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11. 发明申请

US20050079107A1 High-pressure processing apparatus and high-pressure processing method 失效
标题翻译：高压加工设备及高压加工方法
公开(公告)号：US20050079107A1
公开(公告)日：2005-04-14
申请号：US10958224
申请日：2004-10-04
申请人： Yusuke Muraoka , Tomomi Iwata , Kimitsugu Saito , Masahiro Yamagata , Yoichi Inoue , Hisanori Oshiba
发明人： Yusuke Muraoka , Tomomi Iwata , Kimitsugu Saito , Masahiro Yamagata , Yoichi Inoue , Hisanori Oshiba
IPC分类号： B08B3/08 , G05D11/13 , H01L21/304 , H01L21/306 , G05D9/00 , G05B1/00
CPC分类号： G05D11/132 , Y10S134/902
摘要： Mixing baths 6A and 6B which temporarily hold chemical agents A and B respectively are disposed. The mixing baths 6A and 6B are each connected with a high-pressure fluid supplying unit 2. For surface treatment using a mixture of the chemical agent A and SCF (processing fluid), SCF is fed under pressure from the high-pressure fluid supplying unit 2 to the mixing bath 6A which already holds the chemical agent A, whereby the chemical agent A dissolves in SCF flowing into the mixing bath 6A and the mixture of the chemical agent A and SCF (processing fluid) is created. As a high-pressure valve (processing fluid introducing valve) 39 is opened, the processing fluid is sent into a pressure vessel 1. This achieves a predetermined surface treatment of a substrate which has been set inside the pressure vessel 1, using the processing fluid.
摘要翻译：分别临时容纳化学试剂A和B的混合浴6A和6B。混合槽6A和6B各自与高压流体供应单元2连接。为了使用化学试剂A和SCF（处理流体）的混合物的表面处理，SCF在压力下从高压流体供应单元 2到已经保持化学试剂A的混合槽6A，由此化学试剂A溶解在流入混合槽6A的SCF中，并且产生化学试剂A和SCF（加工流体）的混合物。当打开高压阀（加工流体导入阀）39时，处理流体被送入压力容器1中。这样就可以利用处理流体对设置在压力容器1内部的基板进行预定的表面处理。

12. 发明申请

US20050005957A1 Cleaning apparatus for cleaning objects to be treated with use of cleaning composition 审中-公开
标题翻译：使用清洁剂清洁待处理物体的清洁装置
公开(公告)号：US20050005957A1
公开(公告)日：2005-01-13
申请号：US10886629
申请日：2004-07-09
申请人： Masahiro Yamagata , Hisanori Oshiba , Yoichi Inoue , Yusuke Muraoka , Tomomi Iwata , Kimitsugu Saito
发明人： Masahiro Yamagata , Hisanori Oshiba , Yoichi Inoue , Yusuke Muraoka , Tomomi Iwata , Kimitsugu Saito
IPC分类号： B08B3/08 , B08B7/00 , H01L21/00 , H01L21/027 , H01L21/304 , B08B3/00
CPC分类号： H01L21/67051 , B08B7/0021
摘要： Provided is a cleaning apparatus for cleaning an object to be treated by contacting the object to be treated with a high pressure fluid of a cleaning composition containing a cleaning component as an essential ingredient. The cleaning apparatus includes high pressure fluid supplying means for supplying the high pressure fluid of the cleaning composition, a high pressure washing vessel for removing unnecessary materials deposited on the object to be treated by contacting the object to be treated with the high pressure fluid of the cleaning composition therein, a storing vessel for storing a waste high pressure fluid of the cleaning composition carrying the unnecessary materials therein, and a sealed structure for sealably housing the high pressure fluid supplying means, the high pressure washing vessel, and the storing vessel therein. The sealed structure has first exhaust means for exhausting the gas remaining in the sealed structure therefrom.
摘要翻译：本发明提供一种清洁装置，用于通过将含有清洁组分作为必要成分的清洁组合物的高压流体接触待处理物体来清洁待处理物体。清洁装置包括用于供应清洁组合物的高压流体的高压流体供应装置，用于通过使待处理物体与待处理物体接触的待处理物体与所述待处理物体接触的高压流体来除去沉积在待处理物体上的不需要的材料的高压清洗容器清洁组合物，用于储存载有不需要的材料的清洁组合物的废高压流体的储存容器，以及用于将高压流体供给装置，高压清洗容器和储存容器密封地容纳在其中的密封结构。密封结构具有用于从其中排出残留在密封结构中的气体的第一排气装置。

