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11. 发明授权

US08173727B2 Crosslinkable elastomer composition and molded article using the same 有权
标题翻译：可交联弹性体组合物和使用其的成型制品
公开(公告)号：US08173727B2
公开(公告)日：2012-05-08
申请号：US12264089
申请日：2008-11-03
申请人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08L1/00
CPC分类号： C08L27/18 , C08G73/101 , C08L79/08 , C08L101/00 , C08L2666/14 , C08L2666/02
摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.
摘要翻译：本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒）治疗显着抑制。具体地说，本发明涉及可交联弹性体组合物，其包含可交联弹性体和比表面积至少为0.5m 2 / g的填料，并且含有在主链中具有热和化学稳定的芳环的合成聚合物，可交联的包含可交联弹性体和非氧化物陶瓷的弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。

12. 发明授权

US06683127B1 Crosslinkable elastromer composition, sealing material produced from the composition, and filler for use therein 有权
标题翻译：可交联的弹性体组合物，由组合物制备的密封材料，以及用于其中的填料
公开(公告)号：US06683127B1
公开(公告)日：2004-01-27
申请号：US09743709
申请日：2001-01-16
申请人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi
IPC分类号： C08L304
CPC分类号： C08K3/04 , C08L21/00
摘要： A carbon black filler for crosslinkable elastomer composition having a content of impurity metals of not more than 300 ppm and a pH value of 5.0 to 11.0. The filler can be obtained by subjecting a starting carbon black filler to extraction treatment with an acid to reduce a content of impurity metals of the filler and then alkali treatment with an alkali to neutralize a remaining acid. The filler does not cause a crosslinking failure even when added to an elastomer composition and can provide an elastomer molded article suitable as a very clean sealing material for semi-conductor production apparatuses.
摘要翻译： 1.一种用于交联性弹性体组合物的炭黑填料，其杂质金属含量不超过300ppm，pH值为5.0〜11.0。填充剂可以通过使起始炭黑填料用酸进行萃取处理来降低填料的杂质金属含量，然后用碱进行碱处理以中和残留的酸。填充剂即使添加到弹性体组合物中也不会引起交联失败，并且可以提供适合作为用于半导体生产设备的非常干净的密封材料的弹性体模塑制品。

13. 发明授权

US06632871B1 Crosslinkable elastomer composition, sealing material produced from said composition and filler used therefor 失效
标题翻译：可交联弹性体组合物，由所述组合物制成的密封材料和用于其的填料
公开(公告)号：US06632871B1
公开(公告)日：2003-10-14
申请号：US09743707
申请日：2001-01-16
申请人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Masanori Hasegawa , Tsuyoshi Noguchi
IPC分类号： C08K322
CPC分类号： C08K3/22 , C08K9/02 , C08L21/00
摘要： The metal oxide filler of titanium oxide or silicon oxide for the crosslinkable elastomer composition which has a pH value of from 5.0 to 11.0 and contains impurity metals other than the essential metal of the filler in an amount of not more than 10,000 ppm. The metal oxide filler can be obtained by extraction treatment of a starting metal oxide filler with an acid to reduce a content of impurity metals thereof and then treatment with an alkali to neutralize a remaining acid. The metal oxide filler of the present invention does not cause a crosslinking failure even when added to the elastomer composition and can provide the elastomer molded article suitable as a very clean sealing material for semi-conductor production apparatuses.
摘要翻译：用于可交联弹性体组合物的氧化钛或氧化硅的金属氧化物填料，其pH值为5.0至11.0，并且含有不大于10,000ppm的填料必需金属以外的杂质金属。金属氧化物填料可以通过用酸萃取处理起始金属氧化物填料而得到，以减少其杂质金属的含量，然后用碱处理以中和残留的酸。本发明的金属氧化物填料即使添加到弹性体组合物中也不会引起交联失败，并且可以提供适合作为用于半导体生产设备的非常干净的密封材料的弹性体模塑制品。

14. 发明申请

US20110028655A1 PERFLUOROELASTOMER SEAL MATERIAL 有权
标题翻译：全氟聚合物密封材料
公开(公告)号：US20110028655A1
公开(公告)日：2011-02-03
申请号：US12903474
申请日：2010-10-13
申请人： Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08F214/18
CPC分类号： C09K3/1009 , F16J15/102 , Y10T428/24355
摘要： The present invention provides a perfluoroelastomer seal material in which adhesive strength, contamination, corrosion and color change of a contacted surface with a seal material are improved, and an amount of an uncrosslinked polymer component is at most 1% by weight, measured under specific conditions, and a process for preparing the same. The present invention relates to a perfluoroelastomer seal material, wherein a rate of weight decrease is at most 1% by weight when the seal material is immersed into perfluoro(tri-n-butyl) amine at 60° C. for 70 hours and is dried at 90° C. for 5 hours, 125° C. for 5 hours and 200° C. for 10 hours after taken out of the emersion. And, the present invention also relates to a process for preparing a perfluoroelastomer seal material comprising a step of treating with a solvent having at least 50% of a swelling rate based on said molded article, when said molded article is immersed at 60° C. for 70 hours.
摘要翻译：本发明提供了一种全氟弹性体密封材料，其中改善了与密封材料的接触表面的粘合强度，污染物，腐蚀和颜色变化，并且在特定条件下测量的未交联聚合物组分的量为至多1重量％，及其制备方法。全氟弹性体密封材料技术领域本发明涉及一种全氟弹性体密封材料，其中当密封材料在60℃下浸入全氟（三正丁基）胺中70小时时，其重量减少率至多为1重量％，并干燥在90℃，5小时，125℃，5小时和200℃，10分钟后脱出。另外，本发明还涉及一种全氟弹性体密封材料的制造方法，其特征在于，在将所述成形体浸渍于60℃时，使用具有基于所述成型体的至少50％的溶胀率的溶剂进行处理的工序。 70个小时。

