近导电基板的短边缘。靠近导电基板的短边缘的薄膜沉积抑制装置的至少一部分是导电的。通过将成膜抑制装置的导电部分和导电基板保持在基本相同的电位，抑制导电基板的另一个表面上的成膜。

12. 发明申请

US20050287791A1 Method of forming laminate and method of manufacturing photovoltaic device 失效
公开(公告)号：US20050287791A1
公开(公告)日：2005-12-29
申请号：US11197512
申请日：2005-08-05
申请人： Takaharu Kondo , Hideo Tamura , Atsushi Yasuno , Noboru Toyama , Yuichi Sonoda , Masumitsu Iwata , Akiya Nakayama , Yusuke Miyamoto
发明人： Takaharu Kondo , Hideo Tamura , Atsushi Yasuno , Noboru Toyama , Yuichi Sonoda , Masumitsu Iwata , Akiya Nakayama , Yusuke Miyamoto
IPC分类号： H01L31/04 , B05D5/12 , C03C17/36 , H01L21/00 , H01L21/4763 , H01L27/14 , H01L31/00 , H01L31/0216 , H01L31/052 , H01L31/18
CPC分类号： H01L31/02168 , H01L31/056 , Y02E10/52
摘要： A method of forming a laminate and a method of manufacturing a photovoltaic device using the laminate are provided. The laminate forming method includes a first step of forming an intermediate layer on a base member, and a second step of forming a metal layer on the intermediate layer, the adhesion of the metal layer to the base member being lower than that of the intermediate layer, the reflectance of the metal layer being higher than that of the intermediate layer. The rate of formation of the metal layer is increased at an intermediate stage in the second step. The laminate thereby formed has improved characteristics and is capable of maintaining improved reflection characteristics and adhesion even under high-temperature and high-humidity conditions or during long-term use.

13. 发明授权

US06951771B2 Method of forming laminate and method of manufacturing photovoltaic device 失效
标题翻译：形成层压板的方法和制造光伏器件的方法
公开(公告)号：US06951771B2
公开(公告)日：2005-10-04
申请号：US10616937
申请日：2003-07-11
申请人： Takaharu Kondo , Hideo Tamura , Atsushi Yasuno , Noboru Toyama , Yuichi Sonoda , Masumitsu Iwata , Akiya Nakayama , Yusuke Miyamoto
发明人： Takaharu Kondo , Hideo Tamura , Atsushi Yasuno , Noboru Toyama , Yuichi Sonoda , Masumitsu Iwata , Akiya Nakayama , Yusuke Miyamoto
IPC分类号： H01L31/04 , B05D5/12 , C03C17/36 , H01L21/00 , H01L21/4763 , H01L27/14 , H01L31/00 , H01L31/0216 , H01L31/052 , H01L31/18
CPC分类号： H01L31/02168 , H01L31/056 , Y02E10/52
摘要： A method of forming a laminate and a method of manufacturing a photovoltaic device using the laminate are provided. The laminate forming method includes a first step of forming an intermediate layer on a base member, and a second step of forming a metal layer on the intermediate layer, the adhesion of the metal layer to the base member being lower than that of the intermediate layer, the reflectance of the metal layer being higher than that of the intermediate layer. The rate of formation of the metal layer is increased at an intermediate stage in the second step. The laminate thereby formed has improved characteristics and is capable of maintaining improved reflection characteristics and adhesion even under high-temperature and high-humidity conditions or during long-term use.
摘要翻译：提供一种形成层压体的方法和使用该层压体制造光伏器件的方法。层压体形成方法包括在基材上形成中间层的第一工序和在中间层上形成金属层的第二工序，金属层与基材的密合性比中间层低，金属层的反射率高于中间层的反射率。在第二步骤的中间阶段，金属层的形成速率增加。由此形成的层压件具有改进的特性，并且即使在高温和高湿度条件下或在长期使用中也能够保持改进的反射特性和粘附性。

