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11. 发明授权

US08847173B2 Gas field ion source and method for using same, ion beam device, and emitter tip and method for manufacturing same 有权
标题翻译：气体离子源及其使用方法，离子束装置和发射极尖端及其制造方法
公开(公告)号：US08847173B2
公开(公告)日：2014-09-30
申请号：US13811392
申请日：2011-07-13
申请人： Yoshimi Kawanami , Shinichi Matsubara , Hironori Moritani , Noriaki Arai , Hiroyasu Shichi , Tomihiro Hashizume , Hiroyasu Kaga , Norihide Saho , Hiroyuki Muto , Yoichi Ose
发明人： Yoshimi Kawanami , Shinichi Matsubara , Hironori Moritani , Noriaki Arai , Hiroyasu Shichi , Tomihiro Hashizume , Hiroyasu Kaga , Norihide Saho , Hiroyuki Muto , Yoichi Ose
IPC分类号： H01J37/26 , H01J1/304 , H01J37/08 , B23K9/00
CPC分类号： H01J37/261 , B23K9/00 , H01J1/3044 , H01J37/08 , H01J37/26 , H01J2237/0807
摘要： To provide a gas field ion source having a high angular current density, the gas field ion source is configured such that at least a base body of an emitter tip configuring the gas field ion source is a single crystal metal, such that the apex of the emitter tip is formed into a pyramid shape or a cone shape having a single atom at the top, and such that the extraction voltage in the case of ionizing helium gas by the single atom is set to 10 kV or more.
摘要翻译：为了提供具有高角电流密度的气体场离子源，气体离子源被配置为使得至少构成气体离子源的发射极尖端的基体是单晶金属，使得发射极尖端形成为在顶部具有单个原子的锥体形状或锥形形状，并且使得通过单个原子将氦气离子化的情况下的提取电压设定为10kV以上。

12. 发明申请

US20130119252A1 GAS FIELD ION SOURCE AND METHOD FOR USING SAME, ION BEAM DEVICE, AND EMITTER TIP AND METHOD FOR MANUFACTURING SAME 有权
标题翻译：气体场离子源及其使用方法，离子束装置和发射体提示及其制造方法
公开(公告)号：US20130119252A1
公开(公告)日：2013-05-16
申请号：US13811392
申请日：2011-07-13
申请人： Yoshimi Kawanami , Shinichi Matsubara , Hironori Moritani , Noriaki Arai , Hiroyasu Shichi , Tomihiro Hashizume , Hiroyasu Kaga , Norihide Saho , Hiroyuki Muto , Yoichi Ose
发明人： Yoshimi Kawanami , Shinichi Matsubara , Hironori Moritani , Noriaki Arai , Hiroyasu Shichi , Tomihiro Hashizume , Hiroyasu Kaga , Norihide Saho , Hiroyuki Muto , Yoichi Ose
IPC分类号： H01J37/26 , B23K9/00 , H01J1/304
CPC分类号： H01J37/261 , B23K9/00 , H01J1/3044 , H01J37/08 , H01J37/26 , H01J2237/0807
摘要： To provide a gas field ion source having a high angular current density, the gas field ion source is configured such that at least a base body of an emitter tip configuring the gas field ion source is a single crystal metal, such that the apex of the emitter tip is formed into a pyramid shape or a cone shape having a single atom at the top, and such that the extraction voltage in the case of ionizing helium gas by the single atom is set to 10 kV or more.
摘要翻译：为了提供具有高角电流密度的气体场离子源，气体离子源被配置为使得至少构成气体离子源的发射极尖端的基体是单晶金属，使得发射极尖端形成为在顶部具有单个原子的锥体形状或锥形形状，并且使得通过单个原子将氦气离子化的情况下的提取电压设定为10kV以上。

