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11. 发明申请

US20150260593A1 MIRCO-ELECTRO-MECHANICAL SYSTEM PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：微电子机械系统压力传感器及其制造方法
公开(公告)号：US20150260593A1
公开(公告)日：2015-09-17
申请号：US14329111
申请日：2014-07-11
申请人： Yu-Wen Hsu , Chia-Yu Wu , Shih-Chieh Lin , Shih-Ting Lin
发明人： Yu-Wen Hsu , Chia-Yu Wu , Shih-Chieh Lin , Shih-Ting Lin
IPC分类号： G01L9/00 , B81B7/00 , B81C1/00
CPC分类号： G01L9/0072 , B81B2201/0264 , B81C1/00309 , G01L19/0618
摘要： The invention provides a micro-electro-mechanical system pressure sensor. The micro-electro-mechanical system pressure sensor includes: a substrate, including at least one conductive wiring; a membrane disposed above the substrate to form a semi-open chamber between the membrane and the substrate, the semi-open chamber having an opening to receive an external pressure; and a cap, disposed above the membrane and forming an enclosed space with the membrane, the cap including a top electrode corresponding to the membrane and at least one portion of the membrane forming a bottom electrode, wherein the top and bottom electrodes form a sensing capacitor to sense the external pressure.
摘要翻译：本发明提供一种微机电系统压力传感器。微电子机械系统压力传感器包括：基板，包括至少一个导电布线; 膜，设置在所述基板上方以在所述膜和所述基板之间形成半开放室，所述半开放室具有用于接收外部压力的开口; 以及帽，其设置在所述膜的上方并与所述膜形成封闭空间，所述盖包括对应于所述膜的顶部电极和形成底部电极的所述膜的至少一部分，其中所述顶部和底部电极形成感测电容器感觉外部压力。

12. 发明授权

US09563102B2 Signal processing method of multiple mirco-electro-mechanical system (MEMS) devices and combo MEMS device applying the method 有权
标题翻译：多微电子机电系统（MEMS）器件的信号处理方法和应用该方法的组合MEMS器件
公开(公告)号：US09563102B2
公开(公告)日：2017-02-07
申请号：US14676216
申请日：2015-04-01
申请人： Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
发明人： Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
IPC分类号： G02F2/00 , G01C19/5712 , B81B7/00 , G01C19/5776
CPC分类号： G02F2/00 , B81B7/008 , G01C19/5776
摘要： This invention provides a signal processing method of multiple micro-electro-mechanical system devices. The signal processing method includes: providing at least two MEMS devices; applying driving or modulating signals of different frequencies to the MEMS devices such that the MEMS devices generate respective MEMS signals with respective frequencies; and combining the MEMS signals with respective frequencies into one or more multi-frequency signals and outputting the multi-frequency signals, wherein a number of the multi-frequency signals is less than a number of the MEMS signals with respective frequencies. This invention also provides a combo MEMS device integrating two or more MEMS devices and two or more vibration sources.
摘要翻译：本发明提供了一种多个微机电系统装置的信号处理方法。信号处理方法包括：提供至少两个MEMS器件; 将不同频率的信号驱动或调制到MEMS器件，使得MEMS器件以相应的频率产生相应的MEMS信号; 以及将所述MEMS信号与各个频率组合成一个或多个多频信号并输出所述多频信号，其中所述多频信号的数目小于具有相应频率的多个MEMS信号。本发明还提供集成两个或多个MEMS器件和两个或更多个振动源的组合MEMS器件。

13. 发明申请

US20150293141A1 MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE 审中-公开
标题翻译：微电子机电系统设备
公开(公告)号：US20150293141A1
公开(公告)日：2015-10-15
申请号：US14681991
申请日：2015-04-08
申请人： Chia-Yu Wu , Chiung-Wen Lin , Chiung-Cheng Lo
发明人： Chia-Yu Wu , Chiung-Wen Lin , Chiung-Cheng Lo
IPC分类号： G01P15/08 , G01P15/135 , G01P15/125
CPC分类号： G01P15/125 , G01P2015/0834
摘要： The present invention discloses a micro-electro-mechanical system (MEMS) device. The MEMS device includes: a substrate; a proof mass which defines an internal space inside and forms at least two capacitors with the substrate; at least two anchors connected to the substrate and respectively located in the capacitor areas of the capacitors from a cross-sectional view; at least one linkage truss located in the hollow structure, wherein the linkage truss is directly connected to the anchors or indirectly connected to the anchors through buffer springs; and multiple rotation springs located in the hollow structure, wherein the rotation springs are connected between the proof mass and the linkage truss, such that the proof mass can rotate along an axis formed by the rotation springs. There is no coupling mass which does not form a movable electrode in the connection between the proof mass and the substrate.
摘要翻译：本发明公开了一种微机电系统（MEMS）装置。 MEMS器件包括：衬底; 限定内部的内部空间并与衬底形成至少两个电容器的校验物质; 从横截面图分别连接到基板并且分别位于电容器的电容器区域中的至少两个锚点; 位于所述中空结构中的至少一个连杆桁架，其中所述连杆桁架直接连接到所述锚固件或通过缓冲弹簧间接连接到所述锚固件; 以及位于所述中空结构中的多个旋转弹簧，其中所述旋转弹簧连接在所述检测质量块和所述连杆桁架之间，使得所述检测质量块可以沿着由所述旋转弹簧形成的轴线旋转。没有在检测质量体和基体之间的连接中不形成可动电极的耦合质量。