14. 发明申请

US20050150773A1 Method for forming deposition film and method for producing photovoltaic device 审中-公开
标题翻译：用于形成沉积膜的方法和用于制造光伏器件的方法
公开(公告)号：US20050150773A1
公开(公告)日：2005-07-14
申请号：US10999926
申请日：2004-12-01
申请人： Satoru Yamada , Noboru Toyama , Ryo Hayashi , Yuichi Sonoda , Tomonori Nishimoto , Masumitsu Iwata , Yusuke Miyamoto , Takaharu Kondo
发明人： Satoru Yamada , Noboru Toyama , Ryo Hayashi , Yuichi Sonoda , Tomonori Nishimoto , Masumitsu Iwata , Yusuke Miyamoto , Takaharu Kondo
IPC分类号： C25D9/08 , C23C28/00 , C23C28/04 , C25D5/34 , C25D5/48 , H01L21/288 , H01L31/04
CPC分类号： C25D5/48 , C23C28/00 , C25D5/34
摘要： A method for forming a deposition film from an aqueous solution by electrochemical reaction includes the steps of: forming the targeted deposition film under primary deposition conditions; replacing at least part of members in contact with the solution or removing deposit on surfaces of the members; and depositing a film under secondary deposition conditions. These steps are performed in that order. Then, the deposition film is formed again under the primary deposition conditions. In the method, the resulting deposition film exhibits desired characteristics even after maintenance of the deposition apparatus.
摘要翻译：通过电化学反应从水溶液形成沉积膜的方法包括以下步骤：在初始沉积条件下形成目标沉积膜; 替换至少部分与溶液接触的构件或去除构件表面上的沉积物; 并在二次沉积条件下沉积薄膜。这些步骤按照顺序执行。然后，在初始沉积条件下再次形成沉积膜。在该方法中，即使在保存沉积设备之后，所得到的沉积膜也显示出期望的特性。

15. 发明申请

US20050016862A1 Method of producing zinc oxide thin film, method of producing photovoltaic device and method of producing semiconductor device 审中-公开
标题翻译：生产氧化锌薄膜的方法，制造光伏器件的方法和制造半导体器件的方法
公开(公告)号：US20050016862A1
公开(公告)日：2005-01-27
申请号：US10920376
申请日：2004-08-18
申请人： Masafumi Sano , Yuichi Sonoda
发明人： Masafumi Sano , Yuichi Sonoda
IPC分类号： C01G9/02 , C25D9/04 , C25D9/08 , H01L31/0216 , H01L31/0236 , H01L31/04 , C25D3/22 , H02N6/00
CPC分类号： C25D9/04 , H01L31/02167 , H01L31/02363 , Y02E10/50
摘要： The present invention provides a method of producing a zinc oxide thin film in which a current is passed between a conductive substrate immersed in an aqueous solution containing at least zinc ions, ammonium ions and zinc ammonia complex ions, and an electrode as an anode immersed in the aqueous solution to form a zinc oxide thin film on the conductive substrate. This method stabilizes formation of the zinc oxide thin film and improves adhesion between the thin film and the substrate.
摘要翻译：本发明提供一种氧化锌薄膜的制造方法，其中，在浸渍在至少含有锌离子，铵离子和锌氨络离子的水溶液中的导电性基板之间通过电流，以及作为阳极浸渍的电极该水溶液在导电基材上形成氧化锌薄膜。该方法稳定了氧化锌薄膜的形成，提高了薄膜与基板的粘合性。

16. 发明授权

US06544877B1 Method of producing thin film of zinc oxide, process for manufacturing photovoltaic element using its method, and photovoltaic element 失效
标题翻译：氧化锌薄膜的制造方法，使用其制造光电元件的方法和光电元件
公开(公告)号：US06544877B1
公开(公告)日：2003-04-08
申请号：US09447239
申请日：1999-11-23
申请人： Yuichi Sonoda , Kozo Arao , Noboru Toyama , Yusuke Miyamoto
发明人： Yuichi Sonoda , Kozo Arao , Noboru Toyama , Yusuke Miyamoto
IPC分类号： C25D1100
CPC分类号： H01L31/022425 , C25D9/08 , H01L21/02422 , H01L21/02425 , H01L21/02491 , H01L21/02532 , H01L21/02554 , H01L21/02628 , H01L31/056 , Y02E10/52
摘要： The method of the present invention is a method of producing a thin film of zinc oxide, which comprises immersing a counter electrode and a conductive substrate as a negative electrode in an aqueous solution containing nitrate ions and 0.05 mol/liter or more of zinc ions, and passing a current between the counter electrode and the conductive substrate to electrochemically deposit zinc oxide on the conductive substrate from the aqueous solution, thereby forming a thin film of zinc oxide, wherein a film forming rate of the thin film is varied at least one time midway during an electrolytic deposition reaction for forming the thin film. The present invention can provide the following meritorious advantages: it is possible to form a texture-structured thin film effective in optical confinement in a short time by using the above electrolytic deposition method advantageous for lowering a production cost, to prevent abnormal growth of a deposited film, to have a film surface excellent in uniformity and adhesion, and to improve photoelectric characteristics and promote mass productivity by applying the present invention to the stacked structure of a photovoltaic element.
摘要翻译：本发明的方法是一种氧化锌薄膜的制造方法，其特征在于，将含有硝酸根离子和0.05mol / l以上锌离子的水溶液中的相对电极和导电性基板作为负极浸渍，并且在对电极和导电基板之间通过电流，以从电解液中将氧化锌从水溶液中沉积在导电性基板上，由此形成氧化锌薄膜，其中薄膜的成膜速度至少改变一次在用于形成薄膜的电解沉积反应期间的中途。本发明可以提供以下优点：通过使用有利于降低生产成本的上述电解沉积方法，可以在短时间内形成有效的光学限制的纹理结构薄膜，以防止沉积物的异常生长膜具有均匀性和粘合性优异的膜表面，并且通过将本发明应用于光伏元件的堆叠结构来改善光电特性并提高质量生产率。