13. 发明申请

US20120217391A1 CHARGED PARTICLE MICROSCOPE 审中-公开
标题翻译：充电颗粒显微镜
公开(公告)号：US20120217391A1
公开(公告)日：2012-08-30
申请号：US13508040
申请日：2010-11-01
申请人： Hiroyasu Shichi , Shinichi Matsubara , Noriaki Arai , Tohru Ishitani , Yoichi Ose , Yoshimi Kawanami
发明人： Hiroyasu Shichi , Shinichi Matsubara , Noriaki Arai , Tohru Ishitani , Yoichi Ose , Yoshimi Kawanami
IPC分类号： H01J37/28
CPC分类号： H01J37/08 , H01J27/26 , H01J37/09 , H01J37/28 , H01J2237/062 , H01J2237/0807
摘要： The charged particle beam microscope is configured of: a gas field ionization ion source (1); a focusing lens (5) which accelerates and focuses ions that have been discharged from the ion source; a movable first aperture (6) which limits the ion beam that has passed through the focusing lens; a first deflector (35) which scans or aligns the ion beam that has passed through the first aperture; a second deflector (7) which deflects the ion beam that has passed through the first aperture; a second aperture (36) which limits the ion beam that has passed through the first aperture; an objective lens (8) which focuses, on a sample, the ion beam that has passed through the first aperture; and a means for measuring the signal, which is substantially proportional to the current of the ion beam that has passed through the second aperture.
摘要翻译：带电粒子束显微镜由气体离子源（1）构成; 聚焦透镜（5），其加速并聚焦已经从离子源放出的离子; 限制已经通过聚焦透镜的离子束的可移动的第一孔（6）; 第一偏转器（35），其扫描或对准已经穿过第一孔的离子束; 第二偏转器（7），其使已经穿过第一孔的离子束偏转; 限制已经通过第一孔的离子束的第二孔（36）; 物镜（8），其在样品上聚焦已经穿过第一孔的离子束; 以及用于测量与已经通过第二孔的离子束的电流基本成比例的信号的装置。

14. 发明申请

US20110068265A1 ELECTRODE UNIT AND CHARGED PARTICLE BEAM DEVICE 有权
标题翻译：电极单元和充电颗粒光束装置
公开(公告)号：US20110068265A1
公开(公告)日：2011-03-24
申请号：US12992788
申请日：2009-05-15
申请人： Noriaki Arai , Hideyuki Kazumi
发明人： Noriaki Arai , Hideyuki Kazumi
IPC分类号： G01N23/00
CPC分类号： H01J37/026 , H01J3/027 , H01J37/04 , H01J37/28 , H01J2237/0041 , H01J2237/0048 , H01J2237/30 , H01J2237/31749
摘要： A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local charge). An electrode unit (50) according to the present invention is used in a charged particle beam device. The electrode unit (50) includes a plate electrode disposed facing an insulator sample between an objective lens and the sample, and further includes: a first charge-neutralization charged particle beam source which emits a first charged particle beam to eliminate local charge on the sample; and a second charge-neutralization charged particle beam source (25) which emits a second charged particle beam to eliminate global charge on the sample. A first hole (53) through which a primary charged particle beam passes, and a second hole through which the second charged particle beam is emitted are provided in the plate electrode, and the first and second charge-neutralization charged particle beam sources are disposed at such positions as not to interfere with each other. The charged particle beam emitted from the first charge-neutralization charged particle beam source is introduced in the vicinity of the first hole (53).
摘要翻译：通过在整个样品（全局电荷）上消除电荷并在用初级带电粒子束（局部电荷）照射的局部区域中的电荷获得高分辨率采样图像。根据本发明的电极单元（50）用于带电粒子束装置。电极单元（50）包括面对物镜和样品之间的绝缘体样品的平板电极，还包括：第一电荷中和带电粒子束源，其发射第一带电粒子束以消除样品上的局部电荷 ; 以及发射第二带电粒子束以消除样品上的全局电荷的第二电荷中和带电粒子束源（25）。初级带电粒子束通过的第一孔53和第二带电粒子束发射的第二孔设置在板电极中，第一和第二电荷中和带电粒子束源设置在这样的位置不会相互干扰。从第一电荷中和带电粒子束源发射的带电粒子束被引入第一孔（53）附近。