14. 发明申请

US20110123053A1 ACOUSTICS TRANSDUCER 有权
标题翻译：声学传感器
公开(公告)号：US20110123053A1
公开(公告)日：2011-05-26
申请号：US12767658
申请日：2010-04-26
申请人： Di-Bao Wang , Chin-Fu Kuo , Chia-Yu Wu , Jien-Ming Chen
发明人： Di-Bao Wang , Chin-Fu Kuo , Chia-Yu Wu , Jien-Ming Chen
IPC分类号： H04R1/00
CPC分类号： H04R19/005
摘要： According to an embodiment of the disclosure, an acoustics transducer is provided, which includes a support substrate having an upper surface and a lower surface, the upper surface including a first portion and a second portion surrounding the first portion, a recess extending from the upper surface towards the lower surface, the recess is between the first portion and the second portion of the upper surface, a vibratable membrane disposed directly on the recess, the vibratable membrane including a fixed portion fixed on the support substrate and a suspended portion, and a back plate disposed on the support substrate and opposite to the vibratable membrane. The suspended portion has an edge extending substantially along with an edge of an opening of the recess. The suspended portion is separated from the first portion and the second portion of the upper surface by an inner interval and an outer interval, respectively.
摘要翻译：根据本公开的实施例，提供了一种声学换能器，其包括具有上表面和下表面的支撑基底，所述上表面包括第一部分和围绕所述第一部分的第二部分，从所述上表面延伸的凹部表面朝向下表面，凹部位于上表面的第一部分和第二部分之间，直接设置在凹部上的可振动膜，可振动膜包括固定在支撑基板上的固定部分和悬挂部分，以及背板设置在支撑基板上并与可振动膜相对。悬挂部分具有基本上与凹部的开口的边缘一起延伸的边缘。悬挂部分分别与上表面的第一部分和第二部分分开内部间隔和外部间隔。

15. 发明申请

US20100148287A1 TRUSS STRUCTURE AND MANUFACTURING METHOD THEREOF 有权
标题翻译： TRUSS结构及其制造方法
公开(公告)号：US20100148287A1
公开(公告)日：2010-06-17
申请号：US12469079
申请日：2009-05-20
申请人： PIN CHANG , Chin-Hung Wang , Chia-Yu Wu , Jien-Ming Chen
发明人： PIN CHANG , Chin-Hung Wang , Chia-Yu Wu , Jien-Ming Chen
IPC分类号： H01L29/84 , H01L21/3205
CPC分类号： B81C1/00126 , B81B3/0072 , B81B2203/0127
摘要： A truss structure is provided. The truss structure comprises a substrate; and plural sub-truss groups disposed on the substrate, wherein each sub-truss group comprises plural VIAs; and plural metal layers interlaced with the plural VIAs, wherein the plural sub-truss groups are piled up on each other to form a 3-D corrugate structure.
摘要翻译：提供桁架结构。桁架结构包括基底; 以及设置在所述基板上的多个子桁架组，其中每个子桁架组包括多个ⅥA; 以及与多个VIA交织的多个金属层，其中多个子桁架组彼此堆叠以形成3-D波纹结构。

16. 发明授权

US09733269B2 Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame 有权
公开(公告)号：US09733269B2
公开(公告)日：2017-08-15
申请号：US14535022
申请日：2014-11-06
申请人： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
发明人： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
IPC分类号： G01P15/125 , H01L29/84 , G01P15/08
CPC分类号： G01P15/125 , G01P2015/0845 , H01L29/84
摘要： The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.

17. 发明授权

US08340328B2 Acoustics transducer 有权
标题翻译：声学传感器
公开(公告)号：US08340328B2
公开(公告)日：2012-12-25
申请号：US12767658
申请日：2010-04-26
申请人： Di-Bao Wang , Chin-Fu Kuo , Chia-Yu Wu , Jien-Ming Chen
发明人： Di-Bao Wang , Chin-Fu Kuo , Chia-Yu Wu , Jien-Ming Chen
IPC分类号： H04R25/00
CPC分类号： H04R19/005
摘要： According to an embodiment of the disclosure, an acoustics transducer is provided, which includes a support substrate having an upper surface and a lower surface, the upper surface including a first portion and a second portion surrounding the first portion, a recess extending from the upper surface towards the lower surface, the recess is between the first portion and the second portion of the upper surface, a vibratable membrane disposed directly on the recess, the vibratable membrane including a fixed portion fixed on the support substrate and a suspended portion, and a back plate disposed on the support substrate and opposite to the vibratable membrane. The suspended portion has an edge extending substantially along with an edge of an opening of the recess. The suspended portion is separated from the first portion and the second portion of the upper surface by an inner interval and an outer interval, respectively.
摘要翻译：根据本公开的实施例，提供了一种声学换能器，其包括具有上表面和下表面的支撑基底，所述上表面包括第一部分和围绕所述第一部分的第二部分，从所述上表面延伸的凹部表面朝向下表面，凹部位于上表面的第一部分和第二部分之间，直接设置在凹部上的可振动膜，可振动膜包括固定在支撑基板上的固定部分和悬挂部分，以及背板设置在支撑基板上并与可振动膜相对。悬挂部分具有基本上与凹部的开口的边缘一起延伸的边缘。悬挂部分分别与上表面的第一部分和第二部分分开内部间隔和外部间隔。

