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    • 13. 发明授权
    • Low pH barrier slurry based on titanium dioxide
    • 基于二氧化钛的低pH阻挡浆液
    • US07803711B2
    • 2010-09-28
    • US11856790
    • 2007-09-18
    • Daniela WhiteJohn C. Parker
    • Daniela WhiteJohn C. Parker
    • H01L21/302H01L21/461
    • C09G1/02B24B37/044C09K3/1463
    • The invention provides a method of chemically-mechanically polishing a substrate. A substrate is contacted with a polishing pad and a polishing composition comprising an abrasive consisting of (A) particles consisting of titanium dioxide having a rutile structure and (B) particles consisting of titanium dioxide having an anatase structure, wherein an x-ray diffraction pattern of the particles has a ratio of X/Y of about 0.5 or more, wherein X is an intensity of a peak in an x-ray diffraction curve representing a d-spacing of about 3.24 Å, and Y is an intensity of a peak in an x-ray diffraction curve representing a d-spacing of about 3.51 Å, and water. The polishing component is moved relative to the substrate, and at least a portion of the substrate is abraded to polish the substrate.
    • 本发明提供了一种化学机械抛光衬底的方法。 将基板与抛光垫和抛光组合物接触,抛光组合物包含由(A)由具有金红石结构的二氧化钛组成的颗粒和(B)由具有锐钛矿结构的二氧化钛组成的颗粒的研磨剂,其中x射线衍射图 的颗粒具有约0.5或更大的X / Y比,其中X是表示d-间隔约为3.24的x射线衍射曲线中的峰的强度,Y是在 表示约3.51的d间距的x射线衍射曲线和水。 抛光组分相对于基底移动,并且研磨衬底的至少一部分以抛光衬底。
    • 17. 发明授权
    • Radiation detecting apparatus for detecting a brief radiation signal
    • 用于检测短暂的辐射信号的辐射检测装置
    • US4547677A
    • 1985-10-15
    • US505280
    • 1983-06-17
    • John C. Parker
    • John C. Parker
    • G01J1/44G01S3/78G01S3/781G01S3/784G01S7/487H01L27/148H01L27/10H04N3/15
    • G01S7/487G01S3/781G01S3/784
    • The apparatus includes a two-coordinate array of radiation sensitive devices each operable to cause the storage of a charge proportional to the intensity and duration of radiation received. A storage element is associated with each sensitive circuit and a transfer mechanism is operable to transfer the charge from each sensitive circuit to its storage element to define a radiation image frame. A register is arranged in the same two coordinate array, and a shift mechanism operates to transfer charge from the storage elements to the register in parallel bit streams defined by one of the two coordinates. Differential detectors compare corresponding bits shifted into and out of the register and the presence of a detector output exceeding a threshold level causes the detector outputs to be sampled into an output register. The contents of the output register are shifted out serially to determine the position in the radiation image frame of each output register bit position producing a detector output.
    • 该装置包括辐射敏感装置的两坐标阵列,每个阵列可操作以使得与所接收的辐射的强度和持续时间成正比的电荷的存储。 存储元件与每个敏感电路相关联,并且传送机构可操作以将电荷从每个敏感电路传送到其存储元件以限定辐射图像帧。 寄存器布置在相同的两个坐标阵列中,并且移位机构操作以将电荷从存储元件传送到寄存器,并行位流由两个坐标之一定义。 差分检测器比较移入和移出寄存器的相应位,并且存在检测器输出超过阈值电平,使得检测器输出被采样到输出寄存器中。 输出寄存器的内容被串行移出,以确定每个输出寄存器位位置的辐射图像帧中的位置,产生检测器输出。