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    • 14. 发明申请
    • Semiconductor device placing high, medium, and low voltage transistors on the same substrate
    • 将高,中,低压晶体管放置在同一衬底上的半导体器件
    • US20050250342A1
    • 2005-11-10
    • US11104433
    • 2005-04-13
    • Naohiro Ueda
    • Naohiro Ueda
    • H01L21/31H01L21/336H01L21/469H01L21/8234H01L21/8242H01L27/06
    • H01L27/0629H01L21/82345H01L21/823462Y10S438/981
    • A method for forming three kinds of MOS transistors on a single semiconductor substrate, each provided with gate oxides different in thickness from each other, without detracting from the device characteristics. The method includes the steps of forming a dielectric layer for device isolation for defining first, second, and third regions, and buffer oxide layers on the surface of a semiconductor substrate; after forming an oxidation resistance layer, which has an opening for exposing the first region, performing a first thermal oxidation process for forming a first gate oxide layer overlaying the first region; forming a first gate electrode on the first gate oxide layer; removing the buffer oxide layer overlying the third region, having an opening for exposing the third region; performing a second thermal oxidation process for forming a second gate oxide layer, having a thickness different from the first gate oxide, and for forming a third gate oxide layer having a thickness different from the first, and the second gate oxides.
    • 一种用于在单个半导体衬底上形成三种MOS晶体管的方法,每个半导体衬底均设置有彼此不同厚度的栅极氧化物,而不会降低器件特性。 该方法包括以下步骤:在半导体衬底的表面上形成用于器件隔离的介电层,用于限定第一,第二和第三区域以及缓冲氧化物层; 在形成具有用于暴露第一区域的开口的抗氧化层之后,进行用于形成覆盖第一区域的第一栅极氧化物层的第一热氧化工艺; 在所述第一栅极氧化物层上形成第一栅电极; 去除覆盖在第三区域上的缓冲氧化物层,具有用于暴露第三区域的开口; 进行第二热氧化工艺以形成具有不同于第一栅极氧化物的厚度的第二栅极氧化物层,以及用于形成具有不同于第一栅极氧化物的厚度的第三栅极氧化物层。
    • 19. 发明授权
    • Method of forming semiconductor integrated device
    • 形成半导体集成器件的方法
    • US07208359B2
    • 2007-04-24
    • US11134386
    • 2005-05-23
    • Naohiro UedaYoshinori Ueda
    • Naohiro UedaYoshinori Ueda
    • H01L21/8234
    • H01L21/823857H01L21/823892H01L27/0922H01L27/0928
    • A semiconductor device is provided comprising several device components formed in the same substrate, such as a P-substrate having an offset Nch transistor including N-type source and drain each formed in a P-well spatially separated from one another, and the drain surrounded by a low concentration N-type diffusion layer; an offset Pch transistor including P-type source and drain each formed in an N-well spatially separated from one another, and the drain surrounded by a low concentration P-type diffusion layer; a triple well including a deep N-well, and a P-type IP well formed therein; a normal N-well for forming a Pch MOS transistor; and a normal P-well for forming an Nch MOS transistor; in which simultaneously formed are the low concentration N-type diffusion layer, N-well and normal N-well; the P-well and normal P-well; and the low concentration P-type diffusion layer and IP well.
    • 提供了一种半导体器件,其包括形成在同一衬底中的若干器件组件,例如具有偏置N沟道晶体管的P衬底,其中N型晶体管包括N型源极和漏极,其各自形成在彼此空间上分离的P阱中,并且漏极包围 通过低浓度N型扩散层; 偏移Pch晶体管,包括P型源极和漏极,各自形成在空间上彼此分离的N阱中,并且由低浓度P型扩散层包围的漏极; 包括深N阱的三阱和在其中形成的P型IP阱; 用于形成Pch MOS晶体管的正常N阱; 以及用于形成Nch MOS晶体管的正常P阱; 其中同时形成低浓度N型扩散层,N阱和正常N阱; P井和正常P井; 和低浓度P型扩散层和IP井。