17. 发明授权

US6133061A Method of forming thin zinc oxide film, and method of producing semiconductor element substrate and photovoltaic element using thin zinc oxide film 有权
标题翻译：薄氧化锌膜的形成方法以及使用薄氧化锌膜制造半导体元件基板和光电元件的方法
公开(公告)号：US6133061A
公开(公告)日：2000-10-17
申请号：US243456
申请日：1999-02-03
申请人： Yuichi Sonoda
发明人： Yuichi Sonoda
IPC分类号： H01L31/04 , C25D5/02 , C25D7/06 , C25D9/04 , H01L31/0392 , H01L31/075 , H01L31/18 , H01L31/20 , H01L21/00
CPC分类号： H01L31/1884 , H01L31/03921 , H01L31/075 , H01L31/1828 , H01L31/206 , C25D5/028 , C25D7/0614 , C25D9/04 , Y02E10/543 , Y02E10/548 , Y02P70/521
摘要： The present invention provides a method of forming a thin film of zinc oxide on a conductive substrate by electrodeposition from an aqueous solution, which is capable of preventing film deposition on the back surface of the substrate. More specifically, a film deposition-preventing electrode for preventing film deposition on the back surface of the substrate is provided in an aqueous solution containing nitrate ions, and a current is supplied in such a manner that a potential relationship of "a counter electrode>the substrate>the film deposition-preventing electrode" is obtained. This method can be applied to a process for preparing a solar cell, thereby improving short circuit current density, photoelectric conversion efficiency, production yield and durability of the solar cell.
摘要翻译：本发明提供一种通过从水溶液中电沉积而在导电性基材上形成氧化锌薄膜的方法，其能够防止在基板的背面上的成膜。更具体地，在含有硝酸根离子的水溶液中设置用于防止在基板的背面上的膜沉积的防止薄膜沉积的电极，并且以“相对电极> 基板>防止成膜的电极“。该方法可以应用于制造太阳能电池的方法，从而提高太阳能电池的短路电流密度，光电转换效率，生产成品率和耐久性。

18. 发明申请

US20050189012A1 Zinc oxide film, photovoltaic device making use of the same, and zinc oxide film formation process 审中-公开
标题翻译：氧化锌膜，使用相同的光电器件，以及氧化锌膜的形成工艺
公开(公告)号：US20050189012A1
公开(公告)日：2005-09-01
申请号：US10693914
申请日：2003-10-28
申请人： Takaharu Kondo , Noboru Toyama , Ryo Hayashi , Yuichi Sonoda , Tomonori Nishimoto , Satoru Yamada , Makoto Higashikawa , Masumitsu Iwata , Yusuke Miyamoto
发明人： Takaharu Kondo , Noboru Toyama , Ryo Hayashi , Yuichi Sonoda , Tomonori Nishimoto , Satoru Yamada , Makoto Higashikawa , Masumitsu Iwata , Yusuke Miyamoto
IPC分类号： C23C14/08 , C23C28/04 , C25D9/04 , H01L31/0224 , H01L31/0352 , H01L31/0392 , H01L31/18 , H01L31/00
CPC分类号： H01L31/0392 , C23C14/086 , C23C28/044 , C23C28/30 , C23C28/323 , C23C28/324 , C23C28/345 , C25D9/04 , H01L31/022425 , H01L31/03529 , H01L31/03921 , H01L31/18 , Y02E10/50
摘要： In a zinc oxide film having a plurality of texture constituents comprised of hills each having structure wherein a first surface borders on a second surface along one curved line, texture constituents in which first surfaces the hills of the texture constituents have have an average angle of inclination in a size within the range of from 30 degrees or more to 60 degrees or less and second surfaces have an average angle of inclination in a size within the range of from 10 degrees or more to 35 degrees or less account for at least a half of the plurality of texture constituents. This enables improvement in characteristics and durability of zinc oxide films used as optical confinement layers in photovoltaic devices, and also enables formation thereof at a low cost.
摘要翻译：在具有多个纹理构成的氧化锌膜中，每个纹理组成由具有结构的山丘构成，其中第一表面沿着一个曲线边界在第二表面上，其中纹理成分的第一表面纹理成分的山丘具有平均倾角尺寸在30度以上至60度以下的范围内，第二表面具有在10度以上至35度以下的尺寸的平均倾斜角，占至少一半以上多个纹理成分。这使得能够改善用作光电器件中的光限制层的氧化锌膜的特性和耐久性，并且还能够以低成本形成。

