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    • 11. 发明申请
    • FIELD-EFFECT TRANSISTOR
    • 场效应晶体管
    • US20110227132A1
    • 2011-09-22
    • US13118945
    • 2011-05-31
    • Yoshiharu ANDAHidetoshi ISHIDATetsuzo UEDA
    • Yoshiharu ANDAHidetoshi ISHIDATetsuzo UEDA
    • H01L29/205
    • H01L29/42316H01L29/2003H01L29/4236H01L29/7787
    • The present invention has as an object to provide a FET having low on-resistance. The FET according to the present invention includes: first nitride semiconductor layer; a second nitride semiconductor layer formed on the first nitride semiconductor layer and having a higher band gap energy than the first nitride semiconductor layer; a third nitride semiconductor layer formed on the second nitride semiconductor layer; a fourth nitride semiconductor layer formed on the third nitride semiconductor layer and having a higher band gap energy than the third nitride semiconductor layer. A channel is formed in a heterojunction interface between the first nitride semiconductor layer and the second nitride semiconductor layer.
    • 本发明的目的是提供一种具有低导通电阻的FET。 根据本发明的FET包括:第一氮化物半导体层; 形成在所述第一氮化物半导体层上并且具有比所述第一氮化物半导体层更高的带隙能量的第二氮化物半导体层; 形成在所述第二氮化物半导体层上的第三氮化物半导体层; 形成在所述第三氮化物半导体层上并且具有比所述第三氮化物半导体层更高的带隙能量的第四氮化物半导体层。 在第一氮化物半导体层和第二氮化物半导体层之间的异质结界面形成沟道。
    • 12. 发明申请
    • 4H-POLYTYPE GALLIUM NITRIDE-BASED SEMICONDUCTOR DEVICE ON A 4H-POLYTYPE SUBSTRATE
    • 4H-多晶型氮化镓基半导体器件在4H-多晶基片上
    • US20090261362A1
    • 2009-10-22
    • US12496271
    • 2009-07-01
    • Tetsuzo UEDATsunenobu KimotoHiroyuki MatsunamiJun SudaNorio Onojima
    • Tetsuzo UEDATsunenobu KimotoHiroyuki MatsunamiJun SudaNorio Onojima
    • H01L33/00
    • H01L21/02082H01L21/02378H01L21/02433H01L21/02458H01L21/0254H01L21/0262H01L21/02639H01L21/0265H01L33/18H01L33/32
    • 4H—InGaAlN alloy based optoelectronic and electronic devices on non-polar face are formed on 4H—AlN or 4H—AlGaN on (11-20) a-face 4H—SiC substrates. Typically, non polar 4H—AlN is grown on 4H—SiC (11-20) by molecular beam epitaxy (MBE). Subsequently, III-V nitride device layers are grown by metal organic chemical vapor deposition (MOCVD) with 4H-polytype for all of the layers. The non-polar device does not contain any built-in electric field due to the spontaneous and piezoelectric polarization. The optoelectronic devices on the non-polar face exhibits higher emission efficiency with shorter emission wavelength because the electrons and holes are not spatially separated in the quantum well. Vertical device configuration for lasers and light emitting diodes (LEDs) using conductive 4H—AlGaN interlayer on conductive 4H—SiC substrates makes the chip size and series resistance smaller. The elimination of such electric field also improves the performance of high speed and high power transistors. The details of the epitaxial growth s and the processing procedures for the non-polar III-V nitride devices on the non-polar SiC substrates are also disclosed.