15. 发明申请

US20070037922A1 Perfluoroelastomer seal material 有权
标题翻译：全氟弹性体密封材料
公开(公告)号：US20070037922A1
公开(公告)日：2007-02-15
申请号：US10572779
申请日：2004-09-21
申请人： Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08L27/12
CPC分类号： C09K3/1009 , F16J15/102 , Y10T428/24355
摘要： The present invention provides a perfluoroelastomer seal material in which adhesive strength, contamination, corrosion and color change of a contacted surface with a seal material are improved, and an amount of an uncrosslinked polymer component is at most 1% by weight, measured under specific conditions, and a process for preparing the same. The present invention relates to a perfluoroelastomer seal material, wherein a rate of weight decrease is at most 1% by weight when the seal material is immersed into perfluoro(tri-n-butyl)amine at 60° C. for 70 hours and is dried at 90° C. for 5 hours, 125° C. for 5 hours and 200° C. for 10 hours after taken out of the emersion. And, the present invention also relates to a process for preparing a perfluoroelastomer seal material comprising a step of treating with a solvent having at least 50 % of a swelling rate based on said molded article, when said molded article is immersed at 60° C. for 70 hours.
摘要翻译：本发明提供了一种全氟弹性体密封材料，其中改善了与密封材料的接触表面的粘合强度，污染物，腐蚀和颜色变化，并且在特定条件下测量的未交联聚合物组分的量为至多1重量％，及其制备方法。全氟弹性体密封材料技术领域本发明涉及一种全氟弹性体密封材料，其中当密封材料在60℃下浸入全氟（三正丁基）胺中70小时时，其重量减少率至多为1重量％，并干燥在90℃，5小时，125℃，5小时和200℃，10分钟后脱出。另外，本发明还涉及一种全氟弹性体密封材料的制造方法，其特征在于，在将所述成形体浸渍于60℃时，使用具有基于所述成型体的至少50％的溶胀率的溶剂进行处理的工序。 70个小时。

16. 发明授权

US06503986B1 Fluorine-containing rubber composition 有权
标题翻译：含氟橡胶组合物
公开(公告)号：US06503986B1
公开(公告)日：2003-01-07
申请号：US09743708
申请日：2001-01-16
申请人： Hiroyuki Tanaka , Sadashige Irie , Tsuyoshi Noguchi , Mitsuru Kishine
发明人： Hiroyuki Tanaka , Sadashige Irie , Tsuyoshi Noguchi , Mitsuru Kishine
IPC分类号： C08L2712
CPC分类号： C09K3/1009 , C08F293/005 , C08L27/12 , C08L27/16 , C08L27/18 , C08L53/00 , C08L2666/24 , C08L2666/02 , C08L2666/04
摘要： To provide a fluorine-containing rubber composition comprising (a-1) a non-perfluoro fluorine-containing rubber and (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment, in which structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit. The fluorine-containing rubber composition is capable of providing a clean sealing material for semi-conductor production apparatuses without using a filler.
摘要翻译：为了提供含有（a-1）非全氟含氟橡胶的氟橡胶组合物和（b-1）含有弹性体含氟聚合物链段和非弹性体氟的含氟多段聚合物聚合物链段，其中弹性体含氟聚合物链段和非弹性含氟聚合物链段的结构单元包括不少于90摩尔％的全卤代烯烃单元。含氟橡胶组合物能够在不使用填料的情况下为半导体制造装置提供清洁的密封材料。