19. 发明授权

US06733650B2 Apparatus and process for producing zinc oxide film 失效
标题翻译：用于生产氧化锌膜的设备和方法
公开(公告)号：US06733650B2
公开(公告)日：2004-05-11
申请号：US09897012
申请日：2001-07-03
申请人： Yuichi Sonoda , Kozo Arao , Noboru Toyama , Yusuke Miyamoto
发明人： Yuichi Sonoda , Kozo Arao , Noboru Toyama , Yusuke Miyamoto
IPC分类号： C25D706
CPC分类号： C25D9/08 , C25D7/0614 , C25D21/18
摘要： Disclosed are a process for producing a zinc oxide film comprising the steps of transporting a conductive long substrate via above at least one electrode comprised of zinc in an electrodeposition bath held in an electrodeposition tank and applying an electric field between the electrode and the conductive long substrate, thereby forming a zinc oxide film on the conductive long substrate, the process comprising a first step of forming the zinc oxide film on a part of the conductive long substrate; a second step of stopping the application of the electric field and the transportation; and a third step of bringing at least a region of a part of the conductive long substrate being in contact with the electrodeposition bath in the second step into non-contact with the electrodeposition bath, and an apparatus suitably used for the process. The process and apparatus enables high-quality zinc oxide films to be produced.
摘要翻译：公开了一种生产氧化锌膜的方法，包括以下步骤：将导电长基材经由上述至少一个由锌组成的电极输送到保持在电沉积槽中的电沉积浴中并在电极和导电长基板之间施加电场从而在导电性长基板上形成氧化锌膜，该方法包括在导电性长基板的一部分上形成氧化锌膜的第一工序; 停止电场和运输的应用的第二步; 以及第三步骤，使得在第二步骤中的导电长基板的与电沉积浴接触的部分的至少一部分区域与电沉积浴非接触，以及适合用于该方法的设备。该方法和装置能够生产出高质量的氧化锌膜。

20. 发明授权

US06660931B2 Substrate for solar cell, solar cell having the same, and production process of solar cell 失效
标题翻译：用于太阳能电池的基板，具有相同的太阳能电池以及太阳能电池的生产工艺
公开(公告)号：US06660931B2
公开(公告)日：2003-12-09
申请号：US10208868
申请日：2002-08-01
申请人： Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
发明人： Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
IPC分类号： H01L310224
CPC分类号： H01L31/022425 , C23C14/086 , Y02E10/50
摘要： A substrate for a solar cell is provided which comprises a support having a metal surface and a zinc oxide film formed on the metal surface and having a water content of 7.5×10−3 mol/cm3 or less, preferably 4.0×10−4 mol/cm3 or more. Thereby, the increase of series resistance and the generation of shunt are prevented and the efficiency such as Jsc and the chemical stability are improved, thus obtaining a solar cell with a zinc oxide film having optimal overall characteristics.
摘要翻译：提供了一种用于太阳能电池的基板，其包括具有金属表面的支撑体和形成在金属表面上的水分含量为7.5×10 -3 mol / cm 3以下，优选4.0×10 3的氧化锌膜 -4 -4 mol / cm 3以上。由此，防止了串联电阻的增加和分路的产生，提高了Jsc等的效率和化学稳定性，从而得到具有最佳整体特性的具有氧化锌膜的太阳能电池。

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