18. 发明授权

US09624090B2 Mirco-electro-mechanical system device 有权
公开(公告)号：US09624090B2
公开(公告)日：2017-04-18
申请号：US14728153
申请日：2015-06-02
申请人： Chia-Yu Wu , Chiung-Cheng Lo
发明人： Chia-Yu Wu , Chiung-Cheng Lo
IPC分类号： B81B3/00
CPC分类号： B81B3/0051 , B81B3/0027 , B81B3/0072 , B81B2201/0235 , B81B2203/04 , G01P15/125 , G01P15/18 , G01P2015/0814
摘要： The invention provides a micro-electro-mechanical system device including: a substrate; a proof mass, including an outer frame which inwardly defines an internal space, and at least one inner extension portion which is directly connected to the outer frame and inwardly extends from the outer frame; at least one compliant structure, located in the internal space, and directly connected to the corresponding inner extension portion; an anchor, located in the internal space and directly connected to the at least one compliant structure, the anchor being connected to the substrate; movable electrodes, located in the internal space and connected to the proof mass; and fixed electrodes, respectively located in correspondence to the movable electrodes, and being connected to the substrate through fixing portions.

19. 发明申请

US20160257557A1 MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE 有权
标题翻译：微电子机电系统设备
公开(公告)号：US20160257557A1
公开(公告)日：2016-09-08
申请号：US14728153
申请日：2015-06-02
申请人： Chia-Yu Wu , Chiung-Cheng Lo
发明人： Chia-Yu Wu , Chiung-Cheng Lo
IPC分类号： B81B3/00
CPC分类号： B81B3/0051 , B81B3/0027 , B81B3/0072 , B81B2201/0235 , B81B2203/04 , G01P15/125 , G01P15/18 , G01P2015/0814
摘要： The invention provides a micro-electro-mechanical system device including: a substrate; a proof mass, including an outer frame which inwardly defines an internal space, and at least one inner extension portion which is directly connected to the outer frame and inwardly extends from the outer frame; at least one compliant structure, located in the internal space, and directly connected to the corresponding inner extension portion; an anchor, located in the internal space and directly connected to the at least one compliant structure, the anchor being connected to the substrate; movable electrodes, located in the internal space and connected to the proof mass; and fixed electrodes, respectively located in correspondence to the movable electrodes, and being connected to the substrate through fixing portions.
摘要翻译：本发明提供了一种微电子机械系统装置，包括：基板; 包括向内限定内部空间的外框架以及直接连接到所述外框架并且从所述外框架向内延伸的至少一个内延伸部分的检验质量块; 至少一个柔性结构，位于所述内部空间中，并且直接连接到相应的内部延伸部分; 锚固件，位于所述内部空间中并且直接连接到所述至少一个柔性结构，所述锚固件连接到所述基板; 可移动电极，位于内部空间并连接到校验块; 以及固定电极，其分别对应于可动电极，并且通过固定部分连接到基板。

20. 发明授权

US08242570B2 Truss structure and manufacturing method thereof 有权
标题翻译：桁架结构及其制造方法
公开(公告)号：US08242570B2
公开(公告)日：2012-08-14
申请号：US12469079
申请日：2009-05-20
申请人： Pin Chang , Chin-Hung Wang , Chia-Yu Wu , Jien-Ming Chen
发明人： Pin Chang , Chin-Hung Wang , Chia-Yu Wu , Jien-Ming Chen
IPC分类号： G01L9/00
CPC分类号： B81C1/00126 , B81B3/0072 , B81B2203/0127
摘要： A truss structure is provided. The truss structure comprises a substrate; and plural sub-truss groups disposed on the substrate, wherein each sub-truss group comprises plural VIAs; and plural metal layers interlaced with the plural VIAs, wherein the plural sub-truss groups are piled up on each other to form a 3-D corrugate structure.
摘要翻译：提供桁架结构。桁架结构包括基底; 以及设置在所述基板上的多个子桁架组，其中每个子桁架组包括多个ⅥA; 以及与多个VIA交织的多个金属层，其中多个子桁架组彼此堆叠以形成3-D波纹结构。

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