17. 发明授权

US07834096B2 Perfluoroelastomer seal material 有权
标题翻译：全氟弹性体密封材料
公开(公告)号：US07834096B2
公开(公告)日：2010-11-16
申请号：US10572779
申请日：2004-09-21
申请人： Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08L27/12
CPC分类号： C09K3/1009 , F16J15/102 , Y10T428/24355
摘要： The present invention provides a perfluoroelastomer seal material in which adhesive strength, contamination, corrosion and color change of a contacted surface with a seal material are improved, and an amount of an uncrosslinked polymer component is at most 1% by weight, measured under specific conditions, and a process for preparing the same. The present invention relates to a perfluoroelastomer seal material, wherein a rate of weight decrease is at most 1% by weight when the seal material is immersed into perfluoro(tri-n-butyl)amine at 60° C. for 70 hours and is dried at 90° C. for 5 hours, 125° C. for 5 hours and 200° C. for 10 hours after taken out of the emersion. And, the present invention also relates to a process for preparing a perfluoroelastomer seal material comprising a step of treating with a solvent having at least 50 % of a swelling rate based on said molded article, when said molded article is immersed at 60° C. for 70 hours.
摘要翻译：本发明提供了一种全氟弹性体密封材料，其中改善了与密封材料的接触表面的粘合强度，污染物，腐蚀和颜色变化，并且在特定条件下测量的未交联聚合物组分的量为至多1重量％，及其制备方法。全氟弹性体密封材料技术领域本发明涉及一种全氟弹性体密封材料，其中当密封材料在60℃下浸入全氟（三正丁基）胺中70小时时，其重量减少率至多为1重量％，并干燥在90℃，5小时，125℃，5小时和200℃，10分钟后脱出。另外，本发明还涉及一种全氟弹性体密封材料的制造方法，其特征在于，在将所述成形体浸渍于60℃时，使用具有基于所述成型体的至少50％的溶胀率的溶剂进行处理的工序。 70个小时。

18. 发明授权

US07678858B2 Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof 有权
标题翻译：等离子体防老化效果优异的含氟弹性体组合物及其制成的成型制品
公开(公告)号：US07678858B2
公开(公告)日：2010-03-16
申请号：US10553976
申请日：2004-04-21
申请人： Hiroyuki Tanaka , Kouji Fukuyama , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Kouji Fukuyama , Tsuyoshi Noguchi
IPC分类号： C08L27/12
CPC分类号： C09K3/1009 , C08K5/0041 , C08L27/12
摘要： The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.
摘要翻译：本发明提供一种不影响耐热性和加工性的含氟弹性体组合物，在半导体生产步骤中暴露的氟等离子体和氧等离子体的重量变化很小，并且可以显着地抑制异物（颗粒）的产生在这些步骤中，以及包含该组合物的模塑制品。本发明涉及包含含氟弹性体和具有等离子体抗老化效果的化合物的半导体制造装置的密封材料用含氟弹性体组合物。

19. 发明授权

US06884847B2 Transparent elastomer composition 有权
标题翻译：透明弹性体组合物
公开(公告)号：US06884847B2
公开(公告)日：2005-04-26
申请号：US10758041
申请日：2004-01-16
申请人： Sadashige Irie , Kazuyoshi Mimura , Hirofumi Nishibayashi , Hiroyuki Tanaka , Tsuyoshi Noguchi , Mitsuru Kishine
发明人： Sadashige Irie , Kazuyoshi Mimura , Hirofumi Nishibayashi , Hiroyuki Tanaka , Tsuyoshi Noguchi , Mitsuru Kishine
IPC分类号： C08L21/00 , C08L27/12 , C08K5/00 , C08L23/00 , C08L23/02
CPC分类号： C08L21/00 , C08L27/12 , C08L27/18 , C08L2205/02 , C08L2666/04
摘要： A transparent elastomer composition is obtained by co-coagulation of an emulsion of fluorine-containing resin fine particles having an average particle size of from 20 to 150 nm and an emulsion of elastomer particles, in which the fluorine-containing resin fine particles are finely dispersed uniformly in the elastomer. The transparent elastomer composition provides an elastomeric molded article having excellent mechanical strength, abrasion resistance and transparency.
摘要翻译：通过将平均粒径为20〜150nm的含氟树脂微粒的乳液与弹性体粒子的乳液共混而获得透明弹性体组合物，其中含氟树脂微粒被细分散在弹性体中均匀。透明弹性体组合物提供具有优异的机械强度，耐磨性和透明性的弹性体模塑制品。

20. 发明授权

US06527429B1 Dust-free rubber mixer 有权
标题翻译：无尘橡胶搅拌机
公开(公告)号：US06527429B1
公开(公告)日：2003-03-04
申请号：US09890062
申请日：2001-07-26
申请人： Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： B29B786
CPC分类号： B29B7/7495 , B29B7/52
摘要： To provide a dust-free rubber mixer which does not release contaminants such as dusts generated in the rubber mixer into a working room. In the dust-free rubber mixer comprising a rubber mixing section having a plurality of rubber mixing rolls and a driving section having a motor, the whole parts of the rubber mixer except the rubber mixing rolls are covered with a casing, air intakes are provided on the casing in a periphery of rotation shafts of the rubber mixing rolls, an exhaust duct is provided on the casing and air suction means for making the inside pressure of the casing reduced is provided on the exhaust duct.
摘要翻译：提供一种不会将橡胶混合器中产生的灰尘等污染物排放到工作室的无尘橡胶混合器。在包括具有多个橡胶混合辊的橡胶混合部分和具有马达的驱动部分的无尘橡胶混合机中，除了橡胶混合辊之外的橡胶混合器的整个部分被壳体覆盖，进气口设置在橡胶混合辊的旋转轴周围的壳体，在壳体上设置有排气管道，并且在排气管道上设置用于使壳体内部压力降低的空气抽吸装置。

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