    • 在(11-20)a面4H-SiC衬底上的4H-AlN或4H-AlGaN上形成4H-InGaAlN合金基非极性面上的光电子和电子器件。 通常,非极性4H-AlN通过分子束外延(MBE)在4H-SiC(11-20)上生长。 随后,通过用于所有层的4H-多型金属有机化学气相沉积(MOCVD)生长III-V族氮化物器件层。 由于自发和压电极化,非极性器件不包含任何内置的电场。 由于电子和空穴在量子阱中没有空间分离,非极性面上的光电器件表现出较短的发射波长的发射效率。 在导电4H-SiC衬底上使用导电4H-AlGaN夹层的激光器和发光二极管(LED)的垂直器件配置使芯片尺寸和串联电阻更小。 这种电场的消除也提高了高速和高功率晶体管的性能。 还公开了非极性SiC衬底上的非极性III-V族氮化物器件的外延生长细节和处理步骤。
    • 18. 发明申请
    • SEMICONDUCTOR LASER DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体激光器件及其制造方法
    • US20080008220A1
    • 2008-01-10
    • US11850603
    • 2007-09-05
    • Tetsuzo UEDAMasaaki YURI
    • Tetsuzo UEDAMasaaki YURI
    • H01S5/20
    • H01S5/34333B82Y20/00H01S5/0208H01S5/0425H01S5/2009H01S5/2214H01S5/2231H01S5/3214H01S2304/12Y10S438/973Y10S438/977
    • It is an object of the present invention to provide a semiconductor laser device with high-yielding in which a clack generated in an epitaxial growth layer is restrained and to the manufacturing method thereof, the semiconductor laser device includes a GaN substrate 1, an n-type GaN layer 2, an n-type AlGaN cladding layer 3, a n-type GaN guide layer 4, an InGaN multiple quantum well active layer 5, an undoped-GaN guide layer 6, a p-type AlGaN electron overflow suppression layer 7, a p-type GaN guide layer 8, a SiO2 blocking layer 9, an Ni/ITO cladding layer electrode 10 as a transparent electrode, a Ti/Au pad electrode 11, and a Ti/Al/Ni/Au electrode 12. The SiO2 blocking layer 9 is formed above the InGaN multiple quantum well active layer 5 so as to have an opening. The Ni/ITO cladding layer electrode 10 is formed inside the opening, and which is transparent for the light from the InGaN multiple quantum well active layer, and serves as a cladding layer.
    • 本发明的目的是提供一种具有高产量的半导体激光器件,其中在外延生长层中产生的夹克被抑制,并且其制造方法,半导体激光器件包括GaN衬底1, 型GaN层2,n型AlGaN包覆层3,n型GaN引导层4,InGaN多量子阱有源层5,未掺杂GaN引导层6,p型AlGaN电子溢出抑制层7 p型GaN引导层8,SiO 2阻挡层9,作为透明电极的Ni / ITO包层电极10,Ti / Au焊盘电极11和Ti / Al / Ni / Au电极12.SiO 2阻挡层9形成在InGaN多量子阱有源层5上方以具有开口。 Ni / ITO包层电极10形成在开口内部,对于来自InGaN多量子阱有源层的光是透明的,并且用作覆层。
    • 19. 发明申请
    • NITRIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    • 氮化物半导体器件及其制造方法
    • US20100264517A1
    • 2010-10-21
    • US12823325
    • 2010-06-25
    • Masayuki KURODATetsuzo UEDA
    • Masayuki KURODATetsuzo UEDA
    • H01L29/12
    • H01L29/7787H01L29/045H01L29/2003H01L29/41766H01L29/66462
    • It is an object of the present invention to provide a nitride semiconductor device with low parasitic resistance by lowering barrier height to reduce contact resistance at an interface of semiconductor and metal. The nitride semiconductor device includes a GaN layer, a device isolation layer, an ohmic electrode, an n-type Al0.25Ga0.75N layer, a sapphire substrate, and a buffer layer. A main surface of the n-type Al0.25Ga0.75N layer is on (0 0 0 1) plane as a main surface, and concaves are arranged in a checkerboard to pattern on the surface. The ohmic electrode contacts the sides of the concaves of the n-type Al0.25Ga0.75N layer, and the sides of the concaves are on non-polar surfaces such as (1 1 −2 0) plane or (1 −1 0 0) plane.
    • 本发明的目的是通过降低势垒高度来提供具有低寄生电阻的氮化物半导体器件,以降低半导体和金属界面处的接触电阻。 氮化物半导体器件包括GaN层,器件隔离层,欧姆电极,n型Al0.25Ga0.75N层,蓝宝石衬底和缓冲层。 n型Al0.25Ga0.75N层的主表面在(0 0 0 1)平面上作为主表面,并且凹槽布置在棋盘上以在表面上图案化。 欧姆电极接触n型Al0.25Ga0.75N层的凹面的侧面,凹面的两侧在非极性表面上,例如(11-2 -2)面或(1-1000) )飞机。