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    • 16. 发明申请
    • Nanoelectronic sensor with integral suspended micro-heater
    • 纳米电子传感器与集成悬浮微型加热器
    • US20070045756A1
    • 2007-03-01
    • US11488465
    • 2006-07-18
    • Ying-Lan ChangJean-Christophe GabrielSergei SkarupoAlexander StarChristian ValckeQian Wang
    • Ying-Lan ChangJean-Christophe GabrielSergei SkarupoAlexander StarChristian ValckeQian Wang
    • H01L29/82
    • G01K5/486B82Y10/00B82Y15/00G01K2211/00
    • A nanoelectronic sensing device includes a substrate, a nanostructure element disposed adjacent the substrate, and at least a conductive element electrically connected to the nanostructure element. The device is configured to heat at least a portion of the sensor structure including the nanostructure element. In certain embodiments, the nanostructure element comprises at least one nanotube, the nanotube being electrically connected to at least two conductors so as to permit an electric current on the order of 10 microAmps or greater to be passed through the nanotube, causing the nanotube to heat up relative to the substrate. In alternative embodiments, the sensing device includes a platform or membrane which is at least partially thermally isolated by one or more cavities, the platform supporting at least the nanostructure element adjacent to a microheater element. The heating of the sensor structure may be employed, for example, for thermoregulation, to accelerate and/or increase sensor response, and to improve other sensor characteristics.
    • 纳米电子感测装置包括衬底,邻近衬底设置的纳米结构元件和至少导电元件,电连接到纳米结构元件。 该装置构造成加热包括纳米结构元件的传感器结构的至少一部分。 在某些实施例中,纳米结构元件包括至少一个纳米管,纳米管电连接到至少两个导体,以便允许10微安或更大量级的电流通过纳米管,导致纳米管加热 相对于基底。 在替代实施例中,感测装置包括至少部分地通过一个或多个空腔热隔离的平台或膜,所述平台支撑至少与微加热器元件相邻的纳米结构元件。 可以采用传感器结构的加热,例如用于温度调节,加速和/或增加传感器响应,并改善其它传感器特性。