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    • 12. 发明申请
    • SUPERCONFORMAL ELECTRODEPOSITION OF NICKEL IRON AND COBALT MAGNETIC ALLOYS
    • 镍铁和钴磁合金的超强电沉积
    • US20090188805A1
    • 2009-07-30
    • US12358628
    • 2009-01-23
    • Thomas P. MoffatChang Hwa LeeDaniel JosselSoo-Kil Kim
    • Thomas P. MoffatChang Hwa LeeDaniel JosselSoo-Kil Kim
    • C25D5/02
    • C25D3/12C25D3/20C25D7/123G11C11/14H01L21/2885H01L21/76877H01L23/5227H01L2924/0002H01L2924/00
    • A process for electrodepositing at least one ferromagnetic material into a three dimensional pattern within a substrate is provided. The process comprises providing a substrate material, dielectric or conductor, having a three dimensional recessed pattern in at least one outer surface thereof, dielectric substrate materials also having an electrical conductive seed layer at least within the three dimensional pattern. An electrolytic bath is prepared comprising at least one ferromagnetic material and at least one accelerating, inhibiting, or depolarizing additive. The at least one ferromagnetic material comprises at least one metal cation selected from the group consisting of Ni2+, Co2+, Fe2+, Fe3+, and combinations thereof. The substrate is placed into the electrolytic bath and the electrolytic bath contacts the conducting three dimensional pattern in the substrate or the conducting seed layer within the pattern on a dielectric substrate. A counter electrode is placed into the electrolytic bath. An electric current is passed through the electrolytic bath between the electrical conductive substrate or seed layer on the three dimensional substrate and the counter electrode. At least a portion of the ferromagnetic material is deposited into at least a portion of the three dimensional pattern wherein the at least one deposited ferromagnetic material is substantially void-free.
    • 提供了将至少一种铁磁材料电沉积到衬底内的三维图案的方法。 该方法包括在其至少一个外表面中提供具有三维凹陷图案的基底材料,电介质或导体,还具有至少在三维图案内的导电种子层的电介质基底材料。 制备包含至少一种铁磁材料和至少一种加速,抑制或去极化添加剂的电解浴。 至少一种铁磁材料包含至少一种选自Ni2 +,Co2 +,Fe2 +,Fe3 +的金属阳离子及其组合。 将基板放置在电解槽中,并且电解槽与电介质基板上的图案内的基板或导电种子层中的导电三维图案接触。 将反电极放入电解槽中。 电流通过三维基板和对电极之间的导电基板或种子层之间的电解槽。 铁磁材料的至少一部分沉积到三维图案的至少一部分中,其中至少一个沉积的铁磁材料基本上无空隙。