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    • 14. 发明授权
    • Flat panel display device with simplified efficient structure and method of manufacturing the same
    • 具有简化效率结构的平板显示装置及其制造方法
    • US08610126B2
    • 2013-12-17
    • US13042986
    • 2011-03-08
    • Kyung-Min Park
    • Kyung-Min Park
    • H01L33/60
    • H01L27/1255
    • Provided are a flat panel display device and a method of manufacturing the same. The flat panel display device includes a first thin-film transistor including a first active layer, a first insulation layer disposed on the first active layer, and a first gate electrode disposed on the first insulation layer; a second thin-film transistor including a second active layer, the first insulation layer disposed on the second active layer, a second insulation layer disposed on the first insulation layer, and a second gate electrode disposed on the second insulation layer, and electrically connected to the first thin-film transistor; and a capacitor electrically connected to the first thin-film transistor and the second thin-film transistor. In the structure as described above, since different numbers of insulation layers are interposed between active layers and gate electrode in each of the first thin-film transistor and the second thin-film transistor, threshold voltages of the first thin-film transistor and the second thin-film transistor are significantly different from each other, and thus it becomes easy to control the threshold voltages of the first thin-film transistor and the second thin-film transistor.
    • 提供一种平板显示装置及其制造方法。 平板显示装置包括:第一薄膜晶体管,包括第一有源层,设置在第一有源层上的第一绝缘层和设置在第一绝缘层上的第一栅电极; 第二薄膜晶体管,包括第二有源层,设置在第二有源层上的第一绝缘层,设置在第一绝缘层上的第二绝缘层,以及设置在第二绝缘层上的第二栅极,并且电连接到 第一薄膜晶体管; 以及电连接到第一薄膜晶体管和第二薄膜晶体管的电容器。 在上述结构中,由于在第一薄膜晶体管和第二薄膜晶体管的每一个的有源层和栅电极之间插入不同数量的绝缘层,所以第一薄膜晶体管和第二薄膜晶体管的阈值电压 薄膜晶体管彼此显着不同,因此容易控制第一薄膜晶体管和第二薄膜晶体管的阈值电压。
    • 15. 发明申请
    • LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 液晶显示装置及其制造方法
    • US20110221989A1
    • 2011-09-15
    • US13004561
    • 2011-01-11
    • Dae-Won LEEKyung-Min Park
    • Dae-Won LEEKyung-Min Park
    • G02F1/136H01J9/00
    • G02F1/134309G02F1/1339G02F2001/133388G02F2001/134318
    • A Liquid Crystal Display (LCD) device and a method of manufacturing the same are provided. The liquid crystal molecules are inclined and rearranged in a radial shape by patterning upper and lower electrodes across and apart from each other on dummy pixels disposed on a black matrix formed in a non-display area of an LCD device and applying an electric field to a liquid crystal layer via the upper and lower electrodes. Thus, ion impurities in the non-display area can be prevented from dispersing to a display area, thereby improving edge part stains of the LCD device. The LCD device includes a first substrate including first pixel electrodes of the dummy pixels; a second substrate facing the first substrate and including first common electrodes formed across and apart from the first pixel electrodes; and a liquid crystal layer disposed between the first substrate and the second substrate, and having liquid crystal molecules rearranged by an electric field applied via the first pixel electrodes and the first common electrodes.