15. 发明授权

US08698080B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US08698080B2
公开(公告)日：2014-04-15
申请号：US12289461
申请日：2008-10-28
申请人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
发明人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
IPC分类号： G01N23/00
CPC分类号： H01J37/026 , H01J37/28 , H01J2237/0044 , H01J2237/12 , H01J2237/2817
摘要： An object of the invention is to reduce the beam drift in which the orbit of the charged particle beam is deflected by a potential gradient generated by a nonuniform sample surface potential on a charged-particle-beam irradiation area surface, the nonuniform sample surface potential being generated by electrification made when observing an insulating-substance sample using a charged particle beam. Energy of the charged particle beam to be irradiated onto the sample is set so that generation efficiency of secondary electrons generated from the sample becomes equal to 1 or more. A flat-plate electrode (26) is located in such a manner as to be directly opposed to the sample. Here, the flat-plate electrode is an electrode to which a voltage can be applied independently, and which is equipped with a hole through which a primary charged particle beam can pass. Furthermore, a voltage can be applied independently to a sample stage (12) on which the sample is mounted. Here, the sample stage's surface directly opposed to the sample is formed into a planarized structure with no projections and depressions thereon. Also, diameter D of the hole provided in the flat-plate electrode (26) and distance L between the flat-plate electrode (26) and the sample are set such that a relation of D/L≦1.5 is satisfied.
摘要翻译：本发明的目的是减少带电粒子束的轨道偏转由带电粒子束照射区域表面上的不均匀样品表面电位产生的电位梯度的光束漂移，不均匀的样品表面电位为通过使用带电粒子束观察绝缘物质样品时进行通电而产生。设定要照射到样品上的带电粒子束的能量被设定为使得从样品产生的二次电子的产生效率等于1或更大。平板电极（26）以与样品直接相对的方式定位。这里，平板电极是能够独立施加电压的电极，并且具有一次带电粒子束可以穿过的孔。此外，可以独立地对安装有样品的样品台（12）施加电压。这里，与样品直接相对的样品台的表面形成为在其上没有凸起和凹陷的平坦化结构。此外，设置在平板电极（26）中的孔的直径D和平板电极（26）与样品之间的距离L被设定为使得满足D / L＆lt; nlE; 1.5的关系。

16. 发明授权

US08563944B2 Ion beam device 有权
标题翻译：离子束装置
公开(公告)号：US08563944B2
公开(公告)日：2013-10-22
申请号：US13595588
申请日：2012-08-27
申请人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Noriaki Arai , Tohru Ishitani
发明人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Noriaki Arai , Tohru Ishitani
IPC分类号： H01J49/10 , H01J37/28
CPC分类号： H01J37/08 , H01J27/26 , H01J37/15 , H01J2237/0216 , H01J2237/0807 , H01J2237/28
摘要： Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.
摘要翻译：提供了一种具有气体电离电离离子源的离子束装置，其能够防止发射极尖端以非接触的方式振动。气体电场离子源由用于产生离子的发射极尖端（21）组成; 发射极底座（64），用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极（24），其构造为围绕发射极尖端（21）; 以及用于将气体供给到发射极尖端附近的气体供给管（25）。发射极基座和真空容器彼此磁性相互作用。

17. 发明申请

US20120132802A1 GAS FIELD IONIZATION ION SOURCE APPARATUS AND SCANNING CHARGED PARTICLE MICROSCOPE EQUIPPED WITH SAME 审中-公开
标题翻译：气体放电离子源装置和扫描带有粒子的微粒显微镜
公开(公告)号：US20120132802A1
公开(公告)日：2012-05-31
申请号：US13381638
申请日：2010-06-08
申请人： Noriaki Arai , Tohru Ishitani
发明人： Noriaki Arai , Tohru Ishitani
IPC分类号： H01J27/02 , H01J37/26
CPC分类号： H01J27/26 , H01J37/023 , H01J37/08 , H01J37/28 , H01J2237/006 , H01J2237/061 , H01J2237/0807
摘要： A gas field ionization ion source apparatus is provided which is small-sized, has high-performance, and is capable of performing a tilt adjustment in a state in which an emitter tip position is maintained approximately constant. An emitter (1) is surrounded by a chamber wall (4) of an emitter chamber and ions are emitted from the tip of the emitter (1). A gas that is an ion material is introduced into the emitter chamber, through an extraction electrode (3) to which a high voltage is applied and a tube (15). The emitter (1) is cooled by a freezing means (10) through a metallic net (11) and an emitter base (12). The emitter base (12) is fixed to a movable portion (13a) of a tilting means (13). The movable portion (13a) is connected to a non-movable portion (13b) through a sliding surface (14). The sliding surface (14) forms a part of a cylindrical surface whose central axis is an axis that passes through the tip of the emitter (1) and is orthogonal to an optical axis. If the surface forms such a shape, and the amount of sliding of the sliding surface (14) is controlled, control on the tilt of the emitter (1) can be performed without moving the tip of the emitter (1).
摘要翻译：提供了一种小型化，高性能的气体电离离子源装置，并且能够在发射极尖端位置保持大致恒定的状态下进行倾斜调整。发射器（1）被发射器室的室壁（4）包围，离子从发射器（1）的尖端发射。作为离子材料的气体通过施加高电压的引出电极（3）和管（15）引入发射室。发射器（1）由冷冻装置（10）通过金属网（11）和发射极基座（12）冷却。发射极基座（12）固定在倾斜装置（13）的可动部分（13a）上。可移动部分（13a）通过滑动表面（14）连接到不可移动部分（13b）。滑动表面（14）形成圆柱形表面的一部分，其中心轴是穿过发射器（1）的尖端并与光轴正交的轴线。如果表面形成这样的形状，并且控制滑动表面（14）的滑动量，则可以在不移动发射器（1）的尖端的情况下执行对发射器（1）的倾斜的控制。

