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    • 12. 发明授权
    • Bipolar electrostatic chuck
    • 双极静电吸盘
    • US08730644B2
    • 2014-05-20
    • US12997826
    • 2009-06-30
    • Hiroshi FujisawaYoshiaki Tatsumi
    • Hiroshi FujisawaYoshiaki Tatsumi
    • H01L21/683H01T23/00
    • H02N13/00H01L21/6833
    • Provided is a bipolar electrostatic chuck, which has excellent substrate attracting/holding performance when a voltage is applied, and excellent residual charges reducing performance when voltage application is stopped. The bipolar electrostatic chuck includes at least an electrode layer including a first electrode and a second electrode, and an upper insulating layer which forms a substrate attracting surface for attracting a substrate. In a case where a surface of the electrode layer is regarded to be divided into a plurality of virtual cells having a predetermined width (L) in an x direction and a y direction, first electrode sections forming the first electrode and second electrode sections forming the second electrode are alternately arranged in the plurality of virtual cells in the x direction, and are alternately arranged in the plurality of virtual cells in the y direction.
    • 提供一种双极性静电卡盘,其在施加电压时具有优异的基板吸附/保持性能,并且在施加电压时停止优异的残留电荷降低性能。 双极性静电卡盘至少包括具有第一电极和第二电极的电极层,以及形成用于吸引基板的基板吸附面的上部绝缘层。 在电极层的表面被认为在x方向和ay方向上被划分为具有预定宽度(L)的多个虚拟单元的情况下,形成第一电极的第一电极部分和形成第二电极部分的第二电极部分 电极在x方向上交替排列在多个虚拟单元中,并且在y方向上交替配置在多个虚拟单元中。
    • 14. 发明授权
    • Apparatus for removing foreign material from substrate and method for removing foreign material from substrate
    • 用于从基材除去异物的设备和从基材除去异物的方法
    • US08196594B2
    • 2012-06-12
    • US11988514
    • 2006-07-11
    • Riichiro HaranoYoshiaki TatsumiKinya MiyashitaHiroshi Fujisawa
    • Riichiro HaranoYoshiaki TatsumiKinya MiyashitaHiroshi Fujisawa
    • B08B3/00
    • H02N13/00B08B6/00B08B7/0014H01L21/02046H01L21/02096H01L21/67132H01L21/683
    • Provided are an apparatus for and a method of removing foreign materials from a substrate which reliably remove the foreign materials, eliminate a chance of redeposition of the foreign materials, and are applicable even to large-size substrates. The apparatus for removing foreign materials includes electrostatic chucks (2, 3) forming a substrate chucking surface (4) to which the substrate (1) is attracted; a resin sheet supplying means (9) for supplying a resin sheet (5) to the substrate chucking surface (4); resin sheet collecting means (13) for collecting the supplied resin sheet (5); and a substrate transfer means for transferring the substrate (1). The substrate (1) supplied to the electrostatic chucks (2, 3) by the substrate transfer means is attracted to the substrate chucking surface (4) through the resin sheet (5), and a foreign material (22) deposited on a side of the substrate chucking surface (4) of the substrate (1) is transferred onto the resin sheet (5) and removed.
    • 提供了从基材中除去异物的装置和方法,其可靠地除去异物,消除异物再沉积的可能性,并且甚至可应用于大尺寸基板。 用于除去异物的设备包括形成衬底(1)被吸引到其上的衬底夹持表面(4)的静电吸盘(2,3) 用于将树脂片(5)供给到基板夹持表面(4)的树脂片材供应装置(9); 用于收集供应的树脂片(5)的树脂片收集装置(13); 以及用于转移基板(1)的基板转印装置。 通过基板传送装置供给到静电卡盘(2,3)的基板(1)通过树脂片(5)被吸引到基板夹持表面(4),并且异物(22)沉积在 将基板(1)的基板夹持面(4)转印到树脂片(5)上并除去。
    • 15. 发明申请
    • ELECTROSTATIC ATTRACTING STRUCTURE AND FABRICATING METHOD THEREFOR
    • 静电吸引结构及其制造方法
    • US20120120545A1
    • 2012-05-17
    • US13381868
    • 2010-06-29
    • Hiroshi FujisawaMegumu KawaeYoshiaki Tatsumi
    • Hiroshi FujisawaMegumu KawaeYoshiaki Tatsumi
    • H02N13/00H01L21/64
    • H01L21/6833H02N13/00Y10T29/49117
    • Provided are an electrostatic attracting structure which allows a strongly integrated structure to be maintained when used, and also allows the structure to be changed freely in configuration after the use, and a method of fabricating the same. The electrostatic attracting structure includes: a plurality of sheet members each having an electrode which is sandwiched between two dielectric materials; and at least one attraction power source, in which the plurality of sheet members are stacked, and by applying a voltage between the electrodes of facing sheet members, the facing sheet members are electrically attracted and fixed, when the electrostatic attracting structure is used, the dielectric material of any one of or both of outermost sheet members attracts the object to be attracted, and after the use, the stacked plurality of sheet members are made separable from one another by canceling the application of the voltage.
