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11. 发明授权

US08697189B2 Method and apparatus for precision surface modification in nano-imprint lithography 失效
标题翻译：纳米压印光刻中精密表面改性的方法和装置
公开(公告)号：US08697189B2
公开(公告)日：2014-04-15
申请号：US12572224
申请日：2009-10-01
申请人： Ren Xu , Carl T. Petersen, III , Charles Liu
发明人： Ren Xu , Carl T. Petersen, III , Charles Liu
IPC分类号： C23C16/00
CPC分类号： H01L21/67736 , B82Y10/00 , B82Y40/00 , C23C16/54 , G03F7/0002 , G11B5/85 , G11B5/855 , H01L21/67225 , H01L21/67754
摘要： A scalable, high-throughput nanoimprint lithography priming tool includes a dual-reactant chemical vapor deposition reactor chamber, a mandrel configured to hold a plurality of hard disks at an inner diameter of the hard disks, and a transport mechanism to move the plurality of hard disks into and out of the chamber. The tool may also include a transfer tool to transfer the plurality of hard disks to additional chambers for processing.
摘要翻译：可扩展的高通量纳米压印光刻启动工具包括双反应物化学气相沉积反应室，心轴构造成将多个硬盘保持在硬盘的内径处;以及传送机构，用于移动多个硬的磁盘进出室。工具还可以包括用于将多个硬盘传送到另外的室进行处理的转移工具。

12. 发明授权

US5855956A Method for autostoichiometric chemical vapor deposition 失效
标题翻译：自动化学计量化学气相沉积方法
公开(公告)号：US5855956A
公开(公告)日：1999-01-05
申请号：US344509
申请日：1994-11-23
申请人： Ren Xu , Kueir-Weei Chour
发明人： Ren Xu , Kueir-Weei Chour
IPC分类号： C23C16/40 , C23C16/448 , C30B25/02 , C23C16/00
CPC分类号： C23C16/4481 , C23C16/409 , C30B25/02 , C30B29/30
摘要： The chemical vapor deposition of a single phase of a double metal oxide having a stoichiometric ratio results in a fully dense film. The film is deposited by polycondensation of a partially hydrolyzed precursor reacted from water vapor mixed with a volatile, metalorganic precursor having the desired stoichiometric ratio. The film may be annealed to form a perfect crystal of stoichiometric, single phase, double metal oxide having substantially improved optical characteristics for laser light transmission and other electro-optical applications.
摘要翻译：具有化学计量比的双金属氧化物的单相的化学气相沉积导致完全致密的膜。通过与从具有所需化学计量比的挥发性金属有机前体混合的水蒸汽反应的部分水解的前体的缩聚沉积膜。可以将膜退火以形成化学计量的单相双金属氧化物的完美晶体，其具有用于激光传输和其它电光应用的基本上改善的光学特性。

13. 发明授权

US5342648A Method for forming amorphous ferroelectric materials 失效
标题翻译：形成非晶铁电材料的方法
公开(公告)号：US5342648A
公开(公告)日：1994-08-30
申请号：US949744
申请日：1992-09-23
申请人： John D. MacKenzie , Ren Xu , Yuhuan Xu
发明人： John D. MacKenzie , Ren Xu , Yuhuan Xu
IPC分类号： C04B35/624 , H01L37/02 , H01L41/22 , B05D5/12 , C04B35/46
CPC分类号： C04B35/624 , H01L37/025 , H01L41/081 , H01L41/318
摘要： Amorphous ferroelectric materials are formed by a sol-gel type process and the ferroelectric properties stabilized by complete hydrolysis and polycondensation, and extraction of residual organic materials, preferably by heating at temperatures below the temperature at which crystallization may occur. Stable solutions of metal alkoxides are prepared by reacting or dissolving a metal alkoxide in alcohol such as absolute ethanol. The solution may be spincast on essentially any substrate, conductor or nonconductor, crystalline or amorphous, transparent or opaque, and even including plastics. Hydrolysis and polycondensation occur in situ to deposit an amorphous ferroelectric film. Residual alcohol is extracted by heating below the temperature at which crystallization occurs. Such films show P-E hysteresis loops and pyroelectric current. Such ferroelectric thin films are useable in electronic, opto-electronic and optical devices.
摘要翻译：无定形铁电材料通过溶胶 - 凝胶型工艺形成，铁电性能通过完全水解和缩聚稳定，并提取残留的有机材料，优选通过在低于可能发生结晶的温度的温度下加热。金属醇盐的稳定溶液通过使金属醇盐在无水乙醇等醇中反应或溶解来制备。溶液可以在基本上任何基材，导体或非导体，晶体或无定形，透明或不透明的，甚至包括塑料上旋转。原位发生水解和缩聚以沉积非晶铁电薄膜。通过在低于发生结晶温度的加热下提取残余醇。这种膜显示P-E磁滞回线和热电流。这种铁电薄膜可用于电子，光电和光学器件。

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