18. 发明申请

US20120097863A1 ION MICROSCOPE 有权
标题翻译：离子显微镜
公开(公告)号：US20120097863A1
公开(公告)日：2012-04-26
申请号：US13381623
申请日：2010-06-04
申请人： Norihide Saho , Hiroyuki Tanaka , Noriaki Arai , Hiroyasu Shichi , Yoichi Ose
发明人： Norihide Saho , Hiroyuki Tanaka , Noriaki Arai , Hiroyasu Shichi , Yoichi Ose
IPC分类号： H01J37/26 , H01J37/20
CPC分类号： H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807
摘要： Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth.The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.
摘要翻译：提供大电流和高度稳定的气田电离离子源，以及具有大焦深的高分辨率离子显微镜。本发明涉及一种具有气田电离离子源的离子显微镜，其中设置有用于冷却与离子显微镜主体无关的气田电离离子源的制冷机，以及用于循环的制冷剂循环回路冷却机构气体离子源和冰箱之间的制冷剂。因此，可以减小传播到气田电离离子源的冰箱的机械振动，并且实现离子源的亮度的提高和离子束聚焦性能的提高。

19. 发明申请

US20110266465A1 ION BEAM DEVICE 有权
标题翻译：离子束装置
公开(公告)号：US20110266465A1
公开(公告)日：2011-11-03
申请号：US13144620
申请日：2010-01-08
申请人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Noriaki Arai , Tohru Ishitani
发明人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Noriaki Arai , Tohru Ishitani
IPC分类号： G01N23/00
CPC分类号： H01J37/08 , H01J27/26 , H01J37/15 , H01J2237/0216 , H01J2237/0807 , H01J2237/28
摘要： Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.
摘要翻译：提供了一种具有气体电离电离离子源的离子束装置，其能够防止发射极尖端以非接触的方式振动。气体电场离子源由用于产生离子的发射极尖端（21）组成; 发射极底座（64），用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极（24），其构造为围绕发射极尖端（21）; 以及用于将气体供给到发射极尖端附近的气体供给管（25）。发射极基座和真空容器彼此磁性相互作用。

20. 发明申请

US20070057183A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20070057183A1
公开(公告)日：2007-03-15
申请号：US10566634
申请日：2005-08-10
申请人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
发明人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
IPC分类号： G21K7/00
CPC分类号： H01J37/026 , H01J37/28 , H01J2237/0044 , H01J2237/12 , H01J2237/2817
摘要： An object of the invention is to reduce the beam drift in which the orbit of the charged particle beam is deflected by a potential gradient generated by a nonuniform sample surface potential on a charged-particle-beam irradiation area surface, the nonuniform sample surface potential being generated by electrification made when observing an insulating-substance sample using a charged particle beam. Energy of the charged particle beam to be irradiated onto the sample is set so that generation efficiency of secondary electrons generated from the sample becomes equal to 1 or more. A flat-plate electrode (26) is located in such a manner as to be directly opposed to the sample. Here, the flat-plate electrode is an electrode to which a voltage can be applied independently, and which is equipped with a hole through which a primary charged particle beam can pass. Furthermore, a voltage can be applied independently to a sample stage (12) on which the sample is mounted. Here, the sample stage's surface directly opposed to the sample is formed into a planarized structure with no projections and depressions thereon. Also, diameter D of the hole provided in the flat-plate electrode (26) and distance L between the flat-plate electrode (26) and the sample are set such that a relation of D/L≦1.5 is satisfied.
摘要翻译：本发明的目的是减少带电粒子束的轨道偏转由带电粒子束照射区域表面上的不均匀样品表面电位产生的电位梯度的光束漂移，不均匀的样品表面电位为通过使用带电粒子束观察绝缘物质样品时进行通电而产生。设定要照射到样品上的带电粒子束的能量被设定为使得从样品产生的二次电子的产生效率等于1或更大。平板电极（26）以与样品直接相对的方式定位。这里，平板电极是能够独立施加电压的电极，并且具有一次带电粒子束可以穿过的孔。此外，可以独立地对安装有样品的样品台（12）施加电压。这里，与样品直接相对的样品台的表面形成为在其上没有凸起和凹陷的平坦化结构。此外，设置在平板电极（26）中的孔的直径D和平板电极（26）与样品之间的距离L被设定为使得满足D / L <1.5的关系。

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