13. 发明授权

US07513265B2 High pressure processing method and apparatus 失效
标题翻译：高压加工方法及装置
公开(公告)号：US07513265B2
公开(公告)日：2009-04-07
申请号：US10688889
申请日：2003-10-21
申请人： Tetsuya Yoshikawa , Yoichi Inoue , Katsumi Watanabe , Kaoru Masuda , Katsuyuki Iijima , Tomomi Iwata , Yusuke Muraoka , Kimitsugu Saito , Ikuo Mizobata
发明人： Tetsuya Yoshikawa , Yoichi Inoue , Katsumi Watanabe , Kaoru Masuda , Katsuyuki Iijima , Tomomi Iwata , Yusuke Muraoka , Kimitsugu Saito , Ikuo Mizobata
IPC分类号： B08B6/00
CPC分类号： H01L21/67017 , B08B7/0021
摘要： Disclosed is a high pressure processing method for subjecting a processing object to a high pressure processing using a high pressure fluid. In this method, the high pressure fluid is brought into collision with the surface of the processing object placed in a high pressure processing chamber, and then distributed along the surface of the processing object in an outward direction beyond the processing object.
摘要翻译：公开了一种用于使处理对象使用高压流体进行高压处理的高压处理方法。在该方法中，使高压流体与放置在高压处理室中的处理对象的表面碰撞，然后沿着处理对象的表面向外方向分布超过处理对象。

14. 发明授权

US06691430B2 High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus 失效
标题翻译：高压干燥装置，高压干燥方法和基板处理装置
公开(公告)号：US06691430B2
公开(公告)日：2004-02-17
申请号：US10382616
申请日：2003-03-04
申请人： Kimitsugu Saito , Yusuke Muraoka , Ryuji Kitakado , Takashi Miyake , Tomomi Iwata , Ikuo Mizobata
发明人： Kimitsugu Saito , Yusuke Muraoka , Ryuji Kitakado , Takashi Miyake , Tomomi Iwata , Ikuo Mizobata
IPC分类号： F26B700
CPC分类号： H01L21/67034 , Y10S134/902
摘要： Liquid for prevention of substrate drying is supplied into a processing chamber so that a pool of the liquid is created as an anti-drying atmosphere in advance inside a processing chamber, and substrates, as they are dipped in the pool, are kept on stand-by in a substrate board. In this manner, air drying of the substrates which are kept on stand-by is prevented. When the number of the substrates in the substrate board reaches a certain number, the anti-drying atmosphere is removed from the processing chamber, which is followed by introduction of an SCF into the processing chamber and supercritical drying (high pressure drying) of all of the plurality of substrates inside the processing chamber, namely, batch supercritical drying.
摘要翻译：将用于防止基材干燥的液体供应到处理室中，使得在处理室内预先产生作为防干燥气氛的液体池，并且当浸入池中时，将基板保持在待机状态，通过在衬底板中。以这种方式，防止了保持待机的基板的空气干燥。当基板中的基板数量达到一定数量时，从处理室中除去防干燥气氛，然后将SCF引入处理室，并将超临界干燥（高压干燥）全部处理室内的多个基板，即分批超临界干燥。