    • 提供一种静电吸引结构,其在使用时能够维持强的一体化结构,并且还允许结构在使用后的结构中自由变化,及其制造方法。 静电吸引结构包括:多个片状构件,每个片状构件具有夹在两个电介质材料之间的电极; 以及至少一个吸引力源,其中多个片状构件被堆叠,并且通过在相对的片构件的电极之间施加电压,所述面层片构件被电吸引并固定,当使用静电吸引结构时, 最外面的片状构件中的任何一个或两个的电介质材料吸引待吸引的物体,并且在使用之后,堆叠的多个片状构件通过取消施加电压而彼此分离。
    • 16. 发明申请
    • BIPOLAR ELECTROSTATIC CHUCK
    • 双极静电卡
    • US20100149720A1
    • 2010-06-17
    • US12691613
    • 2010-01-21
    • Hiroshi FujisawaKinya Miyashita
    • Hiroshi FujisawaKinya Miyashita
    • H01L21/683
    • H01L21/6833H02N13/00
    • A bipolar electrostatic chuck which has excellent dielectric breakdown strength and provides excellent attracting performance. The bipolar electrostatic chuck eliminates difficulty in dismounting a sample from a sample attracting plane as much as possible after application of a voltage to electrodes is finished. The bipolar electrostatic chuck is provided with a first electrode and a second electrode in an insulator and permits a surface of the insulator to be the sample attracting plane. The insulator has the first electrode, an interelectrode insulating layer and the second electrode in this order from the sample attracting plane in the depth direction. The second electrode has a region not overlapping with the first electrode in a normal line direction of the sample attracting plane.
    • 一种双极性静电卡盘,具有优良的介电击穿强度,并具有优良的吸引性能。 双极静电卡盘消除了在对电极施加电压完成之后尽可能多地从样品吸附面上拆下样品的困难。 双极静电卡盘在绝缘体中设置有第一电极和第二电极,并且允许绝缘体的表面成为样品吸引平面。 绝缘体在深度方向上从样品吸引面起依次具有第一电极,电极间绝缘层和第二电极。 第二电极在样品吸引面的法线方向上具有与第一电极不重叠的区域。
    • 18. 发明申请
    • Electrode Sheet for Electrostatic Chuck, and Electrostatic Chuck
    • 静电卡盘电极片和静电卡盘
    • US20090040681A1
    • 2009-02-12
    • US12085349
    • 2006-11-30
    • Hiroshi FujisawaKinya Miyashita
    • Hiroshi FujisawaKinya Miyashita
    • H01L21/683
    • H02N13/00H01L21/68H01L21/6833Y10T279/23
    • An electrostatic chuck electrode sheet which allows the difference in capacitance between electrodes due to the presence or absence of a substrate to be increased to a level which can be accurately detected using a known substrate detection device, and allows an electrostatic chuck to exhibit an excellent attraction force, and an electrostatic chuck using the electrode sheet, are disclosed. The electrode sheet has a layered structure in which a first insulating layer, a first electrode layer, an inter-electrode insulating layer, a second electrode layer, and a second insulating layer are stacked and attracts a substrate on the first insulating layer, the first electrode layer having a plurality of openings in a specific planar area, and the second electrode layer having opening equivalent portions provided at positions at which the openings in the first electrode layer are projected onto the second electrode layer in a depth direction of the electrode sheet and having almost the same area as the projected openings, and connection portions that connect the opening equivalent portions. The electrostatic chuck is formed using the electrode sheet.
    • 能够将由于基板的存在或不存在而导致的电极间的电容差增大到能够使用公知的基板检测装置能够精确检测的水平的静电卡盘电极片,并且允许静电卡盘显示出优异的吸引力 并且公开了使用该电极片的静电卡盘。 电极片具有堆叠第一绝缘层,第一电极层,电极间绝缘层,第二电极层和第二绝缘层的层叠结构,并且在第一绝缘层上吸引衬底,第一绝缘层 电极层,其具有在特定平面区域中的多个开口,并且所述第二电极层具有设置在所述第一电极层中的开口沿着所述电极片的深度方向突出到所述第二电极层上的位置处的开口等效部分,以及 具有与投影开口几乎相同的面积,以及连接开口等效部分的连接部分。 使用电极片形成静电卡盘。