    • 提供一种液晶显示器(LCD)装置及其制造方法。 液晶分子通过在设置在LCD装置的非显示区域中的黑矩阵上的虚拟像素上彼此跨越并分离上下电极而倾斜并重新排列,并将电场施加到 液晶层通过上下电极。 因此,可以防止非显示区域中的离子杂质分散到显示区域,从而改善LCD装置的边缘部分污渍。 LCD装置包括:第一基板,包括虚拟像素的第一像素电极; 面向所述第一基板的第二基板,并且包括跨越并与所述第一像素电极分离的第一公共电极; 以及设置在第一基板和第二基板之间的液晶层,并且通过经由第一像素电极和第一公共电极施加的电场重新排列液晶分子。
    • 16. 发明授权
    • Thin film transistor array panel and method of manufacturing the same
    • 薄膜晶体管阵列面板及其制造方法
    • US07803672B2
    • 2010-09-28
    • US12433743
    • 2009-04-30
    • Kyung-Min ParkJin-Goo JungChun-Gi YouJae-Byoung ChaeTae-Ill Kim
    • Kyung-Min ParkJin-Goo JungChun-Gi YouJae-Byoung ChaeTae-Ill Kim
    • H01L21/00
    • H01L27/1288H01L27/1214H01L29/4908H01L29/66757
    • A method of manufacturing a thin film transistor array panel is provided, which includes: forming a semiconductor layer of polysilicon on an insulating substrate; forming a gate insulating layer on the semiconductor layer; forming a gate electrode on the gate insulating layer; forming a source region and a drain region by doping conductive impurities in the semiconductor layer; forming an interlayer insulating layer covering the gate electrode; forming a source electrode and a drain electrode respectively connected to the source and the drain regions; forming a passivation layer covering the source and the drain electrodes; forming a pixel electrode connected to the drain electrode; and forming a first alignment key when forming one selected from the semiconductor layer, the gate electrode, the source and the drain electrodes, and the pixel electrode, wherein one selected from the semiconductor layer, the gate electrode, the source and the drain electrodes, and the pixel electrode is at least formed by photolithography process using a photoresist pattern as an etch mask, and a second alignment key completely covering the first alignment key is formed at the same layer as the photoresist pattern.
    • 提供一种制造薄膜晶体管阵列面板的方法,其包括:在绝缘衬底上形成多晶硅半导体层; 在所述半导体层上形成栅极绝缘层; 在栅极绝缘层上形成栅电极; 通过掺杂半导体层中的导电杂质形成源区和漏区; 形成覆盖所述栅电极的层间绝缘层; 形成分别连接到源区和漏区的源电极和漏电极; 形成覆盖源极和漏极的钝化层; 形成连接到所述漏电极的像素电极; 以及在形成从半导体层,栅电极,源极和漏极以及像素电极中选择的一个时形成第一对准键,其中从半导体层,栅电极,源电极和漏电极中选择一个, 并且至少通过使用光致抗蚀剂图案作为蚀刻掩模的光刻工艺形成像素电极,并且在与光致抗蚀剂图案相同的层处形成完全覆盖第一对准键的第二对准键。
    • 18. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE DEVICE
    • 半导体器件及其制造方法
    • US20090160004A1
    • 2009-06-25
    • US12334507
    • 2008-12-14
    • Kyung-Min Park
    • Kyung-Min Park
    • H01L21/04H01L31/0224H01L31/0232
    • H01L21/7682H01L21/76828H01L27/14636
    • Embodiments relate to a semiconductor device and a method for manufacturing a semiconductor device. According to embodiments, a method may include forming a metal layer on and/or over a lower structure formed on and/or over a semiconductor substrate, forming neighboring metal lines by patterning the metal layer by a photolithography process, forming an insulating layer on and/or over a surface of the lower structure and forming a void between the metal lines, and performing heat treatment to the metal lines and the insulating layer having the void. According to embodiments, a void may be used as a buffer against expansion of the metal lines in sintering due to a difference in a thermal expansion coefficient. This may prevent a blister phenomenon that may separate an insulating film from metal lines.
    • 实施例涉及半导体器件和半导体器件的制造方法。 根据实施例,一种方法可以包括在形成在半导体衬底之上和/或之上的下部结构上和/或上方形成金属层,通过光刻工艺图案化金属层形成相邻的金属线,在其上形成绝缘层, /或在下部结构的表面上方,并且在金属线之间形成空隙,并对金属线和具有空隙的绝缘层进行热处理。 根据实施例,由于热膨胀系数的差异,可以使用空隙作为缓冲金属线在烧结中的膨胀。 这可以防止可能将绝缘膜与金属线分离的起泡现象。