15. 发明授权

US06841031B2 Substrate processing apparatus equipping with high-pressure processing unit 有权
标题翻译：衬底处理设备配备高压处理单元
公开(公告)号：US06841031B2
公开(公告)日：2005-01-11
申请号：US10201383
申请日：2002-07-23
申请人： Tomomi Iwata , Yusuke Muraoka , Kimitsugu Saito , Ikuo Mizobata , Takashi Miyake , Ryuji Kitakado
发明人： Tomomi Iwata , Yusuke Muraoka , Kimitsugu Saito , Ikuo Mizobata , Takashi Miyake , Ryuji Kitakado
IPC分类号： G03F7/30 , B65G49/07 , C03C15/00 , C03C23/00 , G03F7/40 , H01L21/00 , H01L21/027 , H01L21/304 , H01L21/306
CPC分类号： H01L21/67161 , C03C15/00 , C03C23/0075 , C03C23/0085 , H01L21/67173
摘要： With respect to any one of processing units, a main transportation path, a developing unit, a dedicated transportation robot and a high-pressure processing unit are disposed linearly in this order in a direction. Hence, even if a processing fluid adhering to a substrate or an evaporant of the processing fluid moves toward the main transportation path while the high-pressure processing unit transports the substrate wet with the processing fluid, there are the processing units located which the processing fluid or its evaporant must arrive at before reaching the main transportation path.
摘要翻译：对于处理单元中的任何一个，主传送路径，显影单元，专用传送机器人和高压处理单元在该方向上以该顺序线性地设置。因此，即使附着在处理液的基板或蒸发剂上的处理流体朝着主输送路径移动，而高压处理单元用处理流体输送基板，则存在处理单元，处理流体或其蒸发器必须在到达主要运输路径之前到达。

16. 发明授权

US07562663B2 High-pressure processing apparatus and high-pressure processing method 失效
标题翻译：高压加工设备及高压加工方法
公开(公告)号：US07562663B2
公开(公告)日：2009-07-21
申请号：US10772546
申请日：2004-02-05
申请人： Yusuke Muraoka , Tomomi Iwata , Kimitsugu Saito , Masahiro Yamagata , Hisanori Oshiba , Shogo Sarumaru
发明人： Yusuke Muraoka , Tomomi Iwata , Kimitsugu Saito , Masahiro Yamagata , Hisanori Oshiba , Shogo Sarumaru
IPC分类号： B08B3/00 , B08B3/04
CPC分类号： B08B7/0021
摘要： A mixing valve assembly 42 is communicated with a dedicated tank 51D, storing therein a compatibilizer D, via an inlet valve 43 and is also communicated with dedicated tanks 51A-51C via three injection valves, the tanks storing therein auxiliaries A-C respectively. A chemical formulation is prepared by selectively injecting any one(s) of four chemical agents into the mixing valve assembly 42 by way of on-off control of the inlet valve 43 and the injection valves and blending together the injected chemical agents. Then, the chemical formulation is pumped into SCF by a high-pressure pump 45 such that the SCF and the chemical formulation are mixed together to form a process fluid. Thus, the number of components of a high-pressure portion can be reduced to achieve a cost reduction of an apparatus. Furthermore, a pipe line for pumping the chemical agents is simplified.
摘要翻译：混合阀组件42与专用罐51D连通，经由入口阀43存储增容器D，并且还经由三个喷射阀与专用罐51A-51C连通，储罐分别存储辅助件A-C。通过对入口阀43和喷射阀的开关控制并将注射的化学试剂混合在一起，通过选择性地将四种化学试剂中的一种或几种四种化学试剂注入混合阀组件42来制备化学制剂。然后，通过高压泵45将化学制剂泵送到SCF中，使得SCF和化学制剂混合在一起以形成工艺流体。因此，可以减少高压部分的部件的数量，以实现装置的成本降低。此外，简化了用于泵送化学试剂的管线。

17. 发明授权

US09249287B2 Document evaluation apparatus, document evaluation method, and computer-readable recording medium using missing patterns 有权
标题翻译：文献评估装置，文件评价方法以及使用缺失图案的计算机可读记录介质
公开(公告)号：US09249287B2
公开(公告)日：2016-02-02
申请号：US14002692
申请日：2013-02-18
申请人： Yusuke Muraoka , Dai Kusui , Yukitaka Kusumura , Hironori Mizuguchi
发明人： Yusuke Muraoka , Dai Kusui , Yukitaka Kusumura , Hironori Mizuguchi
IPC分类号： G06F15/18 , C08L23/06 , B29C47/00 , C08J3/22 , G06N3/08 , B29C43/24 , B29C45/00
CPC分类号： C08L23/06 , B29C43/24 , B29C45/0013 , B29C47/0004 , B29C47/0009 , B29C47/0019 , B29C47/0021 , B29C47/0023 , B29C47/0038 , C08J3/226 , G06F17/30707 , G06N3/08
摘要： In order to accurately learn a function for evaluating documents, even in the case where sample documents having missing feature values are included as training data, a document evaluation apparatus is provided with a data classification unit (3) that classifies a set of sample documents based on missing patterns of a first feature vector, a first learning unit (4) that uses feature values that are not missing in the first feature vector and evaluation values to learn a first function for calculating a first score which is a weighted evaluation value for each classification, a feature vector generation unit (5) that computes a feature value corresponding to each classification using the first score, and generates a second feature vector having the computed feature values, and a second learning unit (6) that uses the second feature vector and the evaluation values to learn a second function for calculating a second score for evaluating documents targeted for evaluation.
摘要翻译：为了准确地学习用于评价文档的功能，即使在作为训练数据包含具有缺失特征值的样本文档的情况下，文档评价装置设置有数据分类单元（3），用于对一组样本文档进行分类在第一特征向量的缺失模式上，使用在第一特征向量中不缺失的特征值的第一学习单元（4）和评估值来学习用于计算作为每个的加权评估值的第一分数的第一函数分类，使用第一分数计算与每个分类对应的特征值的特征向量生成单元（5），并生成具有计算出的特征量的第二特征向量，以及第二学习单元（6），其使用第二特征向量以及评估值，以学习用于计算用于评估用于评估的文档的第二分数的第二函数。

18. 发明申请

US20130282727A1 UNEXPECTEDNESS DETERMINATION SYSTEM, UNEXPECTEDNESS DETERMINATION METHOD AND PROGRAM 审中-公开
标题翻译：独立性确定系统，独立性确定方法和程序
公开(公告)号：US20130282727A1
公开(公告)日：2013-10-24
申请号：US13978811
申请日：2012-01-06
申请人： Yusuke Muraoka , Dai Kusui , Hironori Mizuguchi , Yukitaka Kusumura
发明人： Yusuke Muraoka , Dai Kusui , Hironori Mizuguchi , Yukitaka Kusumura
IPC分类号： G06F17/30
CPC分类号： G06F16/285 , G06F16/313 , G06F17/2785
摘要： The present invention more suitably determines whether a combination of words is an unexpected combination by the use of a smaller corpus. Disclosed is an unexpectedness determination system provided with: category identifying means which identifies a category to which a word belongs; category co-occurrence frequency identifying means which identifies a category co-occurrence frequency between two categories; unexpectedness index calculating means which calculates an index representing a degree of unexpectedness of a combination of two words. The category identifying means identifies a first category, to which an inputted first word belongs, and a second category, to which an inputted second word belongs, the category co-occurrence frequency identifying means identifies the category co-occurrence frequencies between the first category and categories other than the first category, and the unexpectedness index calculating means calculates an index representing the degree of unexpectedness of a combination of the first word and the second word on the basis of the category co-occurrence frequency identified by the category co-occurrence frequency identifying means.
摘要翻译：本发明更合适地通过使用较小的语料库来确定单词的组合是否是意外的组合。公开了一种意外确定系统，其具有：识别单词所属的类别的类别识别装置; 类别同现频率识别装置，其识别两个类别之间的类别同现频率; 意外指标计算装置，其计算表示两个词组合的意外程度的指标。类别识别装置识别输入的第一个字所属的第一类别和所输入的第二个字属于的第二类别，类别同现频率识别装置识别第一类和第二类之间的类别同现频率除了第一类别之外的类别，并且意外指标计算装置基于由类别同现频率识别的类别同现频率来计算表示第一个字和第二个字的组合的意外程度的指标识别手段。

19. 发明申请

US20130007021A1 LINKAGE INFORMATION OUTPUT APPARATUS, LINKAGE INFORMATION OUTPUT METHOD AND COMPUTER-READABLE RECORDING MEDIUM 有权
标题翻译：链接信息输出装置，链接信息输出方法和计算机可读记录介质
公开(公告)号：US20130007021A1
公开(公告)日：2013-01-03
申请号：US13583805
申请日：2010-12-28
申请人： Hironori Mizuguchi , Yukitaka Kusumura , Yusuke Muraoka , Dai Kusui
发明人： Hironori Mizuguchi , Yukitaka Kusumura , Yusuke Muraoka , Dai Kusui
IPC分类号： G06F17/30
CPC分类号： G06F17/3061 , G06F17/30882
摘要： A linkage information output apparatus includes: a linkage information retrieval unit for acquiring, upon receiving source information, destination information linked with the source information, a frequency of occurrence of the source information, a frequency of occurrence of linked each of the destination information, and a frequency of occurrence of a link of the source information and each of the destination information from a linkage information accumulation unit; a recognition degree calculation unit calculating, based on each acquired frequency of occurrence, a recognition degree of the source information, a recognition degree of each acquired destination information, and a recognition degree of each link; and a high interest information narrowing unit selecting destination information to output from among each destination information based on a combination of two or more among a recognition degree of the source information, a recognition degree of the destination information, and a recognition degree of the link.
摘要翻译：连动信息输出装置包括：联动信息检索单元，用于在接收到源信息时获取与源信息相关联的目的地信息，源信息的出现频率，链接的每个目的地信息的发生频率，以及来自链接信息存储单元的源信息和每个目的地信息的链接的出现频率; 识别度计算单元，基于每个获取的出现频率，计算源信息的识别度，每个获取的目的地信息的识别度和每个链接的识别度; 以及高感兴趣度信息缩小单元，基于源信息的识别度，目的地信息的识别度和链接的识别度之间的两个或更多个的组合，从每个目的地信息中选择目的地信息。

20. 发明申请

US20140114930A1 RELIABILITY CALCULATION APPARATUS, RELIABILITY CALCULATION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM 审中-公开
标题翻译：可靠性计算装置，可靠性计算方法和计算机可读记录介质
公开(公告)号：US20140114930A1
公开(公告)日：2014-04-24
申请号：US14127592
申请日：2012-12-19
申请人： Yusuke Muraoka , Dai Kusui , Hironori Mizuguchi , Yukitaka Kusumura
发明人： Yusuke Muraoka , Dai Kusui , Hironori Mizuguchi , Yukitaka Kusumura
IPC分类号： G06F17/30
CPC分类号： G06F16/93 , G06Q50/10
摘要： In order to calculate a reliability that serves as an index of reliableness of an evaluator who evaluated a document, a reliability calculation apparatus (2) is provided with a reliability calculation unit (21) that specifies an evaluation by each evaluator with respect to each author, based on first information specifying respective correspondence relationships between documents targeted for evaluation, evaluators who evaluated the documents and contents of the evaluations, and second information specifying respective correspondence relationships between the documents and authors of the documents, and calculates the reliability of each evaluator, based on the specified evaluation with respect to each author.
摘要翻译：为了计算作为评价文档的评价者的可靠性的指标的可靠性，可靠性计算装置（2）具有可靠性计算部（21），该可靠性计算部（21）针对各作者指定了各评价者的评价基于指定评价对象的文档和评价内容的评价者的评价用对象关系的第一信息以及规定文件与作者之间的对应关系的第二信息，并计算各评价者的可靠性，基于对每位作者的具体评估。

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